CN202352616U - Mercury vapor lamp - Google Patents
Mercury vapor lamp Download PDFInfo
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- CN202352616U CN202352616U CN2011204521160U CN201120452116U CN202352616U CN 202352616 U CN202352616 U CN 202352616U CN 2011204521160 U CN2011204521160 U CN 2011204521160U CN 201120452116 U CN201120452116 U CN 201120452116U CN 202352616 U CN202352616 U CN 202352616U
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- vapor lamp
- mercury vapor
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Abstract
The utility model provides a mercury vapor lamp which can obtain high radiation intensity of light nearby a wavelength of 248 nm, maintain the radiation intensity of the light in a long term, and be lightened up through an electric light power supply used for a high-pressure mercury vapor lamp. The mercury vapor lamp is used as a light source for an exposure process of photoresist which has sensitivity nearby the wavelength of 248 nm. The mercury vapor lamp is provided with a luminotron and a positive pole and a negative pole which are matched with each other in the luminotron. The mercury vapor lamp is formed through sealing of mercury and rare gases except xenon in the luminotron. The sealing quantity of the mercury is 20-40mg/cm<3>. The negative pole is provided with an electrode terminal towards the front end, the electrode terminal is in a conic frustum shape and has a decreasing diameter, and the diameter of the flat surface of the electrode terminal is 0.3-0.5mm.
Description
Technical field
The utility model relates to the mercury vapor lamp that uses as the light source that near the photoresist that wavelength 248nm, has sensitivity is carried out exposure-processed.
Background technology
In the manufacturing process of semiconductor element, operate as follows: through for example rotating the surface coated photoresist of gluing (spin coat) method at wafer, and across the exposure imagings such as photoresist layer of mask to obtaining, thereby form pattern.
And; In rotation gluing method; The pattern that photoresist not only is coated on wafer forms the zone, and is coated on the periphery of wafer, therefore outside the exposure process that the photoresist layer that is positioned at pattern one-tenth zone is made public; Also through of the photoresist layer exposure of peripheral exposure device, and in developing procedure, this photoresist layer is removed the periphery that is positioned at wafer.The light source of peripheral exposure device like this is to select according to the sensitivity wavelength region may of the photoresist that is adopted; For example under near the situation of the photoresist that has sensitivity the employing wavelength 365nm; As the light source of peripheral exposure device, adopted the high-pressure mercury-vapor lamp (referenced patent document 1) of the higher short-arc type of the activity of light of wavelength 365nm in the past.
On the other hand, the pattern that makes public of photoresist layer that forms the zone as the pattern to wafer forms use exposure device, and general employing is called the reduced projection type exposure device of stepping exposure device (stepper).In such reduced projection type exposure device; Because exploring degree that obtains and the ratio (λ/NA) proportional of the light wavelength λ that is used to make public with the opening number NA of reduced projection lens; Therefore when forming meticulous pattern, utilize wavelength X only favourable than what lack.According to such situation, recently, adopt KrF excimer laser (oscillation wavelength 248nm) to form light source with exposure device as pattern.
Photoresist layer is being carried out under the situation of exposure-processed through such pattern formation with exposure device; Owing to be employed near the photoresist that has sensitivity the wavelength 248nm; Therefore as the light source of peripheral exposure device, importantly be employed near the light source that has the activity of higher light the wavelength 248nm, and; As the light source of peripheral exposure device, it is favourable can lighting a lamp through the power supply of lighting a lamp that the high-pressure mercury-vapor lamp that uses is used in the past.
And, near the known activity that the discharge lamp of xenon in mercury is enclosed luminous tube is obtained higher light wavelength 248nm.Yet the starting resistor of such discharge lamp is higher, therefore is difficult to light a lamp through the power supply of lighting a lamp that high-pressure mercury-vapor lamp is used.
In addition, the mercury vapor lamp that the enclosed volume of known mercury is few obtains the activity of higher light near wavelength 248nm.Yet, under the situation that the power supply of using through high-pressure mercury-vapor lamp of lighting a lamp is lit a lamp to this mercury vapor lamp, though modulating voltage reduces because the mercury vapour in the luminous tube is pressed lower; But because high-pressure mercury-vapor lamp is lit a lamp through common constant power control; Because lamp current increases, the loss of the electrode head at negative electrode place is violent, therefore thus; The activity that exists light reduces very soon, the problem that shorten useful life.
Patent documentation 1: japanese kokai publication hei 7-192993 communique
The utility model content
The utility model just is being based on above-mentioned situation and is making; Its purpose is to provide a kind of mercury vapor lamp; Can near wavelength 248nm, obtain the activity of higher light; Can in long-time, keep the activity of light, can light a lamp through the power supply of lighting a lamp of lighting a lamp that is used for high-pressure mercury-vapor lamp.
The mercury vapor lamp of the utility model is as the light source use that is used near the photoresist that wavelength 248nm, has sensitivity is carried out exposure-processed; It is characterized in that; This mercury vapor lamp has luminous tube and anode and negative electrode opposite each other in this luminous tube; And this mercury vapor lamp is enclosed the rare gas that has beyond mercury and the xenon in said luminous tube, the enclosed volume of said mercury is 20～40mg/cm
3, said negative electrode has the electrode head of the circular cone shape that reduces towards point diameter, and the diameter of its front end tabular surface is 0.3～0.5mm.
Preferably, in the mercury vapor lamp of the utility model, the integrated intensity of the light of wavelength 248nm ± 40nm with respect to the ratio of the integrated intensity of the light of wavelength 365 ± 40nm more than 0.25.
In addition, preferably, said rare gas is argon gas.
In addition, preferably, light a lamp through the constant power control of 200～300W.
According to the mercury vapor lamp of the utility model, because the enclosed volume of the mercury in the luminous tube is 20～40mg/cm
3Can near wavelength 248nm, obtain the activity of higher light, and the electrode head of negative electrode forms the circular cone shape that reduces towards point diameter, and the diameter of its front end tabular surface is 0.3～0.5mm; Thus; Even lamp current raises, also suppressed the loss of the electrode head of negative electrode, can in long-time, keep the activity of light.
In addition, through in luminous tube, enclosing the rare gas beyond the xenon, starting resistor can not raise, and therefore can light a lamp through the power supply of lighting a lamp of lighting a lamp that is used for high-pressure mercury-vapor lamp.
Description of drawings
Fig. 1 is the key diagram of structure of luminous tube being cut open an example of the mercury vapor lamp of representing the utility model.
Fig. 2 is that cutaway view is used in the explanation of amplifying the anode that mercury vapor lamp shown in Figure 1 is shown.
Fig. 3 is that cutaway view is used in the explanation of amplifying the negative electrode that mercury vapor lamp shown in Figure 1 is shown.
Fig. 4 is the beam split scatter chart of the light of the mercury vapor lamp radiation that related to by embodiment 1 and comparative example 1.
Fig. 5 is the figure of relation that mercury enclosed volume and the integrated intensity ratio of the mercury vapor lamp that embodiment 1～embodiment 4 and comparative example 1 relate to are shown.
Fig. 6 is the figure of relation of diameter and life time of front end tabular surface of electrode head that the negative electrode of the mercury vapor lamp that embodiment 1, embodiment 4, comparative example 2 and comparative example 3 relate to is shown.
Embodiment
Below, the execution mode of the utility model at length is described.
Fig. 1 is the key diagram of structure of luminous tube being cut open an example of the mercury vapor lamp that the utility model is shown.
Mercury vapor lamp 1 shown in Figure 1 uses as the light source of peripheral exposure device, and it will be positioned at the part exposure of the periphery of this wafer to for example being formed near the photoresist layer that wavelength 248nm, has sensitivity on the wafer.
The luminous tube 10 of this mercury vapor lamp 1 has: profile is roughly oval spherical illuminating part 11, and it forms discharge space in inside; And a shaft-like side's sealing portion 12 and the opposing party's sealing portion 13, they are arranged on the two ends of said illuminating part 11 respectively integratedly continuously, and stretch out laterally along tubular axis.In the illuminating part 11 of this luminous tube 10; Dispose anode 20 and negative electrode 30 with mode respect to one another; Said anode 20 has the rounded bar-shaped electrode axial region 23 of section; A side sealing portion 12 is partly buried and remained on to the cardinal extremity of this electrode axial region 23 underground, and this electrode axial region 23 is the extending axially of luminous tube 10, and said negative electrode 30 has the rounded bar-shaped electrode axial region 33 of section; The opposing party's sealing portion 13 is partly buried and remained on to the cardinal extremity of this electrode axial region 33 underground, and this electrode axial region 33 extending axially at luminous tube 10.
Be embedded with a side's who constitutes by molybdenum metal forming 14 airtightly in the inside of a side's of luminous tube 10 sealing portion 12.The cardinal extremity 23A of the electrode axial region 23 of anode 20 welds and is electrically connected on an end of a side metal forming 14, and the anode outstanding laterally from the outer end of sealing portion 12 welds and be electrically connected on the other end of this side's metal forming 14 with outside lead 16.
Be embedded with the opposing party's who constitutes by molybdenum metal forming 15 airtightly in the inside of the opposing party's of luminous tube 10 sealing portion 13.The cardinal extremity 33A of the electrode axial region 33 of negative electrode 30 welding also is electrically connected on an end of the opposing party's metal forming 15, welds and be electrically connected on the other end of this opposing party's metal forming 15 from the outstanding laterally negative electrode in outer end of the opposing party's sealing portion 13 with outside lead 17.
The enclosed volume that is sealing into the mercury in the illuminating part 11 is 20～40mg/cm
3, 28～32mg/cm more preferably
3, at the not enough 20mg/cm of enclosed volume of mercury
3Situation under, modulating voltage reduces, the power of input setting, lamp current raises, and therefore at luminous tube 10 melanism takes place very soon, shorten the useful life of mercury vapor lamp 1.On the other hand, the enclosed volume at mercury surpasses 40mg/cm
3Situation under, be difficult near the light the high strength ground radiation wavelength 248nm.
In addition, the rare gas that is sealing in the sealing portion 11 is used to improve the startability of lighting a lamp, and its static pressure of enclosing pressure for example is 20～35kPa.In addition, as rare gas, preferably adopt argon gas.
An example of the concrete size of luminous tube 10 is shown: total length is 11cm, and the axial length of illuminating part 11 is 2.5cm, and maximum outside diameter is 2cm, and maximum inner diameter is 1.5cm, and the internal volume of illuminating part 11 is 3.3cm
3
Amplify like Fig. 2 ground is shown,, formed electrode head 21 across the diameter columned electrode body portion 22 bigger than the diameter of this electrode axial region 23 at the front end of electrode axial region 23 at anode 20.The jut 21A of the roughly circular cone shape that this electrode head 21 reduces by the base station part 21B of the roughly circular cone shape that reduces towards point diameter and the front end that is integrally formed in this base station part 21B and towards point diameter constitutes.The rear end of the base station part 21B of electrode head 21 forms with electrode tip main part 22 has identical diameter, and the rear end of the jut 21A of electrode head 21 has identical diameter with the front end of base part 21B.In addition, be provided with coil 25 in electrode body portion 22, this coil 25 is reeled by metal fine and is formed.
The material that constitutes electrode head 21, electrode body portion 22, electrode axial region 23 and the coil 25 of anode 20 can adopt tungsten.
An example of the concrete size of anode 20 below is shown: the length of electrode head 21 is 16mm; The diameter of the front end tabular surface 21a of the jut 21 of electrode head 21 is 0.5mm; The diameter of the rear end of jut 21A (boundary of jut 21A and base station part 21B) is 2.2mm, and the angle of taper β of jut 21A is 120 °, and the length of electrode body portion 22 is 8mm; The diameter of electrode body portion 22 is 3.5mm; The length of electrode axial region 23 is 9mm, and the diameter of electrode axial region 23 is 2.5mm, and the diameter that constitutes the metal fine of coil 25 is 0.4m.
Amplification illustrates ground like Fig. 3; At negative electrode 30; Formed electrode head 31, the roughly circular cone shape of this electrode head 31 at the front end of electrode axial region 33 across the diameter columned electrode body portion 32 littler for reducing towards point diameter than the diameter of this electrode axial region 23.The rear end of electrode head 31 forms with electrode body portion 32 has identical diameter.In addition, be provided with coil 35 in electrode body portion 32, this coil 35 is reeled by metal fine and is formed.
The material that constitutes electrode head 31, electrode body portion 32, electrode axial region 33 and the coil 35 of negative electrode 30 can adopt thoriated tungsten.
And in the utility model, the diameter of the front end tabular surface 31a of the electrode head 31 of negative electrode 30 is 0.3～0.5mm.The not enough 0.3mm of the diameter of this front end tabular surface 31a, it is big that the loss of the front end of the electrode head 31 of negative electrode 30 becomes, thereby shorten the useful life of mercury vapor lamp 1.On the other hand, the diameter of this front end tabular surface 31a surpasses 0.5mm, and the light quantity at the initial stage of the mercury vapor lamp 1 that obtains is low, the effect of the activity that can't expect to obtain expecting.
In addition, the angle of taper α of the electrode head 31 of preferred negative electrode 30 is 50～90 °.
An example of the concrete size of negative electrode 30 below is shown: the length of electrode head 31 is 1.3mm; The diameter of the front end tabular surface 31a of electrode head 31 is 0.3mm, and the angle of taper α of electrode head 31 is 55 °, and the length of electrode body portion 32 is 4mm; The diameter of electrode body portion 32 is 1.5mm; The length of electrode axial region 33 is 18.5mm, and the diameter of electrode axial region 33 is 2.5mm, and the diameter that constitutes the metal fine of coil 35 is 0.4mm.
Above-mentioned mercury vapor lamp 1 is lit a lamp with the constant power control of for example 200～300W through the power supply of lighting a lamp of lighting a lamp that is used for general high-pressure mercury-vapor lamp.
In such mercury vapor lamp 1, the integrated intensity of the light of wavelength 248 ± 40nm with respect to the ratio of the integrated intensity of the light of wavelength 365 ± 40nm preferably more than 0.25, more preferably more than 0.3.
According to the mercury vapor lamp 1 of the utility model, be 20～40mg/cm through the enclosed volume that makes the mercury in the luminous tube 10
3Near wavelength 248nm, can access the activity of higher light; And the circular cone shape of electrode head 31 for reducing towards point diameter of negative electrode 30, the diameter of its front end tabular surface 31a is 0.3～0.5mm, even therefore lamp current raises; Also suppress the loss of the electrode head 31 of negative electrode 30, therefore can keep the activity of light for a long time.
In addition, through the rare gas beyond the xenon is enclosed in the luminous tube 10, starting resistor can not raise, and therefore can light a lamp through the power supply of lighting a lamp of lighting a lamp that is used for high-pressure mercury-vapor lamp.
Embodiment
Below, the concrete embodiment of the mercury vapor lamp of the utility model is described, but the present invention is not limited to these embodiment.
(embodiment 1)
According to Fig. 1～structure shown in Figure 3, make mercury vapor lamp with following specification.
Luminous tube (10) is a quartz glass system, and total length is 11cm, and the axial length of illuminating part (11) is 2.5cm, and maximum outside diameter is 2cm, and maximum inner diameter is 1.6cm, and the internal volume of illuminating part (11) is 3.3cm
3
In addition, in the illuminating part (11) of luminous tube (10), enclosing has 30mg/cm
3Mercury and static pressure be the argon gas of 26.7kP (200torr).
Anode (20) is a tungsten system; The length of electrode head (21) is 1.6mm, and the diameter of the front end tabular surface (21a) of the jut (21A) of electrode head (21) is 0.5mm, and the diameter of the rear end of jut (21A) (boundary of jut (21A) and base part (21B)) is 2.2mm; The angle of taper β of jut (21A) is 120 °; The length of electrode body portion (22) is 8mm, and the diameter of electrode body portion (22) is 3.5mm, and the length of electrode axial region (23) is 9mm; The diameter of electrode axial region (23) is 2.5mm, and the diameter that constitutes the metal fine of coil (25) is 0.4mm.
Negative electrode (30) is a thoriated tungsten system, and the length of electrode head (31) is 1.1mm, and the diameter of the front end tabular surface (31a) of electrode head (31) is 0.3mm; The angle of taper α of electrode head (31) is 55 °; The length of electrode body portion (32) is 4.2mm, and the diameter of electrode body portion (32) is 1.5mm, and the length of electrode axial region (33) is 18.5mm; The diameter of electrode axial region (33) is 2.5mm, and the diameter that constitutes the metal fine of coil (35) is 0.4mm.
Anode (20) is 2.3mm with the spacing distance of negative electrode (30), and the lamp input power is 250W.
Embodiment 2
Make the enclosed volume that removes mercury and changed 20mg/cm into
3In addition, the mercury vapor lamp of the specification identical with embodiment 1.
(embodiment 3)
Make the enclosed volume that removes mercury and changed 40mg/cm into
3The mercury vapor lamp of the specification identical in addition with embodiment 1.
(embodiment 4)
Made except that the mercury vapor lamp that negative electrode (30) is changed the following specification into the specification identical with embodiment 1.
Negative electrode (30) is a thoriated tungsten system, and the length of electrode head (31) is 1.0mm, and the diameter of the front end tabular surface (31a) of electrode head (31) is 0.5mm; The angle of taper α of electrode head (31) is 55 °; The length of electrode body portion (32) is 4.4mm, and the diameter of electrode body portion (32) is 1.5mm, and the length of electrode axial region (33) is 18.5mm; The diameter of electrode axial region (33) is 2.5mm, and the diameter that constitutes the metal fine of coil (35) is 0.4mm.
(comparative example 1)
Made to remove negative electrode is changed into following specification and changes the enclosed volume of mercury into 47mg/cm
3The mercury vapor lamp of the specification identical in addition with embodiment 1.
Negative electrode is a thoriated tungsten system; Length be 18.5mm, diameter be 2.5mm the electrode axial region across length be 4.3mm, diameter be the columned electrode body portion of 1.5mm to form length be that 1mm, angle of taper are 70 ° cone shape electrode head, be provided with the coil of the metal fine of the 0.4mm that reeled in electrode body portion.
(comparative example 2)
Made except that negative electrode being changed into the specification identical the mercury vapor lamp of the specification identical with embodiment 1 with comparative example 1.
(comparative example 3)
Made except that the mercury vapor lamp that negative electrode is changed the following specification into the specification identical with embodiment 1.
Negative electrode is a thoriated tungsten system, and the length of electrode head is 1.3mm, and the diameter of the front end tabular surface of electrode head is 0.15mm; The angle of taper α of electrode head is 55 °; The length of electrode body portion is 4.1mm, and the diameter of electrode body portion is 1.5mm, and the length of electrode axial region is 18.5mm; The diameter of electrode axial region is 2.5mm, and the diameter that constitutes the metal fine of coil is 0.4mm.
The mensuration of the integrated intensity of beam split distribution and light
The power supply of lighting a lamp that uses high-pressure mercury-vapor lamp to use is controlled the mercury vapor lamp that embodiment 1～embodiment 3 and comparative example 1 are related to the constant power of 250W and is lit a lamp respectively; The beam split of measuring the light of radiation distributes, and try to achieve wavelength 248 ± 40nm light integrated intensity with respect to the ratio of the integrated intensity of the light of wavelength 365 ± 40nm (below be called " integrated intensity ratio ".)。
Fig. 4 shows the beam split scatter chart of the light of the mercury vapor lamp radiation that is related to by embodiment 1 and comparative example 1, and Fig. 5 shows the figure of relation of mercury enclosed volume and the integrated intensity ratio of the mercury vapor lamp that embodiment 1～embodiment 3 and comparative example 1 relate to.
According to above results verification: the mercury vapor lamp that utilizes embodiment 1～embodiment 3 to relate to can access the activity of higher light near wavelength 248nm.
The mensuration of life time
The power supply of lighting a lamp that uses high-pressure mercury-vapor lamp to use is controlled the mercury vapor lamp that embodiment 1, embodiment 4, comparative example 2 and comparative example 3 are related to the constant power of 250W and is lit a lamp continuously respectively; Mensuration reaches the time till 40% the light quantity of light quantity at initial stage, as life time.
Fig. 6 is the figure of relation of diameter and life time of front end tabular surface of electrode head that the negative electrode of the mercury vapor lamp that embodiment 1, embodiment 4, comparative example 2 and comparative example 3 relate to is shown.
According to above results verification: the mercury vapor lamp that utilizes embodiment 1 and embodiment 4 to relate to, in long-time more than 3000 hours, keep the activity of light.
Claims (4)
1. mercury vapor lamp uses as the light source that is used near the photoresist that wavelength 248nm, has sensitivity is carried out exposure-processed, it is characterized in that,
This mercury vapor lamp have luminous tube and in this luminous tube anode and negative electrode opposite each other, and this mercury vapor lamp encloses the rare gas that has beyond mercury and the xenon in said luminous tube,
The enclosed volume of said mercury is 20～40mg/cm
3,
Said negative electrode has the electrode head of the circular cone shape that reduces towards point diameter, and the diameter of its front end tabular surface is 0.3～0.5mm.
2. mercury vapor lamp according to claim 1 is characterized in that,
The integrated intensity of the light of wavelength 248nm ± 40nm with respect to the ratio of the integrated intensity of the light of wavelength 365 ± 40nm more than 0.25.
3. mercury vapor lamp according to claim 1 is characterized in that,
Said rare gas is argon gas.
4. mercury vapor lamp according to claim 1 is characterized in that,
Constant power control through 200～300W is lit a lamp.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010007611U JP3165731U (en) | 2010-11-19 | 2010-11-19 | Mercury lamp |
| JP2010-007611 | 2010-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202352616U true CN202352616U (en) | 2012-07-25 |
Family
ID=46582458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204521160U Expired - Lifetime CN202352616U (en) | 2010-11-19 | 2011-11-15 | Mercury vapor lamp |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3165731U (en) |
| CN (1) | CN202352616U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6006961B2 (en) * | 2012-04-02 | 2016-10-12 | 株式会社ユメックス | Ultra high pressure mercury lamp and ultraviolet irradiation device equipped with the same |
-
2010
- 2010-11-19 JP JP2010007611U patent/JP3165731U/en not_active Expired - Lifetime
-
2011
- 2011-11-15 CN CN2011204521160U patent/CN202352616U/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP3165731U (en) | 2011-02-03 |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120725 |
|
| CX01 | Expiry of patent term |