CN202576560U - Evaporator based on heat transfer oil evaporation mechanism - Google Patents

Evaporator based on heat transfer oil evaporation mechanism Download PDF

Info

Publication number
CN202576560U
CN202576560U CN 201220210919 CN201220210919U CN202576560U CN 202576560 U CN202576560 U CN 202576560U CN 201220210919 CN201220210919 CN 201220210919 CN 201220210919 U CN201220210919 U CN 201220210919U CN 202576560 U CN202576560 U CN 202576560U
Authority
CN
China
Prior art keywords
evaporation
container
heat transfer
oil
transfer oil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN 201220210919
Other languages
Chinese (zh)
Inventor
谢义元
周国山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUZHOU ADVANCED MATERIALS RESEARCH ISTITUTE Co Ltd
Original Assignee
SUZHOU ADVANCED MATERIALS RESEARCH ISTITUTE Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUZHOU ADVANCED MATERIALS RESEARCH ISTITUTE Co Ltd filed Critical SUZHOU ADVANCED MATERIALS RESEARCH ISTITUTE Co Ltd
Priority to CN 201220210919 priority Critical patent/CN202576560U/en
Application granted granted Critical
Publication of CN202576560U publication Critical patent/CN202576560U/en
Anticipated expiration legal-status Critical
Withdrawn - After Issue legal-status Critical Current

Links

Abstract

The utility model discloses an evaporator based on a heat transfer oil evaporation mechanism; the evaporator comprises an evaporation container, and is characterized in that a sandwich layer is arranged in the side wall of the evaporation container; a spiral heat transfer oil way which is arranged around the evaporation container is arranged in the sandwich layer; and meanwhile, a heat transfer oil inlet and a heat transfer oil outlet which are respectively connected with both ends of the spiral heat transfer oil way are arranged in the side wall of the evaporation container. According to the evaporator based on the heat transfer oil evaporation mechanism, the sandwich layer is used for heating an evaporation source in a large area, meanwhile, the spiral heat transfer oil way is used for guiding heat transfer oil to advance spirally, so that the problem that the temperature of the heat transfer oil in the sandwich layer is not uniformly distributed is solved; and compared with the prior art, the heating area of the evaporator is larger, the heating is more uniform, so that the evaporation effect of the evaporator and the evaporation efficiency of unit area are greatly improved.

Description

Vaporizer based on thermal oil evaporation mechanism
Technical field
The utility model relates to a kind of vaporizer based on thermal oil evaporation mechanism.
Background technology
Owing to have the advantage of high deposition rate and big sedimentary province area, metal-organic chemical vapor deposition equipment method (MOCVD) is the high-quality REBa of preparation 2Cu 3O 7-δOne of first-selected technology of (RE is Rare Earth, represents Y, Sm, Gd and other thuliums) high-temperature superconducting thin film coating conductor material.The metal organic source that adopts in the MOCVD technology, with M (TMHD) x (M=Y, Ba, Cu, etc.) for representative, often because the difference of metals ion, its evaporation, distillation and decomposition temperature have very big difference.For fear of because the difference of evaporation, distillation and the decomposability of each metal organic source, cause the difficulty of high-temperature superconducting thin film Composition Control, the researchist has been developed the method for single source of solvent; Be about in the organic solvent that whole M (TMHD) x raw material is dissolved in picture THF (THF) a type in proportion, again solution injected vaporizer and evaporate and become metallorganics, be transported to the deposition region.Vaporizer must not cause it to decompose the whole material evaporation in the solution effectively, so the one side evaporator themself need have the temperature of homogeneous and controllable, then is the solution that heat is transferred to effectively injection on the other hand.How employing is directly carried out electrically heated mode to vaporizer in existing design reaches technological effect, and shortcoming is an often local heating of vaporizer, and heating surface area is little, and the inequality of being heated, and is difficult to effectively promote evaporation performance.Certainly also having one type of mode at present is to adopt thermal oil to come heating evaporation; During practical implementation normally in the bottom plate of vaporizer around arranging a heat-conducting oil pipes; Heat thermal oil through process furnace, and make thermal oil come vaporizer is heated through heat-conducting oil pipes.Though comparing electrically heated, this type of heating improved a little evaporation performances a little; But there is disadvantage: because the obstruct between thermal oil tube wall and evaporator wall; Cause heat to be difficult to effectively transmit; Thereby reduced the thermal effect that receives of vaporizer, to a great extent limit the further raising of evaporation performance.
Summary of the invention
The utility model purpose is: to the deficiency of prior art, and a kind of vaporizer based on thermal oil evaporation mechanism is provided, the heating surface area of this vaporizer is big, is heated evenly, can greatly promote evaporation performance.
The technical scheme of the utility model is: a kind of vaporizer based on thermal oil evaporation mechanism; Comprise container for evaporation; It is characterized in that said container for evaporation interior is provided with interlayer; Be provided with spirrillum heat conduction oil duct in the said interlayer, offer on the sidewall of said container for evaporation simultaneously respectively with the two ends of spirrillum heat conduction oil duct continuous heat conductive oil inlet and thermal oil outlet around container for evaporation.
Preferably; The position of heat conductive oil inlet described in the utility model is higher than the position of thermal oil outlet; And the diapire inside of said container for evaporation is provided with the Oil Guide cavity that is communicated with spirrillum heat conduction oil duct, and said thermal oil outlet links to each other with spirrillum heat conduction oil duct through said Oil Guide cavity.Through at vessel bottom wall indoor design Oil Guide cavity, guide thermal oil in the Oil Guide cavity, to pass through, can further improve the heating surface area of container for evaporation, increase receives thermal effect, strengthens evaporation performance.
The same with routine techniques, the top of container for evaporation described in the utility model is fixed with the fluid-through tube that stretches in the container for evaporation.
The same with routine techniques, the bottom of container for evaporation described in the utility model is fixed with the vaporised gas vent pipe that stretches in the container for evaporation.
The utility model need be used with conventional heat transfer oil heater when concrete the use thermal oil is implemented heating, and the fluid-through tube that liquid to be steamed (evaporation source) then passes through the container for evaporation top feeds in the container for evaporation.High temperature heat conductive oil feeds through the heat conductive oil inlet of transport pipe on container for evaporation, from top to bottom advances along spirrillum heat conduction oil duct, flows through the Oil Guide cavity of container for evaporation bottom at last, discharges through the thermal oil outlet.In this process high temperature heat conductive oil to container for evaporation inside wait that steaming liquid implements fully heating, quicken it and flash to gas, from the vaporised gas vent pipe, discharge container for evaporation.
The utility model has the advantages that:
1. what the utility model provided is this based on the machine-processed vaporizer of thermal oil; It is provided with interlayer in the container for evaporation sidewall; And spirrillum heat conduction oil duct is set in interlayer, and utilize interlayer big area heating evaporation source, utilize spirrillum heat conduction oil duct guiding thermal oil spiral to advance simultaneously; Solve the oily temperature problem pockety of thermal oil in the interlayer; Compare prior art and make that the heating surface area of vaporizer is bigger, it is more even to be heated, thereby has promoted the evaporation effect of vaporizer and the vaporization efficiency of unit surface greatly.
2. the thermal oil in the utility model directly feeds in the interlayer of container for evaporation sidewall evaporation source is implemented heating, and thermal conduction is fast, and heats is better.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is further described:
Fig. 1 is the structural representation (dotted line is the thermal oil course among the figure) of the utility model.
Wherein: 1, container for evaporation; 2, spirrillum heat conduction oil duct; 3, heat conductive oil inlet; 4, thermal oil outlet; 5, Oil Guide cavity; 6, fluid-through tube; 7, vaporised gas vent pipe.
Embodiment
Embodiment: combine shown in Figure 1; The utility model provides a kind of vaporizer based on thermal oil evaporation mechanism; It has container for evaporation 1; The same with routine techniques, the top of this container for evaporation 1 is fixed with the fluid-through tube 6 that stretches in the container for evaporation 1, and the bottom of container for evaporation 1 is fixed with the vaporised gas vent pipe 7 that stretches in the container for evaporation 1.The core technology of the utility model is improved and is; Said container for evaporation 1 interior is provided with interlayer; Be provided with spirrillum heat conduction oil duct 2 in the said interlayer, offer on the sidewall of said container for evaporation 1 simultaneously respectively with the two ends of spirrillum heat conduction oil duct 2 continuous heat conductive oil inlet 3 and thermal oil outlet 4 around container for evaporation 1.And it is specifically as shown in Figure 1; The position of heat conductive oil inlet described in the present embodiment 3 is higher than the position of thermal oil outlet 4; The diapire inside of said container for evaporation 1 also is provided with the Oil Guide cavity 5 that is communicated with spirrillum heat conduction oil duct 2, and said thermal oil outlet 4 links to each other with spirrillum heat conduction oil duct 2 through said Oil Guide cavity 5.
The utility model need be used with conventional heat transfer oil heater when concrete the use thermal oil is implemented heating, and the fluid-through tube 6 that liquid to be steamed (evaporation source) then passes through container for evaporation 1 top feeds in the container for evaporation 1.High temperature heat conductive oil feeds through the heat conductive oil inlet 3 of transport pipe on container for evaporation 1, from top to bottom advances along spirrillum heat conduction oil duct 2, flows through the Oil Guide cavity 5 of container for evaporation 1 bottom at last, discharges through thermal oil outlet 4.In this process high temperature heat conductive oil to container for evaporation 1 inner waiting steam liquid and implement fully heating, quicken it and flash to gas, from vaporised gas vent pipe 7, discharge container for evaporation 1.
This vaporizer that the utility model provides based on thermal oil mechanism; It is provided with interlayer in container for evaporation 1 sidewall; And spirrillum heat conduction oil duct 2 is set in interlayer, and utilize interlayer big area heating evaporation source, utilize spirrillum heat conduction oil duct 2 guiding thermal oil spirals advance (shown in dotted line among Fig. 1) simultaneously; Solve the oily temperature problem pockety of thermal oil in the interlayer; Compare prior art and make that the heating surface area of vaporizer is bigger, it is more even to be heated, thereby has promoted the evaporation effect of vaporizer and the vaporization efficiency of unit surface greatly.And the interlayer of container for evaporation 1 sidewall is interior implements heating to evaporation source because the thermal oil in the utility model directly feeds, and thermal conduction is fast, and heats is better.
Certainly the foregoing description only is the technical conceive and the characteristics of explanation the utility model, and its purpose is to let the people who is familiar with this technology can understand content of the utility model and enforcement according to this, can not limit the protection domain of the utility model with this.All modifications of doing according to the spirit of the utility model main technical schemes all should be encompassed within the protection domain of the utility model.

Claims (4)

1. vaporizer based on thermal oil evaporation mechanism; Comprise container for evaporation (1); It is characterized in that said container for evaporation (1) interior is provided with interlayer; Be provided with spirrillum heat conduction oil duct (2) in the said interlayer, offer on the sidewall of said container for evaporation (1) simultaneously respectively with the two ends of spirrillum heat conduction oil duct (2) continuous heat conductive oil inlet (3) and thermal oil outlet (4) around container for evaporation (1).
2. the vaporizer based on thermal oil evaporation mechanism according to claim 1; It is characterized in that the position of said heat conductive oil inlet (3) is higher than the position of thermal oil outlet (4); And the diapire inside of said container for evaporation (1) is provided with the Oil Guide cavity (5) that is communicated with spirrillum heat conduction oil duct (2), and said thermal oil outlet (4) links to each other with spirrillum heat conduction oil duct (2) through said Oil Guide cavity (5).
3. the vaporizer based on thermal oil evaporation mechanism according to claim 1 and 2 is characterized in that the top of said container for evaporation (1) is fixed with the fluid-through tube (6) that stretches in the container for evaporation (1).
4. the vaporizer based on thermal oil evaporation mechanism according to claim 1 and 2 is characterized in that the bottom of said container for evaporation (1) is fixed with the vaporised gas vent pipe (7) that stretches in the container for evaporation (1).
CN 201220210919 2012-05-11 2012-05-11 Evaporator based on heat transfer oil evaporation mechanism Withdrawn - After Issue CN202576560U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220210919 CN202576560U (en) 2012-05-11 2012-05-11 Evaporator based on heat transfer oil evaporation mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220210919 CN202576560U (en) 2012-05-11 2012-05-11 Evaporator based on heat transfer oil evaporation mechanism

Publications (1)

Publication Number Publication Date
CN202576560U true CN202576560U (en) 2012-12-05

Family

ID=47245990

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201220210919 Withdrawn - After Issue CN202576560U (en) 2012-05-11 2012-05-11 Evaporator based on heat transfer oil evaporation mechanism

Country Status (1)

Country Link
CN (1) CN202576560U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102644064A (en) * 2012-05-11 2012-08-22 苏州新材料研究所有限公司 Evaporator based on heat conduction oil evaporation mechanism
WO2016160665A1 (en) * 2015-03-30 2016-10-06 Siva Power, Inc Fluid-assisted thermal management of evaporation sources

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102644064A (en) * 2012-05-11 2012-08-22 苏州新材料研究所有限公司 Evaporator based on heat conduction oil evaporation mechanism
WO2016160665A1 (en) * 2015-03-30 2016-10-06 Siva Power, Inc Fluid-assisted thermal management of evaporation sources
US9816175B2 (en) 2015-03-30 2017-11-14 Siva Power, Inc. Thin-film deposition methods with fluid-assisted thermal management of evaporation sources
US9932666B2 (en) 2015-03-30 2018-04-03 Siva Power, Inc. Fluid-assisted thermal management of evaporation sources
US10174417B2 (en) 2015-03-30 2019-01-08 Siva Power, Inc. Thin-film deposition methods with fluid-assisted thermal management of evaporation sources

Similar Documents

Publication Publication Date Title
CN103484829B (en) In a kind of pipe, the method for film is prepared in chemical vapour deposition
JP5766720B2 (en) Heating system for vapor deposition sources
CN203829926U (en) On-line type organic solvent dehydration device
CN202576560U (en) Evaporator based on heat transfer oil evaporation mechanism
CN105201699B (en) Marine fuel oil pre-heating system and its pre-heating mean based on barrel forms
CN102644064B (en) Evaporator based on heat conduction oil evaporation mechanism
CN103382090B (en) A kind of method of continuous production copper-zinc-tin-sulfur film
CN108950515A (en) A kind of fuel battery metal pole plate carbon-base coating preparation facilities based on PECVD
CN206191552U (en) Conduction oil evaporimeter
CN208611833U (en) Multi-stage distillation equipment
CN108103450A (en) A kind of film deposition apparatus and deposition method
CN201680348U (en) Low-temperature steam generator and low-temperature concentration machine unit
JP5869714B1 (en) Steam circulation regeneration system
CN207880802U (en) A kind of multisection type electric heating Quick steam generator
CN102627337B (en) Equipment capable of treating high-difficult waste water and enabling waste water to be directly recycled
CN101550532A (en) Heating device used for vacuum plating equipment
CN103673596A (en) Semi-fusion type crucible heating device
CN205803580U (en) A kind of compact vapourizing furnace
CN103877920B (en) Methanol is for the reaction unit of BTX aromatics
CN204830914U (en) Heat transfer system that reducing furnace waste heat recovery utilized
CN212680119U (en) Tail gas treatment device for binder production
CN210645192U (en) Condensation pipe structure of distillation tower condensing equipment
CN213724892U (en) Copper interconnection precursor bis hexafluoroacetylacetone copper dehydration purification device
TWM507432U (en) Linear vapor deposition device capable of increasing utilization rate of vapor deposition material
CN209685320U (en) A kind of retort

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20121205

Effective date of abandoning: 20140618

RGAV Abandon patent right to avoid regrant