CN202450184U - Device for continuous production of single crystals - Google Patents
Device for continuous production of single crystals Download PDFInfo
- Publication number
- CN202450184U CN202450184U CN2011205753894U CN201120575389U CN202450184U CN 202450184 U CN202450184 U CN 202450184U CN 2011205753894 U CN2011205753894 U CN 2011205753894U CN 201120575389 U CN201120575389 U CN 201120575389U CN 202450184 U CN202450184 U CN 202450184U
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- concubine
- support arm
- boss
- jacking axle
- column
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Abstract
The utility model relates to the technical field of single crystal production and discloses a device for continuous production of single crystals. The device comprises a base, a main furnace chamber, a furnace cover assembly, a column and at least two auxiliary chambers, wherein a pulling head is fixedly connected to the top of each auxiliary chamber, and a continuous feeding device is provided. Preferably, the amount of the auxiliary chambers is two, and the two auxiliary chambers are arranged on two sides of the column and connected with the column through connecting mechanisms capable of lifting and rotating respectively. According to the device, at least two auxiliary chambers are adopted to pull crystals alternately, when one of the auxiliary chambers is in a crystal pulling state, the other auxiliary chambers and the continuous feeding device perform production arrangements, therefore, time is saved, production efficiency is improved, continuous feeding is provided, a continuous single crystal production process is formed, a plurality of single crystals can be produced through one crucible, temperature of the main furnace chamber can be maintained during alternate change of the auxiliary chambers and continuous feeding, energy resources are further saved, and production cost is reduced.
Description
Technical field
The utility model relates to the monocrystalline production technical field, particularly relates to a kind of equipment of continuous production monocrystalline.
Background technology
At present, semiconductor material adopts czochralski crystal growing furnace as the production of the single crystal rod of silicon, and existing single crystal growing furnace generally comprises: base, column, furnace chamber, bell, have concubine and the associated conduit etc. that lift head.Because existing single crystal growing furnace generally only is provided with a concubine; Can not the continuous production monocrystalline, in a blow-on cycle, can only produce a monocrystalline, because the replacing of cooling, taking-up and the seed crystal of monocrystalline all need expend time in; The crucible consumption is big; A crucible can only be produced 1 monocrystalline, and needs repeated heating, causes the wasting of resources and higher production cost.
The utility model content
The technical problem that (one) will solve
But the technical problem that the utility model will solve is the equipment how a kind of continuous production monocrystalline is provided, and can only draw a monocrystalline to solve crucible of a blow-on cycle consumption, and period is long, causes the wastings of resources such as high energy consumption, the problem that production cost is high.
(2) technical scheme
In order to solve the problems of the technologies described above; The utility model provides a kind of equipment of continuous production monocrystalline; Comprise that base, main furnace chamber, column, bell assembly and top are fixedly connected with the concubine that lifts head unit, said concubine links to each other with the top of bell assembly, and said concubine is set at least two; Each concubine is connected with said column through the connection mechanism of liftable and rotation respectively, the crystal pulling that hockets of said at least two concubines; The outside of said main furnace chamber is provided with feeding device, and said feeding device links to each other with said bell assembly through bellows component.
Wherein, said main furnace chamber can pass through lifting body jacking and outward turning.
Wherein, Said concubine is set to two; Said two concubines lay respectively at the both sides of column, are respectively first concubine and second concubine, and said first concubine links to each other with said column with second connection mechanism through first connection mechanism of liftable and rotation respectively with second concubine.
Wherein, said first connection mechanism comprises first support arm, first support, the first jacking axle, first boss and first lifting body; The said first jacking axle through first be supported and fixed on said column a side; Said first concubine is connected with the first jacking axle through first support arm; First boss is arranged on the below that is positioned at first support arm on the said first jacking axle; Thereby said first lifting body drives first jacking and axially goes up motion and make the boss of winning prop up said first support arm to drive first concubine and do lifter motion, and said first concubine can rotate around the first jacking axle.
Wherein, said second connection mechanism comprises second support arm, second support, the second jacking axle, second boss and second lifting body; The said second jacking axle through second be supported and fixed on said column opposite side; Said second concubine is connected with the second jacking axle through second support arm; Second boss is arranged on the below that is positioned at second support arm on the said second jacking axle; Thereby said second lifting body drives second jacking and axially goes up motion and make second boss prop up said second support arm to drive second concubine and do lifter motion that said second concubine can rotate around the second jacking axle.
Wherein, said bell is connected on the second jacking axle through the 3rd support arm, and said the 3rd support arm is positioned at the top of second lifting body; The below that is positioned at the 3rd support arm on the said second jacking axle is provided with the 3rd boss, and the distance of said the 3rd boss distance the 3rd support arm is greater than the distance of second boss apart from second support arm; The bell assembly can rotate around the second jacking axle.
Wherein, said at least two concubines and bell assembly can through manual work promote to rotate or with rotate through motor-driven the connection automatically.
Wherein, the junction of said bell assembly and said bellows component is provided with push-pull valve.
Wherein, said feeding device is provided with locomotive.
(3) beneficial effect
The equipment of a kind of continuous production monocrystalline that technique scheme provides adopts at least two concubines alternately to carry out crystal pulling, is furnished with continuous feeding simultaneously; Make that when one of them is in crystal pulling work other concubine is in produces the ready state or the monocrystalline state of cooling, at this moment; Continuous feeding also is in charging and forvacuum etc. and produces ready state; Thereby formed successive monocrystalline production process, make to have consumed a crucible and can draw many monocrystalline, and made under winner's furnace chamber working order and keep temperature; Practice thrift the energy, and reduced production cost.Further, be provided with locomotive, be convenient to moving of feeding device in the bottom of feeding device.
Description of drawings
Fig. 1 is the front view under the equipment off working state of a kind of continuous production monocrystalline of the utility model;
Fig. 2 is the front view under the utility model second concubine crystal pulling state;
Fig. 3 is the vertical view under the utility model second concubine crystal pulling state;
Fig. 4 is the front view under the utility model first concubine crystal pulling state;
Fig. 5 is the vertical view under the utility model first concubine crystal pulling state.
Wherein, 1, base; 2, main furnace chamber; 3, bell assembly; 4, feeding device; 5, column; 3-1, bell; 3-2, flap valve; 3-3, push-pull valve; 4-1, feed bin; 4-2, bellows component; 4-3, locomotive; 6-1, first concubine; 6-2, second concubine; 6-1a, first lifts head unit; 6-2a, second lifts head unit; 7-10, first connection mechanism; 7-20, second connection mechanism; 7-11, first support arm; 7-12, first supports; 7-13, the first jacking axle; 7-14, first lifting body; 7-15, first boss; 7-21, second support arm; 7-22, second supports; 7-23, the second jacking axle; 7-24, second lifting body; 7-25, second boss; 7-26, the 3rd boss; 8, the 3rd support arm.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the embodiment of the utility model is described in further detail.Following examples are used to explain the utility model, but are not used for limiting the scope of the utility model.
Like Fig. 1, the equipment of a kind of continuous production monocrystalline of the utility model comprises that base 1, main furnace chamber 2, bell assembly 3, feeding device 4, top are installed with concubine, column 5 and the associated conduit that lifts head unit 6-3.Main furnace chamber 2 is installed on the base 1, and this main furnace chamber 2 can drive its rotation and up-down by lifting body; Establish crucible in the main furnace chamber 2.Bell assembly 3 comprises bell 3-1, the flap valve 3-2 that is fixedly connected with the top of bell 3-1 and is positioned at the push-pull valve 3-3 on the bell 3-1 charging opening that bell assembly 3 can promote and rotate, and is positioned at the top of main furnace chamber 2.Column 5 is fixed on the rear side of base 1, is positioned at the back of main furnace chamber 2.Concubine links to each other with column 5, is positioned at the top of bell 3.Feeding device 4 is arranged on the outside of main furnace chamber 2, and this feeding device 4 can link to each other with the top of bell 3-1, is positioned at a side of main furnace chamber 2, and the inside of main furnace chamber 2, concubine and feeding device 4 is equipped with fills shielding gas pipeline and vacuum lead.The concubine of the utility model is provided with at least two; Each concubine all is connected with column 5 through the connection mechanism of liftable and rotation; Present embodiment is preferably two; These two concubines lay respectively at the both sides of column 5; Be respectively the first concubine 6-1 and the second concubine 6-2, this first concubine 6-1 and the second concubine 6-2 are disposed, and to lift head unit be first to lift head unit 6-1a and second and lift head unit 6-2a, and the first concubine 6-1 links to each other with column 5 with second 7-20 of connection mechanism through first 7-10 of connection mechanism of liftable and rotation respectively with the second concubine 6-2.
First 7-10 of connection mechanism of present embodiment comprises: the first support arm 7-11, first supports 7-12, the first jacking axle 7-13 and the first lifting body 7-14; The upper and lower end of the first jacking axle 7-13 supports the side that 7-12 is fixed on column 5 through first respectively; The first concubine 6-1 is connected with the first jacking axle 7-13 through the first support arm 7-11, and the below that the first jacking axle 7-13 is positioned at the first support arm 7-11 is provided with the first boss 7-15.The first lifting body 7-14 is positioned at the lower end of the first jacking axle 7-13; When the first lifting body 7-14 drove the first jacking axle 7-13 and moves upward, the first boss 7-15 props up the first support arm 7-11 made the first concubine 6-1 that is fixedly connected with the first support arm 7-11 move up and down; The first concubine 6-1 can rotate around its first jacking axle 7-13.Wherein, the first lifting body 7-14 can be the transmission rig that oil cylinder, cylinder, electric pushrod etc. have Telescopic.
Second 7-20 of connection mechanism comprises: the second support arm 7-21, second supports 7-22, the second jacking axle 7-23 and the second lifting body 7-24; The upper and lower end of the second jacking axle 7-23 supports the opposite side that 7-22 is fixed on column 5 through second respectively; The second concubine 6-2 is connected with the second jacking axle 7-23 through the second support arm 7-21, and the below that is positioned at the second support arm 7-21 on the second jacking axle 7-23 is fixedly connected with the second boss 7-25.The second lifting body 7-24 is positioned at the lower end of the second jacking axle 7-23; When the second lifting body 7-24 drove the second jacking axle 7-23 and moves upward, the second boss 7-25 props up the second support arm 7-21 made the second concubine 6-2 that is fixedly connected with the second support arm 7-21 move up and down; The second concubine 6-2 can rotate around its second jacking axle 7-23.Wherein, the second lifting body 7-24 can be the transmission rig that oil cylinder, cylinder, electric pushrod etc. have Telescopic.
Wherein, the first concubine 6-1 and the second concubine 6-2 can promote to rotate or be connected automatically with motor-driven mechanism such as motor and rotate through manual work.
The bell assembly 3 of present embodiment is connected on the second jacking axle 7-22 through the 3rd support arm 8; The below that is positioned at the 3rd support arm 8 on the second jacking axle 7-22 is fixedly connected with the 3rd boss 7-26; The distance of the 3rd boss 7-26 distance the 3rd support arm 8 is greater than the distance of the second boss 7-25 apart from the second support arm 7-21; Making the driving second concubine 6-2 of second lifting body 7-24 elder generation do moves upward; When the second lifting body 7-24 continued to move upward, the driving bell assembly 3 and the second concubine 6-2 moved upward simultaneously.This bell assembly 3 can rotate through being connected around the second jacking axle 7-22 manually or with motor-driven mechanism such as motor.
Like Fig. 1, the feeding device 4 of present embodiment comprises feed bin 4-1, bellows component 4-2 and locomotive 4-3, and feed bin 4-1 can link to each other with the push-pull valve 3-3 on the bell 3-1 through bellows component 4-2, and locomotive 4-3 is positioned at the bottom of feeding device 4.Wherein, the effect of locomotive 4-3 is to be convenient to move feed bin 4-1 to think that the rotation of concubine provides the space; Adopt push-pull valve 3-3 to be used for feed bin 4-1 and bell 3-1 are isolated or be communicated with; With vacuum tightness and the furnace temperature of keeping main furnace chamber 2; When need are reinforced, open this push-pull valve 3-3 and carry out continuous charging; When needing to move feed bin 4-1 after reinforced the completion, close this segregaion valve 4-5 so that main furnace chamber 2 is isolated from the outside.
The working process of the equipment of a kind of continuous production monocrystalline of the above-mentioned technical scheme that provides is:
Fig. 2 and Fig. 3 are the crystal pulling state of the second concubine 6-2; The second concubine 6-2 is connected the crystal pulling state that is in bell assembly 3, at this moment, flap valve 3-2 is in open mode; The first concubine 6-1 is not connected a side that is in column 5 with bell assembly 3, do to install production preparations such as seed crystal; After the second concubine 6-2 crystal pulling is accomplished; Monocrystalline is risen to the inner chamber of the second concubine 6-2; And close flap valve 3-2; The second lifting body 7-24 promotes the second concubine 6-2 then, and rotates the second support arm 7-21 and make the second concubine 6-2 leave bell assembly 3, carries out the monocrystalline cooling, takes out monocrystalline and changes work such as seed crystal; Meanwhile, rotate the first support arm 7-11 and make the concubine 6-1 that wins turn to the top of bell assembly 3, and drive the first lifting body 7-14 and the first concubine 6-1 is connected with bell assembly 3 carries out the crystal pulling work of the first concubine 6-1.
Fig. 4 and Fig. 5 are the crystal pulling state of the first concubine 6-1; After the first concubine 6-1 moves to the position of bell assembly 3; Feeding device 4 is moved to position to be fed in raw material, bellows component 4-2 is connected with the push-pull valve 3-3 of bell assembly 3, this moment, push-pull valve 3-3 was in closing condition; Vacuumize after the bin 4-1 charging; Feed bin 4-1 vacuumizes and opens push-pull valve 3-3 after qualified main furnace chamber 2 is fed in raw material, treat that above-mentioned preparation work is accomplished after, open the crystal pulling work that flap valve 3-2 carries out the first concubine 6-1.After the first concubine 6-1 crystal pulling is accomplished; Monocrystalline is promoted to the inner chamber of the first concubine 6-1; Close the flap valve 3-2 of bell assembly 3; The first concubine 6-1 is promoted through the first lifting body 7-14 then, and rotate position that the first support arm 7-11 makes the concubine 6-1 that wins leave bell assembly 3 and cool off and takes out work such as monocrystalline and replacing seed crystal.
By above-mentioned working process reasoning, after the first concubine 6-1 crystal pulling is accomplished, cooperate continuous charging, can carry out the crystal pulling work of the second concubine 6-2 next round.Two concubines of this enforcement replace successively, can carry out continuous crystal-pulling.
Technique scheme has formed successive monocrystalline production process, makes that consuming a crucible can draw many monocrystalline, and makes winner's furnace chamber 2 holding temperature in changing the concubine process, does not need repeated heating, has practiced thrift the energy, has reduced production cost.
The above only is the preferred implementation of the utility model; Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model know-why, can also make some improvement and replacement, these improvement and replacement also should be regarded as the protection domain of the utility model.
Claims (8)
1. the equipment of a continuous production monocrystalline; Comprise that base, main furnace chamber, column, bell assembly and top are fixedly connected with the concubine that lifts head unit; Said concubine links to each other with the top of bell assembly, it is characterized in that, said concubine is set at least two; Each concubine is connected with said column through the connection mechanism of liftable and rotation respectively, the crystal pulling that hockets of said at least two concubines; The outside of said main furnace chamber is provided with feeding device, and said feeding device links to each other with said bell assembly through bellows component.
2. the equipment of continuous production monocrystalline as claimed in claim 1; It is characterized in that; Said concubine is set to two; Said two concubines lay respectively at the both sides of column, are respectively first concubine and second concubine, and said first concubine links to each other with said column with second connection mechanism through first connection mechanism of liftable and rotation respectively with second concubine.
3. the equipment of continuous production monocrystalline as claimed in claim 2 is characterized in that, said first connection mechanism comprises first support arm, first support, the first jacking axle, first boss and first lifting body; The said first jacking axle through first be supported and fixed on said column a side; Said first concubine is connected with the first jacking axle through first support arm; First boss is arranged on the below that is positioned at first support arm on the said first jacking axle; Thereby said first lifting body drives first jacking and axially goes up motion and make the boss of winning prop up said first support arm to drive first concubine and do lifter motion, and said first concubine can rotate around the first jacking axle.
4. the equipment of continuous production monocrystalline as claimed in claim 2 is characterized in that, said second connection mechanism comprises second support arm, second support, the second jacking axle, second boss and second lifting body; The said second jacking axle through second be supported and fixed on said column opposite side; Said second concubine is connected with the second jacking axle through second support arm; Second boss is arranged on the below that is positioned at second support arm on the said second jacking axle; Thereby said second lifting body drives second jacking and axially goes up motion and make second boss prop up said second support arm to drive second concubine and do lifter motion that said second concubine can rotate around the second jacking axle.
5. the equipment of continuous production monocrystalline as claimed in claim 4 is characterized in that, said bell is connected on the second jacking axle through the 3rd support arm, and said the 3rd support arm is positioned at the top of second lifting body; The below that is positioned at the 3rd support arm on the said second jacking axle is provided with the 3rd boss, and the distance of said the 3rd boss distance the 3rd support arm is greater than the distance of second boss apart from second support arm; The bell assembly can rotate around the second jacking axle.
6. the equipment of continuous production monocrystalline as claimed in claim 1 is characterized in that, said at least two concubines and bell assembly can through manual work promote to rotate or with rotate through motor-driven the connection automatically.
7. the equipment of continuous production monocrystalline as claimed in claim 1 is characterized in that, the junction of said bell assembly and said bellows component is provided with push-pull valve.
8. the equipment of continuous production monocrystalline as claimed in claim 1 is characterized in that, said feeding device is provided with locomotive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205753894U CN202450184U (en) | 2011-12-31 | 2011-12-31 | Device for continuous production of single crystals |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205753894U CN202450184U (en) | 2011-12-31 | 2011-12-31 | Device for continuous production of single crystals |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202450184U true CN202450184U (en) | 2012-09-26 |
Family
ID=46866064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205753894U Withdrawn - After Issue CN202450184U (en) | 2011-12-31 | 2011-12-31 | Device for continuous production of single crystals |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202450184U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108660505A (en) * | 2017-03-27 | 2018-10-16 | 江苏恒合科技有限公司 | A kind of charging, material, separation impurity, the long brilliant synchronous crystal growing furnace for carrying out continuous crystal-pulling |
| CN114059151A (en) * | 2021-11-18 | 2022-02-18 | 深圳市毫欧电子有限公司 | Crystal pulling device for preparing heating electronic component |
-
2011
- 2011-12-31 CN CN2011205753894U patent/CN202450184U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108660505A (en) * | 2017-03-27 | 2018-10-16 | 江苏恒合科技有限公司 | A kind of charging, material, separation impurity, the long brilliant synchronous crystal growing furnace for carrying out continuous crystal-pulling |
| CN114059151A (en) * | 2021-11-18 | 2022-02-18 | 深圳市毫欧电子有限公司 | Crystal pulling device for preparing heating electronic component |
| CN114059151B (en) * | 2021-11-18 | 2022-08-02 | 深圳市毫欧电子有限公司 | Crystal pulling device for preparing heating electronic component |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120926 Effective date of abandoning: 20150624 |
|
| RGAV | Abandon patent right to avoid regrant |