CN202585324U - 等离子体处理装置及其汇聚装置、静电夹盘 - Google Patents
等离子体处理装置及其汇聚装置、静电夹盘 Download PDFInfo
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- CN202585324U CN202585324U CN 201120569756 CN201120569756U CN202585324U CN 202585324 U CN202585324 U CN 202585324U CN 201120569756 CN201120569756 CN 201120569756 CN 201120569756 U CN201120569756 U CN 201120569756U CN 202585324 U CN202585324 U CN 202585324U
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- electrostatic chuck
- plasma processing
- converging device
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CN 201120569756 CN202585324U (zh) | 2011-12-30 | 2011-12-30 | 等离子体处理装置及其汇聚装置、静电夹盘 |
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CN 201120569756 CN202585324U (zh) | 2011-12-30 | 2011-12-30 | 等离子体处理装置及其汇聚装置、静电夹盘 |
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CN202585324U true CN202585324U (zh) | 2012-12-05 |
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CN 201120569756 Expired - Lifetime CN202585324U (zh) | 2011-12-30 | 2011-12-30 | 等离子体处理装置及其汇聚装置、静电夹盘 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107768299A (zh) * | 2016-08-16 | 2018-03-06 | 北京北方华创微电子装备有限公司 | 承载装置及半导体加工设备 |
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2011
- 2011-12-30 CN CN 201120569756 patent/CN202585324U/zh not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107768299A (zh) * | 2016-08-16 | 2018-03-06 | 北京北方华创微电子装备有限公司 | 承载装置及半导体加工设备 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Plasma processing device, gathering device and electrostatic chuck thereof Effective date of registration: 20150202 Granted publication date: 20121205 Pledgee: China Development Bank Co Pledgor: Advanced Micro-Fabrication Equipment (Shanghai) Inc. Registration number: 2009310000663 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20170809 Granted publication date: 20121205 Pledgee: China Development Bank Co Pledgor: Advanced Micro-Fabrication Equipment (Shanghai) Inc. Registration number: 2009310000663 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
CP01 | Change in the name or title of a patent holder |
Address after: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee after: Medium and Micro Semiconductor Equipment (Shanghai) Co., Ltd. Address before: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee before: Advanced Micro-Fabrication Equipment (Shanghai) Inc. |
|
CP01 | Change in the name or title of a patent holder | ||
CX01 | Expiry of patent term |
Granted publication date: 20121205 |
|
CX01 | Expiry of patent term |