CN201780274U

CN201780274U - Optical surface subsurface damage measurer

Info

Publication number: CN201780274U
Application number: CN2010205164560U
Authority: CN
Inventors: 田爱玲; 王春慧; 王红军; 刘丙才
Original assignee: Xian Technological University
Current assignee: Xian Technological University
Priority date: 2010-09-03
Filing date: 2010-09-03
Publication date: 2011-03-30
Anticipated expiration: 2020-09-03

Abstract

The utility model relates to an optical surface subsurface damage measurer. In the surface process of the traditional large-scale optical system or ultraprecise elements, the measurement of the optical surface subsurface damage on the surface of devices is destructive, and in addition, the limiting effect is great. The optical surface subsurface damage measurer comprises a laser light source, a collimating and beam expanding lens and a spectroscope, wherein an emitting end filter needle hole is arranged in the collimating and beam expanding lens, a receiving end collecting lens and a needle hole photodetector are arranged on a transmission side light path of the spectroscope, an X and Y two-dimensional electric control plane scanning vibration lens, a measuring microobjective and a Z-direction piezoelectricity micrometric displacement scanning platform are arranged on the reflecting side optical path of the spectroscope, the needle hole photodetector is connected with a control display module through a signal processing and transmission module and a surface reflecting light calculation processing module, and the Z-direction piezoelectricity micrometric displacement scanning platform is also connected with the control display module. The optical surface subsurface damage measurer can realize the non-destructive quality measurement, has larger vertical measuring range and strong adaptability, and is not limited by the processing process.

Description

A kind of optical surface subsurface stratum damage measurement device

Technical field

The utility model relates to nondestructive quantitative measurement technology field, specifically is a kind of optical surface subsurface stratum damage measurement device that belongs in the optical surface subsurface stratum damage check technical field.

Background technology

The development that deepens continuously of large-sized solid laser engineering, high-performance laser weapon, high-accuracy optical system and little manufacturing processing and other fields is for the development of optics cause in the world wide provides huge expulsive force.Certainly when running into hereat, the relevant practitioner of optical field also is faced with unprecedented huge challenge.Optical surface subsurface stratum damage (Subsurface Damage, SSD) measure and the processing of low damage optical element be present stage pendulum in an optical technology and the previous more thorny difficult problem of optics ultra precise measurement engineers face.Because will carry out deep comprehensively research to processing, the sign of large-scale optical system or ultraprecise element surface, not only include only the Measurement and analysis of surperficial face shape and roughness, also must measure accurately the degree of impairment of optical surface subsurface stratum.

The damage of optical surface subsurface stratum can be divided into two classes from big aspect, a kind of is to inherit the defective of coming from material, mainly comprises pore, foreign particle etc.; Another kind is the damage that optical element produces in grinding process, comprises crackle, unrelieved stress and the metal in the surperficial sedimentary deposit again of introducing, oxide particle etc. in process.

The detection method of traditional optical surface subsurface stratum damage is destructive, and for example: the constant chemical etching rate method of HF, angle polishing method, Ball Dimpling method etc. all are the measuring methods of some comparative maturities.But because these methods all can be brought damage to detected element, the result who measures also is subjected to the influence of measuring method oneself factor, and Measuring Time is long usually, therefore has significant limitation, is replaced by the measuring method of non-destruction row just gradually except that some special occasions.

In recent years, numerous experts and scholars both domestic and external nondestructive testing method of subsurface stratum damage that begins one's study.

For example, with Laser Experiments chamber, U.S. University of Rochester (The Laboratory for Laser Energetics, LLE) Dai Biao domestic and international how tame research institution wishes to study subsurface stratum damage and surfaceness (Surface Roughness by setting up rational mathematical model, SR) contact between, to predict the subsurface stratum damage by measuring the optics Part Surface Roughness, this method is called as sub-surface damage/surfaceness (SSD/SR) scale model prediction method.The method of prediction of this subsurface stratum damage just is suitable in the process of optical surface, and bigger limitation is arranged, if treat the optical surface of unknown technological parameter or the processing of non-traditional grinding process, this method is just no longer suitable.

The people such as Christian F. Kranenberg of the upright university in New Mexico propose total internal reflection (Applied Optics, 1994,33,4248 ~ 4253) method is applied to the measurement of optical surface subsurface stratum damage, this square law device complex structure, it is very big to realize that quantification is measured difficulty, and has used evanescent wave in its principle, also can't measure for the deep optical surface of damage.

People such as the Kevin R.Fine of U.S. Agilent Technologies have proposed to utilize existing commercialization laser confocal microscope to measure the subsurface stratum damage, have also provided some more favourable conclusions.But, in specific operation process, laser confocal microscope mainly is used to measure the microcosmic surface pattern, though measuring light can be deep into sample interior, but since be subjected to strong surface reflection influence (Wang Chunhui, Tian Ailing etc. utilize the MIE scattering theory to subsurface stratum scattering study, the about specific surface reflected light of intensity that draws optical surface subsurface stratum scattered signal will hang down 3 ~ 4 orders of magnitude, SPIE, 2009,7522,75226K1 ~ 75226K7), can't obtain the response signal on inferior surface usually.

Also have optical coherence tomography, photoacoustic microscope method, X-ray diffraction method etc. in addition, but these methods all have bigger limitation, for example inapplicable and noncrystal optical glass, penetration depth are too little, are not suitable for detection by quantitative etc.

Summary of the invention

The utility model provides a kind of optical surface subsurface stratum damage measurement device, to overcome that the limitation that prior art exists is big, measurement range is little and to be difficult to the deficiency of quantification.

For overcoming the deficiency that prior art exists, technical scheme provided by the utility model is:

A kind of optical surface subsurface stratum damage measurement device comprises: LASER Light Source, and the collimator and extender mirror and the splitting ratio that are successively placed on the LASER Light Source transmitting terminal are the spectroscope of 1:1, are provided with transmitting terminal filtering pin hole in the collimator and extender mirror; Spectroscopical transmissive side light path is provided with receiving end condenser and pin hole photodetector, and spectroscopical reflection side light path is provided with the automatically controlled flat scanning galvanometer of X, Y two dimension, measurement microcobjective and Z to piezoelectric micromotor displacement scanning platform; Described pin hole photodetector is connected with the control display module by signal primary treatment and transport module, surface reflection computing module, Z to piezoelectric micromotor displacement scanning platform also with control display module and be connected.

Compared with prior art, of the present utility model have a following good result:

(1) the utility model is applied to laser light scattering, copolymerization Jiao, micro-imaging and chromatographic technique to have realized non-destruction, quantitative measurment in the optical surface subsurface stratum damage measurement;

(2) the utility model has significantly bigger vertical measurement range mutually, is applicable to the optical surface subsurface stratum damage measurement of different level of processing;

(3) the utlity model has advantage of wide range of application, can be applied to the subsurface stratum damage measurement of all kinds of optical element surfaces, and be not subjected to the restriction of processing technology.

Description of drawings

Fig. 1 measurement mechanism synoptic diagram of the present utility model.

Description of reference numerals is as follows:

The 1-LASER Light Source, 2-collimator and extender mirror, 3-spectroscope, the automatically controlled flat scanning galvanometer of 4-X, Y two dimension, 5-measures microcobjective, and 6-Z is to piezoelectric micromotor displacement scanning platform, 7-surface reflection computing module, 8-signal primary treatment and transport module, 9-pin hole photodetector, 10-receiving end condenser, 11-transmitting terminal filtering pin hole, 12-controls display module, 13-measured object.

Embodiment

To be described in detail the utility model by specific embodiment below.

Referring to Fig. 1, a kind of optical surface subsurface stratum damage measurement device: comprise that LASER Light Source 1, collimator and extender mirror 2 and splitting ratio are the spectroscope 3 of 1:1, collimator and extender mirror 2 and spectroscope 3 are successively placed on LASER Light Source 1 transmitting terminal, are provided with transmitting terminal filtering pin hole 11 in the said collimator and extender mirror 2.The transmissive side light path of described spectroscope 3 is provided with receiving end condenser 10 and pin hole photodetector 9, and the reflection side light path of spectroscope 3 is provided with the automatically controlled flat scanning galvanometer 4 of X, Y two dimension, measurement microcobjective 5 and Z to piezoelectric micromotor displacement scanning platform 6.Described pin hole photodetector 9 is connected with control display module 12 by signal primary treatment and transport module 8, surface reflection computing module 7, Z to piezoelectric micromotor displacement scanning platform 6 also with control display module 12 and be connected.

Claims

1. optical surface subsurface stratum damage measurement device, it is characterized in that: comprise LASER Light Source (1), be successively placed on the collimator and extender mirror (2) of LASER Light Source (1) transmitting terminal and the spectroscope (3) that splitting ratio is 1:1, be provided with transmitting terminal filtering pin hole (11) in the collimator and extender mirror (2); The transmissive side light path of spectroscope (3) is provided with receiving end condenser (10) and pin hole photodetector (9), and the reflection side light path of spectroscope (3) is provided with X, Y two dimension automatically controlled flat scanning galvanometer (4), measurement microcobjective (5) and Z to piezoelectric micromotor displacement scanning platform (6); Described pin hole photodetector (9) is connected with control display module (12) by signal primary treatment and transport module (8), surface reflection computing module (7), Z to piezoelectric micromotor displacement scanning platform (6) also with control display module (12) and be connected.