CN202705454U - 电子束蒸发源装置 - Google Patents
电子束蒸发源装置 Download PDFInfo
- Publication number
- CN202705454U CN202705454U CN 201220379953 CN201220379953U CN202705454U CN 202705454 U CN202705454 U CN 202705454U CN 201220379953 CN201220379953 CN 201220379953 CN 201220379953 U CN201220379953 U CN 201220379953U CN 202705454 U CN202705454 U CN 202705454U
- Authority
- CN
- China
- Prior art keywords
- electron beam
- crucible
- evaporation source
- generating mechanism
- beam generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 45
- 230000008020 evaporation Effects 0.000 title claims abstract description 42
- 238000010894 electron beam technology Methods 0.000 claims abstract description 70
- 230000000694 effects Effects 0.000 claims abstract description 17
- 230000005684 electric field Effects 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims description 39
- 238000005566 electron beam evaporation Methods 0.000 claims description 21
- 238000001816 cooling Methods 0.000 claims description 12
- 238000009434 installation Methods 0.000 claims description 11
- 150000002500 ions Chemical class 0.000 abstract description 39
- 239000000758 substrate Substances 0.000 abstract description 21
- 238000010521 absorption reaction Methods 0.000 abstract description 6
- 238000011031 large-scale manufacturing process Methods 0.000 abstract description 3
- 239000011521 glass Substances 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 5
- 230000000295 complement effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000002826 coolant Substances 0.000 description 3
- 238000004821 distillation Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- -1 pottery Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000001149 thermolysis Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220379953 CN202705454U (zh) | 2012-08-01 | 2012-08-01 | 电子束蒸发源装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220379953 CN202705454U (zh) | 2012-08-01 | 2012-08-01 | 电子束蒸发源装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202705454U true CN202705454U (zh) | 2013-01-30 |
Family
ID=47585775
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201220379953 Expired - Fee Related CN202705454U (zh) | 2012-08-01 | 2012-08-01 | 电子束蒸发源装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202705454U (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104294220A (zh) * | 2014-09-16 | 2015-01-21 | 京东方科技集团股份有限公司 | 一种蒸镀装置以及蒸镀方法 |
CN106676480A (zh) * | 2017-03-10 | 2017-05-17 | 南京大学 | 一种蒸发速率可控的电子束蒸发源 |
CN111471968A (zh) * | 2020-04-20 | 2020-07-31 | 费勉仪器科技(上海)有限公司 | 一种狭缝聚焦型超高真空运行的磁偏转电子束蒸发源 |
CN111663105A (zh) * | 2020-05-26 | 2020-09-15 | 南方科技大学 | 超高真空电子束蒸发器、电子束镀膜装置 |
-
2012
- 2012-08-01 CN CN 201220379953 patent/CN202705454U/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104294220A (zh) * | 2014-09-16 | 2015-01-21 | 京东方科技集团股份有限公司 | 一种蒸镀装置以及蒸镀方法 |
CN104294220B (zh) * | 2014-09-16 | 2016-08-17 | 京东方科技集团股份有限公司 | 一种蒸镀装置以及蒸镀方法 |
CN106676480A (zh) * | 2017-03-10 | 2017-05-17 | 南京大学 | 一种蒸发速率可控的电子束蒸发源 |
CN106676480B (zh) * | 2017-03-10 | 2019-11-08 | 南京大学 | 一种蒸发速率可控的电子束蒸发源 |
CN111471968A (zh) * | 2020-04-20 | 2020-07-31 | 费勉仪器科技(上海)有限公司 | 一种狭缝聚焦型超高真空运行的磁偏转电子束蒸发源 |
CN111663105A (zh) * | 2020-05-26 | 2020-09-15 | 南方科技大学 | 超高真空电子束蒸发器、电子束镀膜装置 |
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Legal Events
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Effective date of registration: 20131205 Granted publication date: 20130130 |
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RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20140905 Granted publication date: 20130130 |
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PP01 | Preservation of patent right |
Effective date of registration: 20140905 Granted publication date: 20130130 |
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RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20150905 Granted publication date: 20130130 |
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PP01 | Preservation of patent right |
Effective date of registration: 20150905 Granted publication date: 20130130 |
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RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20210905 Granted publication date: 20130130 |
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PD01 | Discharge of preservation of patent | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130130 Termination date: 20130801 |