CN201590407U - Fixing device - Google Patents
Fixing device Download PDFInfo
- Publication number
- CN201590407U CN201590407U CN2009203510617U CN200920351061U CN201590407U CN 201590407 U CN201590407 U CN 201590407U CN 2009203510617 U CN2009203510617 U CN 2009203510617U CN 200920351061 U CN200920351061 U CN 200920351061U CN 201590407 U CN201590407 U CN 201590407U
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- CN
- China
- Prior art keywords
- chamber door
- connecting rod
- boss
- installing hole
- fixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a fixing device which is applicable to fixing a cavity door on the wall of a cavity body and releasing the fixation, and comprises a handle, a blocking part and a spring, wherein the handle protrudes and extends outwards to form a boss, the boss protrudes and extends outwards to form a connecting rod, threads are formed at the tail end of the connecting rod, a thread part is further formed, a first annular slot encircling the connecting rod is formed on the boss, the spring penetrates the connecting rod, one end of the spring is mounted in the first annular slot, the other end of the spring protrudes and extends out of the first annular slot, a mounting hole is formed on the cavity door by penetration, a threaded hole with internal threads is formed on the wall of the cavity body in the position opposite to the mounting hole, the connecting rod penetrates into the mounting hole, the thread part extends out of the mounting hole, the blocking part is clamped on the connecting rod and positioned between the thread part and the boss, the blocking part is in separate clash with the inner surface of the cavity door, and the boss is in the separate clash with the outer surface of the cavity door. The fixing device can share the oppression quantity of a seal ring on the cavity door and not fall off when the cavity door is opened.
Description
Technical field
The utility model relates to a kind of fixture of plate base part, relates in particular to a kind of being applicable to and is fixed in the chamber door on the cavity wall and can removes fixing fixture.
Background technology
In the manufacturing process of semiconductor device or flat-panel display device, in order to guarantee higher cleannes, usually need in vacuum equipment, finish various technologies, therefore be used for producing the semiconductor devices or the equipment of flat-panel display device, generally be designed to be transported to substrate in the vacuum equipment and utilize plasma that substrate is carried out required technology, with OLED (Organic Light-Emitting Diode, Organic Light Emitting Diode) vacuum evaporation is example, the board transport that processes is indoor to the vacuum technology of sealing, under vacuum condition, the solid material heating evaporation that vacuum technology is indoor, atom that is evaporated or molecule freely are adsorbed on and form film on the substrate gradually, and then form each material layer of OLED.
Existing vacuum processing apparatus generally includes three kinds of vacuum chambers, be load cell, transfer chamber and process chamber, load cell is used for receiving the substrate that will process at equipment so that mounting substrate from outside platform, or the substrate that is used for machining in the output equipment is so that unload carried base board; Transfer chamber is used for transmitting substrate between each chamber; Process chamber is used for utilizing under vacuum environment plasma or heat energy that substrate is carried out required technology, as vacuum evaporation or etch process etc.Because process chamber utilizes various processing gas or plasma gas to come a large amount of technologies of repetition, therefore, the equipment in the process chamber is easy to impaired or contaminated, thereby needs periodic replacement or maintenance.Therefore, process chamber generally is designed to be made of the cavity of hollow structure and able to turn on or off chamber door sealing, the chamber door can be opened so that to safeguarding or change in process chamber inside, and the sealing of process chamber inside is closed and wanted to guarantee to the chamber door when carrying out processing step, therefore usually at chamber door installed inside sealing ring, when closing, the chamber door guarantees chamber door and cavity sealing, after closing, the chamber door also need a fixture that the chamber door is fixedlyed connected with cavity, with the sealing of further reinforcement vacuum technology chamber and the fail safe of assurance operation.
As shown in Figure 1, existing being used for is fixed in device on the cavity wall 100` with chamber door 200`, the general knob 300` that adopts with embossing, the head 301` of knob 300` has screw thread, the middle part has embossing 302`, on the door 200` of chamber, offer corresponding installing hole 201` with knob 300`, knob 300` is installed in the installing hole 201` on the door 200` of chamber and passes installing hole 201`, offer corresponding screwed hole 101` on the cavity wall 100` with installing hole 201`, with being connected with knob 300`, when chamber door 200` closes, to in the screwed hole 101` on the head 301` screw-in chamber wall 100` of knob 300` chamber door 200` and cavity wall 100` be fixed, chamber door 200` and cavity wall 100` compress the sealing that realizes the vacuum technology chamber; Yet, for the sealing needs that keep vacuum technology chamber precession embossing knob 300` to greatest extent, all like this pressure all need be born by the sealing ring 202` on the door 200` of chamber, cause sealing ring 202` compressing amount excessive and influence sealing effectiveness, also shortened the useful life of sealing ring 202` simultaneously; When needing to open chamber door 200`, knob 300` need be screwed out the screwed hole 101` on the cavity wall 100`, in the door 200` opening process of chamber, break away from the installing hole 201` on the door 200` of chamber like this under the effect of knob 300` at gravity easily, for use brings inconvenience.
Therefore, be badly in need of a kind ofly sharing sealing ring compressing amount, and when the chamber door is opened, can prevent the fixture that comes off.
The utility model content
The purpose of this utility model is to provide a kind of can share sealing ring compressing amount, and can prevent the fixture that comes off when the chamber door is opened.
For achieving the above object, the technical solution of the utility model is: a kind of fixture is provided, be applicable to and be fixed in the chamber door on the cavity wall and can remove fixing, it comprises handle, block piece and spring, described handle outwards protrudes out boss, described boss outwards protrudes out connecting rod, the end of described connecting rod offers screw thread and forms the threaded portion, described boss offers first annular groove around described connecting rod, described spring is arranged on the described connecting rod and an end is installed in described first annular groove, the other end of described spring protrudes out described first annular groove, described chamber door runs through and offers installing hole, described cavity wall offers the screwed hole with internal thread over against described installing hole, described connecting rod penetrates described installing hole and described installing hole is stretched out in described threaded portion, described block piece is arranged on the described connecting rod and between described threaded portion and described boss, the inner surface of described block piece and described chamber door is conflicted discretely, and the outer surface of described boss and described chamber door is conflicted discretely.
Preferably, described installing hole is step-like, and described step is recessed to form and over against described screwed hole, described block piece is placed in the described installing hole and with the step of described installing hole and conflicts discretely from the inner surface of described chamber door; When the chamber door is closed, in the screwed hole on the threaded portion precession cavity wall of handle, the threaded portion is threaded with cavity wall, the step of described block piece and described installing hole is separated, and the outer surface of the boss of handle and described chamber door is inconsistent; When opening the chamber door, rotary handle makes the threaded portion withdraw from the screwed hole of cavity wall, and the step of described block piece and described installing hole is inconsistent, the outer surface of the boss of handle and described chamber door is separated, in the process that the chamber door is opened, fixture can not break away from the chamber door, makes things convenient for the frequent unlatching of chamber door.
Preferably, described block piece is a circlip; More specifically, described connecting rod offers mounting groove, and described circlip is arranged in the described mounting groove and protrudes described mounting groove, and circlip has elasticity preferably, long service life, and cost is low.
Preferably, described block piece is a nut, and described nut is meshed with the threaded portion of described connecting rod and the described threaded portion of precession, adopts nut as block piece, only needs the lengthening threaded portion, and nut is connected on the handle by the threaded portion, and simplicity of design is easy for installation.
Preferably, have on the outer surface of described chamber door and corresponding second annular groove of described first annular groove, described second annular groove is used to hold the end that described spring stretches out first annular groove, the threaded portion of handle screws in the installing hole on the cavity wall and when being connected with cavity wall, the outer surface of the boss of handle and described chamber door is inconsistent, the end that spring stretches out first annular groove is placed in second annular groove on the door of chamber and is compressed, the elastic force that spring produces reduces the boss of handle to chamber door applied pressure, make chamber door and cavity wall keep the distance that is fit to, share the compressing amount of the sealing ring of installing on the door inner surface of chamber, be that sealing ring on the holding chamber door has suitable compressing amount, guarantee good sealing effectiveness between chamber door and the cavity wall, and increase the useful life of sealing ring.
Preferably, on the inner surface of described chamber door sealing ring is installed, when chamber door and cavity wall pressing, sealing ring is exerted pressure, make between chamber door and the cavity wall to keep good sealing property, keep processing chamber inside to have good vacuum.
Compared with prior art, because the utility model fixture comprises handle, block piece and spring, described handle outwards protrudes out boss, described boss outwards protrudes out connecting rod, the end of described connecting rod offers screw thread and forms the threaded portion, described boss offers first annular groove around described connecting rod, described spring is arranged on the described connecting rod and an end is installed in described first annular groove, the other end of described spring protrudes out described first annular groove, described chamber door runs through and offers installing hole, described cavity wall offers the screwed hole with internal thread over against described installing hole, described connecting rod penetrates described installing hole and described installing hole is stretched out in described threaded portion, described block piece is arranged on the described connecting rod and between described threaded portion and described boss, the inner surface of described block piece and described chamber door is conflicted discretely, and the outer surface of described boss and described chamber door is conflicted discretely; When the chamber door is closed, in the screwed hole on the threaded portion precession cavity wall of handle, the threaded portion is threaded with cavity wall, the chamber door is fixed on the cavity wall, the outer surface of the boss of handle and described chamber door is inconsistent, spring of installing on the boss and chamber door are inconsistent and be compressed, the elastic force that spring produces reduces the boss of handle to chamber door applied pressure, make chamber door and cavity wall keep the distance that is fit to, make the sealing ring on the door of chamber maintain suitable compressing amount, and then guarantee the sealing effectiveness of chamber door and cavity wall, prolong the useful life of sealing ring simultaneously; When opening the chamber door, rotary handle makes the threaded portion withdraw from the screwed hole of cavity wall, and the outer surface of the boss of handle and chamber door is separated, the step of described block piece and described installing hole is inconsistent, in the process that the chamber door is opened, fixture can not break away from the chamber door, makes things convenient for the frequent unlatching of chamber door.
Description of drawings
Fig. 1 is the schematic cross-section of existing fixture.
Fig. 2 is the schematic cross-section of first embodiment of the utility model fixture.
Fig. 3 is the exploded cross-sectional schematic diagram of fixture shown in Figure 2.
The schematic cross-section of the user mode of Fig. 4 fixture shown in Figure 2.
Fig. 5 is the schematic cross-section of second embodiment of the utility model fixture.
Fig. 6 is the schematic cross-section of the user mode of fixture shown in Figure 5.
Embodiment
With reference now to accompanying drawing, describe embodiment of the present utility model, the similar elements label is represented similar elements in the accompanying drawing.
As Fig. 2, shown in Figure 3, among first embodiment of the utility model fixture 300, block piece is a circlip 330, fixture 300 is used for the chamber door 200 of closure is fixed in cavity wall 100, and can remove chamber door 200 is opened, this fixture 300 comprises handle 310, spring 320 and circlip 330, handle 310 outwards protrudes out boss 311, boss 311 outwards protrudes out connecting rod 312, the end of connecting rod 312 offers screw thread and forms threaded portion 313, boss 311 offers first annular groove 314 around connecting rod 312, spring 320 is arranged on the connecting rod 312 and an end is installed in first annular groove 314, the other end of spring 320 protrudes out first annular groove 314, and the position near threaded portion 313 on the connecting rod 312 offers mounting groove 315; The inner surface 202 that chamber door 200 has outer surface 201 and is connected with cavity wall 100, on chamber door 200, run through and offer and handle 310 corresponding installing holes 205, installing hole 205 is step-like, and the step 206 of installing hole 205 is recessed to form from the inner surface 202 of chamber door 200; Offer screwed hole 101 over against installing hole 205 on the cavity wall 100 with internal thread; The threaded portion 313 of handle 310 ends is passed the installing hole 205 of chamber door 200 and is stretched out installing hole 205 by chamber door 200 outer surfaces 201, circlip 330 is arranged in the mounting groove 315 on the connecting rod 312 and protrudes mounting groove 315, circlip 330 is placed in the installing hole 205, circlip 330 is conflicted discretely with the step 206 of installing hole 205, and boss 311 is conflicted discretely with the outer surface of chamber door 200; The outer surface 201 of chamber door 200 is provided with first annular groove, 314 corresponding second annular groove, 204, the second annular grooves 204 and is used to hold the end that spring 320 stretches out first annular groove 314.During installation, spring 320 is arranged on the connecting rod 312 and the one end is packed in first annular groove 314 on the boss 311, the other end of spring 320 stretches out first annular groove 314, after installing spring 320, stretch into installing hole 205 in by chamber door 200 outer surfaces 201 threaded portion 313 of connecting rod 312 ends and pass installing hole 205, again circlip 330 is stuck in the mounting groove 315 on the connecting rod 312, circlip 330 is placed in the installing hole 205 and with the step 206 of installing hole 205 and conflicts discretely, and boss 311 is conflicted discretely with the outer surface of chamber door 200.
As shown in Figure 4, during use, door 200 closures in chamber are in reaching sealing by the sealing ring 203 that is installed on the chamber door inner surface 202 on the cavity wall 100 and between the two, the utility model fixture 300 is fixed in the chamber door 200 of closure on the cavity wall 100, when chamber door 200 is closed, rotary handle 310 screws in the screwed hole 101 on the cavity walls 100 threaded portion 313 of connecting rod 312 ends, make chamber door 200 and cavity wall 100 sealing and fixing, behind the screwed hole 101 that the threaded portion 313 of handle 310 screws on the cavity wall 100, circlip 330 is separated with step 206, the end that spring 320 stretches out first annular groove 314 is contained in second annular groove 204 on the chamber door 200, boss 311 contacts with chamber door 200 outer surfaces 201, spring 320 is compressed, the elastic force that spring 320 produces reduces 311 pairs of chamber door 200 applied pressures of boss, make and keep suitable distance between chamber door 200 and the cavity wall 100, and then alleviation is installed on the pressure of the sealing ring 203 on chamber door 200 inner surfaces 202, improve the compressing amount of sealing ring 203, make the sealing effectiveness between chamber door 200 and the cavity wall 100 better, and improve the useful life of sealing ring 203; When needs are opened chamber door 200, rotary handle 310 makes the threaded portion 313 of connecting rod 312 ends withdraw from screwed hole 101 on the cavity wall 100, boss 311 is separated with chamber door 200 outer surfaces 201, circlip 330 is inconsistent with step 206, after chamber door 200 is opened, because circlip 330 is inconsistent with the step 206 of installing hole 205, makes handle 310 can not break away from chamber door 200, makes things convenient for the frequent unlatching of chamber door 200.
As shown in Figure 5, among second embodiment of the utility model fixture 300, block piece is a nut 340, fixture 300 comprises handle 310, spring 320 and nut 340, handle 310 outwards protrudes out boss 311, boss 311 outwards protrudes out connecting rod 312, the end of connecting rod 312 offers screw thread and forms threaded portion 313, boss 311 offers first annular groove 314 around connecting rod 312, spring 320 is arranged on the connecting rod 312 and an end is installed in first annular groove 314, the other end of spring 320 protrudes out first annular groove 314, during installation, spring 320 is arranged on the connecting rod 312 and the one end is packed in first annular groove 314 on the boss 311, the other end of spring 320 stretches out first annular groove 314, after installing spring 320, stretch into installing hole 205 in by chamber door 200 outer surfaces 201 threaded portion 313 of connecting rod 312 ends and pass installing hole 205, again with the threaded portion 313 of nut 340 precession connecting rods 312, and nut 340 is placed in the installing hole 205 and with step 206 conflicts discretely, the outer surface of boss 311 and chamber door 200 is conflicted discretely.
As shown in Figure 6, second embodiment of the utility model fixture 300 in use, rotary handle 310 screws in the screwed hole 101 on the cavity walls 100 threaded portion 313 of connecting rod 312 ends, make chamber door 200 and cavity wall 100 sealing and fixing, behind the screwed hole 101 that the threaded portion 313 of connecting rod 312 ends screws on the cavity wall 100, nut 340 is separated with step 206, the end that spring 320 stretches out first annular groove 314 is contained in second annular groove 204 on the chamber door 200, boss 311 contacts with chamber door 200 outer surfaces 201, spring 320 is compressed, the elastic force that spring 320 produces reduces 311 pairs of chamber door 200 applied pressures of boss, make and keep suitable distance between chamber door 200 and the cavity wall 100, and then alleviation is installed on the pressure of the sealing ring 203 on chamber door 200 inner surfaces 202, improve the compressing amount of sealing ring 203, make the sealing effectiveness between chamber door 200 and the cavity wall 100 better, and improve the useful life of sealing ring 203; When needs are opened chamber door 200, rotary handle 310 makes the threaded portion 313 of connecting rod 312 front ends withdraw from screwed hole 101 on the cavity wall 100, boss 311 is separated with chamber door 200 outer surfaces 201, nut 340 is inconsistent with step 206, after chamber door 200 is opened, because nut 340 is inconsistent with the step 206 of installing hole 205, make handle 310 can not break away from chamber door 200, make things convenient for the frequent unlatching of chamber door 200, in this embodiment, only need add the threaded portion 313 of long handle 310, nut 340 spinnings 313 can be reached the purpose that prevents that handle 310 from coming off in the threaded portion, simplicity of design, easy for installation.
Because the utility model fixture 300 comprises handle 310, spring 320 and block piece 330, handle 310 outwards protrudes out boss 311, boss 311 outwards protrudes out connecting rod 312, the end of connecting rod 312 offers screw thread and forms threaded portion 313, boss 311 offers first annular groove 314 around connecting rod 312, spring 320 is arranged on the connecting rod 312 and an end is installed in first annular groove 314, the other end of spring 320 protrudes out first annular groove 314, chamber door 200 runs through and offers installing hole 205, cavity wall 100 offers the screwed hole 101 with internal thread over against installing hole 205, connecting rod 312 penetrates installing hole 205 and installing hole 205 is stretched out in threaded portion 313, block piece 330 is arranged on the connecting rod 312 and between threaded portion 313 and boss 311, block piece 330 is conflicted discretely with the inner surface of chamber door 200, and boss 311 is conflicted discretely with the outer surface of chamber door 200; When chamber door 200 is closed, in the screwed hole 101 on the threaded portion 313 precession cavity walls 100 of connecting rod 312 front ends, threaded portion 313 is threaded with cavity wall 100, chamber door 200 is fixed on the cavity wall 100, the boss 311 of handle 310 is inconsistent with the outer surface 201 of chamber door 200, the spring of installing on the boss 311 320 and chamber door 100 are inconsistent and be compressed, the elastic force that spring 320 produces reduces 311 pairs of chamber door 200 applied pressures of boss, make chamber door 200 and cavity wall 100 keep the distance that is fit to, make the sealing ring 203 on the chamber door 200 maintain suitable compressing amount, and then guarantee the sealing effectiveness of chamber door 200 and cavity wall 100, prolong the useful life of sealing ring 203 simultaneously; When opening chamber door 200, rotary handle 310 makes threaded portion 313 withdraw from the screwed hole 101 of cavity wall 100, the boss 311 of handle 310 is separated with the outer surface 201 of chamber door 200, block piece 330 is inconsistent with the step 206 of installing hole 205, in the process that chamber door 200 is opened, handle 310 can not break away from chamber door 200, makes things convenient for the frequent unlatching of chamber door 200.
The utility model fixture 300 is not limited to the chamber door 200 of closure is connected on the cavity wall 100, also can be used for the fixing of similar plate base part according to actual needs.
The mounting means of the utility model lumen door 200 and cavity wall 100, the mounting means of sealing ring 203 etc. are well known to those of ordinary skill in the art, no longer are described in detail at this.
Above disclosed only is preferred embodiment of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (7)
1. fixture, be applicable to and be fixed in the chamber door on the cavity wall and can remove fixing, it is characterized in that: described fixture comprises handle, block piece and spring, described handle outwards protrudes out boss, described boss outwards protrudes out connecting rod, the end of described connecting rod offers screw thread and forms the threaded portion, described boss offers first annular groove around described connecting rod, described spring is arranged on the described connecting rod and an end is installed in described first annular groove, the other end of described spring protrudes out described first annular groove, described chamber door runs through and offers installing hole, described cavity wall offers the screwed hole with internal thread over against described installing hole, described connecting rod penetrates described installing hole and described installing hole is stretched out in described threaded portion, described block piece is arranged on the described connecting rod and between described threaded portion and described boss, the inner surface of described block piece and described chamber door is conflicted discretely, and the outer surface of described boss and described chamber door is conflicted discretely.
2. fixture as claimed in claim 1, it is characterized in that: described installing hole is step-like, described step is recessed to form and over against described screwed hole, described block piece is placed in the described installing hole and with the step of described installing hole and conflicts discretely from the inner surface of described chamber door.
3. fixture as claimed in claim 1 is characterized in that: described block piece is a circlip.
4. fixture as claimed in claim 3 is characterized in that: described connecting rod offers mounting groove, and described circlip is arranged in the described mounting groove and protrudes described mounting groove.
5. fixture as claimed in claim 1 is characterized in that: described block piece is a nut, and described nut is meshed with the threaded portion of described connecting rod and the described threaded portion of precession.
6. fixture as claimed in claim 1 is characterized in that: have on the outer surface of described chamber door and corresponding second annular groove of described first annular groove.
7. fixture as claimed in claim 6 is characterized in that: on the inner surface of described chamber door sealing ring is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203510617U CN201590407U (en) | 2009-12-23 | 2009-12-23 | Fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203510617U CN201590407U (en) | 2009-12-23 | 2009-12-23 | Fixing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201590407U true CN201590407U (en) | 2010-09-22 |
Family
ID=42750199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009203510617U Expired - Lifetime CN201590407U (en) | 2009-12-23 | 2009-12-23 | Fixing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201590407U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101764045B (en) * | 2009-12-23 | 2011-09-28 | 东莞宏威数码机械有限公司 | Cavity door fixing device |
| CN102419932A (en) * | 2011-11-14 | 2012-04-18 | 苏州佳世达电通有限公司 | Display device |
| CN102534734A (en) * | 2010-12-29 | 2012-07-04 | 康准电子科技（昆山）有限公司 | Hanging tool |
| CN113700719A (en) * | 2021-10-28 | 2021-11-26 | 江苏邑文微电子科技有限公司 | Self-locking structure and equipment |
-
2009
- 2009-12-23 CN CN2009203510617U patent/CN201590407U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101764045B (en) * | 2009-12-23 | 2011-09-28 | 东莞宏威数码机械有限公司 | Cavity door fixing device |
| CN102534734A (en) * | 2010-12-29 | 2012-07-04 | 康准电子科技（昆山）有限公司 | Hanging tool |
| CN102419932A (en) * | 2011-11-14 | 2012-04-18 | 苏州佳世达电通有限公司 | Display device |
| CN113700719A (en) * | 2021-10-28 | 2021-11-26 | 江苏邑文微电子科技有限公司 | Self-locking structure and equipment |
| CN113700719B (en) * | 2021-10-28 | 2021-12-24 | 江苏邑文微电子科技有限公司 | Self-locking structure and equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20100922 Effective date of abandoning: 20091223 |