CN202639654U - Device for processing optical crystal by laser separation - Google Patents
Device for processing optical crystal by laser separation Download PDFInfo
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- CN202639654U CN202639654U CN 201220292836 CN201220292836U CN202639654U CN 202639654 U CN202639654 U CN 202639654U CN 201220292836 CN201220292836 CN 201220292836 CN 201220292836 U CN201220292836 U CN 201220292836U CN 202639654 U CN202639654 U CN 202639654U
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Abstract
The utility model discloses a device for processing optical crystal by laser separation. The scraggy surface of the optical crystal is subjected to simple coarse-grinding polishing along a laser separation processing track; a hydrolysis atomization layer on a surface layer and impurities are cleaned to form a transparent track of which the width is more than the diameter of a laser incident light spot; saturated solution of the same optical crystal material is evenly smeared to the wiped surface of the optical crystal so as to fill and level up the scraggy positions on the surface of the optical crystal; and finally, laser is adopted to carry out scanning separation processing along the track of the saturated solution of the optical crystal. The device comprises a laser processing system and a liquid coating system, wherein a laser focusing device, a liquid coating device, a wiping device, a polishing device and a burnishing device are successively installed on a linear motion mechanism along the X-axis direction. A breakage-free optical crystal chip with high separation precision, steep separation processing mouth, smooth cutting of a separation surface and high separation quality can be obtained, and negative effects caused due to overhigh laser temperature can be effectively inhibited.
Description
Technical field
The invention belongs to the laser processing application technical field, be specifically related to a kind of device of separation by laser processing transparent optical crystal, the method is particularly suitable for the optical crystal blank that polished without specialty.
Background technology
Transparent optical crystal, KDP such as phosphoric acid salt, DKDP, potassium titanium oxide phosphate (KTP), three lithium borate LiB3O5 (LBO), also has LiNbO3 (LN), KNbO3 (KN), potassium dihydrogen phosphate (KDP), phosphoric acid dihydro amine, the crystal such as BaTiO3 and Gd (MoO4) 3 are considered to good electrooptical material for a long time always, in photoelectron technology, be widely used, be frequency multiplication part in the high power driver and the important materials of electro-optical device, aspect nonlinear optics, be widely used in the frequency multiplication of light always, and frequently, difference frequency and mixing etc.Especially KDP and DKDP are standby valued functional crystals the earliest always, and seeing through wave band is 178nm～1.45 μ m, and it is brilliant to belong to the negative optics single shaft, its nonlinear optical coefficients Chang Zuowei standard and the comparison of other crystal.The KDP crystal can realize that not only two, three, four times of frequencys multiplication and dye laser realize that frequency multiplication but also it can also make Q-switch.Particularly superpower laser in the application side of controlled thermonuclear reaction, nuclear blast simulation and, large scale KDP is the only double-frequency material that has adopted, its conversion efficiency is up to more than 80%.Though there is new material to occur, the combination property of especially big crystal is still take KDP as optimum.Demand large scale, high-quality KDP optical crystal are the task of top priority that China develops the work of nuclear power generation unit voluntarily.
But because crystal growth is slow, cost is very high, and KDP has anisotropy, matter is soft, fragility is high, easy deliquescence, responsive to processing temperature, and internal stress is large, easy to crack, aspect large scale KDP optical crystal base substrate separation processing, remains a larger bottleneck.The optical crystal separation method of China mainly is to adopt mechanical means---oil cooling saw blade cutting method at present, produces vibrations and fuel factor when there is cutting processing in this cutting method, so that optical crystal is very easily chipping when machining; Optical crystal size of separation precision is relatively poor; Otch is wider and have a large amount of disintegrating slags to pollute plane of crystal; Cut and separate the problems such as impact that the orientation is subjected to optical crystal self anisotropic, it is lower to cause cutting into power.
Adopt laser that the transparent optical crystal is carried out thermal release processing and have the advantage of noncontact, friction, machinery-free stress, but directly utilize laser that optical crystal is separated processing, especially surperficial scraggly Optical Crystal Processing can be brought following problem:
1, directly utilize Laser Focusing to separate to transparent optical plane of crystal or inside and add man-hour, owing to some transparent optical crystal (such as the KDP crystal) easily deliquescence affect laser transmittance, cause the uniformity extreme difference of absorption of crystal laser energy.In addition, the rough and uneven in surface Laser Transmission direction that incides optical crystal that also can have a strong impact on of the plane of incidence of optical crystal.Therefore must be smooth through the high accuracy polishing to optical crystal to be processed before the separation by laser processing, to satisfy the conforming requirement of high laser transmittance, uniformity and direction.But anisotropy, matter are soft to having, the high optical crystal of fragility carries out loaded down with trivial details, the complicated and work consuming consuming time of the smooth not only program of high accuracy polishing, and very easily chipping in the polishing formation process, and also to carry out again stock removal polishing after separating processing, increase undoubtedly the difficulty of processing of optical crystal.
2, LASER HEAT is separated the finedraw that processing transparent optical crystal produces and can the optical crystal refractive index be changed because air enters, cause that the laser beam transmission direction changes, the laser energy that not only dissipated causes and separates that the degree of depth shoals but also the laser energy that is refracted is absorbed by optical crystal and cause optical crystal to burst, and it is out of control and damage to cause separating machine direction.
The heat that produces when 3, LASER HEAT is separated processing transparent optical crystal can be that separating opening end face material temperature is too high and change the optical property of its optical crystal, and also can cause end face slightly degree of making increase.
Summary of the invention
The above problem that in the separation by laser process, exists for optical crystal, the invention provides a kind of device of separation by laser processing optical crystal, the present invention need not that high accuracy is carried out on the optical crystal surface and polishes under the condition of smooth processing, just can carry out effective separation by laser processing, and in separating the processing optical crystallization process, can not change the optical property of optical crystal refractive index and separating opening material, thereby can obtain without cracked, separation accuracy is high, it is precipitous to separate the processing mouth, the optical crystal thin slice that parting surface is level and smooth and disintegrate-quality is high, and can establishment the too high and negative effect that causes of laser temperature.
The device of a kind of separation by laser processing optical crystal provided by the invention, comprise laser focusing device and linear moving mechanism, it is characterized in that, this device also comprises the masking liquid system, the masking liquid system comprises sanding apparatus, burnishing device, wiping arrangement and liquid coating device, liquid coating device is used for being coated with at separation by laser processing optical plane of crystal the saturated solution of identical optical crystalline material, take the moving direction of linear moving mechanism as X-direction, laser focusing device, liquid coating device, wiping arrangement, burnishing device and sanding apparatus are installed on the linear moving mechanism successively along X-direction.
The characteristics that the present invention has utilized the refractive index of the refractive index of saturation optics crystalloid solution and optical crystal to be close, guiding laser enters optical crystal inside and separates processing, realize to separate in the process without cracked, separation accuracy is high, it is precipitous to separate the processing mouth, it is level and smooth to separate machined surface, and can establishment laser spot place's excess Temperature and the negative effect that causes.Particularly, the present invention has the following advantages:
1, because the interaction of laser beam and optical crystal is untouchable, thereby has eliminated mechanical means and in cutting process, produced vibrations and the mechanical stress that causes the optical crystal fragmentation;
2, the separation by laser optical crystal can separate the more accurate size of separation of acquisition than machine cuts;
3, be not subjected to the impact of optical crystal self anisotropic, can carry out the separation processing of any direction;
4, optical crystal to be processed need not the high accuracy polishing, has improved the separation working (machining) efficiency;
5, the separation degree of depth is large, and the tangent plane quality is good, separation accuracy is high, separates processing seam place and dissipates without laser, has avoided having improved the crystal separation processing safety because the crystal that the laser dissipation causes bursts;
6, do not change the separation processing seam optical property of optical crystal on every side.
The laser power that 7, the separation by laser machining is needed reduces (can reduce laser power 20% to 30%), and the parting surface quality improves, and separating rate increases, and Success rate of virus isolation significantly rises.
Description of drawings
Fig. 1 is the principle schematic of masking liquid method separation by laser processing optical crystal;
Fig. 2 is masking liquid method separation by laser processing optical crystal unit schematic diagram.
The specific embodiment
Operation principle of the present invention is simply to roughly grind along the track of separation by laser processing optical crystal to wipe polishing, the hydrolysis atomizing layer on top layer and impurity is removed clean, has formed a width greater than the transparent track of laser beam incident spot diameter.Then on transparent track, evenly smear the saturated solution that one deck has certain thickness identical optical crystalline material.This solution can form more smooth plane at upper surface under gravity and capillary effect.When laser vertical is injected this flat transparent solution top layer, almost all enter solution inside and arrive solution lower surface, ie in solution and crystal interface without deviation ground.Because the refractive index of saturation optics crystal is close with the refractive index of optical crystal material own, and incidence angle is very little, according to following fresnel formula as can be known:
(in the formula, r is reflectance factor, and n1 is the solution refractive index, and n2 is crystal refractive index, and α is incidence angle, and β is the angle of emergence) its reflectance factor is almost nil.Among all laser is directly injected optical crystal material from saturation optics crystalloid solution and optical crystal boundary face diameter.Therefore, the effect that optics crystal saturated solution has played a transition zone that is coated with, its function is equivalent to an optical crystal surface that the high accuracy polishing is smooth, the crystalline material that the incoming laser beam segregation-free is entered surface irregularity is inner, improve the laser utilization ratio, reduced significantly the requirement to the smooth flatness of plane of crystal.
Optical crystal material is separated in the process of processing at laser, in case the crystalline material surface begins to form the separation finedraw, under action of gravitation, saturated solution will infiltrate finedraw and finedraw is filled up, the close solution of refractive index and crystalline material are combined together again, elimination changes the caused light intensity of Laser Transmission direction and dissipates because air is different with the optical crystal refractive index, keep the former direction of laser to continue transmission downwards, constantly increase and separate working depth, and also can not cause crystal to burst out of control with detaching direction owing to come back reflective and the refraction between the finedraw inwall when separating the optical crystal of processing.
Because the solubility of optical crystal in water sharply increases along with the rising of temperature, causes the solution at laser spot place that optical crystal to be processed is had very strong erosiveness.Under the double action of separation by laser processing itself and solution erosion; separating process velocity significantly improves; separate machined surface than directly processing is much smooth with laser; and the solution at laser spot place is treated a worked crystal separation processing mouthful end face and is had cooling effect, has protected preferably original optical property of minute gap place crystalline material.
Below by by embodiment the present invention being described in further detail, but following examples only are illustrative, and protection scope of the present invention is not subjected to the restriction of these embodiment.
As shown in Figure 1, the present invention adopts its flow process of masking liquid method separation by laser processing optical crystal to be:
1, optical crystal 1 rough and uneven in surface surperficial 2 on simply roughly grind along the track of separation by laser processing and to wipe polishing, the hydrolysis atomizing layer on top layer and impurity removed clean, formed a width greater than the transparent track of laser beam incident spot diameter.
With than fine sandpaper preliminary grinding being carried out along the laser cutting track in the optical crystal surface, clear up with the atomization surface of removing optical crystal and greasy dirt, dregs and the dust etc. that are attached to the optical crystal surface.Can adopt the organic solvents such as alcohol or saturation optics crystalloid solution to assist in the friction process;
Use scribbles the cotton of diamond polishing cream or wool cloth and so on soft material the optical crystal track that rubbed is carried out simple rough polishing.Can adopt the organic solvents such as alcohol to assist in the polishing process;
The water-absorbing materials such as use sponge carry out wiping to the optical crystal surface of polishing, and are attached to alcohol, antiscuffing paste and the optical crystal powder etc. on optical crystal surface with removing;
2, the saturation optics crystalloid solution evenly is applied to wiping optical crystal surface later;
On transparent track, evenly smear the saturated solution 3 of one deck identical optical crystalline material, rough and uneven in surface the filling and leading up in optical crystal surface of separation by laser processing will be treated, the solvent of its solvent for optical crystal is dissolved, mainly be aqueous solvent, this solution can form more smooth plane at upper surface under gravity and capillary effect.
When laser 4 is vertically injected this flat transparent solution top layer 5, almost all enter solution inside and arrive solution lower surface, ie in solution and crystal interface 2 without deviation ground.Because the refractive index of saturation optics crystal is close with the refractive index of optical crystal material own, all incoming laser beams 4 directly enter laser beam 6 among the optics crystal 1 by the brilliant solution 3 of saturation optics and 2 power shots of crystal interface, thereby eliminate the problem that give birth to because of deliquescence and finedraw rough and uneven in surface and that produce in the separation by laser process and excess Temperature on the optical crystal surface.
3, adopt laser to scan separation processing along the track of optical crystal saturated solution.
After laser scanning, produce the separation finedraw at optical crystal, can make the saturated solution that is coated on the plane of crystal under gravity and the effect of pore power, penetrate into laser and optical crystal interaction area along finedraw, and finedraw filled up, the laser power that the separation by laser machining is needed reduces (can reduce laser power 20% to 30%), the parting surface quality improves, and separating rate increases, and Success rate of virus isolation significantly rises.
As shown in Figure 2, the device that example of the present invention provides comprises laser-processing system and masking liquid system, and laser-processing system comprises laser instrument 10, beam expanding lens 11, speculum 12, speculum 13, laser focusing device 14 and linear moving mechanism 15.Laser instrument 10, beam expanding lens 11, speculum 12, speculum 13 and laser focusing device 14 are positioned on the light path successively, and laser focusing device 14 can or be shaken up and down condenser lens for condenser lens, scanning galvanometer focusing.The masking liquid system comprises sanding apparatus 16, burnishing device 17, wiping arrangement 18 and liquid coating device 19.Liquid coating device is used for being coated with at separation by laser processing optical plane of crystal the saturated solution of identical optical crystalline material, and wiping arrangement 18 can adopt the water-absorbing materials such as sponge.
Take the moving direction of linear moving mechanism 15 as X-direction, laser focusing device 14, liquid coating device 19, wiping arrangement 18, burnishing device 17 and sanding apparatus 16 are installed on the linear moving mechanism 15 successively along X-direction.Treating that separation by laser processing optical crystal 20 is fixed on can move up and down on the device 22 along the z direction of principal axis.
Liquid coating device 19 can adopt a upper end to have the linear funnel of inlet opening 21, in order to realize by regulating the size of inlet opening 21 bores, can realizing the control to masking liquid thickness to evenly the smearing of liquid.But the structure of liquid coating device 19 is not limited to this, as long as can be at optical crystal surface masking liquid.
In order to realize light pressure and the damping to crystalline material, can between the sandpaper disk of sanding apparatus and fixed disk, damping spring be set, between the polishing disk of burnishing device and fixed disk, also damping spring can be set.
The masking liquid method separation by laser processing optical crystal specific embodiment is as follows:
Whole masking liquid system moved to left just in time be positioned at the high order end of material to be processed to sanding apparatus 16.By mobile device 22 crystalline material 20 is risen slightly, until the frosted dish of sanding apparatus 16 is pushed down the crystalline material surface gently.Start sanding apparatus 16, burnishing device 17 and linear moving mechanism 15, move along the x positive direction.After separation by laser processing optical crystal 20 surface is respectively by the polishing and wiping arrangement 18 wipings of successively process sanding apparatus 16 simple thick polishings, burnishing devices 17, open again liquid coating device 19 to being coated the saturation optics crystalloid solution by the optical crystal surface after simple thick polishing, polishing and the wiping, start laser instrument 10, laser beam imports laser focusing devices 14 by speculum 12 and speculum 13 and is focused to laser focusing bundle 23 and enters optical crystal 20 and separate processing behind beam expanding lens 11 beam-expanding collimations.
Example 1:
It is 1070nm that the present invention has adopted output wavelength, the output peak laser power is 50W, pulse energy be 1J as optical fiber laser, the high energy laser beam of low peak power, the focal beam spot diameter is respectively 50 μ m, separating processing DKDP optical crystal specimen size is length 60mm, thickness 12mm.Adopt on the DKDP optical crystal surface after DKDP saturation optics crystalloid solution is coated in simple thick polishing, polishing and wiping.Separate process velocity 0.6m/min, optical fiber laser output peak power is 50W, and pulse energy is 1J, sweep speed 1m/min.Experimental result: optical crystal separates along the laser scanning line direction, without cracked, separation accuracy is high, it is mouthful precipitous to separate processing, the separation machined surface is level and smooth.
Example 2:
The present invention has adopted YLM-200 model light pricker laser instrument, and output wavelength is 1064nm, output continuous laser power 200W, and the focal beam spot diameter is respectively 80 μ m, and separating potassium dideuterium phosphate optical crystal specimen size is length 40mm, thickness 55mm.Experimental technique: adopt on the KDP optical crystal surface after KDP saturation optics crystalloid solution is coated in simple thick polishing, polishing and wiping, the optical fiber laser power output of separating processing is 175W, sweep speed 1.8m/min.Experimental result: optical crystal separates along the laser scanning line direction, and it is comparatively coarse to separate end face, need to do polishing just can be applied in desired optical flat.
Example 3:
The present invention has adopted Awave-532-20-25K type green glow to swash device, and output wavelength is 532nm, and exporting maximum single pulse energy is 40 μ J, the focal beam spot diameter is respectively 20 μ m, separating acid lithium (LiNbO3-LN) optical crystal is of a size of length 98mm, thickness 10mm.Experimental technique: sour lithium optical crystal saturation optics crystalloid solution is coated on the sour lithium optical crystal surface after simple thick polishing, polishing and the wiping laser scanning speed 1.3m/min.Separate processing along masking liquid course bearing scanning, the processing end face is comparatively level and smooth after separating, and other directions in optical crystal inside do not crack, desired optical flat in need doing simple mechanical equating then polishing just can being applied.
This method can be used for masking liquid method separation by laser too process other optical crystal, such as lithium iodate (LiIO3-LI), KTP (KTiOPO4-KTP), barium metaborate (BaB2O4-BBO), three lithium borates (LiB3O5-LBO), potassium niobate (KNbO3-KN), the boric acid caesium (CSB3O5-CBO), CLBO (LiCSB6O10-CLBO), the potassium fluoborate beryllium (KBe2BO3F2-KBBF) and sulphur silver gallium (AgGaS2-AGS), arsenic cadmium germanium (CdGeAs-CGA), phosphorus germanium zinc (the nonlinear optics optical crystal such as ZnGeP2-ZGP).
The above is preferred embodiment of the present invention, but the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.So everyly do not break away from the equivalence of finishing under the spirit disclosed in this invention or revise, all fall into the scope of protection of the invention.
Claims (5)
1. the device of a separation by laser processing optical crystal, comprise laser focusing device and linear moving mechanism, it is characterized in that, this device also comprises the masking liquid system, the masking liquid system comprises sanding apparatus, burnishing device, wiping arrangement and liquid coating device, liquid coating device is used for being coated with at separation by laser processing optical plane of crystal the saturated solution of identical optical crystalline material, take the moving direction of linear moving mechanism as X-direction, laser focusing device, liquid coating device, wiping arrangement, burnishing device and sanding apparatus are installed on the linear moving mechanism successively along X-direction.
2. the device of separation by laser processing optical crystal according to claim 1 is characterized in that, described liquid coating device is the linear funnel that a upper end has inlet opening.
3. the device of separation by laser processing optical crystal according to claim 1 and 2 is characterized in that, between the polishing disk of described burnishing device and fixed disk damping spring is set.
4. the device of separation by laser processing optical crystal according to claim 3 is characterized in that, described wiping arrangement is water-absorbing material.
5. the device of separation by laser processing optical crystal according to claim 4 is characterized in that, between the sandpaper disk of described sanding apparatus and the fixed disk damping spring is set.
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| CN 201220292836 CN202639654U (en) | 2012-06-20 | 2012-06-20 | Device for processing optical crystal by laser separation |
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| CN 201220292836 CN202639654U (en) | 2012-06-20 | 2012-06-20 | Device for processing optical crystal by laser separation |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102728958A (en) * | 2012-06-20 | 2012-10-17 | 华中科技大学 | Laser separation machining method and device for optical crystal |
| CN106216837A (en) * | 2016-08-25 | 2016-12-14 | 南京先进激光技术研究院 | A kind of method of the multilayer material of separation by laser OCA optical cement laminating |
-
2012
- 2012-06-20 CN CN 201220292836 patent/CN202639654U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102728958A (en) * | 2012-06-20 | 2012-10-17 | 华中科技大学 | Laser separation machining method and device for optical crystal |
| CN102728958B (en) * | 2012-06-20 | 2014-11-12 | 华中科技大学 | Laser separation machining method and device for optical crystal |
| CN106216837A (en) * | 2016-08-25 | 2016-12-14 | 南京先进激光技术研究院 | A kind of method of the multilayer material of separation by laser OCA optical cement laminating |
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Granted publication date: 20130102 Effective date of abandoning: 20141112 |
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