CN101949839A - Device and method for measuring damage of optical surface subsurface layer - Google Patents
Device and method for measuring damage of optical surface subsurface layer Download PDFInfo
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Abstract
The invention relates to a device and a method for measuring damage of an optical surface subsurface layer. During processing the conventional large-sized optical system or ultra-precise element surface, the measurement of optical surface subsurface layer damage is destructive to the surface of a component, and the limitation is high. The device comprises a laser light source, an alignment beam expansion mirror and a spectroscope, wherein a transmitting end filter pinhole is formed in the alignment beam expansion mirror; the transmission side light path of the spectroscope is provided with a receiving end condenser lens and a pinhole photoelectric detector, and the reflection side light path of the spectroscope is provided with an X and Y two-dimensional electric plane scanning galvanometer, a measurement microscope objective and a Z-directional piezoelectric micro displacement scanning platform; and the pinhole photoelectric detector is connected with a control display module through a signal processing and transmission module and a surface reflected light calculating and processing module, and the Z-directional piezoelectric micro displacement scanning platform is also connected with the control display module. The device can realize nondestructive and quantitative measurement, has larger longitudinal measurement range and strong adaptability, and is not limited by a processing technique.
Description
Technical field
The present invention relates to nondestructive quantitative measurement technology field, specifically is a kind of optical surface subsurface stratum damage measurement device and the measuring method that belongs in the optical surface subsurface stratum damage check technical field.
Background technology
The development that deepens continuously of large-sized solid laser engineering, high-performance laser weapon, high-accuracy optical system and little manufacturing processing and other fields is for the development of optics cause in the world wide provides huge expulsive force.Certainly when running into hereat, the relevant practitioner of optical field also is faced with unprecedented huge challenge.Optical surface subsurface stratum damage (Subsurface Damage, SSD) measure and the processing of low damage optical element be present stage pendulum in an optical technology and the previous more thorny difficult problem of optics ultra precise measurement engineers face.Because will carry out deep comprehensively research to processing, the sign of large-scale optical system or ultraprecise element surface, not only include only the Measurement and analysis of surperficial face shape and roughness, also must measure accurately the degree of impairment of optical surface subsurface stratum.
The damage of optical surface subsurface stratum can be divided into two classes from big aspect, a kind of is to inherit the defective of coming from material, mainly comprises pore, foreign particle etc.; Another kind is the damage that optical element produces in grinding process, comprises crackle, unrelieved stress and the metal in the surperficial sedimentary deposit again of introducing, oxide particle etc. in process.Photo-thermal, optoacoustic and the laser field effect of a series of complexity such as the thermal effect that the damage of optical surface subsurface stratum is produced, self-focusing effect all can cause the reduction of this element laser damage threshold, and this has become one major technique obstacle of high power laser development; For the large-scale optical system that long-term work is used, eyeglass probably since own wt or mechanical clamping cause subsurface stratum crack growth, diffusion, finally make eyeglass fatigue breakdown, the long-time stability of reduction optical element, reduction of service life; The homogeneity of subsurface stratum damage change optical glass has caused glass refraction coefficient local anisotropy, influences the imaging and the coating quality of large-scale optical system; In addition, development along with technology such as precision, ultraprecise and nanofabrication technique, advanced control system, laser measuring technique, scanning probe microscopies, the research of ultraprecise finished surface constantly obtains new progress, its machining precision is just progressively brought up to nanoscale from sub-micron, obtain super-smooth surface by ultraprecise processing and become possibility, want the crudy of these new methods of comprehensive evaluation, also must consider subsurface stratum degree of injury separately.To sum up, optical surface subsurface stratum damage having become restriction energy sustainable development, the bottleneck that fields such as military weapon fighting capacity and high-accuracy design of Optical System application further develop.Studying a kind of feasible, practical, quantitative optical surface subsurface stratum damage detecting method, is the another great requirement that scientific technological advance proposes the optical detection field so far.
The detection method of traditional optical surface subsurface stratum damage is destructive, and for example: the constant chemical etching rate method of HF, angle polishing method, Ball Dimpling method etc. all are the measuring methods of some comparative maturities.But because these methods all can be brought damage to detected element, the result who measures also is subjected to the influence of measuring method oneself factor, and Measuring Time is long usually, therefore has significant limitation, is replaced by the measuring method of non-destruction row just gradually except that some special occasions.
In recent years, numerous experts and scholars both domestic and external nondestructive testing method of subsurface stratum damage that begins one's study.
For example, with Laser Experiments chamber, U.S. University of Rochester (The Laboratory for Laser Energetics, LLE) Dai Biao domestic and international how tame research institution wishes to study subsurface stratum damage and surfaceness (Surface Roughness by setting up rational mathematical model, SR) contact between, to predict the subsurface stratum damage by measuring the optics Part Surface Roughness, this method is called as sub-surface damage/surfaceness (SSD/SR) scale model prediction method.The method of prediction of this subsurface stratum damage just is suitable in the process of optical surface, and bigger limitation is arranged, if treat the optical surface of unknown technological parameter or the processing of non-traditional grinding process, this method is just no longer suitable.
The people such as Christian F. Kranenberg of the upright university in New Mexico propose total internal reflection (Applied Optics, 1994,33,4248 ~ 4253) method is applied to the measurement of optical surface subsurface stratum damage, this square law device complex structure, it is very big to realize that quantification is measured difficulty, and has used evanescent wave in its principle, also can't measure for the deep optical surface of damage.
People such as the Kevin R.Fine of U.S. Agilent Technologies have proposed to utilize existing commercialization laser confocal microscope to measure the subsurface stratum damage, have also provided some more favourable conclusions.But, in specific operation process, laser confocal microscope mainly is used to measure the microcosmic surface pattern, though measuring light can be deep into sample interior, but since be subjected to strong surface reflection influence (Wang Chunhui, Tian Ailing etc. utilize the MIE scattering theory to subsurface stratum scattering study, the about specific surface reflected light of intensity that draws optical surface subsurface stratum scattered signal will hang down 3 ~ 4 orders of magnitude, SPIE, 2009,7522,75226K1 ~ 75226K7), can't obtain the response signal on inferior surface usually.
Also have optical coherence tomography, photoacoustic microscope method, X-ray diffraction method etc. in addition, but these methods all have bigger limitation, for example inapplicable and noncrystal optical glass, penetration depth are too little, are not suitable for detection by quantitative etc.
Summary of the invention
The invention provides a kind of optical surface subsurface stratum damage measurement device and measuring method, to overcome that the limitation that prior art exists is big, measurement range is little and to be difficult to the deficiency of quantification.
For overcoming the deficiency that prior art exists, the invention provides a kind of optical surface subsurface stratum damage measurement device, comprise: LASER Light Source 1, be successively placed on the collimator and extender mirror 2 of LASER Light Source 1 transmitting terminal and the spectroscope 3 that splitting ratio is 1:1, be provided with transmitting terminal filtering pin hole 11 in the collimator and extender mirror 2; The transmissive side light path of spectroscope 3 is provided with receiving end condenser 10 and pin hole photodetector 9, and the reflection side light path of spectroscope 3 is provided with the automatically controlled flat scanning galvanometer 4 of X, Y two dimension, measurement microcobjective 5 and Z to piezoelectric micromotor displacement scanning platform 6; Described pin hole photodetector 9 is connected with control display module 12 by signal primary treatment and transport module 8, surface reflection computing module 7, Z to piezoelectric micromotor displacement scanning platform 6 also with control display module 12 and be connected.
A kind of measuring method of optical surface subsurface stratum damage measurement device is: utilize the scattering nature of subsurface stratum damage to incident light, suppress module by laser scanning co-focusing microscopic system and sample surfaces reflected signal, realize the non-destructive quantitative measurment of optical surface subsurface stratum damage.
A kind of measuring method of optical surface subsurface stratum damage measurement device comprises the following steps: successively
Step 1: sample is arranged at Z on piezoelectric micromotor displacement scanning platform 6, and measured surface upwards records the longitudinal scanning response signal graph of sample surfaces;
Step 2: according to how much imaging relations, with detecting pinhole 5 about confocal light path imaging in the sample surface, in conjunction with the refractive index and the actual detection end pinhole size of quartz glass, according to formula
Calculate the change curve that the ideal surfaced reflected signal changes with scanning position;
Formula
~
It is respectively formula
In the computing formula of different variablees, wherein
Be the general power of incident light,
Be the reflectivity of measured surface, for
The detecting pinhole diameter,
Be the conjugation height of detecting pinhole about confocal system,
Be the operating distance of measuring junction microcobjective,
Be the operating distance of end of probe microcobjective,
For scanning position is put distance apart from ideal focusing,
For can entering the surface reflection solid angle scope of photodetector,
Be the pairing solid angle of measuring junction microcobjective numerical aperture.
Step 3: the sample signal of surveying in the step 1 is unified with the ideal curve peak that calculates in the step 2, remove the above part signal in surface in the step 1 curve, correspondence position subtracts each other then, obtains the subsurface stratum signal of high s/n ratio;
Step 4: the scanning of sample is extended to 3D region, repeat aforesaid operations, obtain the sub-surface damage layer information in tested zone;
Step 5: utilize contouring method to reconstruct the distributed in three dimensions of sample subsurface stratum damage.
Compared with prior art, of the present invention have a following good result:
(1) the present invention is applied to laser light scattering, copolymerization Jiao, micro-imaging and chromatographic technique to have realized non-destruction, quantitative measurment in the optical surface subsurface stratum damage measurement.
(2) the present invention has significantly bigger vertical measurement range compared to the total internal reflection method, is applicable to the optical surface subsurface stratum damage measurement of different level of processing.
(3) the present invention has advantage of wide range of application compared to the prediction method, can be applied to the subsurface stratum damage measurement of all kinds of optical element surfaces, and is not subjected to the restriction of processing technology.
(4) the present invention utilizes imaging relations, calculate the change curve of sample surfaces reflected light with the longitudinal scanning position change, by eliminating this maximum interference signal of surface reflection in the subsurface stratum damage measurement, obtained the scattered signal of the tested part subsurface stratum of high s/n ratio, and on this basis reconstruct the subsurface stratum three-dimensional appearance.
Description of drawings
Fig. 1 measurement mechanism synoptic diagram of the present invention;
Vertical one-dimensional signal response curve that Fig. 2 utilizes Fig. 1 measurement device optical surface to obtain;
The not diagram of sample surface reflection variation simultaneously of Fig. 3 scanning position;
The curve that Fig. 4 ideal surfaced reflected light changes with scanning position;
The vertical one dimension response signal graph of the subsurface stratum that Fig. 5 obtains after treatment;
The Two dimensional Distribution circle of equal altitudes of the tested optical surface subsurface stratum damage of Fig. 6.
Description of reference numerals is as follows:
The 1-LASER Light Source, 2-collimator and extender mirror, 3-spectroscope, the automatically controlled flat scanning galvanometer of 4-X, Y two dimension, 5-measures microcobjective, and 6-Z is to piezoelectric micromotor displacement scanning platform, 7-surface reflection computing module, 8-signal primary treatment and transport module, 9-pin hole photodetector, 10-receiving end condenser, 11-transmitting terminal filtering pin hole, 12-controls display module, 13-measured object.
Embodiment
To be described in detail the present invention by specific embodiment below.
One, referring to Fig. 1, a kind of optical surface subsurface stratum damage measurement device: comprise that LASER Light Source 1, collimator and extender mirror 2 and splitting ratio are the spectroscope 3 of 1:1, collimator and extender mirror 2 and spectroscope 3 are successively placed on LASER Light Source 1 transmitting terminal, are provided with transmitting terminal filtering pin hole 11 in the said collimator and extender mirror 2.The transmissive side light path of described spectroscope 3 is provided with receiving end condenser 10 and pin hole photodetector 9, and the reflection side light path of spectroscope 3 is provided with the automatically controlled flat scanning galvanometer 4 of X, Y two dimension, measurement microcobjective 5 and Z to piezoelectric micromotor displacement scanning platform 6.Described pin hole photodetector 9 is connected with control display module 12 by signal primary treatment and transport module 8, surface reflection computing module 7, Z to piezoelectric micromotor displacement scanning platform 6 also with control display module 12 and be connected.
Two, basic thought of the present invention is to utilize the laser scanning co-focusing microtechnic to realize the non-destructive detection by quantitative of optical surface subsurface stratum damage.
The concrete measuring process of the measuring method that adopts (measuring object is the quartz glass surface) is as follows:
Step 1: quartz to be measured (measured object 13) glass tested surface upwards is positioned on the objective table (Z is to piezoelectric micromotor displacement scanning platform 6) of above-mentioned measurement mechanism, drive the longitudinal scanning position change by Z to piezoelectric micromotor displacement scanning platform 6, utilize the pin hole photodetector to record response signal graph on the sample different longitudinal position, referring to Fig. 2, and be transferred to analysis and processing module 7 after the process signal primary treatment 8, and store.
Step 2:, utilize imaging relations to correspond to the quartz glass surface confocal pinhole size of selecting for use in the actual measurement, and the silica glass material refractive index is input to computation analysis module 7, by formula referring to Fig. 3
The change curve that the quartz glass surface reflection that calculating detector is collected changes with scanning position referring to Fig. 4, and stores.
Formula
~
It is respectively formula
In the computing formula of different variablees, wherein
Be the general power of incident light,
Be the reflectivity of measured surface, for
The detecting pinhole diameter,
Be the conjugation height of detecting pinhole about confocal system,
Be the operating distance of measuring junction microcobjective,
Be the operating distance of end of probe microcobjective,
For scanning position is put distance apart from ideal focusing,
For can entering the surface reflection solid angle scope of photodetector,
Be the pairing solid angle of measuring junction microcobjective numerical aperture.
Step 3: in analysis and processing module 7, the maximal value of the response signal that obtains when utilizing the computational analysis circuit to determine each longitudinal scanning sample, confirm as the surface location of component of quartz glass, with the sample signal of surveying in the step 1, unified mutually with the maximal value that calculates signal in the step 2, remove surface above part signal, correspondence position signal subtraction then in the step 1 curve, obtain the subsurface stratum signal of high s/n ratio, referring to Fig. 5;
Step 4: repeating step one ~ step 3, the scanning of sample is extended to 3D region, obtain the sub-surface damage layer information in the tested zone of high s/n ratio;
Step 5: utilize contouring method to reconstruct the distributed in three dimensions of sample subsurface stratum damage, for ease of demonstration, Fig. 6 has provided the two-dimentional level line shape appearance figure in tested zone.
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is illustrated; but these explanations can not be understood that to have limited scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change on claim of the present invention basis all is protection scope of the present invention.
Claims (4)
1. optical surface subsurface stratum damage measurement device, it is characterized in that: comprise LASER Light Source (1), be successively placed on the collimator and extender mirror (2) of LASER Light Source (1) transmitting terminal and the spectroscope (3) that splitting ratio is 1:1, be provided with transmitting terminal filtering pin hole (11) in the collimator and extender mirror (2); The transmissive side light path of spectroscope (3) is provided with receiving end condenser (10) and pin hole photodetector (9), and the reflection side light path of spectroscope (3) is provided with X, Y two dimension automatically controlled flat scanning galvanometer (4), measurement microcobjective (5) and Z to piezoelectric micromotor displacement scanning platform (6); Described pin hole photodetector (9) is connected with control display module (12) by signal primary treatment and transport module (8), surface reflection computing module (7), Z to piezoelectric micromotor displacement scanning platform (6) also with control display module (12) and be connected.
2. the measuring method of a kind of optical surface subsurface stratum damage measurement device according to claim 1 is: utilize the scattering nature of subsurface stratum damage to incident light, suppress module by laser scanning co-focusing microscopic system and sample surfaces reflected signal, realize the non-destructive quantitative measurment of optical surface subsurface stratum damage.
3. the measuring method of a kind of optical surface subsurface stratum damage measurement device according to claim 2 is characterized in that: comprise the following steps successively;
Step 1: sample is arranged at Z on piezoelectric micromotor displacement scanning platform (6), and measured surface upwards records the longitudinal scanning response signal graph of sample surfaces;
Step 2: according to how much imaging relations, with detecting pinhole (5) about confocal light path imaging in the sample surface, in conjunction with the refractive index and the actual detection end pinhole size of quartz glass, according to formula
Calculate the change curve that the ideal surfaced reflected signal changes with scanning position;
Formula
~
It is respectively formula
In the computing formula of different variablees, wherein
Be the general power of incident light,
Be the reflectivity of measured surface, for
The detecting pinhole diameter,
Be the conjugation height of detecting pinhole about confocal system,
Be the operating distance of measuring junction microcobjective,
Be the operating distance of end of probe microcobjective,
For scanning position is put distance apart from ideal focusing,
For can entering the surface reflection solid angle scope of photodetector,
Be the pairing solid angle of measuring junction microcobjective numerical aperture.
4. step 3: the sample signal of surveying in the step 1 is unified with the ideal curve peak that calculates in the step 2, remove the above part signal in surface in the step 1 curve, correspondence position subtracts each other then, obtains the subsurface stratum signal of high s/n ratio;
Step 4: the scanning of sample is extended to 3D region, repeat aforesaid operations, obtain the sub-surface damage layer information in tested zone;
Step 5: utilize contouring method to reconstruct the distributed in three dimensions of sample subsurface stratum damage.
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