CN201424377Y - Hydrogenation furnace - Google Patents
Hydrogenation furnace Download PDFInfo
- Publication number
- CN201424377Y CN201424377Y CN2008202233561U CN200820223356U CN201424377Y CN 201424377 Y CN201424377 Y CN 201424377Y CN 2008202233561 U CN2008202233561 U CN 2008202233561U CN 200820223356 U CN200820223356 U CN 200820223356U CN 201424377 Y CN201424377 Y CN 201424377Y
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- chassis
- well heater
- hydrogenation furnace
- electrode assemblie
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- Prior art date
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Abstract
The utility model discloses a hydrogenation furnace, which comprises a furnace barrel (1), a chassis (2), an electrode component (3), a heater (4), a insulation cover (5), a device supporting bracket(6), a gas outlet (8) and a mixed gas inlet (9), wherein the furnace barrel (1) is connected together with the chassis (2); the heater (4) and the insulation cover (5) are arranged inside the furnacebarrel (1); the heater (4) is fixed on the electrode component (3), the electrode component (3) is installed on the chassis (2) through an electrode seat on the chassis, and the chassis (2) is insulated to the electrode component (3); the insulation cover (5) is directly arranged on the chassis (2), the water cooling high-temperature gas outlet (8) is welded on the chassis (2), and the top part ofthe furnace barrel (1) is provided with the mixed gas inlet (9); and the entire furnace body is installed on the supporting bracket (6). The hydrogenation furnace is convenient and safe to use and has high efficiency.
Description
Technical field
The utility model relates to field polysilicon, especially a kind of hydrogenation furnace of producing polysilicon.
Background technology
Can produce a large amount of by products in the production of polysilicon, every production 1kg polysilicon can produce～SiCl4 of 15kg, the way of its processing generally has cold hydrogenation, production tetraethyl silicate, the white carbon black of gas phase, takes out and handle, this several method spring is in production cost height, reactivity hazard is big, complex process is unstable, environmental protection can't be handled a difficult problem, this is energy-saving and cost-reducing for polysilicon factory, and obtaining economic benefit and social benefit is a big bottleneck.The structure of the hot hydrogenation furnace of the Russian SiCl4 of original tradition is to be made of stove tube, whole plate-type chassis and upper cover, and cooling water outlet, cooling water cavity, entrance of cooling water are arranged on the stove tube.The Russian hydrogenation furnace of former tradition is at the dull prolonged low grade fever combined running of the design defect of chassis structure, electrode assemblie, consuming time, power consumption, consumption worker, and stay-warm case is made of metal and at high temperature can be produced its metal ion pollution processing medium of corrosion.
The utility model content
The purpose of this utility model is to provide a kind of hydrogenation furnace, this hydrogenation furnace comprises stove tube 1, the chassis 2 of band cooling chamber, electrode assemblie 3, carbon-carbon composite U type well heater 4, stay-warm case 5, equipment support 6 constitutes, water-cooled visor 7, water-cooled high temperature air outlet 8 and combi inlet port 9, wherein be connected with flange between stove tube 1 and the chassis 2, there are carbon-carbon composite U type well heater 4 and stay-warm case 5 in stove tube 1 inside, well heater 4 is positioned at stay-warm case 5 inside, well heater 4 is by being bolted on the electrode assemblie 3, electrode assemblie 3 is installed on the chassis 2 by the electrode holder on the chassis, and chassis 2 and electrode assemblie 3 are insulating; Stay-warm case 5 directly is placed on the chassis 2, and water-cooled high temperature air outlet 8 is welded on the chassis 2, at the top of stove tube 1 combi inlet port 9 is arranged.Whole body of heater is installed on the bracing frame 6.
Stove tube 1 is as hot hydrogenation chamber, and electrode assemblie 3 gives carbon-carbon composite U type well heater 4 power supplies as electrical conductor, and wherein U type well heater can compensate its thermal distortion, and stay-warm case 5 is used for the thermal field of muff heater 4.
Wherein well heater 4 to layout, makes whole hot hydrogenation thermograde change not too greatly along circumferential, ray, and thermal field is evenly distributed.
As further improvement, water-cooled visor 7 is made by the vitreous silica eyeglass, is used to observe the response situation of reaction chamber.
As further improvement, at electrode assemblie 3 outside surfaces elastic compensating device 16 is installed, be used under the high temperature insulation covering being carried out the axial compression force compensating, guarantee the stopping property under the high temperature.
Description of drawings
The utility model will illustrate by example and with reference to the mode of accompanying drawing, wherein:
Fig. 1 is hot hydrogenation furnace assembly structure synoptic diagram.
Fig. 2 is the electrode scheme of installation.
Fig. 3 is the chassis vertical view of the inside of hydrogenation furnace.
Embodiment
The hot hydrogenation furnace assembly structure of the utility model SiCl4 as shown in Figure 1, the chassis 2, electrode assemblie 3, carbon-carbon composite U type well heater 4, stay-warm case 5, the equipment support 6 that comprise stove tube 1, band cooling chamber constitute, water-cooled visor 7, water-cooled high temperature air outlet 8 and combi inlet port 9
Stove tube 1 is as hot hydrogenation chamber, and electrode assemblie 3 gives carbon-carbon composite U type well heater 4 power supplies as electrical conductor, and well heater 4 is positioned at stay-warm case 5 inside, and wherein U type well heater can compensate its thermal distortion, and stay-warm case 5 is used for the thermal field of muff heater 4.As further improvement, water-cooled visor 7 is made by the vitreous silica eyeglass, is used to observe the response situation of reaction chamber.
Be connected with flange between stove tube 1 and the chassis 2, there are carbon-carbon composite U type well heater 4 and stay-warm case 5 in stove tube 1 inside, well heater 4 is by being bolted on the electrode assemblie 3, and electrode assemblie 3 is installed on the chassis 2 by the electrode holder on the chassis, and chassis 2 and electrode assemblie 3 are insulating; Stay-warm case 5 directly is placed on the chassis 2, and water-cooled high temperature air outlet 8 is welded on the chassis 2, at the top of stove tube 1 combi inlet port 9 is arranged.Whole body of heater is installed on the bracing frame 6.
Gas mixture enters reaction chamber in the stay-warm case by inlet mouth 9 and via pore on the stay-warm case 5, carries out hot hydrogenation in the thermal field that U type well heater 4 forms, and enters the back operation by water-cooled high temperature air outlet 8 thereafter.
As shown in Figure 2, wherein the chassis 2 with cooling chamber comprises upper plate 11, lower plate 12 and spacer flanger ring 13, upper plate 11, lower plate 12 and spacer flanger ring 13 are by being welded together, chassis rigidity and intensity have been guaranteed, upper plate 11, lower plate 12 intermediate formation water cavities 14 (as cooling chamber), the cooling by 14 has solved the cooling problem of electrode holder inner seal liner; Wherein 15 is insulating part, between chassis 2 and electrode assemblie 3, is used for chassis 2 and electrode assemblie 3 insulation are opened.
As further improvement, at electrode assemblie 3 outside surfaces elastic compensating device 16 is installed, be used under the high temperature insulation covering being carried out the axial compression force compensating, guarantee the stopping property under the high temperature.
Can monitor inner response situation by range estimation or instrument at water-cooled visor 7 places.
Fig. 3 is the chassis vertical view of the inside of hydrogenation furnace, and wherein well heater 4 to layout, makes whole hot hydrogenation thermograde change not too greatly along circumferential, ray, and thermal field is evenly distributed.
Disclosed all features in this specification sheets, or the step in disclosed all methods or the process except mutually exclusive feature and/or step, all can make up by any way.
Disclosed arbitrary feature in this specification sheets (comprising any accessory claim, summary and accompanying drawing) is unless special narration all can be replaced by other equivalences or the alternative features with similar purpose.That is, unless special narration, each feature is an example in a series of equivalences or the similar characteristics.
The utility model is not limited to aforesaid embodiment.The utility model expands to any new feature or any new combination that discloses in this manual, and the arbitrary new method that discloses or step or any new combination of process.
Claims (6)
1, a kind of hydrogenation furnace is characterized in that, comprises stove tube (1), chassis (2), electrode assemblie (3), well heater (4), stay-warm case (5), equipment support (6), air outlet (8) and combi inlet port (9); Wherein stove tube (1) links together with chassis (2); Inner having heaters of stove tube (1) (4) and stay-warm case 5; Well heater (4) is fixed on the electrode assemblie (3), and well heater (4) is positioned at stay-warm case (5) inside, and electrode assemblie (3) is installed on the chassis (2) by the electrode holder on the chassis, and chassis (2) and electrode assemblie (3) are insulating; Stay-warm case (5) directly is placed on the chassis (2), and water-cooled high temperature air outlet (8) is welded on the chassis (2), and combi inlet port (9) is arranged on stove tube (1).
2, hydrogenation furnace as claimed in claim 1, it is characterized in that: described chassis (2) comprise upper plate (11), lower plate (12), spacer flanger ring (13), water cavity (14) and insulating part (15), upper plate (11), lower plate (12) and spacer flanger ring (13) weld together, upper plate (11), lower plate (12) form water cavity (14) with spacer flanger ring (13), and insulating part (15) is positioned between chassis (2) and the electrode assemblie (3).
3, hydrogenation furnace as claimed in claim 1 is characterized in that: hydrogenation furnace further comprises water-cooled visor (7), and it is made by the vitreous silica eyeglass, and water-cooled visor (7) is located by range estimation or instrument inner response situation to be monitored.
4, hydrogenation furnace as claimed in claim 1 is characterized in that: described well heater (4) along circumferential, ray to layout.
5, hydrogenation furnace as claimed in claim 1 is characterized in that: described well heater (4) is a carbon-carbon composite U type well heater.
6, hydrogenation furnace as claimed in claim 1 is characterized in that: described electrode assemblie (3) outside surface is equipped with elastic compensating device (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008202233561U CN201424377Y (en) | 2008-12-12 | 2008-12-12 | Hydrogenation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008202233561U CN201424377Y (en) | 2008-12-12 | 2008-12-12 | Hydrogenation furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201424377Y true CN201424377Y (en) | 2010-03-17 |
Family
ID=42023816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008202233561U Expired - Fee Related CN201424377Y (en) | 2008-12-12 | 2008-12-12 | Hydrogenation furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201424377Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101891199A (en) * | 2010-07-08 | 2010-11-24 | 山东伟基炭科技有限公司 | Method for preventing graphite tube heater of hydrogenation furnace from being damaged and adopted protective sleeve |
| CN102659109A (en) * | 2012-04-27 | 2012-09-12 | 四川新光硅业科技有限责任公司 | Polycrystalline silicon reduction furnace |
| CN102674361A (en) * | 2012-05-09 | 2012-09-19 | 天津大学 | Top structure of inner container of energy-saving type polysilicon reduction furnace and implementation method for top structure |
-
2008
- 2008-12-12 CN CN2008202233561U patent/CN201424377Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101891199A (en) * | 2010-07-08 | 2010-11-24 | 山东伟基炭科技有限公司 | Method for preventing graphite tube heater of hydrogenation furnace from being damaged and adopted protective sleeve |
| CN102659109A (en) * | 2012-04-27 | 2012-09-12 | 四川新光硅业科技有限责任公司 | Polycrystalline silicon reduction furnace |
| CN102674361A (en) * | 2012-05-09 | 2012-09-19 | 天津大学 | Top structure of inner container of energy-saving type polysilicon reduction furnace and implementation method for top structure |
| CN102674361B (en) * | 2012-05-09 | 2014-04-02 | 天津大学 | Top structure of inner container of energy-saving type polysilicon reduction furnace and implementation method for top structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100317 Termination date: 20131212 |