CN201621995U - 高频电感耦合等离子枪的冷却装置 - Google Patents
高频电感耦合等离子枪的冷却装置 Download PDFInfo
- Publication number
- CN201621995U CN201621995U CN2009200683417U CN200920068341U CN201621995U CN 201621995 U CN201621995 U CN 201621995U CN 2009200683417 U CN2009200683417 U CN 2009200683417U CN 200920068341 U CN200920068341 U CN 200920068341U CN 201621995 U CN201621995 U CN 201621995U
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- CN
- China
- Prior art keywords
- plasma gun
- cooling device
- cooling
- naphthenic acid
- frequency inductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000001816 cooling Methods 0.000 title claims abstract description 17
- 230000008878 coupling Effects 0.000 title claims abstract description 15
- 238000010168 coupling process Methods 0.000 title claims abstract description 15
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 15
- 230000001939 inductive effect Effects 0.000 title abstract 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052802 copper Inorganic materials 0.000 claims abstract description 13
- 239000010949 copper Substances 0.000 claims abstract description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 7
- 239000000919 ceramic Substances 0.000 claims abstract description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000011214 refractory ceramic Substances 0.000 claims description 4
- 239000003921 oil Substances 0.000 abstract description 19
- 239000012212 insulator Substances 0.000 abstract description 13
- 239000000498 cooling water Substances 0.000 abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- HNNQYHFROJDYHQ-UHFFFAOYSA-N 3-(4-ethylcyclohexyl)propanoic acid 3-(3-ethylcyclopentyl)propanoic acid Chemical compound CCC1CCC(CCC(O)=O)C1.CCC1CCC(CCC(O)=O)CC1 HNNQYHFROJDYHQ-UHFFFAOYSA-N 0.000 abstract 4
- 230000000694 effects Effects 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 239000002253 acid Substances 0.000 description 15
- 150000007513 acids Chemical class 0.000 description 15
- 229910052571 earthenware Inorganic materials 0.000 description 6
- 238000010891 electric arc Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
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- Particle Accelerators (AREA)
- Plasma Technology (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009200683417U CN201621995U (zh) | 2009-03-03 | 2009-03-03 | 高频电感耦合等离子枪的冷却装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009200683417U CN201621995U (zh) | 2009-03-03 | 2009-03-03 | 高频电感耦合等离子枪的冷却装置 |
Publications (1)
Publication Number | Publication Date |
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CN201621995U true CN201621995U (zh) | 2010-11-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2009200683417U Expired - Fee Related CN201621995U (zh) | 2009-03-03 | 2009-03-03 | 高频电感耦合等离子枪的冷却装置 |
Country Status (1)
Country | Link |
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CN (1) | CN201621995U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106817834A (zh) * | 2017-02-24 | 2017-06-09 | 中国航天空气动力技术研究院 | 一种高频感应等离子发生器双水冷电感线圈 |
-
2009
- 2009-03-03 CN CN2009200683417U patent/CN201621995U/zh not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106817834A (zh) * | 2017-02-24 | 2017-06-09 | 中国航天空气动力技术研究院 | 一种高频感应等离子发生器双水冷电感线圈 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: LIU HAIBO Effective date: 20111220 Owner name: SUZHOU SUNCOM NANOTECHNOLOGY CO., LTD. Free format text: FORMER OWNER: JIAN LINJUN Effective date: 20111220 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 200072 ZHABEI, SHANGHAI TO: 215300 SUZHOU, JIANGSU PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20111220 Address after: Suzhou City, Jiangsu province 215300 Development Zone of Kunshan City Road East Industrial Park and Chapter 1 Building 2 layer Patentee after: SUZHOU XUNKANG NANOMETER TECHNOLOGY CO., LTD. Address before: 200072 room 700, No. 402, Yanchang Road, Shanghai, Zhabei District Co-patentee before: Liu Haibo Patentee before: Jian Linjun |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101103 Termination date: 20150303 |
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EXPY | Termination of patent right or utility model |