CN202196010U - Instrument provided with reference signal and used for on-line multi-point monitoring optical characteristics of thin film - Google Patents
Instrument provided with reference signal and used for on-line multi-point monitoring optical characteristics of thin film Download PDFInfo
- Publication number
- CN202196010U CN202196010U CN2011203327534U CN201120332753U CN202196010U CN 202196010 U CN202196010 U CN 202196010U CN 2011203327534 U CN2011203327534 U CN 2011203327534U CN 201120332753 U CN201120332753 U CN 201120332753U CN 202196010 U CN202196010 U CN 202196010U
- Authority
- CN
- China
- Prior art keywords
- light intensity
- optical fiber
- data processing
- reference signal
- processing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The utility model relates to an instrument used for on-line multi-point monitoring optical characteristics of a thin film, which can be widely applied in a film coating machine performing continuous operation, and used for on-line monitoring optical characteristics of transparent materials such as ITO transparent conductive thin films, ITO glass and the like. Light intensity sensors as well as rolling wheels used for driving the transparent base material for transmission are installed on the two sides of a transparent base material; one end of each optical fiber is connected with each light intensity sensor, the other end of each optical fiber is connected with a reflection grating; a CCD (Charge Coupled Device) image sensor is arranged on the opposite side of the reflection grating and connected with data processing equipment through circuit lines; and an output end of the data processing equipment is connected with a display.
Description
Technical field
The utility model relates to a kind of instrument of online multiple spot monitoring Film Optics characteristic, and this instrument can be widely used in the coating machine of working continuously, in order to the on-line monitoring optical signature of transparent materials such as ITO transparent conductive film, ito glass for example.
Background technology
The application of plated film product is progressively expanded in recent years; The market demand also is to present ascendant trend; ITO conductive film for example, supply falls short of demand for the ITO demand under the drive of the touch-screen market expansion, in order to enhance productivity; The coating machine of working continuously is just fast-developing, and is the formation quality of monitoring plated film under the situation at machine run how in important problem in the middle of this type coating machine.
In the past, before no effective monitoring method, the quality that can't control plated film in the coating process how; Can not in coating process, carry out the technology adjustment timely; Particularly in the plating multilayer film,, often cause bad, the waste of material of product owing to can not in time control the quality of each tunic.
At present in order to improve the quality monitoring to the plated film product, generally all in the middle of coating machine, embed online monitoring equipment probe, probe is connected with data handling system outside the machinery and equipment, and the analysis result of data is presented on the display.
Summary of the invention
In order to overcome above-mentioned defective; The purpose of the utility model is to provide a kind of on-line monitoring Film Optics characteristic instrument and equipment that has reference signal; Online multiple spot monitoring transparent material optical signature comprises transmissivity and reflectivity etc., is provided with reference signal; With transmission signal or reflected signal contrast, analysis to measure data result.
For realizing above-mentioned purpose; The utility model adopts following technical scheme: the running roller that a kind of on-line monitoring Film Optics characteristic instrument and equipment that has reference signal, the both sides of transparent base are installed and are placed with light intensity sensor, drive the transparent base transmission, a termination light intensity sensor of optical fiber; Another termination reflection grating of optical fiber; Offside in reflection grating is a ccd image sensor, and ccd image sensor is connected the output termination display of data processing equipment through circuitry lines with data processing equipment.
There is spectroscope said light intensity sensor inside, and spectroscope is connected with CD-ROM drive motor.
The beneficial effect of the utility model:
The main effect of optical fiber is to utilize the principle of total reflection that light is imported on the grating; The effect of light intensity sensor is to connect optical fiber, receives light; Spectroscope can rotate under the drive of CD-ROM drive motor, and angle can be regulated as required; The effect of reflection grating mainly is that incident ray is carried out scattering, with the light scattering of different wave length to ccd image sensor; The effect of ccd image sensor changes light signal into electric signal; Electric signal transmits in the data processing equipment through circuitry lines, data processing equipment through a cover software to monitoring result analyzing and processing in addition, before the contrast plated film with plated film after the transmission change situation; It is the data analysis result who shows coating process that display mainly acts on, and the optical signature of film is shown intuitively.
Description of drawings
Fig. 1 is the structural representation of the utility model patent.
Fig. 2 is the installation site synoptic diagram of the utility model patent.
Embodiment
In order to be described in detail the These characteristics of the utility model patent, advantage and principle of work below in conjunction with Figure of description and embodiment the utility model is done further explanation, but the scope that the utility model is protected are not limited thereto.
Like Fig. 1: a kind of on-line monitoring Film Optics characteristic instrument and equipment that has reference signal; The running roller 9 that the both sides of transparent base 11 are installed and are placed with light intensity sensor 2, drive transparent base 11 transmissions; One termination light intensity sensor 2 of optical fiber 1, another termination reflection grating 5 of optical fiber 1 is a ccd image sensor 6 at the offside of reflection grating 5; Ccd image sensor 6 is connected the output termination display 8 of data processing equipment 7 through circuitry lines 10 with data processing equipment 7.There is spectroscope 3 said light intensity sensor 2 inside, and spectroscope 3 is connected with CD-ROM drive motor 4.
Probe imports in the vacuum chamber unit through optical fiber, places in the transparent base both sides light intensity sensor 2 is installed, and the light that light source sends enters in the light intensity sensor 2; In light intensity sensor 2 inside spectroscope 3 is arranged, can drive spectroscope 3 through CD-ROM drive motor 4 and rotate spectroscope 3 rotating certain angle; Make a certain proportion of light through optical fiber 1, import on the outside reflection grating 5 of vacuum chamber, reflection grating 5 will shine its surperficial light scatter to ccd image sensor 6; The light scattering of different wave length is to the diverse location of ccd image sensor 6; Ccd image sensor 6 changes light signal into electric signal, and electric signal is sent in the data processing equipment 7 through circuitry lines 10, and computer system will be according to the light reflection case of different wave length; Draw out the reflectance varies curve map, and show monitoring result through display 8.
Fig. 2 is the installation site synoptic diagram of this instrument and equipment, and Fig. 2 is that mounting object describes with the winding magnetic control sputtering coating machine, but installable coating machine is not limited thereto.The light intensity sensor probe 2 of visible this instrument of Fig. 2 is installed in the vacuum chamber, is connected with the data processing equipment of outside through optical fiber 1, and the installation site of this instrument is not limited to this.From also visible plated film drum 12 of Fig. 2 and target position 13.
Claims (2)
1. on-line monitoring Film Optics characteristic instrument and equipment that has reference signal; It is characterized in that: the running roller (9) that the both sides of transparent base (11) are installed and are placed with light intensity sensor (2), drive transparent base (11) transmission; One termination light intensity sensor (2) of optical fiber (1); Another termination reflection grating (5) of optical fiber (1); Offside in reflection grating (5) is ccd image sensor (6), and ccd image sensor (6) is connected the output termination display (8) of data processing equipment (7) through circuitry lines (10) with data processing equipment (7).
2. the on-line monitoring Film Optics characteristic instrument and equipment that has reference signal according to claim 1, it is characterized in that: there is spectroscope (3) said light intensity sensor (2) inside, and spectroscope (3) is connected with CD-ROM drive motor (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203327534U CN202196010U (en) | 2011-09-06 | 2011-09-06 | Instrument provided with reference signal and used for on-line multi-point monitoring optical characteristics of thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203327534U CN202196010U (en) | 2011-09-06 | 2011-09-06 | Instrument provided with reference signal and used for on-line multi-point monitoring optical characteristics of thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202196010U true CN202196010U (en) | 2012-04-18 |
Family
ID=45950913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203327534U Expired - Fee Related CN202196010U (en) | 2011-09-06 | 2011-09-06 | Instrument provided with reference signal and used for on-line multi-point monitoring optical characteristics of thin film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202196010U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102719800A (en) * | 2012-07-04 | 2012-10-10 | 南昌欧菲光科技有限公司 | Method for on-line monitoring metal oxide gases on winding coating machine |
| CN103409727A (en) * | 2013-08-13 | 2013-11-27 | 南昌欧菲光科技有限公司 | Device for improving flexible substrate material film layer quality online |
| CN104569712A (en) * | 2013-10-16 | 2015-04-29 | 财团法人工业技术研究院 | Photoelectric detection system |
| CN109316169A (en) * | 2018-11-03 | 2019-02-12 | 复旦大学 | A kind of health detector and its detection method based on mobile intelligent terminal |
-
2011
- 2011-09-06 CN CN2011203327534U patent/CN202196010U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102719800A (en) * | 2012-07-04 | 2012-10-10 | 南昌欧菲光科技有限公司 | Method for on-line monitoring metal oxide gases on winding coating machine |
| CN103409727A (en) * | 2013-08-13 | 2013-11-27 | 南昌欧菲光科技有限公司 | Device for improving flexible substrate material film layer quality online |
| CN104569712A (en) * | 2013-10-16 | 2015-04-29 | 财团法人工业技术研究院 | Photoelectric detection system |
| CN109316169A (en) * | 2018-11-03 | 2019-02-12 | 复旦大学 | A kind of health detector and its detection method based on mobile intelligent terminal |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202196010U (en) | Instrument provided with reference signal and used for on-line multi-point monitoring optical characteristics of thin film | |
| CN102538687B (en) | Method and device for measuring morphology of moving sample | |
| US9434553B2 (en) | Glass substrate conveyer | |
| EP2062033A1 (en) | Apparatus and methods for two-dimensional and three-dimensional inspection of a workpiece | |
| WO2006057125A1 (en) | Method and device for inspecting defect of transparent plate body | |
| CN103257465A (en) | Detecting device and method | |
| CN102621931A (en) | On-line monitoring system for friction stir welding and on-line monitoring method therefor | |
| CN102435618A (en) | Transparent tabular body defect inspection method and transparent tabular body defect inspection system | |
| TW201632870A (en) | System and method for inspecting optical film, apparatus and method for managing quality of optical film | |
| CN2898816Y (en) | Measuring system of optical parameter by spatial angle distribution | |
| WO2020263558A1 (en) | Video extensometer system with reflective back screen | |
| CN107271446B (en) | Visual detection method for rubber wire of timing gear chamber of engine | |
| CN2911757Y (en) | Intelligent optical membrane full automatic monitoring system | |
| CN102017114B (en) | Substrate quality tester | |
| CN201163393Y (en) | Touch detection apparatus using camera | |
| CN103076336A (en) | Object surface quality detector | |
| CN1170118C (en) | Method of real time detecting fiber aggregate planar product thickness and fiber orientation | |
| CN212058655U (en) | Reflection type online coating thickness gauge | |
| CN202403671U (en) | Full-automatic optical thickness measurer | |
| CN207658219U (en) | A kind of high-precision automatic code equipment | |
| CN206601098U (en) | Sapphire substrate geometric parameter detecting system | |
| CN111256604A (en) | Reflection type online coating thickness gauge | |
| CN202522805U (en) | Vision system for TFT-LCD (Thin Film Transistor-Liquid Crystal Display) detection | |
| CN207976171U (en) | A kind of coating machine releasing portion paper roll detection apparatus | |
| CN101915550A (en) | Continuous cylinder measuring device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120418 Termination date: 20150906 |
|
| EXPY | Termination of patent right or utility model |