CN201942781U - Three-valve crucible in single crystal furnace - Google Patents
Three-valve crucible in single crystal furnace Download PDFInfo
- Publication number
- CN201942781U CN201942781U CN2010205571942U CN201020557194U CN201942781U CN 201942781 U CN201942781 U CN 201942781U CN 2010205571942 U CN2010205571942 U CN 2010205571942U CN 201020557194 U CN201020557194 U CN 201020557194U CN 201942781 U CN201942781 U CN 201942781U
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- China
- Prior art keywords
- crucible
- lobe
- valve
- crucibles
- single crystal
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model relates to a three-valve crucible in a single crystal furnace, wherein upper edge ports at the two ends of each valve of the three-valve crucible are respectively provided with an inclined angle; and the two valves of the three-valve crucible are fixed by molybdenum wires. In the three-valve crucible, the problem that gaps among all the valves are overlarge caused by excessive use of the three-valve crucible can be solved, so that the service life of a quartz crucible and the stability of the crucible position are greatly improved.
Description
Affiliated technical field:
The utility model relates to a kind of heating installation that is used for straight pulling silicon single crystal furnace, particularly relates to three lobe crucibles in a kind of single crystal growing furnace.
Background technology:
The major part of silicon silicon single-crystal is with cutting krousky (Czochralski) manufactured.In this method, polysilicon is put into quartz crucible, heat fused then, will melt silicon and lower the temperature slightly, give certain condensate depression, the silicon single crystal of a particular crystal orientation (seed crystal) is contacted with melt silicon, and the speed that temperature by adjusting melt and seed crystal upwards promote is got rid of when growing up to aimed dia after the dislocation seed crystal necking down, improve pulling speed, make the permanent growth in thickness of single crystal.In the last stage of process of growth, the interior silicon melt not completely dissolve as yet of crucible this moment, by the heat supplied that increases the crystalline pulling speed and regulate crystal diameter is reduced to form a tail shape cone gradually to crucible, when whole enough hour of the point of cone, crystal will break away from melt, thereby finishes the crystalline process of growth.The diameter silicon monocrystalline roughly is divided into so several stages during fabrication: the dress polycrystal, find time, growth, equal diameter growth, afterbody crystal growth, the crystal of unmelted polycrystalline silicon, crystalline substance and shoulder cool off.Because in pyroprocess, loss can take place because oxidation etc. act on load bearing equipment three lobe crucibles, the gap between special crucible lobe and the crucible lobe will become greatly, cause the inconvenience in the production.
Summary of the invention;
Each makes a call to one 45 ° oblique angle to the utility model with top, the two ends mouth of the every lobe crucible of old three lobe crucibles, fixes two lobe crucibles with molybdenum filament.
Design of the present utility model can solve because the excessive problem in slit between crucible lobe that the used number of times of three lobe crucibles causes after too much and the crucible lobe.Too much the slit can be increasing between back crucible lobe and the crucible lobe for the used number of times of three lobe crucibles, because quartz crucible at high temperature can deliquescing, meeting changes according to the shape of plumbago crucible.If the slit between the three lobe crucibles is excessive, quartz crucible can expand, and influences the life-span of quartz crucible and the stability of crucible position.If the slit is a little bigger again, can cause three lobe crucibles and well heater friction, make slosh; More serious meeting causes sparking, the infringement well heater.
Each makes a call to one 45 ° oblique angle to the utility model with top, the two ends mouth of the every lobe crucible of old three lobe crucibles, fixes two lobe crucibles with molybdenum filament, fixing so in twos after, three lobe crucibles can and new the same fitting together perfectly.Shape behind the quartz crucible hot mastication can be more fixing like this, and is lower to the influence of melt crucible position, also can reduce the possibility with the well heater friction.
Utilization of the present utility model for the access times that prolong three lobe crucibles, is improved quartz crucible and is used back shape control and the control of melt crucible position, and the reason that reduces owing to three lobe crucibles causes having played effect effectively with the friction possibility of well heater.
Description of drawings:
Below in conjunction with drawings and Examples the utility model is further specified.
The main sectional view of accompanying drawing 1 the utility model structural representation;
Accompanying drawing 2, three lobe crucible vertical views;
Accompanying drawing 3, single-lobe crucible side-view.
1,2,3 is three lobe crucibles in the accompanying drawing, the 4th, and molybdenum filament, the 5th, quartz crucible, the 6th, melt, the 7th, well heater.
Embodiment:
This comprises that mainly each makes a call to one 45 ° oblique angle with two ends (1-1,1-2,2-1,2-2,3-1,3-2) the top mouth of the every lobe crucibles of old three lobe crucibles (1,2,3) for three lobe crucibles (1,2,3), molybdenum filament (4), quartz crucible (5), melt (6), well heater 7, fix two lobe crucibles with molybdenum (silk) 4, after fixing so in twos, meeting of three lobe crucibles and new the same fitting together perfectly.Shape behind quartz crucible (5) hot mastication can be more fixing like this, and melt (6) crucible position is stable, also reduces the possibility with well heater (7) friction.
Claims (2)
1. three lobe crucibles of a single crystal growing furnace, it is characterized in that the every lobe crucible of three lobe crucibles top, two ends mouth each make a call to one oblique angle.
2. require 1 described three lobe crucibles according to patent, it is characterized in that the angle at the mouth oblique angle, top, two ends of the every lobe crucible of three lobe crucibles is 45 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205571942U CN201942781U (en) | 2010-10-09 | 2010-10-09 | Three-valve crucible in single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205571942U CN201942781U (en) | 2010-10-09 | 2010-10-09 | Three-valve crucible in single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201942781U true CN201942781U (en) | 2011-08-24 |
Family
ID=44470129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205571942U Expired - Fee Related CN201942781U (en) | 2010-10-09 | 2010-10-09 | Three-valve crucible in single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201942781U (en) |
-
2010
- 2010-10-09 CN CN2010205571942U patent/CN201942781U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110824 Termination date: 20121009 |