CN201260940Y - Separated flow type standard humidity generator - Google Patents
Separated flow type standard humidity generator Download PDFInfo
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- CN201260940Y CN201260940Y CNU2008200649623U CN200820064962U CN201260940Y CN 201260940 Y CN201260940 Y CN 201260940Y CN U2008200649623 U CNU2008200649623 U CN U2008200649623U CN 200820064962 U CN200820064962 U CN 200820064962U CN 201260940 Y CN201260940 Y CN 201260940Y
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Abstract
The utility model relates to a divided-flow type standard humidity generator which belongs to a generator that is marked with humidity content nitrogen and is used for detecting or calibrating moisture instruments. The divided-flow type standard humidity generator comprises a data acquisition and control device and a power supply circuit, a case is internally provided with a humidifying saturer and a mixing chamber; a nitrogen introducing main pipe is connected with an inlet of the mixing chamber through a branch pipe, the branch pipe is sequentially provided with a solenoid pilot actuated valve and a quality flow controller, the other branch pipe of the main pipe is sequentially provided with a solenoid pilot actuated valve, a quality flow controller and a non return valve and then is connected with an inlet of the humidifying saturer, an outlet of the humidifying saturer is connected with the inlet of the mixing chamber through a pipeline, and an outlet of the mixing chamber leads gas which contains standard humidity and is used for detecting or calibrating the instruments out of the case. The utility model has the characteristics of convenient operation, little system error and high accuracy, and can meet requirements of detecting and calibrating various moisture instruments in electric power industry.
Description
Technical field
The utility model relates to a kind of standard humidity generator, particularly is provided for the generator that the calibrating of moisture instruments or calibration, output have the nitrogen of standard humidity content.
Background technology
The various electrical equipment that power industry is used all have specific requirement as high-tension switch cabinet, all kinds of temperature relay, the time relay etc. to the humidity of its working environment, the requirement in case humidity is above standard, and the fault that will be short-circuited causes cisco unity malfunction.This just needs to use the different moisture levels measuring instrument to measure, and monitors the working environment humidity of electrical equipment in real time.At present, also do not make to measure for all kinds of moisture instruments of power industry specially, for it provides the instrument calibrating or calibrates needed standard humidity generator.
The utility model content
The purpose of this utility model provides a kind of simple in structure, handled easily, shunting standard humidity generator that precision is high.
This novel purpose is that this is to realize: a kind of shunting standard humidity generator, comprise data acquisition and control device, power circuit, cabinet, and humidification saturator and mixing chamber are installed in the cabinet; Nitrogen is introduced house steward and is connected with mixing-chamber inlet through a branched pipe, magnetic valve and mass flow controller are installed on this branched pipe successively, after on another branched pipe of this house steward magnetic valve, mass flow controller and check (non-return) valve being installed successively, be connected with the import of humidification saturator, the outlet of humidification saturator is connected with mixing-chamber inlet by the road, and the gas that mixing chamber outlet will be used for instrument calibrating or calibration by the road, contain standard humidity is drawn outside the cabinet.
The operation principle of shunting humidity generator is: dry gas is separated into two parts according to a certain percentage, and one the tunnel enters the humidification saturator, is mixed with another strand dry gas in mixing chamber by water saturated air-flow, then enters test cavity, enters atmosphere at last.Adjust the flow-rate ratio of two strands of gases, can obtain the moisture of different humidity.By parameters such as the temperature in measurement dry gas flow, saturated with moisture flow, the saturator, pressure, atmospheric pressure, can calculate the humidity of the moisture of generator generation, be used for the calibrating or the calibration of moisture instruments.
This novel beneficial effect is:
1, simple in structure, cost is lower
2, easy to operate
Can adopt manual control and control dual mode automatically, adjust dry gas flow and saturated with moisture flow easily, thereby adjust the moisture humidity that generator takes place.
3, systematic error is little, the precision height
In three gas circuits of saturated with moisture, the range ability of mass flow controller is divided into 0.5～5SCCM (standard ml/min), 5～50SCCM and 50～500SCCM third gear, and the range of mass flow controller is 2SLM (standard liters per minute) in the dry gas flow process; Remove superfluous water, remove granulometric impurity to reduce systematic error through sintered metal filter again through 5A molecular sieve drying pipe before nitrogen is introduced; The humidification saturator adopts two-stage series connection, to guarantee sufficiently high saturation degree.
Characteristics that this is novel and advantage will be further elaborated in conjunction with example in the concrete part of implementing.
Description of drawings
Fig. 1 is this novel block diagram of system;
Fig. 2 is this novel fundamental diagram;
Fig. 3 is the structure chart of an embodiment of humidification saturator shown in Figure 1.
The specific embodiment
Among Fig. 1, divide according to function, this generator is made up of with control section and power unit source of the gas part, dry gas flow and flux of moisture control and measure portion, humidification saturator, temperature and pressure measure portion, data acquisition.Wherein, humidity and pressure measxurement part can belong to data acquisition and control section.
Fig. 2 illustrates the operation principle of shunting standard humidity generator: humidification saturator 3 and mixing chamber 4 are installed in the generator cabinet; Nitrogen is introduced house steward and is connected with mixing chamber 4 imports through a branched pipe, magnetic valve 1a and mass flow controller 1 are installed on this branched pipe successively, behind this house steward's another arm once mounting magnetic valve 2a, quality control flow device 2 and the check (non-return) valve 2b, be connected with the import of humidification saturator 3, the outlet of humidification saturator 3 is connected with mixing chamber 4 imports by the road, and mixing chamber outlet will be used for the instrument calibrating by the road or calibrate the gas that contains standard humidity and draw outside the cabinet.
Each part of system is as follows:
1, source of the gas part
Adopt bottled high pure nitrogen to make source of the gas.Generally the humidity of (being on the outer nitrogen introducing house steward of generator cabinet 5A molecular sieve drying pipe and sintered metal filter to be installed successively also) high pure nitrogen is less than 5 * 10
-6(V/V), can be considered absolute dry gas again after the drying tube of interior dress 5A molecular sieve is removed residual moisture, humidity is zero.Drying nitrogen is removed the contaminant particles that may contain in the gas through sintered metal filter then, with the protection mass flow controller.Because the generator chassis capacity is limited, drying tube and filter place the cabinet outside, by intake interface (the two cutting ferrules of φ 6mm), connect with stainless steel tube or polyfluortetraethylene pipe.
2, flow-control and measure portion
The degree of accuracy of flow measurement is the main source of shunting humidity generator error.For guaranteeing flow-control and certainty of measurement and realizing computer control, adopt mass flow controller (MFC) to control each gas circuit flow.The degree of accuracy of this mass flow controller is 1%F.S, and repeatable accuracy is 0.2%F.S, and the flow-control scope is (2～100) %F.S (range ratio is 50:1), and output signal is 0～5V, and output signal was 0V when flow was zero, and output signal is 5V during full scale.Flow setting signal also is 0～5V, respectively corresponding zero delivery and full scale flow.Working power is DC ± 15V.Other has valve control line can realize that valve cuts out (valve control line connects+the 15V power supply) and valve cleans (valve control line connects-the 15V power supply) function.For the excessive situation of error appears in the flow controller that prevents big range of flow when controlling and measure low discharge, the actual flow-control scope of using is (10～100) %F.S (range ratio is 10:1), with the further raising degree of accuracy.
After drying nitrogen enters generator, be divided into dry gas and saturated with moisture two-way air-flow.The mass flow controller that it is 2SLM (standard liters per minute) that the dry gas stream adopts a range is controlled and is measured, and the use traffic scope is 200～2000SCCM (a standard ml/min).
For the range ability that satisfies generator and guarantee the degree of accuracy, saturated with moisture is divided into three road air-flows in parallel again, controls and measure its flow with three mass flow controller segmentations.Nitrogen is introduced between house steward and 3 imports of humidification saturator and also is connected with two branched pipes, and on two branched pipes magnetic valve, mass flow controller and check (non-return) valve is installed successively all.Range is the flow that the mass flow controller of 5SCCM is used to control and measure 0.5～5SCCM scope, range is the flow that the mass flow controller of 50SCCM is used to control and measure 5～50SCCM scope, and range is the flow that the mass flow controller of 500SCCM is used to control and measure 50～500SCCM scope.It is one the road in running order that three road air-flows have only usually, and two-way ends in addition.
Three road air-flows behind mass flow controller, enter the humidification saturator respectively then.
For guaranteeing closing fully of corresponding gas circuit, install an electromagnet cut off valve (being magnetic valve) additional every mass flow controller front.When electromagnet cut off valve was closed, corresponding gas circuit was ended fully, and flow is zero, to guarantee no phase mutual interference between gas circuit.
Check valve (being check (non-return) valve) all is housed on the export pipeline of three mass flow controllers, refluxes and the damage mass flow controller to prevent the water in the saturator.
3, humidification saturator (referring to Fig. 3)
The humidification saturator is the device that contains the moisture of saturated steam, though also air-flow be reached for water saturated state, be the core component of humidity generator, the height of its efficient directly influences the degree of accuracy of humidity generator.
The humidification saturator of this generator adopts the work of bubble type principle for designing and producing voluntarily.The humidification saturator is cylindric, interior dress deionized water.Air-flow disperses to enter the saturator inner chamber from the saturator bottom through copper mesh, bubbling in water and by water saturation, leave saturator from top again.The clean hydrophily objects such as gauze of packing among the water 3c of saturator inner chamber with further dispersion air-flow, improve saturation efficiency.
This generator adopts the identical two-stage saturator series system work of structure, to guarantee sufficiently high saturation degree rate.Prime is a presaturator, and air-flow reaches capacity behind presaturator substantially, again through after a level saturator reach capacity fully, thereby prevent the problem that when air-flow is excessive saturation efficiency descends.Humidification saturator 3 is identical two of structure: its import is arranged on the bottom, outlet is arranged on the top, and inner chamber is filled with the gauze and the import that are used as the humidification material and is provided with copper mesh disperser 3a, 3d (cylindrical shell and tube top and tube are provided with sealing ring 3b) at the end; The outlet of prime humidification saturator is connected with the import of back level humidification saturator by the road.
For preventing that air-flow from taking mist out of, water level is higher in the presaturator, and water level is lower in the level saturator of back, and at back level exit, saturator top installing copper mesh filter 3e (structure is the same with copper mesh disperser 3a), to stop mist.
Be provided with temperature sensor 3g and pressure sensor 3f in the level saturator of back, in order to measure the running parameter of humidification saturator.
The saturated with moisture that flows out the humidification saturator is mixed into the standard moisture by mixing chamber 4 (or threeway) and drying nitrogen, flows out generator by the interface of giving vent to anger (6 pairs of cutting ferrules of φ), introduces being subjected to test examination instrument by φ 6 polyfluortetraethylene pipes.
4, temperature and pressure measure portion
The temperature and pressure measure portion is made up of a temperature transmitter and two absolute pressure transducers.
Temperature transmitter is used to measure the water temperature in the humidification saturator, so that calculate Saturated water vapor pressure.It is the Pt1000 RTD of 1/3DIN B level that the sensing element of this transmitter adopts accuracy class, and change-over circuit part precision is 0.1%, and range is 0 ℃～50 ℃, and output signal is 0～5V.Output signal is 0V in the time of 0 ℃, and output signal is 5V in the time of 50 ℃.Operating voltage DC 24V.Take all factors into consideration, the degree of accuracy of temperature transmitter can reach 0.1 ℃.
Two absolute pressure transducers are respectively applied for absolute pressure and the atmospheric pressure of measuring in the humidification saturator.The degree of accuracy of pressure transmitter is 0.2%F.S, and range is 0～200kPa, operating voltage DC24V, and output signal is 0～5V.Output signal was 0V when pressure was zero, and output signal is 5V during full scale 200kPa.
5, data acquisition and control section
Data acquisition and control section are made up of a blocks of data capture card and a relay terminal plate.The data collecting card function comprises 16 tunnel 12 A/D signal conversions, 4 tunnel 12 D/A signal conversions, and 16 road digital quantities inputs (DI) and 16 road digital quantities outputs (DO) are connected with computer by USB interface.16 road relay terminal plates are accepted the break-make that digital quantity signal is realized corresponding relay.
The voltage signal of seven tunnel 0～5V (the two-way pressure signals of one road temperature signal of four road flow signals of four mass flow controller outputs, temperature transmitter output and two pressure transmitter outputs) amplifies the voltage signal that becomes 0～10V through the twice prime, be converted into 0～4095 digital quantity again through 12 A/D, send into computer and handle by software analysis.
Four tunnel 0～4095 the digital quantity that computer is sent becomes the voltage signal of 0～5V after 12 D/A conversions of capture card, be used to set the flow of four mass flow controllers.
The make-and-break signal that computer sends (totally 12 tunnel), send high and low level through capture card digital quantity output function, the break-make that is used for corresponding relay on the control relay terminal board is controlled the break-make of four electromagnet cut off valve and the valve control function of four mass flow controllers (every needs with two relay controls) more then.
6, power unit
This humidity generator needs the DC power supply by multiple voltage.Because mass flow controller is higher to power requirement, requires power supply pure, voltage pulsation must not be greater than 5mV, and general commercially available Switching Power Supply can't meet the demands, and therefore adopts the linear stabilized power supply power supply that designs and produces voluntarily.The 220V civil power becomes galvanic current through steps such as EML filtering, transformation, rectification, filtering, voltage stabilizings.Ripple voltage satisfies the requirement of mass flow controller to power supply less than 5mV at full capacity the time after tested.4 kinds of voltages are provided altogether :+24V power supply is given electromagnet cut off valve, relay terminal plate and temperature, pressure transmitter power supply; ± 15V power supply is powered to mass flow controller; + 5V power supply is used for the auxiliary power supply of data collecting card, is provided with independent power switch.(data collecting card can be powered by USB interface of computer usually, but causes the capture card cisco unity malfunction as USB mouth output current deficiency, then can enable auxiliary power supply.)
Control software:
This humidity generator adopts computer control fully, except that power switch, functional units such as hand switch, knob is not set on the generator.Generator is connected with computer by USB cable, by parameters such as the software control generator work of special establishment and calculated flow rate, humidity.
Control software adopts Microsoft Visual C# 2005 language compilation, operation on Windows operating system (needing to install Microsoft.Net Framework 2.0).
Software provides manually and automatic two kinds of control modes.Under manual control mode, break-make, operational quality flow controller that can be by each electromagnet cut off valve of mouse control and import each road and set flow value.Mass flow controller will be controlled gas flow automatically for setting flow value.Software is according to preset flow and the humidity (with volume fraction and two kinds of unit representations of dew-point temperature) of setting flow and the temperature that collects in real time, pressure data calculating generation moisture, and the while is calculated the actual flow and the humidity of generation moisture according to the actual flow that collects and temperature, pressure data.Under mass flow controller situation working properly, actual flow equals or is in close proximity to the setting flow, and the actual value that therefore flux of moisture and humidity take place equals or is in close proximity to setting value.Under manual control mode, because each road flow fixes, thereby when environment temperature or pressure changed the temperature and pressure that causes in the humidification saturator and changes, the humidity of output moisture can correspondingly change (setting value and actual value all can change) to some extent.
Under the automatic control mode, the user can not the direct control magnetic valve and element such as mass flow controller, but import the flow and the humidity (can be volume fraction or dew-point temperature) of required moisture, software is by calculating automatic selection gas circuit and setting the flow of each road gas.Under automatic control mode, the user only needs given required total flow and humidity get final product, and need not pay close attention to the assignment of traffic (certain, as still can to know duty, the parameter of each mass flow controller and electromagnet cut off valve from the software interface) of each gas circuit.When environment temperature or pressure changed, software can be adjusted assignment of traffic automatically, thereby guaranteed the moisture moisture stable that takes place.
Humidity is calculated:
1, the processing of collection and control signal
Computer acquisition to be 12 LSB number, scope is 0～4095, must be converted into magnitude of voltage earlier, calculates each signal value again.
Conversion formula is V=LSB * (5000/4096), and voltage unit is mV.
In like manner, (0～5000mV) formula that is converted to LSB is LSB=V/ (5000/4096) with voltage.
The range ability of respectively corresponding each sensor of the voltage signal of 0～5000mV.The corresponding range lower limit of 0mV (zero delivery, zero pressure or 0 ℃), the corresponding range upper limit of 5000mV (full scale flow, 200kPa or 50 ℃).Principle can calculate the concrete numerical value of each signal by voltage signal according to this.
2, the calculating of Saturated water vapor pressure
Saturated is a kind of dynamic equilibrium attitude, and under this state, it is constant that water vapor concentration in the gas phase or density keep.In the conversion process of whole humidity, seem particularly important for choosing of Saturated water vapor pressure formula.Practical Saturated water vapor pressure formula mainly contains Goff-Grattch formula and Wexler-Greenspan vapour pressure formula.
(1) Goff-Grattch saturation water barometric formula
From nineteen forty-seven, the vapour pressure equation of Goff-Grattch is just recommended to use by World Meteorological Organization.This equation be after universally acknowledged for many years formula the most accurately.It comprises two formula, and one is used for liquid-gas equilibrium (water surface), and another is used for solid-gas balance (ice face).
For the saturation water air pressure on the horizontal plane
In the formula, T
0Be water triple point temperature 273.16K.
For the saturation water air pressure on the ice face
lge
i＝9.096936(1-T
0/T)-3.56654lg(T
0/T)+0.87682(1-T/T
0)+0.78614
More than two formulas adopted with table by the international meteorological of World Meteorological Organization in 1966 issue.
(2) Wexler-Greenspan vapour pressure formula
1971, the Wexler of NBS and Greenspan are according to the accurate measurement data of saturation water air pressure on 25～100 ℃ of scope waters surface, based on carat Bai Long one Clausius equation, in conjunction with Ka Molin-Ang Nisi equation, done partly to revise through the simple mathematical computing and with reference to test data, derived the computing formula of the saturation water air pressure on the water surface in 0～100 ℃ of scope, the calculated value and the experiment value of this formula meet substantially.
The number n of constant term generally gets 4～8 in the formula, and for example n is 4 o'clock, and every coefficient is: C
0=-0.60436117 * 10
4, C
1=0.1893292601 * 10
2, C
2=-0.28244925 * 10
-1, C
3=0.17250331 * 10
-4, C
4=0.2858487 * 10.
(3) formula of reduction of saturation water air pressure
Above-mentioned saturation water barometric formula is widely used, but the two is all very complicated, is unfavorable for engineering calculation, particularly calculates the backwards calculation of water surface temperature by Saturated water vapor pressure.In order to simplify calculating, and guarantee enough precision, the control software of this humidity generator has adopted one group to simplify the Saturated water vapor pressure formula.
For water surface Saturated water vapor pressure
lge
w＝(10.286t+661.23)/(t+237.3)
For ice face Saturated water vapor pressure
lge
i＝12.5633-2670.59/(t+273.15)
0～50 ℃ of water surface and-50～0 ℃ of ice face Saturated water vapor pressure data of calculating by computer show that above-mentioned formula of reduction is compared with the Wexler formula with Goff-Grattch, and its maximum relative deviation is less than 0.2%.This precision satisfies the needs of shunting standard humidity generator fully.
3, the calculating of moisture humidity take place
If the flow of saturated with moisture is F
w, dry gas flow is F
d, temperature is t in the humidification saturator, pressure is p
s, atmospheric pressure is p
a, then
Water vapor pressure in the saturator is
p
W＝10
(10.286t+661.23)/(t+237.3)
Volume fraction humidity in the saturator is
The volume fraction humidity that moisture takes place is
The dew-point temperature (more than 0 ℃) that moisture takes place is
If dew-point temperature during less than 0 ℃, is then used following formula:
4, the calculating of automatic control mode down-off
The flow that the user sets the output moisture is F
t, volume fraction humidity is V
r, then
F
d＝F
t-F
w
If that the user sets is the dew-point temperature T of output moisture
d, then earlier dew-point temperature is converted to volume fraction.
Dew-point temperature is during more than or equal to 0 ℃:
Dew-point temperature is during less than 0 ℃:
Range
The measurement category of this humidity generator output humidity is relevant with flow, also relevant with the temperature and the atmospheric pressure of humidification saturator.The humidification saturator is not established thermostat, and its temperature is equal to environment temperature substantially, generally can be decided to be 20 ℃.Atmospheric pressure is got 100kPa.General and the atmospheric pressure of pressure in the humidification saturator differs very little, also gets 100kPa.
In theory, be maximum 2000SCCM in dry gas flow, flux of moisture is under the situation of minimum 0.5SCCM, the minimum humidity that moisture takes place is about 6 * 10
-6, dew-point temperature is-64 ℃, flow is about 2000SCCM.Certainly want the actual very difficulty of so low humidity that reach, this needs the material, structure, sealing etc. of flow path to make the design of special optimization, and the purging of residual moisture also is a very difficult thing in the system.The influence of background moisture can not be ignored in the nitrogen.
In theory, when dry gas flow is zero, generator generation saturated with moisture, its relative humidity is 100%, volume fraction is greater than 23000 * 10
-6, dew-point temperature equals the temperature of saturator, and flow is 500SCCM to the maximum.For preventing saturated with moisture dewfall in pipeline, the moisture relative humidity of output should be greater than 90% usually, and volume fraction is about 20000 * 10
-6, corresponding dew point is about 17.5 ℃, and flow is about 575SCCM.
At fixing output flow is under the situation of 1000SCCM, and generator can satisfy-55～9 ℃ measurement category, and this scope satisfies the needs of all kinds of moisture instruments calibratings of power industry, calibration fully.In output humidity-55 ℃ (20 * 10
-6) time, the saturated with moisture flow is 0.9SCCM, dry gas flow is 999.1SCCM; Exporting humidity 9 ℃ (1148 * 10
-6) time, the saturated with moisture flow is 491SCCM, dry gas flow is 509SCCM.In particular cases can come expanded range by changing output flow.Increase output flow and can reduce lower limit, reduce output flow and can improve the upper limit.
Claims (7)
1, a kind of shunting standard humidity generator comprises, data acquisition and control device, power circuit, cabinet is characterized in that: humidification saturator (3) and mixing chamber (4) are installed in the described cabinet; Nitrogen is introduced house steward and is connected with mixing chamber (4) import through a branched pipe, magnetic valve (1a) and mass flow controller (1) are installed on this branched pipe successively, after magnetic valve (2a), mass flow controller (2) and check (non-return) valve (2b) are installed on another branched pipe of this house steward successively, be connected with the import of humidification saturator (3), the outlet of humidification saturator (3) is connected with mixing chamber (4) import by the road, and the gas that mixing chamber outlet will be used for instrument calibrating or calibration by the road, contain standard humidity is drawn outside the cabinet.
2, according to the described shunting standard humidity generator of claim 1, it is characterized in that: described nitrogen is introduced between house steward and humidification saturator (3) import and also is connected with two branched pipes, and on two branched pipes magnetic valve, mass flow controller and check (non-return) valve is installed successively all.
3, according to the described shunting standard humidity generator of claim 2, it is characterized in that: the range of three mass flow controllers on three branched pipes between described nitrogen introducing house steward and humidification saturator (3) import is respectively 5 standard ml/min: 50 standard ml/min, 500 standard ml/min; The range that nitrogen is introduced the mass flow controller on the branched pipe between house steward and the mixing chamber (4) is 2 standard liters per minute.
4, according to claim 1 or 2 or 3 described shunting standard humidity generators, it is characterized in that: described humidification saturator (3) is identical two of structure: its import is arranged on the bottom, outlet is arranged on the top, and inner chamber is filled with the gauze and the import that are used as the humidification material and is provided with the copper mesh disperser; The outlet of prime humidification saturator is connected with the import of back level humidification saturator by the road.
5, according to the described shunting standard humidity generator of claim 4, it is characterized in that: be provided with temperature sensor (3g) and pressure sensor (3f) in the level humidification saturator of described back.
6, according to the described shunting standard humidity generator of claim 5, it is characterized in that: the exit, top of described back level humidification saturator is provided with copper mesh filter (3e).
7, according to the described shunting standard humidity generator of claim 6, it is characterized in that: the outer nitrogen of described cabinet is introduced on the house steward 5A molecular sieve drying pipe and sintered metal filter also is installed successively.
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- 2008-09-01 CN CNU2008200649623U patent/CN201260940Y/en not_active Expired - Lifetime
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