CN201684759U - Secondary dust collection device of crystal pulling furnace primary dust storage box - Google Patents

Abstract

A secondary dust collection device of a crystal pulling furnace primary dust storage box comprises a dust collection nozzle, dust collection branched pipes, a branched valve, a main pipeline, a secondary dust storage box, an aspiration pipe, a draft fan and an air exhaust pipe. The dust collection branched pipes are communicated with the main pipeline through the branched valve, each dust collection branched pipe corresponds to one crystal pulling furnace, the secondary dust storage box comprises a secondary dust storage barrel and a high-temperature resistant filter net barrel and an end cover, the main pipeline is communicated with a barrel body inner cavity, the high-temperature resistant filter net barrel is placed into the barrel body inner cavity, the aspiration pipe penetrates through the end cover to be communicated with a filter net barrel inner cavity of the high-temperature resistant filter net barrel, and the draft fan is arranged between the aspiration pipe and the air exhaust pipe. The secondary dust collection device replaces existing dust collectors, can shorten cooling time of the crystal pulling furnace, increases yield of the crystal pulling furnace, can collect dust for all crystal pulling furnaces in a crystal pulling plant, is convenient, rapid, reliable and safe in dust collection, and has low maintenance cost.

Description

The secondary dust exhaust apparatus of primary dust storage tank of crystal pulling furnace

[technical field]

The utility model relates to manufacture of solar cells equipment, relates in particular to the cleaner of crystal pulling furnace.

[background technology]

Along with constantly applying of solar cell, the demand of silicon rod is increasing.At present, silicon rod adopts crystal pulling furnace to draw usually, is commonly called as vertical pulling method.Vertical pulling method is meant in the vacuum chamber of crystal pulling furnace and is provided with silica crucible; in treated high purity polycrystalline silicon material or substandard products silicon (monocrystalline silicon and polysilicon the are expected end to end) silica crucible of packing into; and in crystal pulling furnace, charge into protective gas; be heated to 1500 ℃ and make the fusing of silicon material; then the sub-crystalline substance in the brilliant chuck of son is fallen with the molten silicon of polycrystalline and fully contacted; son is brilliant strict directed, and rotates and upgrades with certain speed, induces down at nucleus slowly to be lifted out from melt.In the crystal pulling process, melted silicon can produce the volatility flue gas, mainly comprises Si oxide (SiO, a spot of SiO ₂, be yellow flue dust shape) and the impurity volatile matter.These gas grit must in time be drawn in the primary dust storage tank of crystal pulling furnace by vavuum pump, otherwise dust particle will float around the crystal growth interface in the gas, thereby directly influence the quality of silicon rod.Therefore must charge into argon gas in producing in crystal pulling furnace, argon gas passes the crystal growth zone from top to bottom, takes away gas trifle in the world matter.When the flow of argon gas is less than normal, can see obviously that the melted silicon top has flue dust to seethe, be commonly called as " smoldering ", at this moment, the SiO particle may be adsorbed on the crystal growth interface, causes the atom crystal orientation of the monocrystalline of growing that dislocation takes place, and makes the crystal growth failure, be commonly called as " disconnected bud ", reduced crystal forming rate.

Owing to the increase along with battery size of the unit cost of battery reduces, the silicon rod of therefore producing big specification is an inexorable trend, and the silicon material amount that so once drops in crystal pulling furnace is just bigger, must the bigger silica crucible of use.The gas trifle in the world matter that produces in the pull-rod process will inevitably be more, also just increased the probability of silicon rod generation dislocation.So the major diameter crystal bar needs more promptly to get rid of gas trifle in the world matter.At present, annexation between crystal pulling furnace, primary dust storage tank and the vavuum pump as shown in Figure 1, described primary dust storage tank 12 is vertical cylindrical body, comprise cylindrical shell and cover, in cylindrical shell, be provided with stainless steel filtering net B2, it deposits dirt chamber B1 and vacuum chamber B3 with being separated in the cylindrical shell, and the waste gas in the crystal pulling furnace 10 communicates with the dirt chamber B1 that deposits in the primary dust storage tank 12 by tube connector 11, and vavuum pump 13 interlinks with vacuum chamber B3 by tube connector 11.In the crystal pulling process, the dust in the crystal pulling furnace 10 can be inhaled in the primary dust storage tank 12, and crystal pulling finishes through supercooling, absorbs dust in the primary dust storage tank 12 with moving vacuum cleaner again.According to existing crystal pulling technique, need after crystal pulling furnace 10 crystal pullings finish to cool off and to absorb the dust in the primary dust storage tank 12 in 5 hours, even so, temperature in the primary dust storage tank 12 of crystal pulling furnace 10 is also very high, generally at 120 ℃～150 ℃, because the storage dirt bag in the dust catcher is papery or nonwoven material, so the dust waste gas of temperature is sucked in the storage dirt bag of dust catcher by force, often it is scorched, the high-temp waste gas that contains dust can directly be penetrated in the rotary main shaft bearing of dust catcher drive motors, cause bearing stuck, therefore the service life of dust catcher very short, generally can only use 3 months, every crystal pulling furnace needs to join 4 dust catchers 10 every year at least, calculate with 2000 yuan/platform, only dust catcher consumption is just up to 8000 yuan for every crystal pulling furnace 10, and not only production cost is big, and the production of crystal pulling furnace 10 is oversize blanking time, the production efficiency of crystal pulling furnace is not fully exerted, each blow-on, it is also very big to close the energy that stove consumed.Up to the present, manufacture of solar cells enterprise does not also have desirable solution.

[utility model content]

The purpose of this utility model provides a kind of secondary dust exhaust apparatus of primary dust storage tank of crystal pulling furnace.

Replace existing dust catcher with this dust exhaust apparatus, not only can shorten the furnace outage time of crystal pulling furnace, improve the production capacity of crystal pulling furnace, and can absorb, not only fast but also safety the high temperature dust in the primary dust storage tank of all crystal pulling furnaces of crystal pulling workshop.

The technical scheme that the utility model adopted is:

The secondary dust exhaust apparatus of described primary dust storage tank of crystal pulling furnace, it is characterized in that: comprise dust absorption nozzle, dust suction arm, branch road valve, trunk line, secondary dust storage tank, aspiration channel, induced-draught fan and exhaust duct, on trunk line, be connected to many dust suction arms, each bar dust suction arm is corresponding to a crystal pulling furnace, and each bar dust suction arm all interlinks by branch road valve and trunk line; Described secondary dust storage tank comprises secondary tip fastening box, high temperature resistant screen tube and end cap, the cylinder lumen of trunk line and secondary tip fastening box interlinks, high temperature resistant screen tube is placed in the cylinder lumen of secondary tip fastening box, the screen tube inner chamber that aspiration channel passes end cap and high temperature resistant screen tube interlinks, and induced-draught fan is arranged between aspiration channel and the exhaust duct.

Further, described dust suction arm is a stainless steel flexible hose.

Further, described high temperature resistant screen tube is surrounded by the Stainless Steel net and forms, and its order number is 30～60 orders.

Owing on trunk line, be connected to several dust suction arms, every dust suction arm is by the bypass valve gate control, each root dust suction arm is corresponding to a crystal pulling furnace, cooling is 2～3 hours after the crystal pulling furnace crystal pulling finishes, open induced-draught fan, as long as branch road valve open with correspondence, with dust absorption nozzle aim in the primary dust storage tank deposit the dirt chamber and stainless steel filtering net is absorbed, just can soon the dust in the primary dust storage tank of crystal pulling furnace be absorbed, in the absorption process, though the temperature of dust is also higher in the primary dust storage tank, generally in 200 ℃, but because dust suction arm, the branch road valve, trunk line, the secondary dust storage tank, aspiration channel, induced-draught fan and exhaust duct all are exotic material, it can not only in time be absorbed the dust in the primary dust storage tank, shorten the cool time of crystal pulling furnace, and working stability is reliable in the absorption process, the situation that does not exist filter core to be scorched.The secondary dust storage tank is arranged on outside the crystal pulling workshop, has not only reduced the pollution of dust suction to the crystal pulling workshop, satisfy the purification requirement in crystal pulling workshop, and prolonged the cooling route of high temperature dust waste gas, dust is near environment temperature in the feasible suction secondary dust storage tank.

Replace existing dust catcher with the utility model, not only shorten the cool time of crystal pulling furnace, improved the production capacity of crystal pulling furnace, and reduced in the dust suction process dust to the pollution in crystal pulling workshop, one covering device can carry out dust suction to all crystal pulling furnaces in crystal pulling workshop, dust suction is convenient, fast, reliable, safety, and maintenance cost is low.Through measuring and calculating, the expense that the crystal pulling workshop is equipped with 1 year replacing dust catcher of an input ratio prior art of the present utility model is also low, and economic benefit is very remarkable.

[description of drawings]

Fig. 1 is crystal pulling furnace, primary dust storage tank, the triangular connection diagram of vavuum pump;

Among the figure: the 10-crystal pulling furnace; The 11-tube connector; The 12-primary dust storage tank; The 13-vavuum pump; B 1-deposits the dirt chamber; The B2-stainless steel filtering net; The B3-vacuum chamber.

Fig. 2 is the utility model work schematic diagram;

Among the figure: the 1-dust absorption nozzle; 2-dust suction arm; 3-branch road valve; The 4-trunk line; 5-secondary dust storage tank; The 6-aspiration channel; The 7-induced-draught fan; The 8-exhaust duct; The 9-sewer; 51-secondary tip fastening box; The high temperature resistant screen tube of 52-; The 53-end cap; The 54-cylinder lumen; 55-screen tube inner chamber.

[specific embodiment]

Below in conjunction with description of drawings specific embodiments of the present utility model:

The secondary dust exhaust apparatus of primary dust storage tank of crystal pulling furnace described in the utility model, as shown in Figure 2, it comprises dust absorption nozzle 1, dust suction arm 2, branch road valve 3, trunk line 4, secondary dust storage tank 5, aspiration channel 6, induced-draught fan 7 and exhaust duct 8, each bar dust suction arm 2 is corresponding to a crystal pulling furnace, and dust suction arm 2 interlinks by branch road valve 3 and trunk line 4, and described dust suction arm 2 is resistant to elevated temperatures metal hoses; Described secondary dust storage tank 5 is arranged on outside the crystal pulling workshop, it is made up of secondary tip fastening box 51, high temperature resistant screen tube 52 and end cap 53, high temperature resistant screen tube 52 is placed in the secondary tip fastening box 51, and fit with the end face of end cap 53, described high temperature resistant screen tube 52 is that 40 purpose Stainless Steel nets surround and form by the order number; Trunk line 4 interlinks with the cylinder lumen 54 of secondary tip fastening box 51, the screen tube inner chamber 55 that aspiration channel 6 passes end cap 53 and high temperature resistant screen tube 52 interlinks, the inlet scoop of induced-draught fan 7 is connected with aspiration channel 6, and the exhaust outlet of induced-draught fan 7 is connected with exhaust duct 8, and exhaust duct 8 feeds in the sewer 9.

Claims (3)

1. the secondary dust exhaust apparatus of a primary dust storage tank of crystal pulling furnace, it is characterized in that: comprise dust absorption nozzle (1), dust suction arm (2), branch road valve (3), trunk line (4), secondary dust storage tank (5), aspiration channel (6), induced-draught fan (7) and exhaust duct (8), on trunk line (4), be connected to many dust suction arms (2), each bar dust suction arm (2) is corresponding to a crystal pulling furnace, and each bar dust suction arm (2) all passes through branch road valve (3) and interlinks with trunk line (4); Described secondary dust storage tank (5) comprises secondary tip fastening box (51), high temperature resistant screen tube (52) and end cap (53), trunk line (4) interlinks with the cylinder lumen (54) of secondary tip fastening box (51), high temperature resistant screen tube (52) is placed in the cylinder lumen (54) of secondary tip fastening box (51), the screen tube inner chamber (55) that aspiration channel (6) passes end cap (53) and high temperature resistant screen tube (52) interlinks, and induced-draught fan (7) is arranged between aspiration channel (6) and the exhaust duct (8).

2. according to the secondary dust exhaust apparatus of the described primary dust storage tank of crystal pulling furnace of claim 1, it is characterized in that: described dust suction arm (2) is a stainless steel flexible hose.

3. according to the secondary dust exhaust apparatus of the described primary dust storage tank of crystal pulling furnace of claim 1, it is characterized in that: described high temperature resistant screen tube (52) is surrounded by the Stainless Steel net and forms, and its order number is 30～60 orders.

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