CN201560233U - Continuous winding plating device for solar energy selectivity absorption film - Google Patents
Continuous winding plating device for solar energy selectivity absorption film Download PDFInfo
- Publication number
- CN201560233U CN201560233U CN2009200020654U CN200920002065U CN201560233U CN 201560233 U CN201560233 U CN 201560233U CN 2009200020654 U CN2009200020654 U CN 2009200020654U CN 200920002065 U CN200920002065 U CN 200920002065U CN 201560233 U CN201560233 U CN 201560233U
- Authority
- CN
- China
- Prior art keywords
- chamber
- vacuum
- film
- chamber body
- metal sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to the field of surface physics vapour deposition of metal sheet belt under vacuum condition. A continuous winding plating device for solar energy selectivity absorption film comprises a uncoiler set (10), and is characterized in that each vacuum film-plating chamber comprises low vacuum chambers A (20a and 20b), a ion treatment chamber (30), a low vacuum chamber B (40), and a high vacuum chamber (50), five vacuum film-plating chambers (60) are connected with one another in sealing mode through flange, and are provided with windows (2) through which metal sheet belt is passed; the low vacuum chambers A (20a and 20b), the ion treatment chamber (30), the low vacuum chamber B (40), the high vacuum chamber (50) and the vacuum film-plating chamber are connected with a vacuum set (90); and a winding machine set (80) and a control system (100) for continuously plating film are arranged outside the vacuum film-plating chamber. The device has advantages that the device can plate multi-layer film and reaction film on the metal sheet belt, the thickness of the film can be independently controlled, and the film is uniform and compact, has strong adhesive force and is suitable for industrialization production.
Description
Technical field
The utility model relates to the solar energy collector technical field, is specifically related to a kind of continuous coiling and coating device of solar selective absorbing film.
Background technology
Flat plate solar collector is a kind of basic type in the heat collector, and simple in structure, stable and reliable operation, cost are suitable, also have characteristics such as bearing capacity is strong, endotherm area is big, and being sun power combines one of heat collector type of optimal selection with building.Solar selective absorbing film is one of its core component, and its performance quality and cost have directly determined the thermo-efficiency and the manufacturing cost of heat collector.
Be divided into two kinds of chemical coating method and Vacuum Coating methods substantially for the preparation method of solar selective absorbing film.A kind of method and apparatus for preparing the solar selectively absorption layer by dc anodizing and alternating current electrolysis method is disclosed as patent ZL91104451.5, this equipment is comparatively simple, and can realize successive production, but the absorbing membranous layer material of preparation is comparatively single, therefore assimilated efficiency is lower, and preparation process is seriously polluted.The comparatively advanced in the world method for preparing selective absorbing film adopts vacuum coating technology more.There is not pollution problem in the vacuum coating technology production technique, the film excellent optical performance.But have following shortcoming with regard to present disclosed vacuum coating method: it is single that (1) is coated with film material, thereby influence the assimilated efficiency of selective absorbing film; (2) preparation of each functional film layer can not be carried out in same vacuum chamber body continuously, not only influence production efficiency, more main is that environment exists pollution to rete, thereby influence film efficient, it is higher to disclose a kind of light-thermal conversion efficiency as patent 99126652.8, physical strength big and simple relatively solar selectively absorbing coating of manufacturing process and preparation method, its innovative point has the activated metal layer to be finished by the bias voltage sputter for design, and aluminium/oxygen/nitrogen composite bed is finished by magnetic control sputtering plating.Vacuum coating film equipment corresponding to prior art then is the intermittent type vacuum coating film equipment, but there is following shortcoming in this kind equipment: (1) whenever finishes an operation, all to open door for vacuum chamber, the loading and unloading roll coil of strip, production efficiency is low, be not suitable for industrial continuous production, a kind of solar selectively absorbing coating and preparation method thereof is disclosed as patent 200810020179.1, preparation technology for pack into matrix in the coating equipment, the negative voltage bombardment cleans matrix, logical subsequently negative bias, make the energising of titanium target, the depositing TiN layer; Aerating oxygen subsequently, depositing Ti O layer and TiO
2Then make SiO
2The target energising feeds argon gas and oxygen, the deposition antireflection layer.(2) filming parameter is difficult to guarantee unanimity, and the quality product consistence is poor; (3) target loads and unloads substrate because cooling is bad at every turn, and to a certain degree oxidation and pollution are arranged behind the exposure atmosphere, influences film quality.
The utility model content
The purpose of this utility model is to avoid the deficiencies in the prior art, and a kind of continuous coiling and coating device of solar selective absorbing film is provided.The advantage of this device is: can plate on metal sheet strip that multilayer film, reaction film, thicknesses of layers can independently be controlled, even film layer densification, strong adhesion, be fit to suitability for industrialized production.
For achieving the above object, the technical scheme that the utility model is taked is: a kind of continuous coiling and coating device of solar selective absorbing film, comprise uncoiling unit (10), the vacuum film coating chamber of its principal feature setting includes A low vacuum chamber (20a, 20b), ion processing chamber (30), B low vacuum chamber (40), high vacuum chamber (50), there is flange seal to be connected between 5 vacuum film coating chambers (60), chamber and chamber, and is provided with the window (2) that metal sheet strip (1) passes through; A low vacuum chamber (20a, 20b), ion processing chamber (30), B low vacuum chamber (40), high vacuum chamber (50), vacuum film coating chamber (60) link to each other with vacuum unit (90); In the outdoor rolling unit (80) that also is provided with of vacuum plating, the Controlling System of continuous coating (100).
The continuous coiling and coating device of described solar selective absorbing film, described uncoiling unit (10) comprising: go up scroll wheel (10-1), uncoiling roller (10-2) is provided with crop (10-3), welds (10-4) in last scroll wheel (10-1) the place ahead with uncoiling roller (10-2); Between 1#S roller (10-5) and 2#S roller (10-7), be provided with inlet metal sheet strip (1) tightening pulley system (10-6); Be provided with cleaning system (10-8) afterwards at 2#S roller (10-7), warm air drying (10-9).
The continuous coiling and coating device of described solar selective absorbing film, described A low vacuum chamber (20a, 20b) comprises the body of having family (20-1), is provided with dividing plate (20-1-1) in it chamber body (20-1) is separated into 2-6 vacuum chamber; Dividing plate (20-1-1) is provided with the window (2) that metal sheet strip (1) passes through; Locate to be provided with sealing roller devices (20-2) in the ingress of chamber body (20-1) or the window (2) of exit or chamber body (20-1) portion dividing plate, power-driven mechanism (20-3) is located on the sealing roller devices (20-2); The top of chamber body (20-1) is provided with loam cake (20-4), is provided with cap sealing (20-6) therebetween, and the bottom is provided with frame (20-5); Body junction, chamber is provided with tightness system (20-7); Be connected with slide valve pump unit (90-1,90-2), lobe pump (90-3) in the chamber body (20-1).
The continuous coiling and coating device of described solar selective absorbing film, described sealing roller devices (20-2) comprises that two rubber rollers (20-2-3) that are parallel to each other are supported on the bearing support (20-2-5) at two ends, transmitting gear (20-2-1) is located at the two ends of two rubber rollers (20-2-3) respectively, is connected with power-driven mechanism (20-3) at an end of rubber rollers (20-2-3) axle; Two ends at rubber rollers (20-2-3) axle are provided with spring (20-2-2), and sealing plate (20-2-4) is located on the rubber rollers (20-2-3); The both sides of the window (2) that passes through at metal sheet strip (1) are provided with the coupling seat (20-2-7) that is connected with the chamber body by gasket (20-2-6), which is provided with spring piece (20-2-8), and plastic plate (20-2-9) is pressed on two rubber rollers (20-2-3).
The continuous coiling and coating device of described solar selective absorbing film, described ion processing chamber (30) comprises the body of having family (30-1), is provided with dividing plate (30-1-1) in it chamber body (30-1) is separated into 2-4 vacuum chamber; On the two ends of chamber body (30-1) and dividing plate (30-1-1), be provided with the window (2) that metal sheet strip (1) passes through; In chamber body (30-1), be provided with high-pressure ion treatment system (30-2); In chamber body (30-1), be provided with gas distribution system (30-3); The top of chamber body (30-1) is provided with loam cake (30-4), is provided with cap sealing (30-7) therebetween, and the middle part is provided with viewing window (30-5), and the bottom is provided with frame (30-6); Body junction, chamber is provided with tightness system (30-8); Be connected with slide valve pump unit, lobe pump (90-4) in the chamber body (30-1).
The continuous coiling and coating device of described solar selective absorbing film, described B low vacuum chamber (40) comprises the body of having family (40-1), is provided with dividing plate (40-1-1) in it chamber body (40-1) is separated into 2-4 vacuum chamber; On the two ends of chamber body (40-1) and dividing plate (40-1-1), be provided with the window (2) that metal sheet strip (1) passes through; The top of chamber body (40-1) is provided with loam cake (40-2), is provided with cap sealing (40-3) therebetween, and the middle part is provided with viewing window (40-5), and the bottom is provided with frame (40-6); Body junction, chamber is provided with tightness system (40-4); Be connected with slide valve pump unit, lobe pump (90-5) in the chamber body (40-1).
The continuous coiling and coating device of described solar selective absorbing film, described high vacuum chamber (50) comprises the body of having family (50-1), is provided with dividing plate (50-1-1) in it chamber body (50-1) is separated into 2-4 vacuum chamber; On the two ends of chamber body (50-1) and dividing plate (50-1-1), be provided with the window (2) that metal sheet strip (1) passes through; The top of chamber body (50-1) is provided with loam cake (50-2), is provided with cap sealing (50-4) therebetween, and the bottom is provided with frame (50-3); Body junction, chamber is provided with tightness system (50-5); Be connected with diffusion pump, slide valve pump unit, lobe pump (90-6) in the chamber body (50-1).
The continuous coiling and coating device of described solar selective absorbing film, described coating chamber (60) comprises the body of having family (60-1); Be provided with dividing plate (60-1-1) in it chamber body (60-1) is separated into 2-4 vacuum chamber; On the two ends of chamber body (60-1) and dividing plate (60-1-1), be provided with the window (2) that metal sheet strip (1) passes through; In chamber body (60-1), be provided with plane magnetic control target or electronics is robbed (60-3); The top of chamber body (60-1) is provided with loam cake (60-2), is provided with cap sealing (60-6) therebetween, and the middle part is provided with viewing window (60-4), and the bottom is provided with frame (60-5); Body junction, chamber is provided with tightness system (60-7).
The continuous coiling and coating device of described solar selective absorbing film, described rolling unit (80) includes and be provided with pasting protective film mechanism (80-1) on the outdoor metal sheet strip of vacuum plating (1), is provided with outlet metal sheet strip (1) tightening pulley system (80-3) between 3#S roller (80-2) and the 4#S roller (80-4); Be provided with shearing (80-5) afterwards at 4#S roller (80-4), pinch roll (80-6) batches (80-7), unloads volume (80-8).
The continuous coiling and coating device of described solar selective absorbing film, the Controlling System of described continuous coating apparatus (100) includes computer centralized Control rack (100-1), process control interface module rack (100-2), vacuum system control rack (100-3), transmission system control rack (100-4), vacuum ionic is handled power supply cabinet continuous coating power supply cabinet (100-5), rolling operation subcontrol rack (100-6) and uncoiling operation subcontrol rack (100-7).
The beneficial effects of the utility model are: the General Arrangement Scheme and the configuration of the correct combination of (1) equipment components; (2) movable sealing structure of air-air vacuum continuous coating; (3) coating source can carry out multiple combination according to arts demand.This production line adopts computer full automatic control technology, has abundant man-machine interface, and is easy to operate.This production line adopts the vacuum continuous coating mode of air-air, plated film efficient height, and coating process is environment friendly and pollution-free, can be coated with multiple film, multilayer film, film quality are good.
Description of drawings
Fig. 1 looks synoptic diagram for master of the present utility model;
Fig. 2 looks synoptic diagram for uncoiling unit of the present utility model (10) is main;
Fig. 3 looks synoptic diagram for A low vacuum chamber of the present utility model (20a, 20b) is main;
Fig. 4 a is the main synoptic diagram of looking of sealing roller devices of the present utility model (20-2);
Fig. 4 b looks synoptic diagram for the left side of Fig. 5 a;
Fig. 5 looks synoptic diagram for ion processing of the present utility model chamber (30) is main;
Fig. 6 looks synoptic diagram for B low vacuum chamber of the present utility model (40) is main;
Fig. 7 looks synoptic diagram for high vacuum chamber of the present utility model (50) is main;
Fig. 8 looks synoptic diagram for coating chamber of the present utility model (60) is main;
Fig. 9 looks synoptic diagram for rolling unit of the present utility model (80) is main;
Figure 10 looks synoptic diagram for Controlling System of the present utility model (100) is main.
Embodiment
Below in conjunction with embodiment principle of the present utility model and feature are described, institute gives an actual example and only is used to explain the utility model, is not to be used to limit scope of the present utility model.
Embodiment 1:
See Fig. 1, a kind of continuous coiling and coating device of solar selective absorbing film, comprise uncoiling unit 10, the vacuum film coating chamber that is provided with includes A low vacuum chamber 20a, 20b, ion processing chamber 30, B low vacuum chamber 40, high vacuum chamber 50, there is flange seal to be connected between 5 vacuum film coating chambers 60, chamber and chamber, and is provided with the window 2 that metal sheet strip 1 passes through; A low vacuum chamber 20a, 20b, ion processing chamber 30, B low vacuum chamber 40, high vacuum chamber 50, vacuum film coating chamber 60 link to each other with vacuum unit 90; In the outdoor rolling unit 80 that also is provided with of vacuum plating, the Controlling System 100 of continuous coating.
See Fig. 2, described uncoiling unit 10 includes scroll wheel 10-1, and uncoiling roller 10-2 is provided with crop 10-3, welding 10-4 in the place ahead of last scroll wheel 10-1 and uncoiling roller 10-2; Between 1#S roller 10-5 and 2#S roller 10-7, be provided with inlet metal sheet strip 1 10-6 of tightening pulley system; After 2#S roller 10-7, be provided with cleaning system 10-8, warm air drying 10-9.
See Fig. 3, described A low vacuum chamber 20a, 20b comprise the body 20-1 that has family, and be provided with dividing plate 20-1-1 in it chamber body 20-1 is separated into 4 vacuum chambers; Dividing plate 20-1-1 is provided with the window 2 that metal sheet strip 1 passes through; Be provided with sealing roller devices 20-2 in the ingress of chamber body 20-1 or window 2 places of exit or chamber body 20-1 intermediate membrane, power-driven mechanism 20-3 is located on the sealing roller devices 20-2; The top of chamber body 20-1 is provided with loam cake 20-4, is provided with cap sealing 20-6 therebetween, and the bottom is provided with frame 20-5; Body junction, chamber is provided with tightness system 20-7; Be connected with slide valve pump unit 90-1,90-2, lobe pump 90-3 in the body 20-1 of chamber.Body mid-way, chamber is separated into three to five parts to the chamber body by 3 cover sealed roller devices, from charging C low vacuum chamber, 20b is from discharge end, and beginning every partial vacuum degree has a step-like reduction, can reach below the 5Pa through A low vacuum chamber 20a, C low vacuum chamber 20b final vacuum degree.The chamber body can be made integral body or divide two according to making needs.
See Fig. 4, described sealing roller devices 20-2 comprises that two rubber rollers 20-2-3 that are parallel to each other are supported on the bearing support 20-2-5 at two ends, transmitting gear 20-2-1 is located at the two ends of two rubber rollers 20-2-3 respectively, is connected with power-driven mechanism 20-3 at an end of rubber rollers 20-2-3 axle; Two ends at rubber rollers 20-2-3 axle are provided with spring 20-2-2, and sealing plate 20-2-4 is located on the rubber rollers 20-2-3; The both sides of the window 2 that passes through at metal sheet strip 1 are provided with by gasket 20-2-6 and the coupling seat 20-2-7 that the chamber body is connected, and which is provided with spring piece 20-2-8, and plastic plate 20-2-9 is pressed on two rubber rollers 20-2-3.
See Fig. 5, described ion processing chamber 30 comprises the body 30-1 that has family, and is provided with dividing plate 30-1-1 in it chamber body 30-1 is separated into 2 vacuum chambers; On the two ends of chamber body 30-1 and dividing plate 30-1-1, be provided with the window 2 that metal sheet strip 1 passes through; In the body 30-1 of chamber, be provided with high-pressure ion treatment system 30-2; In the body 30-1 of chamber, be provided with gas distribution system 30-3; The top of chamber body 30-1 is provided with loam cake 30-4, is provided with cap sealing 30-7 therebetween, and the middle part is provided with viewing window 30-5, and the bottom is provided with frame 30-6; Body junction, chamber is provided with tightness system 30-8; Be connected with slide valve pump unit, lobe pump 90-4 in the body 30-1 of chamber.
See Fig. 6, described B low vacuum chamber 40 comprises the body 40-1 that has family, and is provided with dividing plate 40-1-1 in it chamber body 40-1 is separated into 2 vacuum chambers; On the two ends of chamber body 40-1 and dividing plate 40-1-1, be provided with the window 2 that metal sheet strip 1 passes through; The top of chamber body 40-1 is provided with loam cake 40-2, is provided with cap sealing 40-3 therebetween, and the middle part is provided with viewing window 40-5, and the bottom is provided with frame 40-6; Body junction, chamber is provided with tightness system 40-4; Be connected with slide valve pump unit, lobe pump 90-5 in the body 40-1 of chamber.Indoor vacuum tightness can reach below the 5Pa.
See Fig. 7, described high vacuum chamber 50 comprises the body 50-1 that has family, and is provided with dividing plate 50-1-1 in it chamber body 50-1 is separated into 2 vacuum chambers; On the two ends of chamber body 50-1 and dividing plate 50-1-1, be provided with the window 2 that metal sheet strip 1 passes through; The top of chamber body 50-1 is provided with loam cake 50-2, is provided with cap sealing 50-4 therebetween, and the bottom is provided with frame 50-3; Body junction, chamber is provided with tightness system 50-5; Be connected with diffusion pump, slide valve pump unit, lobe pump 90-6 in the body 50-1 of chamber.Indoor ultimate pressure can reach below 1 * 10-3Pa.High vacuum chamber respectively is provided with one in the coating chamber both sides.
See Fig. 8, described coating chamber 60 comprises the body 60-1 that has family; Be provided with dividing plate 60-1-1 in it chamber body 60-1 is separated into 2 vacuum chambers; On the two ends of chamber body 60-1 and dividing plate 60-1-1, be provided with the window 2 that metal sheet strip 1 passes through; In the body 60-1 of chamber, be provided with plane magnetic control target or electronics is robbed 60-3; The top of chamber body 60-1 is provided with loam cake 60-2, is provided with cap sealing 60-6 therebetween, and the middle part is provided with viewing window 60-4, and the bottom is provided with frame 60-5; Body junction, chamber is provided with tightness system 60-7.
See Fig. 9, described rolling unit 80 includes on the outdoor metal sheet strip 1 of vacuum plating and is provided with the 80-1 of pasting protective film mechanism, is provided with outlet metal sheet strip 1 80-3 of tightening pulley system between 3#S roller 80-2 and the 4#S roller 80-4; Be provided with after 4#S roller 80-4 and shear 80-5, pinch roll 80-6 batches 80-7, unloads volume 80-8.
See Figure 10, the Controlling System 100 of described continuous coating apparatus includes computer centralized Control rack 100-1, process control interface module rack 100-2, vacuum system control rack 100-3, transmission system control rack 100-4, vacuum ionic is handled power supply cabinet continuous coating power supply cabinet 100-5, rolling operation subcontrol rack 100-6 and uncoiling operation subcontrol rack 100-7.
Computer centralized Control rack 100-1 is by operator-machine-interfaces such as touch-screens, show the data of accepting from each controller of production line in real time with forms such as figure, form and rod figure, and send operator's instruction to controller, finish functions such as the parameter control of transmission system in the production line, vacuum-pumping system, coating process system and supplementary controlled system and management, process control, equipment fault diagnosis, man-machine interaction.
Process control interface module rack 100-2 mainly is responsible for collection, output and the control in real time of each technology controlling and process link analog quantity of production line;
Vacuum system control rack 100-3 realizes control to the production line vacuum-pumping system according to the instruction of computer control rack, is that coating film production line obtains the high vacuum Working environment that continues;
Transmission system control rack 100-4 realizes speed regulating control and the tension control and the correction control of production line multi-motor-drive system uncoiling section, rolling section and process section according to the instruction of computer control rack.
Rolling operation subcontrol rack 100-6 and uncoiling operation subcontrol rack 100-7 mainly realize system's material loading volume, discharging volume, default tension force, rotate the subsidiary function of crawl.Improve the working efficiency of continuous coating production line.
During use, described uncoiling unit go up the volume dolly, be positioned at below the reel of Abrollhaspel, with metal sheet strip from the inlet saddle on to reel of uncoiler, Abrollhaspel is provided with automatic centring device, when there is deviation roll coil of strip installation site with desired location, can revise automatically; By the rotation of Abrollhaspel, make the pinch roll of strip by pinching forward, forward strip is delivered to inlet by pinch roll then and cut, cut off taking the lead of this strip by inlet, strip enters the 1#S roller by welding machine; At this moment, volume dolly is delivered to inlet by step noted earlier with strip and is cut the place on another, when the magnetic tape trailer arrival inlet of last roll bending band is cut, shear the magnetic tape trailer of this volume and taking the lead of back one volume by inlet, arriving the welding machine place then together welds, band after the welding continues at the uniform velocity forward by No. 1 S roller, band enters entry loop under the driving of No. 1 S roller, entry loop is used for storing earlier metal sheet strip, guaranteeing the unit entrance when metal sheet strip stops and carrying out welding job, entry loop discharge strip so that the process section metal sheet strip still can continous-stable operation; Be furnished with No. 2 the S roller in the entry loop back, strip is through behind No. 2 S rollers, and under the conveying effect of No. 2 S rollers, strip is cleaned by the washing unit of back; Strip through extracting deviation correcting device, works remove moisture and rectify a deviation corrigent effect to strip through after cleaning; After extracting deviation correcting device, be furnished with hot-air drying device,, dry up the moisture that the strip surface is stayed in degreasing by to strip surface winding-up high speed hot blast.Strip enters A low vacuum chamber 20a through after extracting deviation correcting device, successively by ion processing chamber 30, B low vacuum chamber 40, high vacuum chamber 50, coating chamber 60, C low vacuum chamber 20b, arrives the rolling unit then; At the rolling unit, the one side of strip plated film is sticked the plastics film or the paper of protection on its surface by film sticking apparatus, strip continues forward, by No. 3 S rollers, is fed into the outlet kink by drawing of No. 3 S rollers, outlet is used for storing metal sheet strip when unloading the lamina membranacea band and stop, guaranteeing when strip stops and carrying out welding job, the operation that the process section strip still can continous-stable is after change of lap is finished, discharge strip, store strip in order to unloading volume next time; Strip enters the S roller through outlet No. 4 behind the kink, draws at it and send down by pressing shearing machine and pinch roll, arrives winder and carries out rolling, after roll coil of strip coil diameter reaches a certain size, cuts by pressure and strip to be cut off the rolling of newly rolling up behind the change of lap.
Finish wear band after, each low vacuum chamber vacuumizes simultaneously, reaches 5Pa when following in high vacuum chamber vacuum tightness, adopts the high vacuum unit that high vacuum chamber is vacuumized.After ion processing chamber vacuum reaches the certain vacuum degree, to the indoor N2 that charges into, utilize the ion processing device that strip is carried out surface treatment by gas distribution system; Simultaneously, when coating chamber reaches certain vacuum tightness, adopt coating system (electron beam evaporation or magnetic control sputtering system) that coating film treatment is carried out on the strip surface; The transmission speed of strip and plated film watt level are regulated according to processing requirement.
Application examples: a kind of plated film of high-performance multilayer composite solar selective absorption coating, include and on matrix, be sequentially with far-infrared reflection layer, compound thermal absorption layer and anti-oxidant and antireflection layer, the far-infrared reflection layer is the Al layer of sputtering sedimentation on matrix; Compound thermal absorption layer is the TiNOx layer of sputtering sedimentation on the far-infrared reflection layer, and anti-oxidant and antireflection layer is the SiO of sputtering sedimentation on compound thermal absorption layer
2Layer.Described matrix is phosphorized copper band or oxygen-free copper stripe or aluminium strip.The thickness of described far-infrared reflection layer is 100～120nm.The thickness of described compound hot coefficient layer is 100～120nm.Described anti-oxidant and thickness antireflection layer is 60～70nm.
The steps include: 1. will carry out pretreated matrix and pack in the magnetron sputtering coater of bedroom, and the vacuum tightness of the vacuum chamber of bedroom magnetron sputtering coater is evacuated to 2.0 * 10
-2～8.0 * 10
-3Described pre-treatment is the high-pressure ion cleaning, charges into nitrogen, pressure 2～5Pa, voltage bombardment 3200～3500V, electric current 2～4A.2. feed purity and be 99.95% argon gas in vacuum chamber, making vacuum tightness is 6.5 * 10
-2～9.0 * 10
-2Pa connects the negative DC voltage bombardment and cleans matrix 5min in argon gas atmosphere, remove matrix surface impurity, the activation matrix surface; 3. in vacuum chamber, feed purity and be 99.95% argon gas, play the aluminium target, depositing Al layer on matrix, wherein the Ar flow is 260sccm, air pressure is 6.5 * 10
-2Pa, volts DS are 580V, and electric current is 100A, and depositing time is 300s, and the thickness of Al layer is 100～200nm; 4. in vacuum chamber, feed purity and be 99.95% argon gas, play the titanium target, depositing Ti layer on matrix, wherein the Ar flow is 170sccm, air pressure is 7.5 * 10
-2Pa, volts DS are 640V, and electric current is 35A, and depositing time is 300s; In vacuum chamber, feed purity then and be 99.95% argon gas and acetylene, play the titanium target, depositing Ti C layer on matrix, wherein the Ar flow is 170sccm, C
2H
2Flow is 120sccm, and air pressure is 5.7 * 10
-2Pa, volts DS are 660V, and electric current is 29A, and the time is 300s, and the thickness of Ti+TiC layer is 50～100nm; 5. in vacuum chamber, feed purity and be 99.95% argon gas, oxygen and nitrogen, play the titanium target, depositing TiN Ox layer on matrix, wherein the Ar flow is 60sccm, N
2Flow is 90sccm, O
2Flow is 100sccm, and air pressure is 0.11Pa, and volts DS is 440～490V, and electric current is 37A, and the time is 30min, and the thickness of TiNOx layer is 100～200nm; 6. in vacuum chamber, feed purity and be 99.95% argon gas and oxygen, play silicon target, on matrix, deposit SiO
2Layer, wherein the Ar flow is 60sccm, O
2Flow is 120sccm, and air pressure is 0.2Pa, and volts DS is 400～450V, and electric current is 39A, and the time is 10min, SiO
2The thickness of layer is 60～100nm.
The above only is preferred embodiment of the present utility model, and is in order to restriction the utility model, not all within spirit of the present utility model and principle, any modification of being done, is equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (10)
1. the continuous coiling and coating device of a solar selective absorbing film, comprise uncoiling unit (10), it is characterized in that the vacuum film coating chamber that is provided with includes A low vacuum chamber (20a, 20b), ion processing chamber (30), B low vacuum chamber (40), high vacuum chamber (50), 5 vacuum film coating chambers (60), there is flange seal to be connected between chamber and the chamber, and is provided with the window (2) that metal sheet strip (1) passes through; A low vacuum chamber (20a, 20b), ion processing chamber (30), B low vacuum chamber (40), high vacuum chamber (50), vacuum film coating chamber (60) link to each other with vacuum unit (90); In the outdoor rolling unit (80) that also is provided with of vacuum plating, the Controlling System of continuous coating (100).
2. the continuous coiling and coating device of solar selective absorbing film as claimed in claim 1, it is characterized in that: described uncoiling unit (10) comprising: go up scroll wheel (10-1), uncoiling roller (10-2) is provided with crop (10-3), welds (10-4) in last scroll wheel (10-1) the place ahead with uncoiling roller (10-2); Between 1#S roller (10-5) and 2#S roller (10-7), be provided with inlet metal sheet strip (1) tightening pulley system (10-6); Be provided with cleaning system (10-8) afterwards at 2#S roller (10-7), warm air drying (10-9).
3. the continuous coiling and coating device of solar selective absorbing film as claimed in claim 1, it is characterized in that: described A low vacuum chamber (20a, 20b) comprises the body of having family (20-1), is provided with dividing plate (20-1-1) in it chamber body (20-1) is separated into 2-6 vacuum chamber; Dividing plate (20-1-1) is provided with the window (2) that metal sheet strip (1) passes through; Locate to be provided with sealing roller devices (20-2) in the ingress of chamber body (20-1) or the window (2) of exit or chamber body (20-1) intermediate membrane, power-driven mechanism (20-3) is located on the sealing roller devices (20-2); The top of chamber body (20-1) is provided with loam cake (20-4), is provided with cap sealing (20-6) therebetween, and the bottom is provided with frame (20-5); Body junction, chamber is provided with tightness system (20-7); Be connected with slide valve pump unit (90-1,90-2), lobe pump (90-3) in the chamber body (20-1).
4. the continuous coiling and coating device of solar selective absorbing film as claimed in claim 3, it is characterized in that: described sealing roller devices (20-2) comprises that two rubber rollers (20-2-3) that are parallel to each other are supported on the bearing support (20-2-5) at two ends, transmitting gear (20-2-1) is located at the two ends of two rubber rollers (20-2-3) respectively, is connected with power-driven mechanism (20-3) at an end of rubber rollers (20-2-3) axle; Two ends at rubber rollers (20-2-3) axle are provided with spring (20-2-2), and sealing plate (20-2-4) is located on the rubber rollers (20-2-3); The both sides of the window (2) that passes through at metal sheet strip (1) are provided with the coupling seat (20-2-7) that is connected with the chamber body by gasket (20-2-6), which is provided with spring piece (20-2-8), and plastic plate (20-2-9) is pressed on two rubber rollers (20-2-3).
5. the continuous coiling and coating device of the described solar selective absorbing film of claim 1, it is characterized in that: described ion processing chamber (30) comprises the body of having family (30-1), is provided with dividing plate (30-1-1) in it chamber body (30-1) is separated into 2-4 vacuum chamber; On the two ends of chamber body (30-1) and dividing plate (30-1-1), be provided with the window (2) that metal sheet strip (1) passes through; In chamber body (30-1), be provided with high-pressure ion treatment system (30-2); In chamber body (30-1), be provided with gas distribution system (30-3); The top of chamber body (30-1) is provided with loam cake (30-4), is provided with cap sealing (30-7) therebetween, and the middle part is provided with viewing window (30-5), and the bottom is provided with frame (30-6); Body junction, chamber is provided with tightness system (30-8); Be connected with slide valve pump unit, lobe pump (90-4) in the chamber body (30-1).
6. the continuous coiling and coating device of the described solar selective absorbing film of claim 1, it is characterized in that: described B low vacuum chamber (40) comprises the body of having family (40-1), is provided with dividing plate (40-1-1) in it chamber body (40-1) is separated into 2-4 vacuum chamber; On the two ends of chamber body (40-1) and dividing plate (40-1-1), be provided with the window (2) that metal sheet strip (1) passes through; The top of chamber body (40-1) is provided with loam cake (40-2), is provided with cap sealing (40-3) therebetween, and the middle part is provided with viewing window (40-5), and the bottom is provided with frame (40-6); Body junction, chamber is provided with tightness system (40-4); Be connected with slide valve pump unit, lobe pump (90-5) in the chamber body (40-1).
7. the continuous coiling and coating device of the described solar selective absorbing film of claim 1, it is characterized in that: described high vacuum chamber (50) comprises the body of having family (50-1), is provided with dividing plate (50-1-1) in it chamber body (50-1) is separated into 2-4 vacuum chamber; On the two ends of chamber body (50-1) and dividing plate (50-1-1), be provided with the window (2) that metal sheet strip (1) passes through; The top of chamber body (50-1) is provided with loam cake (50-2), is provided with cap sealing (50-4) therebetween, and the bottom is provided with frame (50-3); Body junction, chamber is provided with tightness system (50-5); Be connected with diffusion pump, slide valve pump unit, lobe pump (90-6) in the chamber body (50-1).
8. the continuous coiling and coating device of solar selective absorbing film as claimed in claim 1, it is characterized in that: described coating chamber (60) comprises the body of having family (60-1); Be provided with dividing plate (60-1-1) in it chamber body (60-1) is separated into 2-4 vacuum chamber; On the two ends of chamber body (60-1) and dividing plate (60-1-1), be provided with the window (2) that metal sheet strip (1) passes through; In chamber body (60-1), be provided with plane magnetic control target or electronics is robbed (60-3); The top of chamber body (60-1) is provided with loam cake (60-2), is provided with cap sealing (60-6) therebetween, and the middle part is provided with viewing window (60-4), and the bottom is provided with frame (60-5); Body junction, chamber is provided with tightness system (60-7).
9. the continuous coiling and coating device of solar selective absorbing film as claimed in claim 1, it is characterized in that: described rolling unit (80) includes and be provided with pasting protective film mechanism (80-1) on the outdoor metal sheet strip of vacuum plating (1), is provided with outlet metal sheet strip (1) tightening pulley system (80-3) between 3#S roller (80-2) and the 4#S roller (80-4); Be provided with shearing (80-5) afterwards at 4#S roller (80-4), pinch roll (80-6) batches (80-7), unloads volume (80-8).
10. the continuous coiling and coating device of solar selective absorbing film as claimed in claim 1, it is characterized in that: the Controlling System of described continuous coating apparatus (100) includes computer centralized Control rack (100-1), process control interface module rack (100-2), vacuum system control rack (100-3), transmission system control rack (100-4), vacuum ionic is handled power supply cabinet continuous coating power supply cabinet (100-5), rolling operation subcontrol rack (100-6) and uncoiling operation subcontrol rack (100-7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200020654U CN201560233U (en) | 2009-08-26 | 2009-08-26 | Continuous winding plating device for solar energy selectivity absorption film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200020654U CN201560233U (en) | 2009-08-26 | 2009-08-26 | Continuous winding plating device for solar energy selectivity absorption film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201560233U true CN201560233U (en) | 2010-08-25 |
Family
ID=42625380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200020654U Expired - Lifetime CN201560233U (en) | 2009-08-26 | 2009-08-26 | Continuous winding plating device for solar energy selectivity absorption film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201560233U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103384637A (en) * | 2011-02-24 | 2013-11-06 | 株式会社尼康 | Substrate processing apparatus |
| CN106906446A (en) * | 2015-12-23 | 2017-06-30 | 深圳市拓日新能源科技股份有限公司 | A kind of vacuum coating method and vacuum coating equipment for collecting hotting mask |
-
2009
- 2009-08-26 CN CN2009200020654U patent/CN201560233U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103384637A (en) * | 2011-02-24 | 2013-11-06 | 株式会社尼康 | Substrate processing apparatus |
| CN103384637B (en) * | 2011-02-24 | 2015-09-09 | 株式会社尼康 | Substrate board treatment |
| CN106906446A (en) * | 2015-12-23 | 2017-06-30 | 深圳市拓日新能源科技股份有限公司 | A kind of vacuum coating method and vacuum coating equipment for collecting hotting mask |
| CN106906446B (en) * | 2015-12-23 | 2019-09-03 | 深圳市拓日新能源科技股份有限公司 | A kind of vacuum coating method and vacuum coating equipment collecting hotting mask |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101649448B (en) | Continuous surface vacuum coater of metal sheet strip | |
| CN101649447B (en) | Continuous coiling and coating device of solar selective absorbing film | |
| CN201560233U (en) | Continuous winding plating device for solar energy selectivity absorption film | |
| CN109207926B (en) | Enhanced aluminum-plated film and production process thereof | |
| WO2009024460A2 (en) | System and process for the continous vacuum coating of a material in web form | |
| CN101093115A (en) | Nickel-chromium heat collection film for conversion of light and heat of solar energy | |
| CN110004427A (en) | Flexible continuity magnetron sputtering deposition plating work chamber partition method | |
| CN201553778U (en) | Metal thin sheet strip continuous proceeding surface vacuum film coating device | |
| CN101768725B (en) | Continuous preparation method of selective solar absorbing film | |
| WO2022047948A1 (en) | Method for preparing aluminum-based conductive thin film with multilayer composite structure | |
| CN104775102B (en) | The vacuum coating system that volume to volume magnetic control sputtering cathode is combined with column multi-arc source | |
| CN201437551U (en) | Continuous winding coating equipment | |
| CN215050676U (en) | Multifunctional vacuum coating equipment | |
| WO2022116434A1 (en) | Perovskite thin film rhythmic deposition production method, and device | |
| CN203429245U (en) | Winding evaporative type vacuum coating equipment | |
| CN219527189U (en) | Plastic coating and film coating integrated machine | |
| CN216891198U (en) | Novel volume to volume vacuum coating equipment of vacuum container structure | |
| JP2011246788A (en) | Method of forming oxide transparent conductive film, sputtering apparatus, and method of manufacturing photoelectric conversion element | |
| CN205152317U (en) | Vertical coiling formula strap paper tinsel vacuum ion coating machine | |
| CN102358937A (en) | Continuous preparation method of cermet conposite membrane with large-area flexible metal substrate and high heat absorption | |
| CN102409310A (en) | Method for continuously coating gradient cermet film by flexible metal substrate double target co-sputtering | |
| CN102220559A (en) | Production method and production device of flat solar-energy heat-absorbing film-coated plate | |
| CN1338531A (en) | Technological arrangement of continuous in-line plating equipment for multi-layer film | |
| CN217757641U (en) | Double-sided composite coating equipment for current collector electrode of lithium battery | |
| WO2021072360A1 (en) | Thin film deposition systems and deposition methods for forming photovoltaic cells |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent for invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Fan Duowang Inventor after: Fan Duojin Inventor after: Ling Xiaoming Inventor after: Kong Linggang Inventor before: Fan Duowang Inventor before: Fan Duojin Inventor before: Ling Xiaoming Inventor before: Kong Linggang |
|
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Gansu Jinchuan Solar Co., Ltd. Assignor: Lanzhou Dacheng Technology Co., Ltd. Contract record no.: 2012620000031 Denomination of utility model: Continuous winding plating device for solar energy selectivity absorption film Granted publication date: 20100825 License type: Exclusive License Record date: 20120903 |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100825 |