CN202323100U - Straight-pull eight-inch silicon single crystal thermal field - Google Patents
Straight-pull eight-inch silicon single crystal thermal field Download PDFInfo
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- CN202323100U CN202323100U CN2011204353396U CN201120435339U CN202323100U CN 202323100 U CN202323100 U CN 202323100U CN 2011204353396 U CN2011204353396 U CN 2011204353396U CN 201120435339 U CN201120435339 U CN 201120435339U CN 202323100 U CN202323100 U CN 202323100U
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- preservation cylinder
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Abstract
The utility model discloses a straight-pull eight-inch silicon single crystal thermal field. A protective disc pressing sheet is arranged above a lower protective disc pressing sheet, and a graphite felt is filled between the lower protective disc pressing sheet and the protective disc pressing sheet; the bottom of a main thermal insulation cylinder is clamped with a lower thermal insulation cylinder, the bottom of the lower thermal insulation cylinder is clamped with the lower protective disc pressing sheet, and the bottom of the lower protective disc pressing sheet is clamped with a furnace bottom supporting ring; and an outer guide cylinder is arranged on a guide cylinder supporting ring, an inner guide cylinder is clamped on the outer guide cylinder, and a graphite felt is filled in the clearance between the inner guide cylinder and the outer guide cylinder. The thermal field is simple in structure and good in thermal insulation performance, improves the equal-diameter average drawing speed, reduces the equal-diameter power consumption, reduces the production cost and improves the production efficiency.
Description
Technical field
The utility model relates to eight inches silicon single-crystal thermal fields of a kind of vertical pulling, belongs to silicon single-crystal thermal field technical field.
Background technology
Sun power be clean most future, the safe and reliable energy, the silicon single-crystal solar cell is one of human most important green energy resource from now on.Say that under existing technology and condition and from battery performance silicon single-crystal is to make the more satisfactory material of solar cell, and the silicon single-crystal of high-quality parameter is a pacing items of manufacturing high efficiency solar cell.
The czochralski silicon monocrystal main product is Φ 200mm in the world, and to Φ 300mm transition, the development level has reached Φ 400mm～450mm gradually.In Chinese photovoltaic field, market is very big to the demand growth of eight inches silicon chips, and especially in recent years, eight inches silicon single-crystal become main product.
At present, eight inches silicon single-crystal of domestic production are employed to be main with 20 inches thermal fields still mainly, according to prior art, draws the employed conventional 20 inches thermal fields of silicon single-crystal and has the problem that power consumption is high, pulling rate is low, the plumbago crucible loss is big.Shown in accompanying drawing 1: in existing 20 inches the water conservancy diversion cartridge type thermal field, thermal field component comprise graphite felt 1-1, graphite compressing tablet 1-2, venting port 1-3, down graphite heat-preservation cylinder 1-4, down graphite support ring 1-5, axis extension shaft 1-6, main graphite heat-preservation cylinder 1-7, well heater 1-8, go up support ring 1-9, middle sheath shaft 1-10, electrode sheath 1-11, electrode quartz sheath 1-12, graphite axis 1-13, crucible holder 1-14, plumbago crucible 1-15, quartz crucible 1-16, top insulation cover plate 1-17, molten silicon 1-18, top blind flange 1-21, external flow guiding cylinder 1-22, guide shell bed hedgehopping ring 1-23, guide shell support ring 1-24, go up graphite heat-preservation cylinder 1-25, inner draft tube 1-26 and retaining ring 1-27.Its concrete structure is: in the burner hearth internal diameter is the single crystal growing furnace of 850mm, installing with well heater 1-8 is the combined type thermic devices of core; Seed crystal 1-20 and silicon single crystal bar 1-19 place quartz crucible 1-16; Put into the peripheral main graphite heat-preservation cylinder 1-7 of installation of well heater 1-8, main graphite heat-preservation cylinder 1-7 outside wraps graphite felt 1-1.Rim of the mouth under main graphite heat-preservation cylinder 1-7 is positioned on the graphite support ring 1-5; Following graphite support ring 1-5 is positioned on the following graphite heat-preservation cylinder 1-4; The outside of following graphite heat-preservation cylinder 1-4 is coating graphite felt 1-1 also, and following graphite heat-preservation cylinder 1-4 is positioned at the rim of the mouth on the graphite compressing tablet 1-2, graphite felt 1-1 on the graphite compressing tablet 1-2 underlay; Main graphite heat-preservation cylinder 1-7 is stamped support ring 1-9 in the upper edge; Rim of the mouth below the last support ring 1-9 is stuck on the main graphite heat-preservation cylinder 1-7, and pad graphite felt 1-1 presses top insulation cover plate 1-17 more in the above on last support ring 1-9, upward goes up graphite heat-preservation cylinder 1-25 and is placed on going up and being stuck in the rim of the mouth of support ring 1-9; Outside last graphite heat-preservation cylinder 1-25, coat graphite felt 1-1; Guide shell support ring 1-24 is stuck on the graphite heat-preservation cylinder 1-25, and guide shell support ring 1-24 goes up pad guide shell bed hedgehopping ring 1-23, and external flow guiding cylinder 1-22 upper edge is placed on the guide shell bed hedgehopping ring 1-23; Retaining ring 1-27 is close to guide shell bed hedgehopping ring 1-23 outer and is placed on the guide shell support ring 1-24 top blind flange 1-21 underlay graphite felt 1-1.Put axis extension shaft 1-6 on the graphite lower shaft 1-13, axis extension shaft 1-6 supports puts crucible holder 1-14.There are following some shortcomings in this water conservancy diversion cartridge type thermal field:
1, thermal field integral body is compact inadequately, heat insulation effect is poor, energy consumption is higher;
2, thermal field guide shell structure design unreasonable cause argon gas flow smooth, effect of heat insulation is not good, the external flow guiding cylinder upper edge outsidely is prone to adhere in a large number the silicon oxide volatile matter, become brilliant unstable;
3, the longitudinal temperature gradient of monocrystalline rostral-caudal changes greatly, and whole pulling rate is lower;
4, plumbago crucible unreasonable structure, work-ing life is low.
The utility model content
The purpose of the utility model is: eight inches silicon single-crystal thermal fields of vertical pulling that a kind of structure is compact more, better, the isometrical average pull rate of heat-insulating property improves, isometrical power consumption is minimized are provided, thereby can effectively solve the problem that exists in the above-mentioned prior art.
The utility model purpose realizes through following technical proposals: eight inches silicon single-crystal thermal fields of a kind of vertical pulling; Comprise graphite felt, furnace bottom support ring, electrode sheath, down protection plate compressing tablet, Graphite Electrodes, down heat-preservation cylinder, crucible holder, plumbago crucible, well heater, main heat-preservation cylinder, go up support ring, go up insulation cover, electrode bolts, graphite axis, axis extension shaft, go up heat-preservation cylinder, external flow guiding cylinder, guide shell support ring, inner draft tube, protection plate compressing tablet and quartz crucible; Main heat-preservation cylinder is located at the well heater periphery, and well heater is located on the Graphite Electrodes; Establish the graphite axis in the middle of the well heater, establish the axis extension shaft on the graphite axis, the axis extension shaft supports the crucible holder; Said protection plate compressing tablet is located at down on the protection plate compressing tablet, is filled with graphite felt between following protection plate compressing tablet and the protection plate compressing tablet; The bottom of main heat-preservation cylinder and following heat-preservation cylinder clamping, following heat-preservation cylinder bottom and the clamping of following protection plate compressing tablet, following protection plate compressing tablet bottom and the clamping of furnace bottom support ring; Said external flow guiding cylinder places on the guide shell support ring, and inner draft tube is stuck on the external flow guiding cylinder, and the gap between inner draft tube and the external flow guiding cylinder is filled with graphite felt; Plumbago crucible is supported in said crucible holder, and quartz crucible is located in the plumbago crucible, and the quartz crucible upper edge exceeds the plumbago crucible upper edge.
As preferably, main heat-preservation cylinder top and last support ring clamping, the top of last support ring and the bottom clamping of last heat-preservation cylinder, the top of last heat-preservation cylinder and the clamping of guide shell support ring.
Preferred as further, said main heat-preservation cylinder, following heat-preservation cylinder and last heat-preservation cylinder all are coated with graphite felt outward.
Preferred as further, be lined with graphite felt on the guide shell support ring, insulation cover is put in the graphite felt top.
Preferred as further, be lined with graphite felt in the said furnace bottom support ring.
Gap between the said inside and outside guide shell is strengthened, and fills more graphite felt; Contact area between plumbago crucible and the holder of graphite crucible also increases.
Compared with prior art, the beneficial effect of the utility model: in eight inches silicon single-crystal thermal fields of the utility model vertical pulling, the guide shell good heat-insulation effect, reduced scattering and disappearing of heat in a large number, solved the phenomenon that outside, external flow guiding cylinder upper edge is adhered to the silicon oxide volatile matter in a large number; Strengthened the thermal field insulation, increased crystals longitudinal temperature gradient, improved whole pulling rate, better guaranteed the stability of Cheng Jing, the structure of plumbago crucible has significantly prolonged its work-ing life; Therefore, eight inches silicon single-crystal thermal fields of the utility model vertical pulling one-piece construction is compact more, better, the isometrical average pull rate of heat-insulating property improves, and has reduced isometrical power consumption, has practiced thrift production cost, enhances productivity.
Description of drawings
Fig. 1 is the structural representation of thermal field in the prior art.
Fig. 2 is the structural representation of thermal field in the utility model;
Fig. 3 is the structural representation of plumbago crucible among Fig. 2;
Fig. 4 is the structural representation of guide shell among Fig. 2.
Among prior art Fig. 1: 1-1 is a graphite felt, and 1-2 is the graphite compressing tablet, and 1-3 is a venting port, and 1-4 is following graphite heat-preservation cylinder, and 1-5 is following graphite support ring; 1-6 is the axis extension shaft, and 1-7 is main graphite heat-preservation cylinder, and 1-8 is a well heater, and 1-9 goes up support ring, and 1-10 is middle sheath shaft; 1-11 is an electrode sheath, and 1-12 is the electrode quartz sheath, and 1-13 is the graphite axis, and 1-14 is the crucible holder, and 1-15 is a plumbago crucible; 1-16 is a quartz crucible, and 1-17 is a top insulation cover plate, and 1-18 is molten silicon, and 1-19 is a silicon single crystal bar; 1-20 is a seed crystal, and 1-21 is a top blind flange, and 1-22 is an external flow guiding cylinder, and 1-23 is a guide shell bed hedgehopping ring; 1-24 is the guide shell support ring, and 1-25 goes up the graphite heat-preservation cylinder, and 1-26 is an inner draft tube, and 1-27 is a retaining ring.
Among the utility model Fig. 2: the 1st, graphite felt, the 2nd, furnace bottom support ring, the 3rd, electrode sheath, the 4th, following protection plate compressing tablet, the 5th, Graphite Electrodes; The 6th, following heat-preservation cylinder, the 7th, crucible holder, the 8th, plumbago crucible, the 9th, well heater, the 10th, main heat-preservation cylinder; The 11st, last support ring, the 12nd, silicon single crystal bar, the 13rd, last insulation cover, the 14th, stove tube venting port, the 15th, electrode bolts; The 16th, graphite axis, the 17th, axis extension shaft, the 18th, molten silicon, the 19th, last heat-preservation cylinder, the 20th, external flow guiding cylinder; The 21st, guide shell support ring, the 22nd, inner draft tube, the 23rd, seed crystal, the 24th, protection plate compressing tablet, the 25th, quartz crucible.
Embodiment
For the purpose, technical scheme and the advantage that make the utility model is clearer,, the utility model is further elaborated below in conjunction with accompanying drawing and embodiment.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
Disclosed all characteristics in this specification sheets, or the step in disclosed all methods or the process are except the speciality of mutual repulsion and/or the step; All can make up by any way; Only if special narration all can be replaced by other equivalences or the alternative features with similar purpose, promptly; Only if special narration, an embodiment in a series of equivalences of each characteristic or the similar characteristics.
Embodiment 1
Eight inches silicon single-crystal thermal fields of a kind of vertical pulling; Like Fig. 2, Fig. 3, shown in Figure 4; Thermal field comprise graphite felt 1, furnace bottom support ring 2, electrode sheath 3, down protection plate compressing tablet 4, Graphite Electrodes 5, down heat-preservation cylinder 6, crucible holder 7, plumbago crucible 8, well heater 9, main heat-preservation cylinder 10, go up support ring 11, go up insulation cover 13, electrode bolts 15, graphite axis 16, axis extension shaft 17, go up heat-preservation cylinder 19, external flow guiding cylinder 20, guide shell support ring 21, inner draft tube 22, protection plate compressing tablet 24 and quartz crucible 25; Main heat-preservation cylinder 10 is located at well heater 9 peripheries, and well heater 9 is located on the Graphite Electrodes 5; Establish graphite axis 16 in the middle of the well heater 9, establish axis extension shaft 17 on the graphite axis 16, axis extension shaft 17 supports crucible holder 7, and said protection plate compressing tablet 24 is located at down on the protection plate compressing tablet 4, is filled with graphite felt 1 between following protection plate compressing tablet 4 and the protection plate compressing tablet 24; The bottom of main heat-preservation cylinder 10 and following heat-preservation cylinder 6 clampings, following heat-preservation cylinder 6 bottoms and following protection plate compressing tablet 4 clampings, following protection plate compressing tablet 4 bottoms and 2 clampings of furnace bottom support ring; Said external flow guiding cylinder 20 places on the guide shell support ring 21, and inner draft tube 22 is stuck on the external flow guiding cylinder 20, and is filled with graphite felt 1 between inner draft tube 22 and the external flow guiding cylinder 20; Plumbago crucible 8 is supported in said crucible holder 7, and quartz crucible 25 is located in the plumbago crucible 8, and quartz crucible 25 upper edges exceed plumbago crucible 8 upper edges.
Main heat-preservation cylinder 10 tops and 11 clampings of last support ring, the top of last support ring 11 and the 19 bottom clampings of last heat-preservation cylinder, the top of last heat-preservation cylinder 19 and 21 clampings of guide shell support ring; Be lined with graphite felt 1 on the guide shell support ring 21, establish insulation cover 13 on the graphite felt 1; Said main heat-preservation cylinder 10, heat-preservation cylinder 6 and last heat-preservation cylinder 19 all are coated with graphite felt 1 outward down; Be lined with graphite felt 1 in the said furnace bottom support ring 2.
Specifically: eight inches silicon single-crystal thermal fields of the utility model vertical pulling are that installation is the combined type thermic devices of core with well heater 9 in burner hearth internal diameter Φ=850mm single crystal growing furnace, the main heat-preservation cylinder 10 of well heater 9 peripheral installations, and main heat-preservation cylinder 10 outsides wrap graphite felt 1.Main heat-preservation cylinder 10 is located in down in the seam on the heat-preservation cylinder 6, and following heat-preservation cylinder 6 is located in down in the seam on the protection plate compressing tablet 4, and 4 times seams of following protection plate compressing tablet are stuck on the furnace bottom support ring 2; Pad is gone up graphite felt 1 in the furnace bottom support ring, and support ring 11 is put in main heat-preservation cylinder 10 upper edges, and last support ring 11 following seams will be stuck on the main heat-preservation cylinder 10; On last support ring 11, load onto heat-preservation cylinder 19; Last heat-preservation cylinder 19 is stuck in the last seam of support ring 11, and outside last heat-preservation cylinder 19, wraps graphite felt 1, and guide shell support ring 21 is stuck on the heat-preservation cylinder 19; External flow guiding cylinder 20 lower edges are placed on the guide shell support ring 21; Inner draft tube 22 is stuck on the external flow guiding cylinder 20, and pad graphite felt 1 covers insulation cover 13 on the guide shell support ring 21 on the graphite felt.
Put axis extension shaft 17 on the graphite axis 16, axis extension shaft 17 supports puts crucible holder 7, and plumbago crucible 8 is supported in crucible holder 7, and quartz crucible 25 is located in the plumbago crucible 8, and quartz crucible 25 upper edges need exceed plumbago crucible 8 upper edges.
Well heater 9 is sitting on the Graphite Electrodes 5, and Graphite Electrodes 5 passes through screw threads for fastening on the energising metal electrode.
As shown in Figure 3: this plumbago crucible is that the cooperation of three lobe crucible bodies forms, and the crucible body is cylindric, and this external surface of crucible Internal and external cycle has even and highly identical at interval small boss.The thick 3mm of the more former plumbago crucible in plumbago crucible A place in the utility model thermal field; Plumbago crucible B place is that the easy fracture place also thickeies 10-15mm, in addition, has increased plumbago crucible C place; The reduced 70-80mm of plumbago crucible D place has increased the contact surface of plumbago crucible and crucible holder.
As shown in Figure 4: the guide shell in the utility model thermal field is to be cooperated with external flow guiding cylinder 20 by inner draft tube 22 to form; The shape of said external flow guiding cylinder 20 is divided into upper and lower two sections; Epimere is the past tilt in vertical section, lower end, and the lower flange face of inner draft tube 22 lies on the upper flange surface of external flow guiding cylinder 20, and the following seam of inner draft tube 22 is stuck on the following seam of external flow guiding cylinder 20; Certain space was left in inside after interior external flow guiding cylinder was worked good, and filled graphite felt 1 here.
The above is merely the preferred embodiment of the utility model; Not in order to restriction the utility model; Any modification of being done within all spirit and principles at the utility model, be equal to replacement and improvement etc., all should be included within the protection domain of the utility model.
Claims (5)
1. eight inches silicon single-crystal thermal fields of a vertical pulling; Comprise graphite felt (1), furnace bottom support ring (2), electrode sheath (3), down protection plate compressing tablet (4), Graphite Electrodes (5), down heat-preservation cylinder (6), crucible holder (7), plumbago crucible (8), well heater (9), main heat-preservation cylinder (10), go up support ring (11), go up insulation cover (13), electrode bolts (15), graphite axis (16), axis extension shaft (17), go up heat-preservation cylinder (19), external flow guiding cylinder (20), guide shell support ring (21), inner draft tube (22) and quartz crucible (25); Main heat-preservation cylinder (10) is located at well heater (9) periphery, and well heater (9) is located on the Graphite Electrodes (5); Establish graphite axis (16) in the middle of the well heater (9), establish axis extension shaft (17) on the graphite axis (16), axis extension shaft (17) supports crucible holder (7); It is characterized in that: also comprise protection plate compressing tablet (24), said protection plate compressing tablet (24) is located at down on the protection plate compressing tablet (4), is filled with graphite felt (1) between following protection plate compressing tablet (4) and the protection plate compressing tablet (24); The bottom of main heat-preservation cylinder (10) and following heat-preservation cylinder (6) clamping, following heat-preservation cylinder (6) bottom and following protection plate compressing tablet (4) clamping, following protection plate compressing tablet (4) bottom and furnace bottom support ring (2) clamping; Said external flow guiding cylinder (20) places on the guide shell support ring (21), and inner draft tube (22) is stuck on the external flow guiding cylinder (20), and the gap between inner draft tube (22) and the external flow guiding cylinder (20) is filled with graphite felt (1); Plumbago crucible (8) is supported in said crucible holder (7), and quartz crucible (25) is located in the plumbago crucible (8), and quartz crucible (25) upper edge exceeds plumbago crucible (8) upper edge.
2. eight inches silicon single-crystal thermal fields of vertical pulling according to claim 1; It is characterized in that: main heat-preservation cylinder (10) top and last support ring (11) clamping; The top of last support ring (11) and last heat-preservation cylinder (13) bottom clamping, the top of last heat-preservation cylinder (13) and guide shell support ring (21) clamping.
3. eight inches silicon single-crystal thermal fields of vertical pulling according to claim 2 is characterized in that: the outer graphite felt (1) that all is coated with of said main heat-preservation cylinder (10), following heat-preservation cylinder (6) and last heat-preservation cylinder (13).
4. eight inches silicon single-crystal thermal fields of vertical pulling according to claim 3 is characterized in that: be lined with graphite felt (1) on the guide shell support ring (21), insulation cover (13) is put in graphite felt (1) top.
5. according to eight inches silicon single-crystal thermal fields of the described vertical pulling of arbitrary claim in claim 1 or 4, it is characterized in that: be lined with graphite felt (1) in the said furnace bottom support ring (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204353396U CN202323100U (en) | 2011-11-07 | 2011-11-07 | Straight-pull eight-inch silicon single crystal thermal field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204353396U CN202323100U (en) | 2011-11-07 | 2011-11-07 | Straight-pull eight-inch silicon single crystal thermal field |
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| Publication Number | Publication Date |
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| CN202323100U true CN202323100U (en) | 2012-07-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011204353396U Expired - Fee Related CN202323100U (en) | 2011-11-07 | 2011-11-07 | Straight-pull eight-inch silicon single crystal thermal field |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104357896A (en) * | 2014-10-19 | 2015-02-18 | 镇江大成新能源有限公司 | Molybdenum draft tube for monocrystalline silicon preparation |
| CN105525346A (en) * | 2014-10-21 | 2016-04-27 | 镇江大成新能源有限公司 | Novel single crystal furnace |
| CN105887207A (en) * | 2014-10-21 | 2016-08-24 | 镇江大成新能源有限公司 | Low-power-consumption monocrystal furnace |
| CN106319619A (en) * | 2016-11-02 | 2017-01-11 | 中国电子科技集团公司第四十六研究所 | Dislocation-free growth technique for 6-inch straight pulling heavy doped silicon single crystal and thermal field system thereof |
| CN115323479A (en) * | 2022-08-16 | 2022-11-11 | 晶澳太阳能有限公司 | Guide cylinder and preparation method thereof |
-
2011
- 2011-11-07 CN CN2011204353396U patent/CN202323100U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104357896A (en) * | 2014-10-19 | 2015-02-18 | 镇江大成新能源有限公司 | Molybdenum draft tube for monocrystalline silicon preparation |
| CN105525346A (en) * | 2014-10-21 | 2016-04-27 | 镇江大成新能源有限公司 | Novel single crystal furnace |
| CN105887207A (en) * | 2014-10-21 | 2016-08-24 | 镇江大成新能源有限公司 | Low-power-consumption monocrystal furnace |
| CN106319619A (en) * | 2016-11-02 | 2017-01-11 | 中国电子科技集团公司第四十六研究所 | Dislocation-free growth technique for 6-inch straight pulling heavy doped silicon single crystal and thermal field system thereof |
| CN115323479A (en) * | 2022-08-16 | 2022-11-11 | 晶澳太阳能有限公司 | Guide cylinder and preparation method thereof |
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