CN201224759Y - Multiple-cabin combined type output vacuum coating system - Google Patents

Multiple-cabin combined type output vacuum coating system Download PDF

Info

Publication number
CN201224759Y
CN201224759Y CNU2007201700783U CN200720170078U CN201224759Y CN 201224759 Y CN201224759 Y CN 201224759Y CN U2007201700783 U CNU2007201700783 U CN U2007201700783U CN 200720170078 U CN200720170078 U CN 200720170078U CN 201224759 Y CN201224759 Y CN 201224759Y
Authority
CN
China
Prior art keywords
vacuum
storehouse
coating system
workpiece
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNU2007201700783U
Other languages
Chinese (zh)
Inventor
刘阳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Powertech Co Ltd
Original Assignee
Beijing Powertech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Powertech Co Ltd filed Critical Beijing Powertech Co Ltd
Priority to CNU2007201700783U priority Critical patent/CN201224759Y/en
Application granted granted Critical
Publication of CN201224759Y publication Critical patent/CN201224759Y/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Abstract

The utility model relates to a multi-chamber modular vacuum coating system, which adopts a modular multi-vacuum chamber structure in the mass, and comprises at least 2 or a plurality of vacuum chambers; every vacuum chamber can be implemented with metallic-membrane plating or auxiliary process; the working parts of at least one metallic-membrane plating chamber can drive the multi-circle thick metallic-membranes along a circular orbit; every auxiliary process chamber can implement various auxiliary processes besides the metallic-membrane plating; an automatic vacuum valve control flow is arranged between two adjacent vacuum chambers; a flexible conveyor belt can move along the guide rail under the condition of vacuum for exchanging or conveying the working parts automatically, thereby the requirement on large-scale metallic-membrane plating production line can be met.

Description

A kind of many storehouses built-up type batch production of vacuum coating system
Technical field
The present invention relates to vacuum coating system, especially for the transmission system and the continuous coating method of structure, layout and the workpiece in vacuum storehouse in a kind of vacuum coating system of volume production.
Background technology
Improve the quality and increase output and day by day become the important channel that Modern Industry Products reduces cost and increases the benefit, workpiece wherein in enormous quantities needs the high-quality rete of vacuum moulding machine, and often need to increase thicknesses of layers thereby needs and realize through the recirculation plated film, become key technical problem anxious to be solved.But existing coating system adopts unit list storehouse operating mode mostly, and vacuum coating system constantly circulates from the atmosphere to the high vacuum and brings heavy exhaust burden, has reduced production efficiency; The loading of existing workpiece adopts dress, the card mode of not having transmission usually, makes Workpiece Rotating on the work rest with toothing substantially, and every kind of operating mode is only finished a plated film program.The batch process that this has just fettered product causes the consistence of rete defective and performance poor; Simultaneously, also be difficult to carry out beat-type serialization or automatic continuous large batch of film coating manufacturing process, the low production cost height that causes of production efficiency.
CN1566398A discloses the method that a kind of continuous vacuum is decorated plating, and article are placed on the common continuous conveyor, sends into one by one in rough vacuum warehouse, the high vacuum coating warehouse and carries out plated film.The workpiece to be plated that this vacuum coater relates to adopts common belt conveying mode, and the vacuum coating film equipment type of adaptation is limited, and transmission efficiency needs further to improve.
We disclose a kind of built-in double warehouse structure ZL200520147087.1: the transfer bin of pre-treatment storehouse, aftertreatment storehouse and plated film product is combined into an auxiliary storehouse, forms the built-in double warehouse structure with the plated film storehouse then; Unlatching is arranged on the high vacuum valve on the next door, two storehouses, and two storehouses are communicated with, and can carry out the workpiece transposition between this two storehouse under vacuum condition; Close these valve two storehouses and isolate, when plated film is carried out in the plated film storehouse, in auxiliary storehouse, carry out the transfer of workpiece pre-treatment, the aftertreatment of plated film product and turnover coating system thereof etc., all do not influence the works better in plated film storehouse.
We disclose a kind of 2 or shared one or more portable storehouses of switching, a plurality of plated films storehouse ZL200520130173.1, carry out the vacuum coating system that workpiece to be coated and plated film product switch, wherein the plated film storehouse has the high vacuum exhaustion device, the switching storehouse has vacuum pumping hardware; The portable storehouse of switching can be docked with each plated film storehouse respectively; Plated film storehouse and switching storehouse are respectively equipped with the docking port of mutual coupling; But in switching the storehouse, be provided with the station of two place work piece framves, and move the inversion mechanism connection with one.This system is suitable for producing in enormous quantities, and exhaust burden and the pollution of avoiding the plated film storehouse constantly to circulate from normal atmosphere to high vacuum and bring are enhanced productivity, and reduce cost.
All vectorial from different perspectives antenatal the going a step further of latter two patents, and accumulated certain basis for it further develops; But, still have certain limitation.
Summary of the invention
At the deficiencies in the prior art, the invention provides the high efficiency of transmission system of a kind of novel evacuated coating system structure and workpiece thereof, realize vacuum plating production in enormous quantities and relevant treatment thereof reliably.
In order to increase the treatment capacity of coating equipment, the volume that enlarges the plated film storehouse merely is subjected to certain restriction, and increases the quantity in plated film storehouse, and coordinates and the workpiece turnover by auxiliary storehouse, is an effective way, and development space is widely arranged.
The present invention is based on workpiece in enormous quantities, different steps at technique for vacuum coating, different requirements for its working environment (vacuum tightness, atmosphere and temperature etc.), adopt following warehouse structure and many storehouses space layout: this novel evacuated coating system totally adopts many vacuum of built-up type chamber structure, wherein comprise two storehouses or the vacuum storehouse more than 2 at least, each vacuum storehouse has a kind of function in plated film or the auxiliary treatment at least; Having at least in the vacuum storehouse in described each plated film storehouse to make workpiece move multi-turn continuously so that coating thick film along circular orbit; The various auxiliary treatment outside the plated film can be realized in each auxiliary treatment storehouse; Connect by the automatic vacuum gate between the adjacent vacuum storehouse, realize flow process control between the storehouse; Adopt a kind of flexible delivery band in the operation of vacuum condition lower edge guide rail, can exchange automatically or conveying workpieces.
In order to adapt to the needs of workpiece fast deposition thick film in enormous quantities, in a plated film storehouse, revolve round the sun in cylindrical space with the big area workpiece, or workpiece in bulk can autobiography in revolution, the two circle target groups of the inside and outside placement-face of revolution orbit, deposit thick film equably on the single or double of flexible plate-shaped workpiece, each surface of separation workpiece to workpiece; It is above with the increase depositing time that workpiece is circled, thereby obtain uniform thick film layers at the single or double of workpiece.
Standardized modular design is adopted in described many vacuum storehouse, and arbitrary warehouse can use separately, can be used as the vacuum plating storehouse to realize different coating process processing procedures; Also can be used as the auxiliary treatment storehouse realizing the various auxiliary treatment functions outside the plated film respectively, enter pre-treatment such as forvacuum and preheating before storehouse, the plated film comprising workpiece to be coated, aftertreatment such as vacuum passivation of plated film product and product deliver from godown; Between described many storehouses, can be according to the needs arbitrary combination and the connection of production line structure.
When the logotype of described vacuum storehouse, can between adjacent unit warehouse, vacuum tunnel be set, at least one automatic vacuum gate wherein is installed; When a gate was opened, work rest can only unidirectionally enter or unidirectionally withdraw from relevant storehouse; When two self-shooters are opened simultaneously, allow that different work rests is simultaneously respectively into and out of relevant storehouse; When workpiece switches between adjacent vacuum storehouse, be under vacuum condition (10 -4Pa-1000Pa) finish.
When the logotype of many storehouses, can distribute each unitary working hour and freight space in real time by self-shooter according to the asynchronism(-nization) of every storehouse processing procedure.
During the automatic vacuum closing gate, the vacuum tunnel sealing, each vacuum storehouse works alone, and finishes different film-plating process or processing respectively.
The automatic vacuum gate can connect described vacuum storehouse with different structure, can constitute the built-up type continuous coating production line that contains difference in functionality storehouse series, parallel and/or series-parallel connection and different flow processs thereof.
Adopt a kind of device of flexible transmission workpiece, comprising power-driven system, guide rail and conveying belt, conveying belt is along guide rail operation automatic flexible ground conveying workpieces; Guide rail is circular arc or annular in the vacuum plating storehouse, is the curve shape and/or the rectilinear form of annular or suitable curvature in the vacuum transition storehouse; The part of conveying belt on its width enters guide rail inside, and its outer outer another part of opening that is exposed at is used to carry workpiece, conveying belt keeps rigidity at width, demonstrates flexibility on thickness direction, with the production-line technique flow process of coupling built-up type continuous coating and relevant treatment thereof.
The vacuum system of many storehouses built-up type continuous coating production line of described automatic vacuum gate and connection thereof, industrial computer, PLC (programmable controller) or industrial computer+PLC be can pass through, the automatic synchronization of beat-type or serialization plated film and relevant treatment technological process thereof and control reliably realized.
According to a kind of batch production of vacuum coating system architecture of the present invention and work-piece transmission system thereof, be easy to realize the efficient alternately conversion of batch workpiece in the vacuum storehouse of various functions, reliably and automatically realize vacuum plating production in enormous quantities of beat-type or continous way and relevant treatment thereof.
Description of drawings
Fig. 1. warehouse and automatic vacuum valve schematic layout pattern when being three storehouses (A, B, C) series connection use, wherein A, B, C are 3 independent warehouses, between adjacent logotype two storehouse A and B and B and C, be connected with b-c by the automatic vacuum valve a-b in the vacuum tunnel respectively.
Fig. 2 A is middle guide of the present invention, workpiece transfer device and drive unit synoptic diagram thereof, and Fig. 2 B is the synoptic diagram of drive systems conveying belt along the guide rail operation, wherein: the 1-electric motor; The 2-sprocket wheel; The 3-conveying belt; The 4-guide rail.
Fig. 3. during the logotype of many storehouses the series, parallel in storehouse and or the independent warehouse series connection of series-parallel connection schematic layout pattern: 3a-N, each and every one independent warehouse series-parallel connection (i.e. series connection and in parallel the coexistence) of the in parallel and 3c-5 of 3b-4 independent warehouse.Wherein 1,2,3 ... N is respectively N independent warehouse,
Figure Y200720170078D00051
-expression workpiece to be coated enters the storehouse, -expression plated film product delivers from godown.
Embodiment
Below in conjunction with accompanying drawing, transmission system and continuous coating method to batch production of vacuum coating system of the present invention and workpiece are described in further detail, but are to be understood that protection scope of the present invention is not subjected to the restriction of embodiment.
The present invention adopts many vacuum of built-up type chamber structure at first on the whole, wherein comprise the vacuum storehouse more than 2 or 2 at least, each storehouse has a kind of function in plated film or the auxiliary treatment at least, have at least in described each plated film storehouse to make workpiece move multi-turn continuously so that coating thick film along circular orbit in the storehouse, the various auxiliary treatment outside the plated film can be realized in each auxiliary treatment storehouse; Connect flow process control between the realization storehouse by the automatic vacuum gate between the adjacent vacuum storehouse; Adopt a kind of flexible delivery band in the operation of vacuum condition lower edge guide rail, can exchange automatically or conveying workpieces, implement the needs of the coating film production line in enormous quantities of serialization with assurance.
In a plated film storehouse, turn round in cylindrical space with workpiece, flexible plate-shaped workpiece adopts revolution, and workpiece in bulk adopts revolution+autobiography, within it, outer placement-face is to two circle target groups of workpiece, deposits thick film equably on the single or double of flexible plate-shaped workpiece, each surface of separating workpiece; It is above with the increase depositing time that workpiece is circled, thereby obtain uniform thick film at the single or double of workpiece.
Standardized modular design is adopted in described many vacuum storehouse, and arbitrary warehouse can use separately, can be used as the vacuum plating storehouse to realize different coating process processing procedures; Also can be used as the auxiliary treatment storehouse realizing the various auxiliary treatment functions outside the plated film respectively, enter forvacuum and preheating etc. before storehouse, the plated film comprising workpiece to be coated, aftertreatment such as vacuum passivation of plated film product and product deliver from godown.
When the logotype of described vacuum storehouse, can between adjacent unit warehouse, vacuum tunnel be set, at least one automatic vacuum gate wherein is installed, as shown in Figure 1, A, B, the series connection of C three storehouses are at adjacent logotype two storehouse A and B and few automatic vacuum gate, as shown in Figure 1, A, B, the series connection of C three storehouses between adjacent logotype two storehouse A and B and B and C, are connected with b-c by vacuum tunnel and automatic vacuum valve a-b wherein respectively; When a gate was opened, work rest can only unidirectionally enter or unidirectionally withdraw from relevant storehouse; When two self-shooters are opened simultaneously, allow that different work rests is simultaneously respectively into and out of relevant storehouse; When workpiece switches between adjacent vacuum storehouse, be under vacuum condition (10 -4Pa-1000Pa) finish.
When the logotype of many storehouses, can distribute each unitary working hour and freight space in real time by self-shooter according to the asynchronism(-nization) of every storehouse processing procedure.For example with each unit logotype plating multilayer film of A, B, C, wherein the treatment capacity of B is greater than the treatment capacity of A and C, after A and C finish first processing procedure respectively, enters B and finishes next processing procedure; Perhaps the treatment capacity of A, B, C is suitable, plates different retes in regular turn respectively by A, B, C, and then carries out follow-up several circulation of taking turns, thereby obtains desired multilayer film; Also available B is as auxiliary storehouse, and A and C do the plated film storehouse respectively.
During the automatic vacuum closing gate, the vacuum tunnel sealing, each vacuum storehouse works alone, and finishes different film-plating process or processing respectively.
As shown in Figure 2, adopt a kind of flexible transmission workpiece system, comprising power-driven system (electric motor 1 and sprocket wheel 2), guide rail 4 and conveying belt 3, conveying belt 3 is along guide rail 4 operation automatic transport workpiece; Guide rail is circular arc or annular in the vacuum plating storehouse, is the curve shape and/or the rectilinear form of annular or suitable curvature in the vacuum transition storehouse; The part of conveying belt on width enters guide rail inside, another part that conveying belt is exposed at the opening below outward is used to carry workpiece, conveying belt keeps rigidity at width, on thickness direction, demonstrate flexibility, with the production-line technique flow process of coupling built-up type continuous coating and relevant treatment thereof.
As shown in Figure 3, the automatic vacuum gate can connect described many vacuum storehouse with different structure, as shown in Figure 3: each and every one independent warehouse series-parallel connection (i.e. series connection and coexistence in parallel) of the independent warehouse series connection of 3a-N, a 3b-4 independent warehouse parallel connection and 3c-5; Built-up type continuous coating production line can comprise the plated film storehouse of different flow processs and handle the storehouse.
Many storehouses built-up type continuous coating production line vacuum system of described automatic vacuum gate and connection thereof can be passed through industrial computer, PLC (programmable controller) or industrial computer+PLC, realizes the automatic synchronization of beat-type or serialization plated film and relevant treatment technological process thereof and control reliably.
According to a kind of batch production of vacuum coating system architecture of the present invention and work-piece transmission system thereof, realized the efficient alternately conversion of batch workpiece in the vacuum storehouse of various functions, reliably and automatically realized vacuum plating production in enormous quantities of beat-type or continous way and relevant treatment thereof, production efficiency improves, cost reduces.

Claims (5)

1, a kind of batch production of vacuum coating system, it is characterized in that: described vacuum coating system is knockdown, at least comprise two or more vacuum storehouse, each vacuum storehouse disposes a kind of in film coating apparatus and the supplementary unit at least, wherein have at least in the vacuum storehouse and have circular orbit, workpiece can be along the circular orbit multi-turn of moving; Connect by the automatic vacuum gate between the adjacent vacuum storehouse; Other has a kind of flexible delivery band at the operation of vacuum condition lower edge guide rail, exchange or conveying workpieces automatically.
2, batch production of vacuum coating according to claim 1 system, it is characterized in that: standardized modular design is adopted in described vacuum storehouse.
3, according to each described batch production of vacuum coating system among the claim 1-2, it is characterized in that: between the warehouse of adjacent cells, vacuum tunnel is set, the automatic vacuum gate is arranged in the vacuum tunnel.
4, according to each described batch production of vacuum coating system among the claim 1-2, its feature also is: be connected to series, parallel and/or series-parallel connection between the described vacuum storehouse.
5, according to each described batch production of vacuum coating system among the claim 1-2, it is characterized in that: described batch production of vacuum coating system also comprises industrial computer and/or programmable logic controller.
CNU2007201700783U 2007-08-07 2007-08-07 Multiple-cabin combined type output vacuum coating system Expired - Lifetime CN201224759Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2007201700783U CN201224759Y (en) 2007-08-07 2007-08-07 Multiple-cabin combined type output vacuum coating system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2007201700783U CN201224759Y (en) 2007-08-07 2007-08-07 Multiple-cabin combined type output vacuum coating system

Publications (1)

Publication Number Publication Date
CN201224759Y true CN201224759Y (en) 2009-04-22

Family

ID=40597642

Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2007201700783U Expired - Lifetime CN201224759Y (en) 2007-08-07 2007-08-07 Multiple-cabin combined type output vacuum coating system

Country Status (1)

Country Link
CN (1) CN201224759Y (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104264114A (en) * 2014-10-14 2015-01-07 秦皇岛国泰玻璃有限公司 Full-automatic vacuum electronic gun film coating device
CN111575670A (en) * 2020-04-05 2020-08-25 武汉科瑞达真空科技有限公司 Flexible revolution and rotation conveying device and coating machine cavity with same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104264114A (en) * 2014-10-14 2015-01-07 秦皇岛国泰玻璃有限公司 Full-automatic vacuum electronic gun film coating device
CN111575670A (en) * 2020-04-05 2020-08-25 武汉科瑞达真空科技有限公司 Flexible revolution and rotation conveying device and coating machine cavity with same

Similar Documents

Publication Publication Date Title
CN101139699A (en) Batch production of vacuum coating system architecture and work-piece transmission system
KR100437752B1 (en) Vacuum apparatus for surface treatment of workpieces
EP2207909B1 (en) Method for manufacturing workpieces and apparatus
JPH07273166A (en) Device to transfer substrate
CN108190462B (en) Workpiece flexible transfer system with cache function
JP2008532770A (en) Apparatus for continuously local deformation and / or expansion deformation of metal container
CN101724825A (en) Continuous vacuum coating method and special equipment thereof
CN201224759Y (en) Multiple-cabin combined type output vacuum coating system
TWI495753B (en) Coating system and method for coating a substrate
JP2002102968A (en) Manufacturing equipment for can barrel and manufacturing method therefor
CN211689220U (en) Coating system with bidirectional loading track
US20090304907A1 (en) Coating system and method for coating a substrate
CN107895644B (en) It is a kind of to expand the production line seeped and production method for heavy rare earth crystal boundary
CN205774780U (en) Stacking-type Sputting film-plating apparatus
CN105887030B (en) Stacking-type Sputting film-plating apparatus and its film plating process
EP2133445B1 (en) Coating System and Method for Coating a Substrate
CN101659350B (en) Double-side loading and unloading continuous type transportation system and method thereof
CN114351124A (en) Battery piece coating system
CN112481588A (en) Full-automatic rapid sputtering coating production equipment
CN102517553A (en) Magnetron-sputtering filming production system and production process thereof
CN101624137B (en) Continuous transportation system with bypass structure and method thereof
TWM602563U (en) Film sputtering system having bidirectional material loading path
CN110142175B (en) Automatic spraying production line
CN214160170U (en) Double-station automatic paint spraying system of brake disc
CN214736078U (en) Modular rotary space atomic layer deposition system

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20090422

CX01 Expiry of patent term