The cutting mechanism of Buddha's warrior attendant line shear
Technical field
The utility model relates to a kind of multi-thread cutting technique, particularly relates to a kind of cutting mechanism that is applicable to the Buddha's warrior attendant line shear of monocrystal silicon.
Background technology
Multi-thread cutting technique is present more advanced in the world silicon rod process technology, and its principle is that the steel wire by a high-speed motion drives and attached to the cutting blade material on the steel wire hard brittle materials such as semiconductor rubbed, thereby reaches the cutting purpose.Line cutting technology has been compared with traditional knife saw sheet, grinding wheel and interior circle cutting has the efficient height, production capacity height, precision advantages of higher.
Having now silicon rod, especially silicon single crystal rod carries out in the process, for conveniently silicon single crystal rod being carried out operations such as follow-up polishing and section, needs in advance described silicon single crystal rod is processed into the cube with four sides fillet.In knowing the process technology of knowing, common way is described silicon single crystal rod to be placed between the emery wheel of two opposing parallel carry out the face grinding, again four radian faces are carried out grinding afterwards, when four radian faces to described silicon single crystal rod carry out grinding, described emery wheel need be done rotation at a high speed around the axle center of this silicon single crystal rod, this silicon single crystal rod being placed rotation is the grinding of carrying out four radian faces between the emery wheel again, the problem that this way is brought is: because the quality of emery wheel is heavier, and the angular speed of rotation is bigger, difficult control during rotation, if have deviation then can have influence on the accuracy of carrying out grinding at this silicon single crystal rod slightly, and then have influence on the quality of this silicon single crystal rod; The more important thing is, adopt the method for grinding to carry out round as a ball to the crystal silicon rod, in the process of grinding, need to add water or wet goods liquid serves as lapping liquid, become mud after a part of crystal silicon material that is ground off by emery wheel and lapping liquid are mixed during this time, so the difficulty that reclaims is very big, also relatively more serious to workpiece pollution, can cause follow-up cleaning very inconvenient to equipment and workpiece.
So, how a kind of linear cutting equipment is provided, need not grind or the means of grinding are reached the round as a ball purpose of crystal silicon rod, so that the material that is cut can become block, not only be beneficial to recovery, save cost, avoid above-described shortcoming, real is the present problem demanding prompt solution of dealer of association area.
Summary of the invention
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of cutting mechanism of Buddha's warrior attendant line shear, need not grind or the means of grinding are reached the round as a ball purpose of crystal silicon rod, make the material that is cut to become block and be beneficial to reclaim and save cost.
Reach other relevant purposes for achieving the above object, the utility model provides a kind of cutting mechanism of Buddha's warrior attendant line shear, in order to four crystal silicon ingots for the treatment of round as a ball that have end face, bottom surface and connect described end face and bottom surface are carried out round as a ball cutting operation, it is characterized in that described cutting mechanism comprises: anchor clamps and at least one Buddha's warrior attendant line.Described anchor clamps are in order to the end face and the bottom surface of the described crystal silicon ingot of clamping, and described anchor clamps can axle be rotated among end face that runs through described crystal silicon ingot and bottom surface; Described Buddha's warrior attendant line and described crystal silicon ingot treat round as a ball opposing parallel setting, and described Buddha's warrior attendant line is positioned on described four circumference for the treatment of round as a ball institute's structure circle, to determine the diameter for the treatment of institute's structure circle of round as a ball of described crystal silicon ingot; Wherein, the described Buddha's warrior attendant line of high-speed cruising, described anchor clamps of low speed rotation afterwards, when the crystal silicon ingot of low speed rotation contacted with the Buddha's warrior attendant line of high-speed cruising, it treated round as a ball by described Buddha's warrior attendant line cutting.
In the cutting mechanism of the Buddha's warrior attendant line shear of the utility model, described crystal silicon ingot is a silicon single crystal rod.Described anchor clamps one end has the driving motor rotating.
In the cutting mechanism of the Buddha's warrior attendant line shear of the utility model, described Buddha's warrior attendant line can also be two, be set in parallel in respectively described crystal silicon ingot wherein two treat round as a ball, so, be not limited thereto, in another embodiment, described Buddha's warrior attendant line can also be four, treats round as a ball for four that are set in parallel in described crystal silicon ingot respectively.
In the cutting mechanism of the Buddha's warrior attendant line shear of the utility model, the speed of service of the Buddha's warrior attendant line of described high-speed cruising is 1000m/min; The rotary speed of the anchor clamps of described low speed rotation is 0.5~2mm/min.
As mentioned above, the cutting mechanism of the Buddha's warrior attendant line shear of the utility model is with round as a ball the opposing parallel setting for the treatment of of Buddha's warrior attendant line and crystal silicon ingot, in high-speed cruising Buddha's warrior attendant line and low speed rotation anchor clamps, when the crystal silicon ingot of low speed rotation contacts with the Buddha's warrior attendant line of high-speed cruising, it treats round as a ball by described Buddha's warrior attendant line cutting, be beneficial to recovery so that the silicon materials that are cut can become block and save cost, the method that has also solved simultaneously the available technology adopting grinding is carried out round as a ball to the crystal silicon rod, after being mixed, a part of crystal silicon material that is ground off by emery wheel and lapping liquid become mud, the difficulty that reclaims is very big, to problems such as workpiece pollution are also more serious.
Description of drawings
Fig. 1 is shown as the forward schematic diagram of concrete enforcement state of the cutting mechanism of Buddha's warrior attendant line shear of the present utility model.
Fig. 2 is shown as the side schematic view of concrete enforcement state of the cutting mechanism of Buddha's warrior attendant line shear of the present utility model.
Fig. 3 is shown as another of cutting mechanism of Buddha's warrior attendant line shear of the present utility model and implements the side schematic view of state.
Fig. 4 is shown as the side schematic view of another enforcement state of the cutting mechanism of Buddha's warrior attendant line shear of the present utility model.
The specific embodiment
Below by specific instantiation embodiment of the present utility model is described, those skilled in the art can understand other advantages of the present utility model and effect easily by the content that this specification disclosed.The utility model can also be implemented or be used by other different concrete real mode, and the every details in this specification also can be based on different viewpoints and application, carries out various modifications or change under the spirit of the present utility model not deviating from.
First embodiment:
See also Fig. 1 to Fig. 2, Fig. 1 is shown as the forward schematic diagram of concrete enforcement state of the cutting mechanism of Buddha's warrior attendant line shear of the present utility model; Fig. 2 is shown as the side schematic view of concrete enforcement state of the cutting mechanism of Buddha's warrior attendant line shear of the present utility model.Need to prove, the diagram that is provided in the present embodiment only illustrates basic conception of the present utility model in a schematic way, satisfy and only show the assembly relevant in graphic but not component count, shape and size drafting when implementing according to reality with the cutting mechanism of Buddha's warrior attendant line shear of the present utility model, kenel, quantity and the ratio of each assembly can be a kind of random change during its actual enforcement, and its assembly layout kenel also may be more complicated.
As shown in the figure, the utility model provides a kind of cutting mechanism of Buddha's warrior attendant line shear, in order to having end face, bottom surface (indicate) and four crystal silicon ingots for the treatment of round as a ball 11 1 that connect described end face and bottom surface carry out round as a ball cutting operation, in present embodiment, the utility model provides a kind of cutting mechanism of Buddha's warrior attendant line shear only to treat that to four of described silicon single crystal rod round as a ball 11 is carried out cutting operation, described silicon single crystal rod also has relative respectively first to be treated flour milling (indicating) and second and treats flour milling (indicating), treats that treating flour milling and second between described first for round as a ball 11 treats between the flour milling for four that mention in the utility model.Described cutting mechanism comprises: anchor clamps 2 and at least one Buddha's warrior attendant line 3.
Described anchor clamps 2 are in order to the end face and the bottom surface of the described crystal silicon ingot 1 of clamping, and described anchor clamps 2 can axle (X in the diagram) be rotated among end face that runs through described crystal silicon ingot and bottom surface; In present embodiment, described anchor clamps 2 one ends have the driving motor rotating, particularly, drive two chucks of described anchor clamps 2 when described motor rotates, and then drive place the crystal silicon ingot 1 of anchor clamps 2 to be rotated.
Described Buddha's warrior attendant line 3 is one, with round as a ball the 11 opposing parallel setting for the treatment of with described crystal silicon ingot 1 of described Buddha's warrior attendant line 3; In present embodiment, described Buddha's warrior attendant line 3 has the Buddha's warrior attendant line of diamond dust for the top layer, select for use this kind Buddha's warrior attendant line in process, to avoid using lapping liquid with abrasive sand, not only reduced the materials cost, also solved the workpiece cleaning inconvenience, the lapping liquid recovery difficult is big, and the problem serious to workpiece contamination.In present embodiment, described is that the line of Buddha's warrior attendant line is directly for 0.3mm.
Described Buddha's warrior attendant line 3 is positioned on described four circumference for the treatment of round as a ball 11 structure circles, to determine the diameter for the treatment of institute's structure circle of round as a ball 11 of described crystal silicon ingot 1; In present embodiment, round as a ball 11 the diameter of institute's structure circle is treated to friendship with described in the line of described Buddha's warrior attendant line 3 footpath, and in other words, described Buddha's warrior attendant line 3 is set at described treating on round as a ball 11 the circumference of institute's structure circle.What need indicate is that described Buddha's warrior attendant line 3 is determined according to concrete processing needs with the actual pitch for the treatment of round as a ball 11 of crystal silicon ingot 1.
The described Buddha's warrior attendant line 3 of high-speed cruising, in present embodiment, the speed of service of described Buddha's warrior attendant line 3 is 1000m/min.
The described anchor clamps 2 of low speed rotation, when the crystal silicon ingot 1 of low speed rotation contacts with the Buddha's warrior attendant line 3 of high-speed cruising, described crystal silicon ingot 1 treat round as a ball 11 by 3 cuttings of described Buddha's warrior attendant line.In concrete embodiment, the rotary speed of the anchor clamps of described low speed rotation is between 0.5~2mm/min, so that described anchor clamps 2 drive that the crystal silicon ingot 1 that places anchor clamps 2 is rotated and during Buddha's warrior attendant line 3 high-speed cruisings, carry out the cutting of round as a ball mode at described crystal silicon ingot 1, and then guarantee that the waste material that cuts down becomes block, be beneficial to reclaim reproduce.
Second embodiment:
See also Fig. 3, Fig. 3 is shown as another of cutting mechanism of Buddha's warrior attendant line shear of the present utility model and implements the side schematic view of state.In present embodiment, described Buddha's warrior attendant line 3 can also be two, be set in parallel in respectively described crystal silicon ingot 1 wherein two treat round as a ball 11, particularly, described two Buddha's warrior attendant lines 3 are separately positioned on described treating on round as a ball 11 the circumference of institute's structure circle.Adopt a Buddha's warrior attendant line to compare in first embodiment, two Buddha's warrior attendant lines of employing are disposable in the present embodiment can treat that round as a ball face carries out round as a ball cutting, has higher operating efficiency to two.
Second embodiment:
See also Fig. 4, Fig. 4 is shown as the side schematic view of another enforcement state of the cutting mechanism of Buddha's warrior attendant line shear of the present utility model.In present embodiment, described Buddha's warrior attendant line 3 can also be four, be set in parallel in respectively described crystal silicon ingot 1 wherein four treat round as a ball 11, particularly, described four Buddha's warrior attendant lines 3 are separately positioned on described treating on round as a ball 11 the circumference of institute's structure circle.One of employing or two Buddha's warrior attendant lines are compared in first embodiment and second embodiment, and four Buddha's warrior attendant lines of employing are disposable in the present embodiment can treat that round as a ball face carries out round as a ball cutting, has higher operating efficiency to four.So, the Buddha's warrior attendant line quantity of more than enumerating in the cutting mode to be adopted is not limited to above statement, can take the circumstances into consideration to increase or delete according to the demand of concrete operation, therefore, such as have in the affiliated technical field and know that usually the knowledgeable modifies or changes not breaking away from all equivalences of being finished under spirit that the utility model discloses and the technological thought, must be contained by claim described later.
In sum, the cutting mechanism of the Buddha's warrior attendant line shear of the utility model is with round as a ball the opposing parallel setting for the treatment of of Buddha's warrior attendant line and crystal silicon ingot, in high-speed cruising Buddha's warrior attendant line and low speed rotation anchor clamps, when the crystal silicon ingot of low speed rotation contacts with the Buddha's warrior attendant line of high-speed cruising, it treats round as a ball by described Buddha's warrior attendant line cutting, be beneficial to recovery so that the silicon materials that are cut can become block and save cost, the method that has also solved simultaneously the available technology adopting grinding is carried out round as a ball to the crystal silicon rod, after being mixed, a part of crystal silicon material that is ground off by emery wheel and lapping liquid become mud, the difficulty that reclaims is very big, to problems such as workpiece pollution are also more serious and the tool high industrial utilization.
The foregoing description is illustrative principle of the present utility model and effect thereof only, but not is used to limit the utility model.Any personage who has the knack of this technology all can be under spirit of the present utility model and category, and the foregoing description is modified or changed.