CN101891199A - Method for preventing graphite tube heater of hydrogenation furnace from being damaged and adopted protective sleeve - Google Patents
Method for preventing graphite tube heater of hydrogenation furnace from being damaged and adopted protective sleeve Download PDFInfo
- Publication number
- CN101891199A CN101891199A CN 201010221627 CN201010221627A CN101891199A CN 101891199 A CN101891199 A CN 101891199A CN 201010221627 CN201010221627 CN 201010221627 CN 201010221627 A CN201010221627 A CN 201010221627A CN 101891199 A CN101891199 A CN 101891199A
- Authority
- CN
- China
- Prior art keywords
- tube heater
- graphite tube
- sheath
- hydrogenation furnace
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses a method for preventing a graphite tube heater of a hydrogenation furnace from being damaged and an adopted protective sleeve and particularly relates to the hydrogenation furnace for producing polysilicon. The method for preventing the graphite tube heater of the hydrogenation furnace from being damaged is characterized in that a sheath (1) is sleeved outside the root of the graphite tube heater, at least two annular plates (2) which are axially arranged at intervals are arranged on the outer side surface of the sheath (1), and an annular groove (3) is formed between two adjacent annular plates (2). In the invention, the annular groove arranged on the sheath is utilized to form a maze structure to buffer washing of an air flow on the root of the heater, and therefore, the graphite heater is not easy to break at the root, and the service life of the graphite tube heater is prolonged.
Description
Technical field
The present invention relates to the polysilicon manufacturing technology, particularly the hydrogenation furnace of production of polysilicon specifically is a kind of method and graphite tube heater protective sleeve that prevents that the hydrogenation furnace graphite tube heater from damaging.
Background technology
At present, in the polysilicon manufacturing technology, hydrogenation furnace is the key equipment that Siemens Method is produced polysilicon, has adopted a large amount of graphite tube heater in the hydrogenation furnace.The about 50mm of the external diameter of graphite tube heater, the about 1800mm of length, two heating tubes are a pair of, and this well heater is vertically installed, and the top links into an integrated entity with the graphite crossbeam, and the bottom has copper electrode to be connected with it.Hydrogenation furnace is by the temperature of graphite tube heater heating to 1400 ℃ in use, feeds 6kgf/cm then
2Reactant gases, react.Because the air-flow in the stove is to wash away from top to bottom, therefore well heater rocks in hydrogenation furnace, and high temperature, highly compressed air-flow wash away the root formation of well heater easily, cause heater temperature inhomogeneous, from its root fracture, shortened the work-ing life of well heater easily.
Summary of the invention
In order to overcome above shortcomings in the prior art, the invention provides a kind of method that prevents that graphite tube heater from damaging, it can prolong the work-ing life of graphite tube heater greatly.
The technical scheme that method of the present invention adopted is: a kind of method that prevents that the hydrogenation furnace graphite tube heater from damaging, it is suit one sheath outside the root of graphite tube heater, the outer side of this sheath is provided with at least two annular plates that are provided with along its axially spaced-apart, forms annular recesses between adjacent two annular plates.
The present invention is by suit one sheath outside the root of graphite tube heater, utilizes the annular recesses that is provided with on the sheath to form maze-type structure and comes buffer gas flow washing away the heating tube root.When feeding reactant gases in the hydrogenation furnace; air-flow washes away from top to bottom; this protective sleeve has stopped air-flow directly washing away graphite heating pipe root on the one hand; simultaneously; the annular recesses that is provided with on the sheath has formed maze-type structure; air-flow has been produced a kind of shock absorption, alleviated air-flow washing away the heating tube root.
Sheath among the present invention and annular plate can adopt the branch body structure, but consider the simple and reliability of structure, but described sheath and annular plate one are made.
In order to guarantee to use reliably, the sheath among the present invention and the material of annular plate all adopt graphite material.
Its cross-sectional shape of groove among the present invention on the sheath can adopt Any shape, but in order to reduce the probability that air-flow arrives the well heater root as far as possible, the cross section of described groove can be rectangle or U-shaped or V-arrangement.
The technical scheme of graphite tube heater protective sleeve of the present invention is: a kind of hydrogenation furnace graphite tube heater protective sleeve; comprise the sheath that can be sleeved on the graphite tube heater outside; the outer side of sheath is provided with at least two annular plates that are provided with along its axially spaced-apart, forms annular recesses between adjacent two annular plates.
Sheath among the present invention and annular plate can adopt the branch body structure, but consider the simple and reliability of structure, and described sheath and annular plate one are made.
In order to protect the graphite heating pipe, the termination of a wherein end of described sheath is a pyramidal structure.During use, this conical ends is provided with up, and this kind design helps air-guiding, avoids air-flow to the washing away of heating tube, thereby the protection heating tube is not damaged.
Its cross-sectional shape of described groove can adopt Any shape, but in order to reduce the probability that air-flow arrives the well heater root as far as possible, the cross section of described groove can be rectangle or U-shaped or V-arrangement.
The invention has the beneficial effects as follows, it has solved hydrogenation furnace graphite tube heater root well and has washed away because of being subjected to high-temperature high-pressure air flow by simple structure design, causes the temperature inequality, the technical problem of fracture takes place easily, has prolonged the work-ing life of graphite tube heater greatly.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention 1;
Fig. 2 is the cross-sectional schematic of graphite tube heater protective sleeve in the embodiment of the invention 1;
Fig. 3 is that the groove cross section is the cross-sectional schematic of the graphite tube heater protective sleeve of U-shaped;
Fig. 4 is that the groove cross section is the cross-sectional schematic of the graphite tube heater protective sleeve of V-arrangement.
Among the figure, 1, sheath, 2, annular plate, 3, groove, 4, graphite tube heater.
Embodiment
The present invention is further illustrated below in conjunction with the embodiment of accompanying drawing and indefiniteness:
As shown in Figure 1, be the local structure cross-sectional schematic of the graphite tube heater in the hydrogenation furnace used of production of polysilicon.In hydrogenation furnace, graphite tube heater 4 is vertically to install, and its bottom has copper electrode to be connected (electrode does not draw among the figure) with it.Root in graphite tube heater 4 is set with a protective sleeve; as shown in Figure 2; this protective sleeve comprises the sheath 1 that can be sleeved on graphite tube heater 4 outsides; the outer side of sheath 1 is provided with a plurality of annular plates 2 that are provided with along its axially spaced-apart; form annular recesses 3 between adjacent two annular plates 2, the whole protecting cover is maze-type structure.Wherein, sheath 1 and annular plate 2 one are made, and are graphite material.In order to protect the graphite heating pipe, sheath 1 superposed termination is designed to pyramidal structure, and this kind design helps air-guiding, avoids air-flow to the washing away of heating tube, thereby the protection heating tube is not damaged.
The present invention utilizes protective sleeve to stop air-flow directly washing away graphite heating pipe root on the one hand; on the other hand; the maze-type structure design has produced certain shock absorption to air-flow; alleviated air-flow washing away to the heating tube root; make graphite heater be not easy to damage, prolonged the work-ing life of graphite heater greatly.
The cross-sectional shape of the groove 3 among the present invention can be an Any shape, as: can be rectangle (as shown in Figure 2), also can be U-shaped (as shown in Figure 3) or V-arrangement (as described in Figure 4) or other shape.Consider structure design and reduce the probability that air-flow arrives the well heater root as far as possible, the cross section of described groove is preferably rectangle or U-shaped or V-arrangement.
Other parts of the present invention adopt prior art, do not repeat them here.
The foregoing description with the explanation of the present invention of opposing, is not a limitation ot it only, also can make change on this basis, as: sheath 1 and annular plate 2 among the present invention also can adopt split-type structural etc.
Claims (8)
1. method that prevents that the hydrogenation furnace graphite tube heater from damaging, it is characterized in that: suit one sheath (1) outside the root of graphite tube heater, the outer side of this sheath (1) is provided with at least two annular plates (2) that are provided with along its axially spaced-apart, forms annular recesses (3) between adjacent two annular plates (2).
2. the method that prevents that the hydrogenation furnace graphite tube heater from damaging according to claim 1 is characterized in that: described sheath (1) is made with annular plate (2) one.
3. the method that prevents that the hydrogenation furnace graphite tube heater from damaging according to claim 1 and 2, it is characterized in that: described sheath (1) and annular plate (2) are graphite material.
4. the method that prevents that the hydrogenation furnace graphite tube heater from damaging according to claim 1 and 2, it is characterized in that: the cross section of described groove (3) is rectangle or U-shaped or V-arrangement.
5. hydrogenation furnace graphite tube heater protective sleeve; it is characterized in that: comprise the sheath (1) that can be sleeved on the graphite tube heater outside; the outer side of sheath (1) is provided with at least two annular plates (2) that are provided with along its axially spaced-apart, forms annular recesses (3) between adjacent two annular plates (2).
6. hydrogenation furnace graphite tube heater protective sleeve according to claim 5 is characterized in that: described sheath (1) is made with annular plate (2) one.
7. according to claim 5 or 6 described hydrogenation furnace graphite tube heater protective sleeves, it is characterized in that: the termination of a wherein end of described sheath (1) is a pyramidal structure.
8. according to claim 5 or 6 described hydrogenation furnace graphite tube heater protective sleeves, it is characterized in that: the cross section of described groove (3) is rectangle or U-shaped or V-arrangement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102216271A CN101891199B (en) | 2010-07-08 | 2010-07-08 | Method for preventing graphite tube heater of hydrogenation furnace from being damaged and adopted protective sleeve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102216271A CN101891199B (en) | 2010-07-08 | 2010-07-08 | Method for preventing graphite tube heater of hydrogenation furnace from being damaged and adopted protective sleeve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101891199A true CN101891199A (en) | 2010-11-24 |
| CN101891199B CN101891199B (en) | 2012-02-29 |
Family
ID=43100577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102216271A Active CN101891199B (en) | 2010-07-08 | 2010-07-08 | Method for preventing graphite tube heater of hydrogenation furnace from being damaged and adopted protective sleeve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101891199B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1285496A (en) * | 1999-08-20 | 2001-02-28 | 哈珀国际有限公司 | Graphite Rotary pipe type furnace |
| US7029632B1 (en) * | 1999-10-06 | 2006-04-18 | Wacker-Chemie Gmbh | Radiation-heated fluidized-bed reactor |
| CN101216263A (en) * | 2008-01-18 | 2008-07-09 | 河北工业大学 | Pipe shell type heat-exchanger |
| CN201424377Y (en) * | 2008-12-12 | 2010-03-17 | 四川新光硅业科技有限责任公司 | Hydrogenation furnace |
| CN201742573U (en) * | 2010-07-08 | 2011-02-09 | 山东伟基炭科技有限公司 | Protecting jacket of graphite tube heater |
-
2010
- 2010-07-08 CN CN2010102216271A patent/CN101891199B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1285496A (en) * | 1999-08-20 | 2001-02-28 | 哈珀国际有限公司 | Graphite Rotary pipe type furnace |
| US7029632B1 (en) * | 1999-10-06 | 2006-04-18 | Wacker-Chemie Gmbh | Radiation-heated fluidized-bed reactor |
| CN101216263A (en) * | 2008-01-18 | 2008-07-09 | 河北工业大学 | Pipe shell type heat-exchanger |
| CN201424377Y (en) * | 2008-12-12 | 2010-03-17 | 四川新光硅业科技有限责任公司 | Hydrogenation furnace |
| CN201742573U (en) * | 2010-07-08 | 2011-02-09 | 山东伟基炭科技有限公司 | Protecting jacket of graphite tube heater |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101891199B (en) | 2012-02-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201742573U (en) | Protecting jacket of graphite tube heater | |
| CN103145130A (en) | Method and apparatus for increasing silicon core number in polycrystalline silicon reduction furnace | |
| CN101891199B (en) | Method for preventing graphite tube heater of hydrogenation furnace from being damaged and adopted protective sleeve | |
| CN204596818U (en) | A kind of tubular diffusion furnace for solar cell | |
| CN102537577A (en) | Insulation structure of directly-buried high-temperature hot water sleeve compensator | |
| CN205039011U (en) | Copper core wire drawing annealing integral type device | |
| CN203320090U (en) | External heating device for corridor tubes in process of producing titanium sponges | |
| CN102182537A (en) | Exhaust pipe of automobile | |
| CN205648027U (en) | Prevent electric heating radiant tube of short circuit | |
| CN103058495B (en) | A kind of device of hot lower replacing tank furnace channel front arch and replacing options thereof | |
| CN202901570U (en) | High-strength polyethylene (PE) pipe | |
| CN214370098U (en) | Waste heat boiler tube array protection device | |
| CN204756189U (en) | PE pipe material is used in feedwater of high elongation at break | |
| CN206109184U (en) | Glass melting furnaces | |
| CN202182564U (en) | Sleeve type anti-abrasion protective device for tube bundle of supporting plate | |
| CN205907290U (en) | Copper strips annealing anti oxidation device | |
| CN204577660U (en) | Inner wire connector | |
| CN203980884U (en) | A kind of bell furnace bonnet with buffer structure | |
| CN201368663Y (en) | Rotary cement kiln eye with long service life | |
| CN203833806U (en) | Protective structure for furnace wire inside convection system of convection tempering furnace | |
| CN209197156U (en) | A kind of optical-wave electric water heater heat-generating pipe | |
| CN204648980U (en) | Pre-burning stove | |
| CN203200302U (en) | Annealing furnace | |
| CN220551611U (en) | Explosion-proof type hydraulic pipe | |
| CN202936461U (en) | Annealing furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: JINAN WISDOM HIGH-TEMPERATURE MATERIALS CO., LTD. Free format text: FORMER OWNER: SHANDONG WEIJI CARBON TECHNOLOGY CO., LTD. Effective date: 20111026 Free format text: FORMER OWNER: JINAN WISDOM HIGH-TEMPERATURE MATERIALS CO., LTD. |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 250101 JINAN, SHANDONG PROVINCE TO: 250108 JINAN, SHANDONG PROVINCE |
|
| TA01 | Transfer of patent application right |
Effective date of registration: 20111026 Address after: Licheng District 250108 in Shandong province Ji'nan city Huashan Town West Li No. 169 Applicant after: Jinan Wisdom High-Temperature Materials Co., Ltd. Address before: 203, room 5, building 666, Jin Zhiyuan IT Industrial Park, 250101 Hua Shun Dong Road, Ji'nan hi tech Development Zone, Shandong, China Applicant before: Shandong Weiji Carbon-Tech Co., Ltd. Co-applicant before: Jinan Wisdom High-Temperature Materials Co., Ltd. |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANDONG WEIJI CARBON TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: JINAN WISDOM HIGH-TEMPERATURE MATERIALS CO., LTD. Effective date: 20130819 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 250108 JINAN, SHANDONG PROVINCE TO: 250101 JINAN, SHANDONG PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130819 Address after: 250101, building 5, Jin Zhiyuan IT Industrial Park, 666 East Shun Hua Road, hi tech Zone, Shandong, Ji'nan, 203 Patentee after: Shandong Weiji Carbon-Tech Co., Ltd. Address before: Licheng District 250108 in Shandong province Ji'nan city Huashan Town West Li No. 169 Patentee before: Jinan Wisdom High-Temperature Materials Co., Ltd. |