CN113700719B - Self-locking structure and equipment - Google Patents
Self-locking structure and equipment Download PDFInfo
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- CN113700719B CN113700719B CN202111260424.8A CN202111260424A CN113700719B CN 113700719 B CN113700719 B CN 113700719B CN 202111260424 A CN202111260424 A CN 202111260424A CN 113700719 B CN113700719 B CN 113700719B
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- 230000000694 effects Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 12
- 238000012423 maintenance Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B21/00—Means for preventing relative axial movement of a pin, spigot, shaft or the like and a member surrounding it; Stud-and-socket releasable fastenings
- F16B21/10—Means for preventing relative axial movement of a pin, spigot, shaft or the like and a member surrounding it; Stud-and-socket releasable fastenings by separate parts
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B21/00—Means for preventing relative axial movement of a pin, spigot, shaft or the like and a member surrounding it; Stud-and-socket releasable fastenings
- F16B21/10—Means for preventing relative axial movement of a pin, spigot, shaft or the like and a member surrounding it; Stud-and-socket releasable fastenings by separate parts
- F16B21/20—Means for preventing relative axial movement of a pin, spigot, shaft or the like and a member surrounding it; Stud-and-socket releasable fastenings by separate parts for bolts or shafts without holes, grooves, or notches for locking members
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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Abstract
The application relates to a self-locking structure and equipment. This auto-lock structure is applicable to the locking of first module and second module, the first end of this auto-lock structure's connecting piece can set up in the first through-hole of first module lockingly, the second end movably of connecting piece sets up in the second through-hole of second module, the fixed second end that sets up at the connecting piece of guide, the top of guide is higher than the top of connecting piece, the one end that the connecting piece was kept away from to the guide is the spigot surface, the spigot surface is the inclined plane, the top of spigot surface extends to the direction of connecting piece, the top of guide sets up the guide way, the top of locking piece sets up the upper end at the third through-hole, the bottom activity of locking piece passes the third through-hole, the bottom of locking piece sets up in the second through-hole, the bottom of locking piece is operativelyable to shelter from the guide way or slide in the guide way. The locking or contact locking of two modules can be realized fast to this application, and can avoid the module to remove the danger of hitting the maintainer.
Description
Technical Field
The application belongs to the technical field of semiconductor mechanical assembly, and particularly relates to a self-locking structure and equipment.
Background
In the domestic semiconductor industry, various devices have parts with the same functions, and a plurality of manufacturers modularize the parts, so that a plurality of modules can be recombined to form new devices.
At present, the common modularized connection of the semiconductor machine mostly considers the fastening between modules, and neglects the separation and positioning of the module parts. When in maintenance, after the fasteners of the module pieces are loosened, because the modules mostly adopt the rollers, the danger that the modules move to collide with maintenance personnel exists; in order to limit the movement of the module, the efficiency of module removal and maintenance is compromised if the module is re-secured.
Disclosure of Invention
For solving above-mentioned technical problem, this application provides a auto-lock structure and degumming machine, aims at solving the danger that the removal of module hits maintainer among the prior art to a certain extent at least to and in order to restrict the removal of module, if adopt the mode of refastening the module can influence the module and dismantle the technical problem of the efficiency of maintaining.
The technical scheme of the application is as follows:
in one aspect, the present application provides a self-locking structure, which is suitable for locking a first module and a second module, and is characterized in that the first module is provided with a first through hole, the second module is provided with a second through hole and a third through hole, the second through hole is operably connected and communicated with the first through hole, and the third through hole is communicated and arranged above the second through hole;
the self-locking structure comprises:
the first end of the connecting piece can be arranged in the first through hole of the first module in a locking mode, and the second end of the connecting piece can be arranged in the second through hole of the second module in a movable mode;
the guide piece is fixedly arranged at the second end of the connecting piece, the top of the guide piece is higher than that of the connecting piece, one end, far away from the connecting piece, of the guide piece is a guide surface, the guide surface is an inclined surface, the top end of the guide surface extends towards the direction of the connecting piece, the top of the guide piece is provided with a guide groove, and the guide groove is arranged along the length direction of the connecting piece;
the top end of the locking piece is arranged at the upper end of the third through hole, the bottom end of the locking piece movably penetrates through the third through hole, the bottom end of the locking piece is arranged in the second through hole, and the bottom end of the locking piece can operatively shield the guide groove or slide in the guide groove.
In some embodiments, the first through hole is a kidney-shaped hole, the first end of the connecting member is movable in the first through hole along the length direction of the first through hole, and the first end of the connecting member is locked on the first module through a screw, so that the connecting member can be finely adjusted in the width direction of the first through hole.
Preferably, the guide is integrally formed on the second end of the connector.
In some embodiments, the bottom of the guide slot is flush with the top surface of the connector.
In some embodiments, a length dimension of the bottom end of the latch member in the first direction is greater than a length dimension of the bottom end of the latch member in the second direction, the length dimension of the bottom end of the latch member in the first direction is greater than a width dimension of the guide slot, the length dimension of the bottom end of the latch member in the second direction is not greater than the width dimension of the guide slot, and the first direction and the second direction are perpendicular.
Preferably, the bottom end of the locking member is rectangular.
Preferably, the length dimension of the tip of the lock member in the first direction is greater than the length dimension of the tip of the lock member in the second direction.
Preferably, the orthographic projection of the bottom end of the lock member is located inside the orthographic projection of the middle part of the lock member.
In another aspect, the present application provides an apparatus, which is characterized in that the apparatus comprises a first module and a plurality of second modules, and the first module is selectively connected with the second modules through the self-locking structure.
Furthermore, the equipment is a photoresist stripper, the first module is a conveying module for conveying the wafer box, the second module is a process module for performing photoresist stripping treatment, and the conveying module is selectively connected with the process module through the self-locking structure
The beneficial effects of this application include at least:
in practical implementation, when a first module and a second module need to be locked, the bottom end of a locking piece is firstly placed into a second through hole of the second module through a third through hole of the second module, in the process that the first module and the second module are close to each other, a second end of a connecting piece and a guide piece are inserted into the second through hole of the second module, in the process, the bottom end of the locking piece is jacked up under the action of a guide surface of the guide piece, the locking piece rises relative to the connecting piece, after the first module and the second module are attached, the locking piece falls onto the top surface of the connecting piece and is limited by the guide piece in the moving position, at the moment, the bottom end of the locking piece shields a guide groove, and the first module and the second module are locked and fixed relatively; when the first module and the second module need to be unlocked and separated, the locking piece is operated, the bottom end of the locking piece slides in the guide groove, the first module and the second module can be separated from each other, the locking state of the two modules can be released, and due to the guiding function of the guide groove, the first module and the second module can be prevented from moving after being unlocked and separated.
According to the self-locking structure, locking or contact locking of the two modules can be achieved rapidly, operation efficiency is improved, and after locking is relieved, the two modules can be installed and can move directionally in the direction of the guide groove, so that danger that maintenance personnel are collided when the modules move can be avoided, and the self-locking structure has good application value.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural view of a self-locking structure in a locked state according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a partial structure of a first module according to an embodiment of the present disclosure;
FIG. 3 is a schematic front view of FIG. 2;
FIG. 4 is a schematic diagram of a portion of a second module according to an embodiment of the present disclosure;
FIG. 5 is a schematic view of the structure of the connecting member and the guide member of FIG. 1;
FIG. 6 is a schematic view of the assembly of the connector and guide shown in FIG. 5 on a first module;
FIG. 7 is a schematic structural view of the latch of FIG. 1;
FIG. 8 is a schematic view of the latch of FIG. 7 assembled to a second module in a first position;
FIG. 9 is a schematic view of the latch of FIG. 7 assembled to a second module in a second condition;
FIG. 10 is a schematic structural view of a transport module;
FIG. 11 is a schematic diagram of a process module.
In the drawings:
1-connecting piece, 2-guiding piece, 3-locking piece, 301-top end, 302-middle part, 303-bottom end, 4-first module, 5-second module, 6-screw, 7-first through hole, 8-second through hole, 9-third through hole, 10-guiding surface and 11-guiding groove.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that all the directional indications in the embodiments of the present application are only used to explain the relative position relationship, the motion situation, and the like between the components in a certain posture, and if the certain posture is changed, the directional indication is changed accordingly.
The following disclosure provides many different embodiments, or examples, for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, which have been repeated for purposes of simplicity and clarity and do not in themselves dictate a relationship between the various embodiments and/or arrangements discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
The technical solution related to the embodiment is suitable for applications in the semiconductor field and other fields, including but not limited to life, industrial manufacturing, general machinery, and the like, and can be implemented as long as the technical solution related to the embodiment can produce practical effects on applications in the corresponding fields. Preferably, as one application, the technology according to the present embodiment is mainly applied to the semiconductor field, and is intended to ensure safety in manufacturing in the semiconductor field.
The photoresist removing machine comprises a conveying module for conveying the wafer boxes and a plurality of process modules for photoresist removing treatment, wherein any process module and the conveying module are required to be frequently detached, and the conveying module is also sold separately and combined with other process units. When the device is originally designed, the conveying module and the process module to be connected are only fastened by adopting a stud, the alignment and fastening are difficult during assembly, and the locking efficiency between the modules is low; when the modules need to be unlocked and separated, screws need to be disassembled, and the process modules are heavy in gravity center and have the danger of lateral movement and overturning, so that the safety of maintenance personnel is threatened; if the module is limited by screws, the four studs need to be sequentially separated every time the module is pulled away, so that the module cannot be conveniently detached, and the detachment efficiency is low.
Based on the technical problem, the embodiment of the application designs the self-locking structure to solve the problem.
Fig. 1 is a schematic structural diagram of a self-locking structure in a locked state according to an embodiment of the present disclosure, and with reference to fig. 1, the self-locking structure according to the embodiment of the present disclosure is suitable for locking a first module 4 and a second module 5, and includes a connecting member 1, a guide member 2, and a locking member 3.
Fig. 2 is a partial structural schematic view of a first module according to an embodiment of the present disclosure, and fig. 3 is a front view schematic view of fig. 2, and with reference to fig. 2 and fig. 3, a first through hole 7 is disposed on the first module 4 according to the embodiment of the present disclosure.
Fig. 4 is a partial structural schematic diagram of a second module according to an embodiment of the present disclosure, and with reference to fig. 4, in the embodiment of the present disclosure, a second through hole 8 and a third through hole 9 are provided in the second module 5, the third through hole 9 is disposed above the second through hole in a communicating manner, and when the first module 4 and the second module 5 are operated to approach and lock, the second through hole 8 and the first through hole 7 are in butt communication.
Fig. 5 is a schematic structural diagram of the connecting member and the guiding member in fig. 1, fig. 6 is a schematic assembly diagram of the connecting member and the guiding member shown in fig. 5 on the first module, and with reference to fig. 1, fig. 5 and fig. 6, a first end of the connecting member 1 according to an embodiment of the present invention is lockably disposed in the first through hole 7 of the first module 4, a second end of the connecting member 1 is movably disposed in the second through hole 8 of the second module 5, the guiding member 2 is fixedly disposed at the second end of the connecting member 1, a top of the guiding member 2 is higher than the top of the connecting member 1, an end of the guiding member 2 away from the connecting member 1 is a guiding surface 10, the guiding surface 10 is an inclined surface, a top end of the guiding surface 10 extends towards the connecting member 1, a top of the guiding member 2 is provided with a guiding groove 11, and the guiding groove 11 is disposed along a length direction of the connecting member.
With reference to fig. 1 to 3, and fig. 5 and 6, in the embodiment of the present application, the first through hole 7 formed in the first module 4 may be a kidney-shaped hole, and the connecting member 1 may be square, the first end of the connecting member 1 may move in the first through hole 7 along the length direction of the first through hole 7, and the first end of the connecting member 1 is locked on the first module 4 by the screw 6, so that the connecting member 1 can be finely adjusted in the width direction of the first through hole 7, and after the adjustment is in place, the connecting member 1 can be relatively and fixedly disposed on the first module 4 by the screw 6.
Referring to fig. 5, in the embodiment of the present application, the guide member 2 and the connecting member 1 may be both block-shaped, and the guide member 2 may be fixedly disposed on the second end of the connecting member 1 in an integrally formed manner, and of course, may also be connected by other fixing manners such as welding, which is not limited in the embodiment of the present application.
Referring to fig. 5, in the embodiment of the present application, the bottom of the guide member 2 and the bottom of the connecting member 1 may be flush with each other, and the top of the guide member 2 is higher than the top of the connecting member 1, so that a step having a height difference may be formed between the guide member 2 and the connecting member 1, and the step may be used to limit the movement of the locking member 1.
In addition, in the embodiment of the present application, the top of the guiding element 2 may be a straight line, that is, the top end of the guiding surface 10 directly extends to the side of the guiding element 2 facing the connecting element 1, and at this time, the whole guiding element 2 is in a right triangle shape; of course, in the embodiment of the present application, the top of the guide 2 may be a plane, that is, the top end of the guide surface 10 extends to the middle of the top surface of the guide 2, and in this case, the guide 2 has a right trapezoid shape as a whole.
Further, in the embodiment of the present application, referring to fig. 5, the bottom of the guide groove 11 is flush with the top surface of the connecting member 1, so as to facilitate the sliding of the locking member 2 in the guide groove 11.
Fig. 7 is a schematic structural diagram of the locking member in fig. 1, fig. 8 is a schematic assembly diagram of the locking member in fig. 7 in a first state on a second module, and fig. 9 is a schematic assembly diagram of the locking member in fig. 7 in a second state on the second module, in combination with fig. 7-9, in this embodiment of the present invention, a top end 301 of the locking member 3 is disposed at an upper end of a third through hole 9, a bottom end 303 of the locking member 3 movably passes through the third through hole 9, the bottom end 303 of the locking member 3 is disposed in the second through hole 7, and the bottom end 303 of the locking member 3 operatively covers the guide groove 11 or slides in the guide groove 11.
Further, referring to fig. 7, in the embodiment of the present application, the top end 301 of the locking member 3 may be a nut, which is larger than the diameter of the third through hole 9, so that the locking member 3 can be hung on the third through hole 9 of the second module 5.
Referring to fig. 7, in the embodiment of the present invention, the length dimension of the bottom end 303 of the lock member 3 in the first direction is greater than the length dimension of the bottom end 303 of the lock member 3 in the second direction, the length dimension of the bottom end 303 of the lock member 3 in the first direction is greater than the width dimension of the guide groove 11, the length dimension of the bottom end 303 of the lock member 3 in the second direction is not greater than the width dimension of the guide groove 11, and the first direction and the second direction are perpendicular to each other, that is, the lock member 3 in the embodiment of the present invention has two use states, in the first state, the lock member 3 is operated so that the first direction of the lock member 3 is perpendicular to the length dimension of the guide groove 11, and at this time, the lock member 3 cannot slide in the guide groove 11 of the guide member 2, and the lock member is blocked by the step formed by the guide member 2 and the link member 1; in another state, the lock member 3 is operated such that the second direction of the lock member 3 is perpendicular to the longitudinal direction of the guide groove 11, and at this time, the lock member 3 can slide in the guide groove 11 of the guide member 2.
In the embodiment of the present application, the bottom end 303 of the locking member 3 may be substantially rectangular, and the first direction and the second direction of the bottom end of the locking member 303 are the length direction and the width direction of the rectangle.
In some embodiments, the bottom end 303 of the locking member 3 may have other shapes as long as the above-mentioned functions can be achieved, and the present embodiment is not limited thereto.
Preferably, in the embodiment of the present application, in combination with fig. 7, the length dimension of the top end 301 of the lock member 3 in the first direction is greater than the length dimension of the top end 301 of the lock member 3 in the second direction, so that the size of the top end 301 of the lock member 3 and the size of the bottom end 303 of the lock member 3 are consistent, so as to facilitate the operation of the orientation of the lock member 3 by operating the top end 301 of the lock member 3.
Further, with reference to fig. 7, in the embodiment of the present application, the middle portion 302 of the locking member 3 may be square, and the orthographic projection of the bottom end 303 of the locking member 3 is located inside the orthographic projection of the middle portion 302 of the locking member 3, that is, the size of the middle portion 302 of the locking member 3 is larger than the size of the bottom end 303 of the locking member 3, so as to improve the connection strength of the locking member 3.
In practical implementation, when the first module 4 and the second module 5 need to be locked, the self-locking structure provided by the embodiment of the application first puts the bottom end 303 of the locking member 3 down into the second through hole 8 of the second module 5 through the third through hole 9 of the second module 5, during the process of approaching the first module 4 and the second module 5 to each other, the second end of the link 1 and the guide 2 are inserted into the second through hole 8 of the second module 5, during which the bottom end 303 of the locking member 3 is pushed up by the guide surface 10 of the guide 2, the locking member 3 is raised relative to the link 1, when the first module 4 and the second module 5 are jointed, the locking piece 3 falls down to the top surface of the connecting piece 1, the moving position of the first module 4 is limited by the guide piece 2, at the moment, the bottom end 303 of the locking piece 3 covers the guide groove 11, and the first module 4 and the second module 5 are locked and fixed relatively; when the first module 4 and the second module 5 need to be unlocked and separated, the locking piece 3 is operated to change the direction, so that the bottom end 303 of the locking piece 3 slides in the guide groove 11, the first module 4 and the second module 5 can be separated from each other, the locking state of the two modules can be released, and the first module 4 and the second module 5 can be prevented from moving after being unlocked and separated due to the guide function of the guide groove 11.
In addition, the embodiment of the application also discloses equipment, the equipment comprises a first module 4 and a plurality of second modules 5, and the first module 4 can be selectively connected with the second modules 5 through the self-locking structure.
When the self-locking structure is applied to a degumming machine, a conveying module of the degumming machine is a first module of the self-locking structure, fig. 10 is a schematic structural diagram of the conveying module, in combination with fig. 10, a plurality of connecting pieces 1 can be arranged on the conveying module of the degumming machine at intervals, a process module of the degumming machine is a second module of the self-locking structure, fig. 11 is a schematic structural diagram of a certain process module, in combination with fig. 11, a plurality of locking pieces 3 are correspondingly arranged, through the synchronization effect of a plurality of self-locking mechanisms, the connection locking and unlocking separation of the conveying module of the degumming machine and the selected process module can be quickly realized, and the operation efficiency is high.
To sum up, the self-locking structure shown in the embodiment of the application can quickly realize locking or contact locking of the two modules, improves the operation efficiency, and can realize directional movement of the direction of the guide grooves in which the two modules can be installed after the locking is released, so that the danger that the modules move to collide with maintenance personnel can be avoided, and the self-locking structure has good application value.
While the preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all alterations and modifications as fall within the scope of the application.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.
Claims (10)
1. A self-locking structure is suitable for locking a first module and a second module, and is characterized in that the first module is provided with a first through hole, the second module is provided with a second through hole and a third through hole, the second through hole is in butt joint communication with the first through hole in an operable manner, and the third through hole is arranged above the second through hole in a communication manner;
the self-locking structure comprises:
the first end of the connecting piece can be arranged in the first through hole of the first module in a locking mode, and the second end of the connecting piece can be arranged in the second through hole of the second module in a movable mode;
the guide piece is fixedly arranged at the second end of the connecting piece, the top of the guide piece is higher than that of the connecting piece, one end, far away from the connecting piece, of the guide piece is a guide surface, the guide surface is an inclined surface, the top end of the guide surface extends towards the direction of the connecting piece, the top of the guide piece is provided with a guide groove, and the guide groove is arranged along the length direction of the connecting piece;
the top end of the locking piece is arranged at the upper end of the third through hole, the bottom end of the locking piece movably penetrates through the third through hole, the bottom end of the locking piece is arranged in the second through hole, and the bottom end of the locking piece can operatively shield the guide groove or slide in the guide groove.
2. The self-locking structure of claim 1, wherein the first through hole is a kidney-shaped hole, the first end of the connecting member is movable in the first through hole along the length direction of the first through hole, and the first end of the connecting member is locked to the first module by a screw.
3. The self-locking arrangement of claim 1, wherein the guide member is integrally formed on the second end of the connector member.
4. The self-locking structure of claim 1, wherein the bottom of the guide slot is flush with the top surface of the connector.
5. The self-locking structure of claim 1, wherein a length dimension of the bottom end of the lock member in the first direction is greater than a length dimension of the bottom end of the lock member in the second direction, the length dimension of the bottom end of the lock member in the first direction is greater than a width dimension of the guide groove, the length dimension of the bottom end of the lock member in the second direction is not greater than the width dimension of the guide groove, and the first direction is perpendicular to the second direction.
6. The self-locking structure of claim 5, wherein the bottom end of the locking member is rectangular.
7. The self-locking structure of claim 5, wherein a length dimension of the tip of the locking member in the first direction is greater than a length dimension of the tip of the locking member in the second direction.
8. The self-locking structure of claim 5, wherein an orthographic projection of the bottom end of the lock member is located inward of an orthographic projection of a middle portion of the lock member.
9. An apparatus comprising a first module and a plurality of second modules, the first module being selectively connectable to the second modules by the self-locking mechanism of any one of claims 1-8.
10. The apparatus of claim 9, wherein the apparatus is a stripper, the first module is a transport module for cassette transport, the second module is a process module for stripping, and the transport module is selectively connectable to the process module by the self-locking mechanism of any one of claims 1-8.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111260424.8A CN113700719B (en) | 2021-10-28 | 2021-10-28 | Self-locking structure and equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111260424.8A CN113700719B (en) | 2021-10-28 | 2021-10-28 | Self-locking structure and equipment |
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| Publication Number | Publication Date |
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| CN113700719A CN113700719A (en) | 2021-11-26 |
| CN113700719B true CN113700719B (en) | 2021-12-24 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201590407U (en) * | 2009-12-23 | 2010-09-22 | 东莞宏威数码机械有限公司 | Fixing device |
| CN104952773A (en) * | 2015-05-27 | 2015-09-30 | 沈阳拓荆科技有限公司 | Butt joint method of chambers of semiconductor deposition devices |
| CN204984013U (en) * | 2015-05-27 | 2016-01-20 | 沈阳拓荆科技有限公司 | Semiconductor is locking device for deposition equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165531A (en) * | 1989-11-24 | 1991-07-17 | Hitachi Ltd | Socket for mounting semiconductor device |
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2021
- 2021-10-28 CN CN202111260424.8A patent/CN113700719B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201590407U (en) * | 2009-12-23 | 2010-09-22 | 东莞宏威数码机械有限公司 | Fixing device |
| CN104952773A (en) * | 2015-05-27 | 2015-09-30 | 沈阳拓荆科技有限公司 | Butt joint method of chambers of semiconductor deposition devices |
| CN204984013U (en) * | 2015-05-27 | 2016-01-20 | 沈阳拓荆科技有限公司 | Semiconductor is locking device for deposition equipment |
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| CN113700719A (en) | 2021-11-26 |
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Address after: 226000 No.1 Jinshan Road, zuegang street, Rudong County, Nantong City, Jiangsu Province Patentee after: Jiangsu Yiwen Microelectronics Technology Co.,Ltd. Patentee after: Wuxi Yiwen Microelectronics Technology Co.,Ltd. Address before: 226000 No.1 Jinshan Road, zuegang street, Rudong County, Nantong City, Jiangsu Province Patentee before: Jiangsu Yiwen Microelectronics Technology Co.,Ltd. Patentee before: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. |