CN201684506U - Primary dust collection and storage box of crystal pulling furnace - Google Patents
Primary dust collection and storage box of crystal pulling furnace Download PDFInfo
- Publication number
- CN201684506U CN201684506U CN2010202081960U CN201020208196U CN201684506U CN 201684506 U CN201684506 U CN 201684506U CN 2010202081960 U CN2010202081960 U CN 2010202081960U CN 201020208196 U CN201020208196 U CN 201020208196U CN 201684506 U CN201684506 U CN 201684506U
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- crystal pulling
- pulling furnace
- screen pack
- chamber
- cylindrical shell
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Abstract
A primary dust collection and storage box of crystal pulling furnace comprises a barrel body and a barrel cover. The barrel cover is airtightly equipped to an upper opening of the barrel body. The barrel cover is provided with a vacuum pipe joint. The inner chamber of the barrel body is communicated with a dust suction pipe. The barrel body is internally provided with a first filtering screen plate and a second filtering screen plate. The two layers of filtering screen plates divide the inner part of the barrel body into a dust collection chamber, a fine dust chamber and a vacuum chamber. After the exhaust gas is sucked from the crystal pulling furnace into the inner chamber of the barrel body, the dust particles in the exhaust gas successively pass through the first filtering screen plate, the second filtering screen plate and the third filtering screen plate for being filtered. The damage of the dust in the exhaust gas to the vacuum pump is greatly reduced. The service life of the vacuum pump is prolonged. The defects in the prior art is effectively reduced.
Description
[technical field]
The utility model relates to manufacture of solar cells equipment, relates in particular to the cleaner of crystal pulling furnace.
[background technology]
Along with constantly applying of solar cell, the demand of silicon rod is increasing.At present, silicon rod adopts crystal pulling furnace to draw usually, is commonly called as vertical pulling method.Vertical pulling method is that crystal pulling furnace is provided with silica crucible in the chamber of vacuum; in treated high purity polycrystalline silicon material or substandard products silicon (monocrystalline silicon and polysilicon the are expected end to end) silica crucible of packing into; and in crystal pulling furnace, charge into protective gas; be heated to 1500 ℃ and make the fusing of silicon material; then the sub-crystalline substance in the brilliant chuck of son is fallen with the molten silicon of polycrystalline and fully contacted; son is brilliant strict directed, and rotates and upgrades with certain speed, induces down at nucleus slowly to be lifted out from melt.In the crystal pulling process, melted silicon can produce the volatility flue gas, mainly comprises Si oxide (SiO, a spot of SiO
2, be yellow flue dust shape) and the impurity volatile matter.These gas grit must in time be drawn in the primary dust storage tank of crystal pulling furnace by vavuum pump, otherwise dust particle will float around the crystal growth interface in the gas, thereby directly influence the quality of silicon rod.Therefore must charge into argon gas in producing in crystal pulling furnace, argon gas passes the crystal growth zone from top to bottom, takes away gas trifle in the world matter.When the flow of argon gas is less than normal, can see obviously that the melted silicon top has flue dust to seethe, be commonly called as " smoldering ", at this moment, the SiO particle may be adsorbed on the crystal growth interface, causes the atom crystal orientation of the monocrystalline of growing that dislocation takes place, and makes the crystal growth failure, be commonly called as " disconnected bud ", reduced crystal forming rate.
Owing to the increase along with battery size of the unit cost of battery reduces, the silicon rod of therefore producing big specification is an inexorable trend, and the silicon material amount that so once drops in crystal pulling furnace is just bigger, must the bigger silica crucible of use.The gas trifle in the world matter that produces in the pull-rod process will inevitably be more, also just increased the probability of silicon rod generation dislocation.So the major diameter crystal bar needs more promptly to get rid of gas trifle in the world matter.
At present, the structure of the primary dust suction and storage tank that crystal pulling furnace was equipped with as shown in Figure 1, it is vertical cylindrical body, comprises cylindrical shell 1, cover 2 and stainless steel filtering net core 3, stainless steel filtering net core 3 is installed in the cylindrical shell 1, and stainless steel filtering net core 3 is deposited dirt chamber 4 and vacuum chamber 5 with being separated in the cylindrical shell 1.Between crystal pulling furnace and primary dust suction and storage tank and the vavuum pump three annexation as shown in Figure 2, the waste gas in the crystal pulling furnace 31 communicates with the dirt chamber 4 of depositing in the primary dust suction and storage tank by sweep-up pipe 32, vavuum pump 33 interlinks by vacuum tube 34 and vacuum chamber 5.In the crystal pulling process; the waste gas that contains dust in the crystal pulling furnace 31 at first is inhaled into by sweep-up pipe 32 to be deposited in the dirt chamber 4; then under the swabbing action of vavuum pump 33; filter through stainless steel filtering net core 3; oarse-grained dust then is blocked in outside the vacuum chamber 5; and short grained dust still can enter in the vacuum chamber 5; owing to enter the interior EGT of primary dust suction and storage tank than higher; generally at 120 ℃～150 ℃; vavuum pump 33 long-term suctions contain the waste gas of fine particle dust; high temperature dust in the waste gas can directly be penetrated in the vavuum pump rotary main shaft bearing, causes bearing stuck, so is difficult to the service life of vavuum pump guarantee; maintenance frequency at the actual production intermediate pump is more; expense is higher, will directly influence the quality of silicon rod in case break down, and causes silicon rod to be scrapped when serious; forcing crystal pulling furnace to stop production keeps in repair; the production efficiency of crystal pulling furnace is not fully exerted, and up to the present, manufacture of solar cells enterprise does not also have desirable solution.
[utility model content]
The purpose of this utility model provides a kind of primary dust suction and storage tank of crystal pulling furnace.
It can not only carry out multiple times of filtration to the waste gas that enters in the primary dust suction and storage tank, improves the service life of vavuum pump, and is more convenient for dust is wherein absorbed.
The technical scheme that the utility model adopted is:
Described primary dust suction and storage tank of crystal pulling furnace, comprise cylindrical shell and cover, cover is arranged on the suitable for reading of cylindrical shell hermetically, on cover, offer the vacuum tube interface, the inner chamber and the sweep-up pipe of cylindrical shell interlink, it is characterized in that: be provided with first screen pack and second screen pack in cylindrical shell, two floor screen pack are deposited dirt chamber, thin dirt chamber and vacuum chamber with being separated in the cylindrical shell.
Further, first screen pack and second screen pack are the stainless steel web plate.
Further, the order number of first screen pack is 30～60 orders, and the order number of second screen pack is 50～100 orders.
Further, the vacuum tube interface on cover is provided with the 3rd filter net sheet.
Owing in cylindrical shell, set up two layers of screen pack, on cover, set up the 3rd filter net sheet, after suction waste gas enters cylinder lumen from crystal pulling furnace, successively through the filtration of first screen pack, second screen pack and the 3rd filter net sheet, dust granule is through three metafiltration net filtrations in the waste gas, reduced significantly that dust has improved the service life of vavuum pump to the infringement of vavuum pump in the waste gas, solved the deficiencies in the prior art effectively.
[description of drawings]
Fig. 1 is the structural representation of existing primary dust suction and storage tank;
Fig. 2 is crystal pulling furnace, existing primary dust suction and storage tank, the triangular connection diagram of vavuum pump;
Among the figure, the 1-cylindrical shell; The 2-cover; 3-stainless steel filtering net core; 4-deposits the dirt chamber; The 5-vacuum chamber; The 31-crystal pulling furnace; The 32-sweep-up pipe; The 33-vavuum pump; The 34-vacuum tube.
Fig. 3, Fig. 4 are the utility model structural representation;
Fig. 4 is the A-A cutaway view among Fig. 3;
Among the figure: the 1-cylindrical shell; The 2-cover; 4-deposits the dirt chamber; The 5-vacuum chamber; 6-first screen pack; 7-second screen pack; The thin dirt of 8-chamber; 21-vacuum tube interface; 22-the 3rd filter net sheet.
[specific embodiment]
Below in conjunction with description of drawings specific embodiments of the present utility model:
Primary dust suction and storage tank of crystal pulling furnace described in the utility model, as Fig. 3, shown in Figure 4, it comprises cylindrical shell 1 and cover 2, cover 2 is arranged on the suitable for reading of cylindrical shell 1 hermetically, on cover 2, offer vacuum tube interface 21, the inner chamber of cylindrical shell 1 and sweep-up pipe 32 interlink, it is characterized in that: in cylindrical shell 1, be provided with first screen pack 6 and second screen pack 7, first screen pack 6 and second screen pack 7 are the stainless steel web plate, the order number of first screen pack is 30～60 orders, the order number of second screen pack is 50～100 orders, two floor stainless steel filtering net plates are deposited dirt chamber 4 with being separated in the cylindrical shell 1, thin dirt chamber 8 and vacuum chamber 5, vacuum tube interface 21 places on cover 2 are provided with the 3rd filter net sheet 22.
Claims (4)
1. primary dust suction and storage tank of crystal pulling furnace, it is characterized in that: comprise cylindrical shell (1) and cover (2), cover (2) is arranged on the suitable for reading of cylindrical shell (1) hermetically, on cover (2), offer vacuum tube interface (21), the inner chamber of cylindrical shell (1) and sweep-up pipe (32) interlink, it is characterized in that: be provided with first screen pack (6) and second screen pack (7) in cylindrical shell (1), two floor screen pack are deposited dirt chamber (4), thin dirt chamber (8) and vacuum chamber (5) with being separated in the cylindrical shell (1).
2. according to the described primary dust suction and storage tank of crystal pulling furnace of claim 1, it is characterized in that: first screen pack (6) and second screen pack (7) are the stainless steel web plate.
3. according to the described primary dust suction and storage tank of crystal pulling furnace of claim 1, it is characterized in that: the order number of first screen pack (6) is 30～60 orders, and the order number of second screen pack (7) is 50～100 orders.
4. according to the described primary dust suction and storage tank of crystal pulling furnace of claim 1, it is characterized in that: the vacuum tube interface (21) on cover (2) locates to be provided with the 3rd filter net sheet (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202081960U CN201684506U (en) | 2010-05-31 | 2010-05-31 | Primary dust collection and storage box of crystal pulling furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202081960U CN201684506U (en) | 2010-05-31 | 2010-05-31 | Primary dust collection and storage box of crystal pulling furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201684506U true CN201684506U (en) | 2010-12-29 |
Family
ID=43372799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202081960U Expired - Fee Related CN201684506U (en) | 2010-05-31 | 2010-05-31 | Primary dust collection and storage box of crystal pulling furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201684506U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831690A (en) * | 2010-05-31 | 2010-09-15 | 常州亿晶光电科技有限公司 | Primary dust suction and storage tank of crystal pulling furnace |
-
2010
- 2010-05-31 CN CN2010202081960U patent/CN201684506U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831690A (en) * | 2010-05-31 | 2010-09-15 | 常州亿晶光电科技有限公司 | Primary dust suction and storage tank of crystal pulling furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101229 Termination date: 20150531 |
|
| EXPY | Termination of patent right or utility model |