CN201540246U - Light path on/off automatic control device for elliptic polarization measuring system - Google Patents
Light path on/off automatic control device for elliptic polarization measuring system Download PDFInfo
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- CN201540246U CN201540246U CN2009202776933U CN200920277693U CN201540246U CN 201540246 U CN201540246 U CN 201540246U CN 2009202776933 U CN2009202776933 U CN 2009202776933U CN 200920277693 U CN200920277693 U CN 200920277693U CN 201540246 U CN201540246 U CN 201540246U
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Abstract
The present utility model discloses a light path on/off automatic control device for an elliptic polarization measuring system. The light path on/off automatic control device comprises a polarizing arm for generating polarization state detecting optical waves and sending the optical waves to samples, and a polarization detecting arm for re-modulating the optical waves reflected by the samples and detecting the light energy. The polarizing arm comprises a linearly-polarized light source and a linearity polarizer, wherein, the linearity polarizer is fixed on a rotating shaft of a rotating platform of the polarizer, the shaft line of the rotating shaft is coincided with the light axis of the polarizing arm, the rotation of the rotating shaft can be controlled to drive the linearity polarizer to rotate to change an angle difference theta between the position angle of the linearity polarizer and the position angle of the linearly-polarized light generated by the linearly-polarized light source. The light path on/off automatic control device of the utility model has a simple structure and is easy to realize without adding any optical devices or mechanical installations in the main light path of an existing elliptic polarization measuring system, and on/off control of the light path can be realized only by changing an angle difference theta between the position angle of the linearity polarizer and the position angle of the linearly-polarized light output by the linearly-polarized light source.
Description
Technical field
The utility model relates to the optical measurement field, especially a kind of elliptical polarization measuring system light path break-make device of control automatically that is used for.
Background technology
The ellipsometry technology is one of important means that characterizes nano thin-film, the variation that its utilize to survey light wave polarization state when surface reflection survey sample information (as, the thickness of refractive index n, extinction coefficient k, nano thin-film, surfaceness, material electronics vibration information etc.).The advantage of this technology is: when (1) is measured sample is not had disturbance, do not have destructively, therefore can measure in real time, exsomatize and even in bulk measurement; (2) sensitivity can reach the analysis level of atomic layer magnitude, therefore can carry out highly sensitive detection to nano thin-film; (3) almost unrestricted to specimen material, can be suitable for insulator, conductor, semiconductor; (4) low to environmental requirement, specific conditions such as needing no vacuum just can carry out in common experimental situation.Based on its advantage, this technology has been widely used in fields such as microelectronics industry, surfacing and biomedicine.
Utilize the ellipsometry technology obtain sample parameter (as, refractive index, extinction coefficient, film thickness etc.) general step be: (1) utilizes elliptical polarization measuring system to obtain the ellipse drift angle (φ and Δ) of sample; (2) sample is carried out modelling, promptly set up the relation of ellipse drift angle and sample parameters; (3) utilize the method for data fitting to obtain the parameter of sample.Therefore, when utilizing the ellipsometry technology that sample is analyzed, the most basic task is to utilize elliptical polarization measuring system to obtain the ellipse drift angle (φ and Δ) of sample.
The most basic structure of elliptical polarization measuring system is: light source-polarizer-sample-analyzer-photoelectric sensor.On this basis,, developed multiple different structure according to different application demands, as: light source-polarizer-compensator-sample-analyzer-photoelectric sensor, light source-polarizer-sample-compensator-analyzer-photoelectric sensor etc.In elliptical polarization measuring system, the propagation of light beam generally is: the detection light wave that light source sends becomes the known polarized light of polarization state behind polarization devices such as the polarizer, compensator, incide on the sample surfaces then, sample is modulated the amplitude and the phase place of incident light wave, thereby make the polarization state of reflecting light change, enter photoelectric sensor through surveying light wave behind the polarization devices such as compensator, analyzer again, thereby obtain to survey the intensity of light wave.As can be seen, the light source and the polarizer are indispensable in the structure of elliptical polarization measuring system.
For quantitative measurment ellipsometric parameter (φ and Δ), corresponding to the structural development of system the different method of samplings, comprise zero ellipsometry, rotation polarizer method, rotation analyzer method, whirl compensator method, and phase modulation (PM) method etc.
When utilizing elliptical polarization measuring system that sample is measured, can require under a lot of situations before inciding sample, to cut off surveying light wave, as: after (1) is measured and to be finished, for fear of survey optical wavelength time irradiation sample cause sample be damaged (as, cause the biological sample dehydration); (2) when placing or adjust sample, be subjected to surveying the irradiation of light wave and calcination for fear of operating personnel's skin or eyes; (3) when measuring in real time, cause temperature to raise in order to prevent reactant liquor to be subjected to for a long time surveying light-wave irradiation, so require between each sampled point, to cut off the detection light wave that shines on the sample.Therefore, in the elliptical polarization measuring system of reality, to carry out break-make control be an important basic problem to inciding detection light wave on the sample.
The existing method that addresses the above problem has: (1) directly cuts off the power supply of light source and supplies with: this method is very simple, but since once more when opening the light source preheating that need (be generally several minutes) through after a while just can reach the stable output of luminous energy, and frequent unlatching can reduce the Acceptable life of light source, and therefore this method is used few; (2) insert a controlled mechanical shading diaphragm between light source and sample: its principle is by the machinery of diaphragm or Electronic Control being reached to surveying blocking or passing through of light wave, this method is used more general, but its deficiency has been to increase the moment electromagnetic interference (EMI) of the higher-strength that the energy of the number of the number of device, control device, power supply is supplied with and produced in the measurement mechanism when action, makes the weight and volume of system become big simultaneously; (3) add other auxiliary optical attenuation device (as, neutral colour filter etc.): its weak point is similar with (2).This shows, in elliptical polarization measuring system, existingly be difficult to satisfy simultaneously inciding method that detection light wave on the sample carries out break-make control that reaction is quick, simple in structure, the application scenario of the high requirement of reliability.
The utility model content
At the problem that prior art exists, the purpose of this utility model be to provide a kind of fast, need not extra additional device, simple in structure, the reliable and stable elliptical polarization measuring system light path break-make device of control automatically that is used for.
For achieving the above object, the utility model is used for the elliptical polarization measuring system light path break-make device of control automatically, comprise and be used to produce detection light wave with polarization state, and it is incided the inclined to one side arm that rises on the sample, and be used for that light wave after sample reflection is carried out polarization state and modulate analyzing arm with light energy detection again, play inclined to one side arm and comprise linear polarization light source and linear polariser, wherein linear polariser is fixed on the turning axle of polarizer universal stage, the axis of this turning axle coincides with the optical axis that plays inclined to one side arm, the control turning axle rotates and drives linear polariser rotation, to change azimuthal declinate θ of linear polariser position angle and the linearly polarized light of linear polarization light source generation.
Further, described analyzing arm comprises linear analyzer and photoelectric sensor, and the Surface Vertical of its neutral line analyzer is in the optical axis of described analyzing arm, and this linearity analyzer is used for the reflected light polarization state of described sample is modulated; Photoelectric sensor is positioned at after the linear analyzer, is used to receive the luminous energy by the detection light wave of linear analyzer, and is translated into electric signal.
Further, the described device that is used for the automatic control of elliptical polarization measuring system light path break-make also comprises data acquisition unit, robot calculator and the control box that is connected electrically in successively between described photoelectric sensor and the polarizer universal stage, data acquisition unit is used to receive the electric signal that described photoelectric sensor transmits, and converts thereof into the digital signal that robot calculator can be handled; Robot calculator is used to receive the digital signal that data acquisition unit transmits; Control box is used for receiving movement instruction that robot calculator sends, receives the feedback signal of each device and be returned to robot calculator and handle, and rotatablely moves with the moving component that drives on the polarizer universal stage.
Further, described being used for also is provided with phase compensator on the automatic device of controlling of elliptical polarization measuring system light path break-make, this phase compensator is arranged on the described linear polariser and the light path between the sample on described the inclined to one side arm, or is arranged on the described linear analyzer and the light path between the sample on the described analyzing arm.
Further, what described linear polarization light source was exported is linearly polarized light, the laser instrument, the laser diode that comprise linear polarization output also comprise the complex line polarized light source that linearly polarized photon is exported that has that xenon lamp, Halogen lamp LED, light emitting diode, laser diode, laser instrument, halogen tungsten lamp and a linear polarization device by the output of nonlinear polarization light combine.
Further, described linear polariser comprises dichroism linear polarization, Nicol polarizing prism, Glan-thomson polarizer or Glan-Taylor's polarizer for any light wave being transformed into the linear polarization device of linearly polarized light.
Further, described polarizer universal stage is the hollow gearing by driven by motor, motor on it is electrically connected with motor driver in the described control box, the described linear polariser of driven by motor is rotated around the optical axis of described inclined to one side arm, the universal stage that the universal stage of the worm gear-endless screw structure of the stepper motor that described polarizer universal stage is a hollow, the servomotor of hollow, hollow or the belt of hollow drive.
Further, described sample is flat reflection type mirror bulk or thin layer structure material, described sample reception is from the illumination of the polarized lightwave of described inclined to one side arm generation, and the polarization state of this light wave modulated, light wave by described sample reflection enters described analyzing arm, the optical axis of the optical axis of described analyzing arm and described inclined to one side arm meets at a bit on described sample, angle between the optical axis of described sample surfaces normal and described inclined to one side arm is an incident angle, the folded angle of the optical axis of described analyzing arm and sample surfaces normal is a reflection angle, and satisfies incident angle and equal reflection angle.
A kind of application rights requires 1 described device to realize the method for light path break-make control is specially:
1) input or in robot calculator by the azimuth angle theta of the linearly polarized photon of robot calculator read line polarized light source output
PL, and the azimuth angle theta of current linear polariser
PP, and calculate the two poor θ=θ
PP-θ
PL
2) when needs cut off the detection light wave incide on the sample, send instruction by robot calculator and give control box, control box drives polarizer universal stage and drives the linear polariser rotation, till the * of θ=(2k+1) 90 ° (k is an integer);
3) when sending instruction by robot calculator and give control box inciding detection light on the sample when dissengaged positions is converted to normal irradiating state, control box drives polarizer universal stage and drives the linear polariser rotation, equals θ until the position angle of linear polariser
PP
The utility model provides is used for the apparatus structure that elliptical polarization measuring system controls the break-make that incides the detecting light beam on the sample and simply is easy to realize, and need in the main optical path of existing elliptical polarization measuring system, not add any optical device or mechanical hook-up, only the difference θ at the position angle of the linearly polarized light of the position angle of utilization change linear polariser and the output of linear polarization light source reaches light path is carried out break-make control.
Description of drawings
Fig. 1 is the utility model embodiment 1 structural representation;
Fig. 2 is the utility model embodiment 2 structural representations;
Fig. 3 is the utility model embodiment 3 structural representations.
Wherein Reference numeral is:
Play inclined to one side arm 1 linear polarization light source 10 linear polariser 11
Polarizer universal stage 12 phase compensation devices 13 samples 2
Analyzing arm 3 linear analyzer 31 photoelectric sensors 32
Embodiment
The ultimate principle that the utility model is used for the device of the automatic control of elliptical polarization measuring system light path break-make is: system adopts has the linear polarization light source 10 that linear polarization is surveyed light wave output, position angle by the linear adjustment polarizer 11 (promptly, the light transmission shaft of linear polariser and the angle of plane of incidence) change linear polarization light source 10 output linearly polarized light the position angle (promptly, the direction of vibration of polarized light and the angle of plane of incidence) reach inciding the break-make control of the detection light wave on the sample 2 with the difference at the position angle of linear polariser 11, when needs disconnect light path, this angle is adjusted to 90 ° odd-multiple, when needs were got through light path, the position angle of linear polariser 11 set back to get final product.
The purpose of this utility model is achieved in that
The device of in the elliptical polarization measuring system that the utility model provides the detection light wave break-make that incides on the sample being controlled comprises:
Inclined to one side together arm 1 is used to produce the detection light wave with certain polarization state, and incides on the sample 2;
One sample 2, sample 2 is the bulk or the thin layer structure material of flat reflection type mirror, be used for the illumination of sample reception from the polarized lightwave that plays inclined to one side arm 1 generation, and the polarization state of this light wave modulated, light wave by sample 2 reflections enters analyzing arm 3, the optical axis of a sample surfaces normal and an inclined to one side arm 1 has formed plane of incidence, and the two folded angle is an incident angle;
One analyzing arm 3, be used for the light wave after sample 2 reflections is carried out the modulation again of polarization state and the detection of luminous energy, the optical axis of analyzing arm 3 meets on sample a bit with the optical axis that plays inclined to one side arm 1, and be positioned at plane of incidence, the folded angle of the optical axis of analyzing arm 3 and sample surfaces normal is a reflection angle, satisfies incident angle and equals reflection angle;
One linear polarization light source 10 has been positioned on the inclined to one side arm 1, and this linear polarization light source 10 is used to produce the detection light wave with linear polarization;
One linear polariser 11, on the linear polarization light source 10 and the light path between the sample 2 that rise on the inclined to one side arm 1, its Surface Vertical is in the optical axis of inclined to one side arm 1, and linear polariser 11 is used for detecting light beam is transformed to linearly polarized light;
One linear analyzer 31 is positioned on the analyzing arm 3, and its Surface Vertical is in the optical axis of analyzing arm 3, and linear analyzer 31 is used for the reflected light polarization state of sample 2 is modulated;
One photoelectric sensor 32 is positioned at after the linear analyzer 31 on the analyzing arm 3, is used to receive the luminous energy by the detection light wave of analyzer, and is translated into electric signal;
One data acquisition unit 43 is electrically connected with photoelectric sensor 32, and is used to receive the electric signal that photoelectric sensor 32 transmits, and converts thereof into the digital signal that robot calculator 42 can be handled;
One robot calculator 42 is electrically connected with data acquisition unit 43, and is used to receive the digital signal that data acquisition unit 43 transmits;
One control box 41, be electrically connected with the moving component in robot calculator 42 and the system, be used to receive the movement instruction that sends from robot calculator 42, receive from the feedback of each device and be returned in the robot calculator 42 and handle, and the drive motion components motion;
The device that the utility model is used for the automatic control of elliptical polarization measuring system light path break-make comprises that also one is used for fixing the polarizer universal stage 12 of linear polariser 11, this polarizer universal stage 12 is the dynamo-electric whirligig of hollow, and linear polariser 11 is fixed therein the sky shaft portion; The turning axle of polarizer universal stage 12 and inclined to one side arm 1 optical axis coincidence; Movement executing mechanism on the polarizer universal stage 12 is electrically connected and is driven by it with control box 41 and drives linear polarization 11 rotations, thereby changes the position angle of linear polariser 11 and the azimuthal poor θ of the linearly polarized light that linear polarization light source 10 produces.
In above-mentioned technical scheme, linear polariser 12 comprises: dichroism linear polarization, Nicol prism, Glan-thomson polarizer (Glan-Thompson polarizer) or Glan-Taylor's polarizer (Glan-Taylor polarizer) etc. for any light wave being transformed into the polarizer of linearly polarized light.
In above-mentioned technical scheme, can also comprise phase compensator 13, this phase compensator 13 has been arranged on the linear polariser 11 and the light path between the sample 20 on the inclined to one side arm 1, or between the linear analyzer 31 and sample 20 on the analyzing arm 3.
In above-mentioned technical scheme, described polarizer universal stage 12 is the hollow gearing by driven by motor, comprise the hollow servomotor, it is characterized in that rotary middle spindle is empty, be used for fixing and linear polariser 11 be installed to change the polarization position angle of linear polariser 11, also can be the hollow stepper motor with position indication, also can be to be slowed down or quickened whirligig (as the hollow rotating platform of worm gear-endless screw structure, or the hollow rotating platform that drives of belt) etc. by motor-driven.Motor on this polarizer universal stage 12 is electrically connected with motor driver in the control box 41, robot calculator 42 sends instruction and gives control box 41, control box 41 driving polarizer universal stages 12 are rotated then, thereby change the position angle of linear polariser 11, by the position feedback device, the position angle of linear polariser 11 can be fed back to drive control box 41.
The principle of work of light path break-make control device of the present utility model can be expressed as follows:
If the position angle of the detection light wave of the linear polarization that linear polarization light source 10 sends is θ
PL, this light wave is through being fixed in the linear polariser 11 in the polarizer universal stage 12, and the position angle of establishing linear polariser 11 is θ
PPTherefore, the difference at the position angle of the position angle of the detection light wave of the linear polarization sent of linear polarization light source 10 and linear polariser 11 is
θ＝θ
PP-θ
PL
Therefore, the energy of the light wave after the linear polariser 11 is:
I＝KI
0cos
2θ
Wherein, I
0Incide luminous energy value on the linear polariser 11 for what linear polarization light source 10 sent, K (0＜K＜1) is the transmitance of linear polarization light source 10.
When the * of θ=(2k+1) 90 ° (k is an integer), I=0, the light intensity that promptly incides on the sample 2 is zero.Therefore, when needing to cut off the detection light wave that incides on the sample, calculate current θ value, send instruction then and give control box 41, be rotated the azimuth angle theta that changes linear polariser 11 thereby control box 41 drives polarizer universal stage 12 by robot calculator 42
PP, therefore reach the purpose that changes θ, when equaling 90 ° odd-multiple, θ stops, and the energy that incides this moment on the sample is zero.When not needing to cut off the detection light wave that incides on the sample, adopt above-mentioned identical mode, make linear polariser 11 equal θ
PPGet final product.
Utilize the method for in the elliptical polarization measuring system that the utility model provides the detection light wave break-make that incides on the sample being controlled, comprise the steps:
A) in robot calculator 42 input or electronics by the azimuth angle theta of the linearly polarized photon of robot calculator 42 read line polarized light sources 10 output
PLAnd the azimuth angle theta of current linear polarization 11
PP, and calculate the two poor θ=θ
PP-θ
PL
B) when needs cut off the detection light wave incide on the sample, send instruction by robot calculator 42 and give control box 41, control box 41 drives polarization universal stages 12 and drives linear polarizations 11 rotations, till the * of θ=(2k+1) 90 ° (k is an integer);
C) when need be inciding detection light on the sample 2 when dissengaged positions is converted to normal irradiating state, send instruction by robot calculator 42 and give control box 41, control box 41 drives polarization universal stage 12 and drives linear polarization 11 rotations, equals θ until the position angle of linear polarization 11
PP
As shown in Figure 1, this synoptic diagram shows is to be used for elliptical polarization measuring system (basic structure is: the device that the detecting light beam break-make to inciding on sample light source-polarizer-sample-analyzer-detector) is controlled.
The structure of this system is: linear polarization light source 10 and the linear polariser 11 that is fixed in the polarizer universal stage 12 have been installed on playing inclined to one side arm 1 successively, survey light and after sample 2 reflections, enter analyzing arm 3, linear analyzer 31 and photoelectric sensor 32 have been installed on the analyzing arm 3 successively.For the position angle of regulating and controlling linear polariser 11, the motor in the polarizer universal stage 12 is electrically connected with control box 41, accepts its driving.Robot calculator 42 is electrically connected with control box 41, sends movement instruction to it, and receives the feedback information from control box 41.Photoelectric sensor 34 receives surveys the luminous energy signal, and enters robot calculator 42 by the conversion of data acquisition unit 43.Motor in the polarizer universal stage 12 is electrically connected with control box 41, the driving that the instruction that reception is sent by robot calculator 42 is sent by control box 41.The angle position signal of polarizer universal stage 12 also feeds back to robot calculator 42 by control box 41.
In said apparatus, linear polarization light source 10 is laser instrument or laser diode etc., and the light wave of its output is a linearly polarized light; Linear polarization light source 10 also can be the composite light source that is combined by a unpolarized light source such as xenon lamp, Halogen lamp LED, light emitting diode, halogen tungsten lamp and a linear polarization device, it is characterized in that the detection light wave of composite light source output is a linearly polarized light.
In said apparatus, polarizer universal stage 12 is the servomotor of hollow, its rotary middle spindle is empty, be used for fixing and linear polariser 11 be installed to change the polarization position angle of linear polariser 11, polarizer universal stage 12 also can be the stepper motor with hollow of angle position indication, also can be to slow down or quicken whirligig (as the hollow rotating platform of worm gear-endless screw structure, or the hollow rotating platform that drives of belt) etc. by motor-driven.
In said apparatus, linear polariser 11 and linear analyzer 31 are the polarizer that any light wave can be transformed into linearly polarized light, for example: dichroism linear polarization, Nicol prism, Glan-thomson polarizer (Glan-Thompson polarizer) or Glan-Taylor's polarizer (Glan-Taylor polarizer) etc.
In said apparatus, photoelectric sensor 32 can be silicon detector, and it can be converted to electric signal to light signal, also can be the photoelectric sensor of other forms such as gallium arsenide.
When inciding detecting light beam on the sample 2 in need be and carrying out break-make control, adopt following method step to elliptical bias detector:
A) input or in robot calculator 42 by the position angle PL of the linearly polarized light of robot calculator 42 read line polarized light sources 10 output and the azimuth angle theta of linear polarization 11
PP, and calculate the two poor θ=θ
PP-θ
PL
B) when need be inciding detection light on the sample 2 when normal irradiating state is converted to dissengaged positions, send instruction by robot calculator 42 and give control box 41, control box 41 drives polarizer universal stage 12 and drives linear polariser 11 rotations to change the position angle of linear polariser 11, till the * of θ=(2k+1) 90 ° (k is an integer), the luminous energy that sees through linear polariser 11 is zero;
C) when need be inciding detection light on the sample 2 when dissengaged positions is converted to normal irradiating state, send instruction by robot calculator 42 and give control box 41, control box 41 drives polarizer universal stage 12 and drives linear polariser 11 rotations, equals θ until the position angle of linear polariser 11
PP
As shown in Figure 2, this synoptic diagram shows is to be used for elliptical polarization measuring system (basic structure is: the device that the detecting light beam break-make to inciding on sample light source-polarizer-compensator-sample-analyzer-detector) is controlled.
In said apparatus, to compare with embodiment 1, difference is that phase compensation device 13 has been installed between the linear polariser 11 and sample 2 on the inclined to one side arm 1, other is identical with device in the example 1.
In said apparatus, phase compensation device 13 can be the slide of 1/4 slide or any bit phase delay, it has mutually perpendicular fast axle and slow axis both direction in the plane vertical with the light wave propagation direction, when light wave passes through, and the bit phase delay difference difference of light wave on both direction.This slide can be the mica slide, have the liquid crystal of bit phase delay, quartzy slide, multilayer film slide etc.
In said apparatus, when inciding detecting light beam on the sample 2 in need be and carrying out break-make control, adopt identical method step with embodiment 1 to elliptical bias detector.
Shown in Figure 3, this synoptic diagram shows is to be used for elliptical polarization measuring system (basic structure is: the device that the detecting light beam break-make to inciding on sample light source-polarizer-sample-compensator-analyzer-detector) is controlled.
In said apparatus, except phase compensation device 13 being installed on the analyzing arm 3 between the linear polariser 11 and sample 2, other is identical with device in the example 2.
In said apparatus, when inciding detecting light beam on the sample 2 in need be and carrying out break-make control, adopt identical method step with embodiment 2 to elliptical bias detector.
Claims (8)
1. be used for the elliptical polarization measuring system light path break-make device of control automatically, it is characterized in that, this device comprises the detection light wave that is used to have the generation polarization state, and it is incided the inclined to one side arm that rises on the sample, and be used for that light wave after sample reflection is carried out polarization state and modulate analyzing arm with light energy detection again, play inclined to one side arm and comprise linear polarization light source and linear polariser, wherein linear polariser is fixed on the turning axle of polarizer universal stage, the axis of this turning axle coincides with the optical axis that plays inclined to one side arm, the control turning axle rotates and drives linear polariser rotation, to change azimuthal declinate θ of linear polariser position angle and the linearly polarized light of linear polarization light source generation.
2. the elliptical polarization measuring system light path break-make device of control automatically that is used for as claimed in claim 1, it is characterized in that, described analyzing arm comprises linear analyzer and photoelectric sensor, the Surface Vertical of its neutral line analyzer is in the optical axis of described analyzing arm, and this linearity analyzer is used for the reflected light polarization state of described sample is modulated; Photoelectric sensor is positioned at after the linear analyzer, is used to receive the luminous energy by the detection light wave of linear analyzer, and is translated into electric signal.
3. the elliptical polarization measuring system light path break-make device of control automatically that is used for as claimed in claim 2, it is characterized in that, the described device that is used for the automatic control of elliptical polarization measuring system light path break-make also comprises data acquisition unit, robot calculator and the control box that is connected electrically in successively between described photoelectric sensor and the polarizer universal stage, data acquisition unit is used to receive the electric signal that described photoelectric sensor transmits, and converts thereof into the digital signal that robot calculator can be handled; Robot calculator is used to receive the digital signal that data acquisition unit transmits; Control box is used for receiving movement instruction that robot calculator sends, receives the feedback signal of each device and be returned to robot calculator and handle, and rotatablely moves with the moving component that drives on the polarizer universal stage.
4. the elliptical polarization measuring system light path break-make device of control automatically that is used for as claimed in claim 3, it is characterized in that, described being used for also is provided with phase compensator on the automatic device of controlling of elliptical polarization measuring system light path break-make, this phase compensator is arranged on the described linear polariser and the light path between the sample on described the inclined to one side arm, or is arranged on the described linear analyzer and the light path between the sample on the described analyzing arm.
5. the elliptical polarization measuring system light path break-make device of control automatically that is used for as claimed in claim 4, it is characterized in that, what described linear polarization light source was exported is linearly polarized light, the laser instrument, the laser diode that comprise linear polarization output also comprise the composite light source that linearly polarized photon is exported that has that xenon lamp, Halogen lamp LED, light emitting diode, laser diode, laser instrument, halogen tungsten lamp and a linear polarization device of the output of nonlinear polarization light combine.
6. the elliptical polarization measuring system light path break-make device of control automatically that is used for as claimed in claim 5, it is characterized in that, described linear polariser comprises dichroism linear polarization, Nicol polarizing prism, Glan-thomson polarizer or Glan-Taylor's polarizer for any light wave being transformed into the linear polarization device of linearly polarized light.
7. the elliptical polarization measuring system light path break-make device of control automatically that is used for as claimed in claim 6, it is characterized in that, described polarizer universal stage is the hollow gearing by driven by motor, motor on it is electrically connected with motor driver in the described control box, the described linear polariser of driven by motor is rotated around the optical axis of described inclined to one side arm, the universal stage that the universal stage of the worm gear-endless screw structure of the stepper motor that described polarizer universal stage is a hollow, the servomotor of hollow, hollow or the belt of hollow drive.
8. the elliptical polarization measuring system light path break-make device of control automatically that is used for as claimed in claim 7, it is characterized in that, described sample is flat reflection type mirror bulk or thin layer structure material, described sample reception is from the illumination of the polarized lightwave of described inclined to one side arm generation, and the polarization state of this light wave modulated, light wave by described sample reflection enters described analyzing arm, the optical axis of the optical axis of described analyzing arm and described inclined to one side arm meets at a bit on described sample, angle between the optical axis of described sample surfaces normal and described inclined to one side arm is an incident angle, the folded angle of the optical axis of described analyzing arm and sample surfaces normal is a reflection angle, and satisfies incident angle and equal reflection angle.
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| CN2009202776933U CN201540246U (en) | 2009-12-09 | 2009-12-09 | Light path on/off automatic control device for elliptic polarization measuring system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102798984A (en) * | 2012-08-21 | 2012-11-28 | 北京量拓科技有限公司 | Linearly-polarized light generating device with high energy utilization rate and application thereof |
| CN103211660A (en) * | 2013-04-22 | 2013-07-24 | 杭州电子科技大学 | Tooth surface demineralization detection device utilizing polarization for imaging |
-
2009
- 2009-12-09 CN CN2009202776933U patent/CN201540246U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102798984A (en) * | 2012-08-21 | 2012-11-28 | 北京量拓科技有限公司 | Linearly-polarized light generating device with high energy utilization rate and application thereof |
| CN103211660A (en) * | 2013-04-22 | 2013-07-24 | 杭州电子科技大学 | Tooth surface demineralization detection device utilizing polarization for imaging |
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