CN202331009U - Workpiece platform dense ball bearing two-dimensional movement device - Google Patents
Workpiece platform dense ball bearing two-dimensional movement device Download PDFInfo
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- CN202331009U CN202331009U CN2011204275626U CN201120427562U CN202331009U CN 202331009 U CN202331009 U CN 202331009U CN 2011204275626 U CN2011204275626 U CN 2011204275626U CN 201120427562 U CN201120427562 U CN 201120427562U CN 202331009 U CN202331009 U CN 202331009U
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- retainer
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- steel ball
- manhole
- shaft
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Abstract
The utility model provides a workpiece platform dense ball bearing two-dimensional movement device, which is composed of a silicon wafer, a platform installation bolt, a nut, a movable retainer, a rotating retainer, a center shaft, an inner shaft sleeve, an outer shaft sleeve, an end face retainer, an end face bearing ring, a support frame, a concave end set screw, a first locking nut, a second locking nut, a coupling, a lead screw shaft, a pin, a motor shaft, a motor, a lead screw, a platform installation hole, a working platform, an external thread, a first installation bolt, a second installation bolt, a third installation bolt, a fourth installation bolt, a fifth installation bolt, a sixth installation bolt, a seventh installation bolt, an eighth installation bolt, a ninth installation bolt and a tenth installation bolt. The device solves problems of being big in gap, easy to deflect and nonuniform in movement, and can be blocked and stagnated and the like in a sliding friction structure in a process of vertical movement in the vertical direction and rotation in the horizontal direction of the workpiece platform, repositioning accuracy of the workpiece platform is guaranteed, and photoetching quality of the silicon wafer is improved.
Description
Technical field
The utility model belongs to technical field of lithography, particularly a kind of work stage sealed bead bearing two dimensional motion device.
Background technology
In litho machine, the precision that rotatablely moves of repetitive positioning accuracy that work stage moves and horizontal direction all is vital to the exposure quality of litho machine.If the repetitive positioning accuracy of vertical direction is low and horizontal direction running accuracy difference all can cause the objective system image quality to descend.In design in the past, vertical direction is to lean on the sliding friction of bearing to realize moving up and down of work stage, and sliding friction be prone to the gap big, be prone to problems such as beat, motion are inhomogeneous, stagnant, card.For this reason, design a kind of work stage sealed bead bearing two dimensional motion device,, guarantee photoetching quality to overcome above-mentioned deficiency.
Summary of the invention
The technical matters that the utility model will solve is: make work stage in motion process, can not cause phenomenons such as card, stagnant, beat because of moving of bearing; The purpose of the utility model provides a kind of work stage sealed bead bearing two dimensional motion device for this reason; Improve running accuracy on work stage repetitive positioning accuracy and the horizontal direction in vertical direction, and steel ball have favorable rigidity and thermal stability; Guarantee that picture element and focal plane are stable, guaranteed photoetching quality.
In order to solve the problems of the technologies described above; The technical scheme that the utility model adopted is: a kind of work stage sealed bead bearing two dimensional motion device, and this device is made up of silicon chip, estrade mounting screw, nut, mobile retainer, rotation retainer, central shaft, internal axle sleeve, outer shaft, end face retainer, end face neck collar, bracing frame, recessed end holding screw, first set nut, second set nut, shaft coupling, lead screw shaft, pin, motor shaft, motor, leading screw, estrade mounting hole, work stage, external thread, first mounting screw～the 6th mounting screw and the 7th mounting screw～the tenth mounting screw; Wherein:
Motor is fixed on the internal axle sleeve cylinder bottom through the 7th mounting screw～the tenth mounting screw, and motor shaft, lead screw shaft link to each other with shaft coupling through pin, recessed end holding screw respectively; Leading screw links to each other with nut; Work stage links to each other with central shaft through the estrade mounting screw, and silicon slice placed is on work stage; Outer shaft is a T type cylindrical structure, and the centre has manhole, is fixed on the bracing frame through first mounting screw～the 6th mounting screw; The rotation retainer is a T type cylindrical structure, and the centre has manhole, and the rotation retainer is positioned at the top of outer shaft, is in the manhole of outer shaft; Internal axle sleeve is a T type cylindrical structure, and the centre has manhole, and internal axle sleeve is mounted on the top of rotation retainer again, is positioned at the manhole of rotation retainer; Mobile retainer is a T type cylindrical structure, and the centre has manhole, and mobile retainer is positioned at the manhole of internal axle sleeve; Central shaft is placed in the round through hole that moves retainer;
End face retainer and end face neck collar all are installed on the internal axle sleeve; The end face retainer is positioned at the top of end face neck collar; Steel ball on the end face retainer contacts with the lower surface of outer shaft and the upper surface of end face neck collar respectively, adopts the no gap locking of rolling to the steel ball on end face neck collar and outer shaft and the end face retainer through first set nut, second set nut; And the end face retainer is a cylindrical structure, and the centre has manhole, and 360 ° of circumference during assembling, are put into steel ball with even 6 manholes that distribute in 60 ° of intervals in these 6 through holes on the plane, top; And the rotation retainer is a T type cylindrical structure, and the centre has manhole, at even 6 manholes that distribute of 360 ° of circumference in plane, top of rotation retainer, during assembling, in these 6 through holes, puts into steel ball; 360 ° are evenly distributed with 3 row, 6 row totally 18 manholes on the face of cylinder of rotation retainer, during assembling, in these through holes, put into steel ball; And mobile retainer is a T type cylindrical structure, and the centre has manhole, on the face of cylinder of moving retainer, is evenly distributed with 4 row, 6 row totally 24 manholes in 360 °, during assembling, in these through holes, puts into steel ball.
Further, the external cylindrical surface C of the inner cylinder face B of outer shaft and internal axle sleeve does not have the gap interference fit through 18 steel balls that distribute on the rotation retainer face of cylinder; The inner cylinder face D of internal axle sleeve and the external cylindrical surface E of central shaft then do not have the gap interference fit through moving the steel ball that distributes on the retainer face of cylinder.
Further, steel ball is processed by the Gcr15SiMn material, and rotation retainer, mobile retainer are processed by the H60 material.
Further, the number of steel ball arrangement mode on the end face retainer and steel ball can increase according to the size of end face retainer or reduce.This device through steel ball do not have gap, interference fit make the work stage motion flexibly, do not have card, do not have and stagnate.
The principle of the utility model is: this device has used the rolling friction principle, makes work stage when motion, not have card, not have stagnant, no beat.
The beneficial effect of the utility model is:
At first, the utility model steel ball has interchangeability, can realize less axial runout with the flatness of pressing end face through the consistance of control steel ball.Secondly, steel ball has favorable rigidity and thermal stability, guarantees that picture element and focal plane are stable, has guaranteed photoetching quality.
Description of drawings
Fig. 1 is the utility model system principle synoptic diagram;
Fig. 2 is the utility model system schematic top plan view;
Fig. 3 moves the retainer cut-open view;
Fig. 4 moves the retainer vertical view;
Fig. 5 is the internal axle sleeve cut-open view;
Fig. 6 is the internal axle sleeve upward view;
Fig. 7 is a rotation retainer cut-open view;
Fig. 8 is a rotation retainer vertical view;
Fig. 9 is an end face retainer cut-open view;
Figure 10 is an end face retainer vertical view;
Figure 11 is the outer shaft cut-open view;
Figure 12 is the outer shaft upward view;
Embodiment:
Specify the utility model below in conjunction with accompanying drawing, those skilled in the art can understand the effect and the advantage of the utility model according to the content of embodiment.
As shown in Figure 1; A kind of work stage sealed bead bearing two dimensional motion device, this device by silicon chip 1, estrade mounting screw 2, nut 3, move retainer 4, rotation retainer 5, central shaft 6, internal axle sleeve 7, outer shaft 8, end face retainer 9, end face neck collar 10, bracing frame 11, recessed end holding screw 12, first set nut 13, second set nut 14, shaft coupling 15, lead screw shaft 16, pin 17, motor shaft 18, motor 19, leading screw 20, estrade mounting hole 21, work stage 22, external thread 23, first mounting screw～the 6th mounting screw 101～106, the 7th mounting screw～the tenth mounting screw 201～204 is formed.
Like Fig. 1, motor 19 is fixed on the internal axle sleeve 7 cylinder bottoms through the 7th mounting screw～the tenth mounting screw 201～204, and motor shaft 18, lead screw shaft 16 link to each other with shaft coupling 15 through pin 17, recessed end holding screw 12 respectively; Leading screw 20 links to each other with nut 3; Work stage 22 links to each other with central shaft 6 through estrade mounting screw 2, and silicon chip 1 is placed on the work stage 22; Like Figure 11, shown in 12, outer shaft 8 is a T type cylindrical structure, and the centre has manhole 8077, is fixed on the bracing frame 11 through first mounting screw～the 6th mounting screw 101～106; Like Fig. 7, shown in 8, rotation retainer 5 is a T type cylindrical structure, and the centre has manhole 325, and rotation retainer 5 is positioned at the top of outer shaft 8, is in the manhole 8077 of outer shaft 8; Like Fig. 5, shown in 6, internal axle sleeve 7 is a T type cylindrical structure, and the centre has manhole 2015, and internal axle sleeve 7 is mounted on the top of rotation retainer 5 again, is positioned at the manhole 325 of rotation retainer 5; Like Fig. 3, shown in 4, moving retainer 4 is T type cylindrical structure, and the centre has manhole 425, moves the manhole 2015 that retainer 4 is positioned at internal axle sleeve 7; Central shaft 6 is placed in the round through hole 425 that moves retainer 4.
End face retainer 9 all is installed on the internal axle sleeve 7 with end face neck collar 10; End face retainer 9 is positioned at the top of end face neck collar 10; Steel ball on the end face retainer 9 contacts with the lower surface of outer shaft 8 and the upper surface of end face neck collar 10 respectively, adopts end face neck collar 10 and steel ball on outer shaft 7 and the end face retainer 9 the no gap of rolling to lock through first set nut 13, second set nut 14.
Like Fig. 9, shown in 10; End face retainer 9 is a cylindrical structure, and the centre has manhole 9077, and on the plane, top in 360 ° with 60 ° of intervals, 6 manholes 9011～9066 that evenly distribute; During assembling, in these 6 manholes, put into steel ball 901～906.The thickness of end face retainer 9 is less than steel ball size.
Like Fig. 7, shown in 8, rotation retainer 5 is a T type cylindrical structure, and the centre has manhole 325; 360 ° of 6 manholes 3011～3066 that evenly distribute on the plane, top of rotation retainer 5; During assembling, in these 6 manholes, put into steel ball, the height of T type end side is less than steel ball size; 360 ° are evenly distributed with 3 row, 6 row totally 18 manholes 3077～3244 on the face of cylinder of rotation retainer 5, during assembling, in these through holes, put into steel ball 307～324.The thickness of cylindrical wall is less than steel ball size.
Like Fig. 3, shown in 4; Moving retainer 4 is T type cylindrical structure; The centre has manhole 425, on the face of cylinder of moving retainer 4, is evenly distributed with 4 row, 6 row totally 24 manholes 4011～4244 in 360 °, during assembling; In these manholes, put into steel ball 401～424, the thickness of cylindrical wall is less than steel ball size.
Because the inner cylinder face D of internal axle sleeve 7 and the external cylindrical surface E of central shaft 6 do not have the gap interference fit through moving 24 steel balls 401～424 that distribute on retainer 4 faces of cylinder, therefore, central shaft 8 becomes one with mobile retainer 4.When motor rotates; Motor shaft 18 drives leading screw 20 through shaft coupling 15 and rotates; The rotation of leading screw 20 drives nut 3 upper and lower displacements again, because nut 3 is an one with central shaft 6, therefore; The moving up and down of nut 3 driven central shaft 6 and moved retainer 4 and moved up and down together, thereby accomplished work stage 22 moving up and down in vertical direction.Therefore, work stage 22 motion is got up not only flexibly but also do not have card, do not have and stagnate.
In addition; Because the inner cylinder face B of outer shaft 8 and the external cylindrical surface C of internal axle sleeve 7 do not have the gap interference fit through equally distributed 18 steel balls 307～324 on rotation retainer 5 faces of cylinder; It is fixed that outer shaft 8 is fixed on the bracing frame 11; End face retainer 9 all is installed on the internal axle sleeve 7 with end face neck collar 10; End face retainer 9 is positioned at the top of end face neck collar 10; Steel ball 901～906 on the end face retainer 9 contacts with the lower surface of outer shaft 8 and the upper surface of end face neck collar 10 respectively, adopts end face neck collar 10 and steel ball on outer shaft 7 and the end face retainer 9 the no gap of rolling to lock through first set nut 13, second set nut 14.Therefore; When the handle G on the internal axle sleeve 7 is applied in certain rotary thrust in the horizontal direction; Internal axle sleeve 7 is rotated motion through the steel ball and the steel ball on the end face retainer 9 of packing in rotation retainer 5 faces of cylinder through no gap interference fit, thereby has also driven the adjustment of whole work-piece platform 22 completion certain angles.
Said steel ball is processed by the Gcr15SiMn material, and rotation retainer 5, mobile retainer 4 are processed by the H62 material.The steel ball arrangement mode on the retainer and the number of steel ball can increase according to the size of retainer or reduce.
Said steel ball has interchangeability, can realize less axial runout with the flatness of pressing end face through the consistance of control steel ball.Secondly, steel ball has favorable rigidity and thermal stability, guarantees that picture element and focal plane are stable, has guaranteed photoetching quality.
Since work stage vertical moving with rotatablely move in what all take is that sealed bead bearing does not have the gap pure rolling friction; Therefore; Realized that in the work stage motion process motion is flexible, do not have card, nothing stagnates; Guarantee the work stage surface in the repetitive positioning accuracy of vertical direction and the positioning of rotating precision of horizontal direction, guaranteed that picture element and focal plane are stable, guaranteed photoetching quality.
Although above the illustrative embodiment of the utility model is described; So that the technician of present technique neck understands the utility model, but should be clear, the utility model is not limited to the scope of embodiment; To those skilled in the art; As long as various variations appended claim limit and the spirit and scope of the utility model of confirming in, these variations are conspicuous, all utilize innovation and creation that the utility model conceives all at the row of protection.
Claims (4)
1. work stage sealed bead bearing two dimensional motion device is characterized in that: this device by silicon chip (1), estrade mounting screw (2), nut (3), move retainer (4), rotation retainer (5), central shaft (6), internal axle sleeve (7), outer shaft (8), end face retainer (9), end face neck collar (10), bracing frame (11), recessed end holding screw (12), first set nut (13), second set nut (14), shaft coupling (15), lead screw shaft (16), pin (17), motor shaft (18), motor (19), leading screw (20), estrade mounting hole (21), work stage (22), external thread (23), first mounting screw～the 6th mounting screw (101～106) and the 7th mounting screw～the tenth mounting screw (201～204) and form; Wherein:
Motor (19) is fixed on internal axle sleeve (7) the cylinder bottom through the 7th mounting screw～the tenth mounting screw (201～204), and motor shaft (18), lead screw shaft (16) link to each other with shaft coupling (15) through pin (17), recessed end holding screw (12) respectively; Leading screw (20) links to each other with nut (3); Work stage (22) links to each other with central shaft (6) through estrade mounting screw (2), and silicon chip (1) is placed on the work stage (22); Outer shaft (8) is a T type cylindrical structure, and the centre has manhole (8077), is fixed on the bracing frame (11) through first mounting screw～the 6th mounting screw (101～106); Rotation retainer (5) is a T type cylindrical structure, and the centre has manhole (325), and rotation retainer (5) is positioned at the top of outer shaft (8), is in the manhole (8077) of outer shaft (8); Internal axle sleeve (7) is a T type cylindrical structure, and the centre has manhole (2015), and internal axle sleeve (7) is mounted on the top of rotation retainer (5) again, is positioned at the manhole (325) of rotation retainer (5); Moving retainer (4) is T type cylindrical structure, and the centre has manhole (425), moves the manhole (2015) that retainer (4) is positioned at internal axle sleeve (7); Central shaft (6) is placed in the round through hole (425) of mobile retainer (4);
End face retainer (9) and end face neck collar (10) all are installed on the internal axle sleeve (7); End face retainer (9) is positioned at the top of end face neck collar (10); Steel ball (901～906) on the end face retainer (9) contacts with the lower surface of outer shaft (8) and the upper surface of end face neck collar (10) respectively, locks end face neck collar (10) and the no gap of steel ball (901～906) employing rolling on outer shaft (8) and the end face retainer (9) through first set nut (13), second set nut (14); And end face retainer (9) is a cylindrical structure, and the centre has manhole (9077), and 360 ° of circumference during assembling, are put into steel ball (901～906) with even 6 manholes (9011～9066) that distribute in 60 ° of intervals in these 6 through holes on the plane, top; And rotation retainer (5) is a T type cylindrical structure, and the centre has manhole (325), at even 6 manholes (3011～3066) that distribute of 360 ° of circumference in plane, top of rotation retainer (5), during assembling, in these 6 through holes, puts into steel ball; 360 ° are evenly distributed with 3 row, 6 row totally 18 manholes (3077～3244) on the face of cylinder of rotation retainer (5), during assembling, in these through holes, put into steel ball (307～324); And mobile retainer (4) is a T type cylindrical structure; The centre has manhole (425); On the face of cylinder of moving retainer (4), be evenly distributed with 4 row, 6 row totally 24 manholes (4011～4244) in 360 °; During assembling, in these through holes, put into steel ball (401～424), this device through steel ball do not have gap, interference fit make the work stage motion flexibly, do not have card, do not have and stagnate.
2. a kind of work stage sealed bead bearing two dimensional motion device according to claim 1 is characterized in that: the external cylindrical surface C of the inner cylinder face B of outer shaft (8) and internal axle sleeve (7) does not have the gap interference fit through 18 steel balls (307～324) that distribute on rotation retainer (5) face of cylinder; The external cylindrical surface E of the inner cylinder face D of internal axle sleeve (7) and central shaft (6) does not then have the gap interference fit through moving the steel ball (401～424) that distributes on retainer (4) face of cylinder.
3. a kind of work stage sealed bead bearing two dimensional motion device according to claim 1, it is characterized in that: steel ball is processed by the Gcr15SiMn material, and rotation retainer (5), mobile retainer (4) are processed by the H60 material.
4. a kind of work stage sealed bead bearing two dimensional motion device according to claim 1, it is characterized in that: the steel ball arrangement mode on the end face retainer (9) and the number of steel ball can increase or reduce according to the size of end face retainer (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204275626U CN202331009U (en) | 2011-11-02 | 2011-11-02 | Workpiece platform dense ball bearing two-dimensional movement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204275626U CN202331009U (en) | 2011-11-02 | 2011-11-02 | Workpiece platform dense ball bearing two-dimensional movement device |
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| Publication Number | Publication Date |
|---|---|
| CN202331009U true CN202331009U (en) | 2012-07-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204275626U Expired - Fee Related CN202331009U (en) | 2011-11-02 | 2011-11-02 | Workpiece platform dense ball bearing two-dimensional movement device |
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| CN (1) | CN202331009U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104455059A (en) * | 2014-10-29 | 2015-03-25 | 中国科学院苏州生物医学工程技术研究所 | Point contact steel ball type super-precise coupling device |
| CN109356999A (en) * | 2018-12-12 | 2019-02-19 | 中核新科（天津） 精密机械制造有限公司 | The close roller shafting of retarder high precision overloading |
| CN109356998A (en) * | 2018-12-12 | 2019-02-19 | 中核新科（天津） 精密机械制造有限公司 | The close roller shafting of retarder heavy duty |
| CN109386590A (en) * | 2018-12-12 | 2019-02-26 | 中核新科（天津） 精密机械制造有限公司 | Retarder high precision dense bead shafting |
| CN113124055A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Air-float thrust bearing based on radial dense-bead adsorption |
| CN113958603A (en) * | 2021-10-12 | 2022-01-21 | 中国科学院光电技术研究所 | High-precision dense-bead shaft system |
| CN114321174A (en) * | 2021-11-29 | 2022-04-12 | 北京航天发射技术研究所 | Guiding device, method and application |
-
2011
- 2011-11-02 CN CN2011204275626U patent/CN202331009U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104455059A (en) * | 2014-10-29 | 2015-03-25 | 中国科学院苏州生物医学工程技术研究所 | Point contact steel ball type super-precise coupling device |
| CN109356999A (en) * | 2018-12-12 | 2019-02-19 | 中核新科（天津） 精密机械制造有限公司 | The close roller shafting of retarder high precision overloading |
| CN109356998A (en) * | 2018-12-12 | 2019-02-19 | 中核新科（天津） 精密机械制造有限公司 | The close roller shafting of retarder heavy duty |
| CN109386590A (en) * | 2018-12-12 | 2019-02-26 | 中核新科（天津） 精密机械制造有限公司 | Retarder high precision dense bead shafting |
| CN113124055A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Air-float thrust bearing based on radial dense-bead adsorption |
| CN113958603A (en) * | 2021-10-12 | 2022-01-21 | 中国科学院光电技术研究所 | High-precision dense-bead shaft system |
| CN114321174A (en) * | 2021-11-29 | 2022-04-12 | 北京航天发射技术研究所 | Guiding device, method and application |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20151102 |
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| EXPY | Termination of patent right or utility model |