CN201212046Y - Vacuum annealing furnace - Google Patents
Vacuum annealing furnace Download PDFInfo
- Publication number
- CN201212046Y CN201212046Y CNU2008200137080U CN200820013708U CN201212046Y CN 201212046 Y CN201212046 Y CN 201212046Y CN U2008200137080 U CNU2008200137080 U CN U2008200137080U CN 200820013708 U CN200820013708 U CN 200820013708U CN 201212046 Y CN201212046 Y CN 201212046Y
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- electric furnace
- worktable
- furnace
- annealing furnace
- silica tube
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Abstract
The utility model relates to a heat treatment device, in particular to a vacuum annealing furnace which comprises a worktable, an electric furnace and a quartz tube, wherein the electric furnace and a sampling chamber are mounted on the worktable, one end of the quartz tube penetrates into the electric furnace, and the other end is sealed and communicated with the sampling chamber through a sealing device; the sampling chamber is connected with a vacuum obtaining and measuring system, and the sealing device comprises a gland bush and a water-cooling cavity assembly which is sleeved on the quartz tube; one end of the water-cooling cavity assembly is sealed and connected with the sampling chamber, and the other end is sealed and connected with the gland bush; a shifter is mounted on the electric furnace and comprises a guide rail, wheels, shafts and wheel frames, the lower part of the electric furnace is connected with a bottom plate through a support, the wheel frames are mounted below the bottom plate, and the wheels are respectively mounted on the wheel frames through the shafts; and the guide rail is laid on the worktable, and the electric furnace can carry out reciprocating motion on the worktable through the matched connection of the wheels and the guide rail. The utility model has high vacuum degree without being repeatedly pumped to be vacuum, can slowly decrease temperature, and can also rapidly decrease the temperature by pushing the electric furnace away from the quartz tube.
Description
Technical field
The utility model relates to Equipment for Heating Processing, specifically a kind of vacuum annealing furnace.
Background technology
Material can experience the process of a recrystallization and grain growth in the heat treatment process of annealing; Recrystallization comprises the growth of nuclear and two primary processes of growing up.Material continues elevated temperature or prolongs soaking time after finishing recrystallization, and growing up of crystal grain can be taken place.Various blocks and thin-film material carry out after vacuum annealing or the anneal of protection under the gas shiled, and structure and performance all can change.
At present, existing vacuum annealing furnace comprises electric furnace, silica tube, worktable and vacuum suction device.Silica tube is inserted in the electric furnace, and two ends are protruding, supports on the worktable; One side of silica tube is connected with vacuum suction device, is vacuumized by it, and opposite side is provided with and opens the door.Material will open the door and open when annealing, manually material be delivered in the electric furnace silica tube, perhaps earlier material be put into the less silica tube of diameter, this silica tube be delivered in the bigger silica tube of electric furnace diameter again.The vacuum annealing furnace of this structure, its vacuum tightness is lower, in the process of material being delivered in the electric furnace silica tube, open open the door after, vacuum tightness in the silica tube will be affected, and is equal to normal atmosphere substantially, need send material, close and vacuumize again after opening the door.
In addition, existing vacuum annealing furnace can only be realized the furnace cooling of material, and can not cool off fast, and complex structure.
Along with science and technology development, need research material anneal at a certain temperature after again through the fast cooling back variation that its structure and performance took place, so demand urgently need a kind of vacuum tightness height (10
-4Pa), can realize behind the anneal of material refrigerative vacuum annealing furnace fast again.
The utility model content
In order to solve the problem of above-mentioned existence, the purpose of this utility model is to provide a kind of vacuum annealing furnace with condition of high vacuum degree.
Another purpose of the present utility model is to provide a kind of annealing back material refrigerative vacuum annealing furnace fast.
The purpose of this utility model is to realize by following technical scheme:
The utility model comprises worktable, electric furnace and silica tube, and electric furnace and Sample Room are installed on worktable, and an end of silica tube stretches in the electric furnace, and the other end is communicated with the Sample Room sealing by tightness system; Being connected with vacuum on the Sample Room obtains and measuring system.
Wherein: described tightness system comprises gland and waterway assembly, and the waterway assembly is sheathed on the silica tube, and an end and the Sample Room of waterway assembly are tightly connected, and the other end is sealedly connected with gland; The hollow circuit cylinder of waterway assembly for being surrounded by inside and outside wall leaves the space between the inside and outside wall; Also be provided with spacer between waterway assembly and silica tube, spacer is sheathed on the silica tube, and both sides seal butt with gland and waterway assembly respectively by the 2nd O RunddichtringO; On the described electric furnace running gear is installed, electric furnace can move back and forth on worktable by running gear; Described running gear comprises guide rail, wheel, axle and wheel carrier, and the below of electric furnace is connected with base plate by support, and wheel carrier is installed below base plate, and wheel is installed on the wheel carrier by axle; Be equipped with guide rail on the worktable, electric furnace is connected and can moves back and forth on worktable by wheel and guide rail; This annealing furnace also is equipped with waterworks, comprises inside and outside wall and water inlet pipe, and inside and outside wall surrounds hollow circuit cylinder, and water inlet pipe is fixed on the outer wall and is connected with space between the inside and outside wall; On the periphery of inwall, be evenly equipped with a plurality of spout holes; Described vacuum obtains and measuring system is positioned on the housing of worktable, comprises mechanical pump, electromagnetism shutdown valve and turbomolecular pump, and mechanical pump is connected with turbomolecular pump by the electromagnetism shutdown valve, and the other end of turbomolecular pump is connected in Sample Room; On Sample Room, also be provided with compound vacuum gauge.
Advantage of the present utility model and positively effect are:
1. silica tube of the present utility model and Sample Room are tightly connected, and have condition of high vacuum degree, needn't repeat to vacuumize.
2. electric furnace can move back and forth by the guide rail on the worktable, and temperature-fall period both can slowly be lowered the temperature, and also electric furnace can be pushed away the silica tube fast cooling.
3. the waterworks of the utility model outfit can make silica tube cool off rapidly, makes the quick cooling purpose of furnace temperature to reach.
4. the utility model is simple in structure, easy to operate.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the structural representation of vacuum acquisition and measuring system;
Fig. 3 is the synoptic diagram that is tightly connected of Sample Room and silica tube;
Fig. 4 is the structural representation of running gear;
Fig. 5 is the structural representation of waterworks;
Fig. 6 is the use synoptic diagram of waterworks;
Fig. 7 is that furnace temperature is with the temperature fall time graph of relation;
Fig. 8 is the XRD figure of FePt film;
Fig. 9 is the magnetic hysteresis loop figure before and after the annealing of FePt film;
Wherein: 1 is electric furnace, and 2 is silica tube, and 3 is worktable, and 4 is Sample Room, 5 is compound vacuum gauge, and 6 is mechanical pump, and 7 is the electromagnetism shutdown valve, and 8 is turbomolecular pump, 9 is gland, and 10 is the waterway assembly, and 11 is an O RunddichtringO, and 12 is spacer, 13 is the 2nd O RunddichtringO, and 14 is guide rail, and 15 is wheel, and 16 is axle, 17 is wheel carrier, and 18 is base plate, and 19 is support, 20 is waterworks, and 21 is spout hole, and 22 is water inlet pipe.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
As shown in Figure 1, the utility model comprises worktable 3, electric furnace 1 and silica tube 2, and electric furnace 1 and Sample Room 4 are installed on worktable 3, and an end of silica tube 2 stretches in the electric furnace 1, and the other end is communicated with Sample Room 4 sealings by tightness system; Being connected with vacuum on the Sample Room 4 obtains and measuring system.Electric furnace 1 is circular, furnace shell adopts stainless steel plate to connect and form through tearing side weld open, burner hearth is made up of alumina tube, with the carborunbum tube is heating unit, carborunbum tube is at the alumina tube internal heating, adopt ceramic fiber and aluminum silicate fiber to do thermal insulation layer, heating power 6KW, flat-temperature zone 160mm between alumina tube and the furnace shell.
As shown in Figure 3, tightness system comprises gland 9 and waterway assembly 10, waterway assembly 10 is sheathed on the silica tube 2, one end of waterway assembly 10 by screw retention on Sample Room 4, be tightly connected by an O RunddichtringO 11 with Sample Room 4, the other end is tightly connected by screw and gland 9.Between waterway assembly 10 and silica tube 2, also be provided with spacer 12, spacer 12 is sheathed on the silica tube 2, both sides are equipped with the 2nd O RunddichtringO 13, be connected to gland 9 and waterway assembly 10 respectively, gland 9 compresses spacer 12 and the 2nd O RunddichtringO 13, reach sealing function, and avoided silica tube to be connected, reduced or remitted because stressed and make silica tube the possibility of fracture occur with the hard of metal.Wherein, waterway assembly 10 adopts double-deck water-cooling structure, is the hollow circuit cylinder that is surrounded by inside and outside wall, and radial section is an annular; Leave the space between the inside and outside wall, communicate, be used for refrigerative water and be contained in space between the inside and outside wall with water inlet pipe; The waterway assembly can prevent to seal usefulness first and second O RunddichtringO 11,13 can since test in the heat-processed silica tube gradually heating cause temperature distortion, loss of seal effect.
As shown in Figure 4, on the electric furnace 1 running gear is installed, comprises guide rail 14, wheel 15, axle 16 and wheel carrier 17, the below of electric furnace 1 is connected with base plate 18 by support 19, and wheel carrier 17 is installed below base plate 18, and wheel 15 is installed on the wheel carrier 17 by axle 16; Be equipped with guide rail 14 on the worktable 3, electric furnace 1 is connected and can back and forth moves reposefully on worktable 3 by wheel 15 and guide rail 14, realizes improving the silica tube speed of cooling, makes the sample fast cooling, reaches the purpose of experiment related request.
As Fig. 5, shown in Figure 6, this annealing furnace also is equipped with waterworks 20, comprises inside and outside wall and water inlet pipe 22, and inside and outside wall surrounds hollow circuit cylinder, and water inlet pipe 22 is fixed on the outer wall and is connected with space between the inside and outside wall; On the periphery of inwall, be evenly equipped with a plurality of spout holes 21.After heating experiment is finished, close heating power supply, electric furnace 1 is pushed away silica tube after, furnace temperature descends rapidly, only needs about 6 minutes time furnace temperature just drop to 300 ℃.When treating that furnace temperature is lower than 300 ℃, waterworks 20 is set on the silica tube 2 and starts, water enters space between the inside and outside wall by water inlet pipe 22, sprays water from 24 spout holes of inner wall even distribution, and silica tube is cooled off rapidly, makes the quick cooling purpose of furnace temperature to reach.
As shown in Figure 2, vacuum obtains and measuring system is positioned on the housing of worktable 3, comprise mechanical pump 6, electromagnetism shutdown valve 7 and turbomolecular pump 8, mechanical pump 6 is connected with turbomolecular pump 8 by electromagnetism shutdown valve 7, and the other end of turbomolecular pump 8 is connected in Sample Room 4; On Sample Room 4, also be provided with compound vacuum gauge 5.
Principle of work of the present utility model is:
Start general supply, start water valve, connect the energy water coolant, check hydraulic pressure, guarantee that the water route is unimpeded.The FePt film sample is pushed end place in the silica tube 2 by Sample Room 4, close the button fly front of Sample Room 4.Start mechanical pump 6, open electromagnetism shutdown valve 7,6 pairs of vacuum chambers of mechanical pump and turbomolecular pump 8 are bled simultaneously.Open compound vacuum gauge 5 and measure, treat that pressure starts turbomolecular pump 8 less than 10Pa in the vacuum chamber, after about 8 minutes, turbomolecular pump 8 works better.At the bottom of highest attainable vacuum, reach 2 * 10
-4During Pa, electric furnace 1 is pushed to low order end to the right along guide rail 14, silica tube 2 inserts in the electric furnace 1, opens the heating temperature-controlled power, sets heating curve, and 550 ℃ of Heating temperatures begin heating; After reaching 550 ℃ of required Heating temperatures, be incubated half an hour; Insulation is closed heating power supply after finishing.Electric furnace 1 is pushed away silica tube 2 along guide rail 14, from Fig. 7 (furnace temperature is with the temperature fall time relation curve) as can be seen furnace temperature descend rapidly, only need about 6 minutes time furnace temperature just drop to 300 ℃, average rate of temperature fall is about 0.67 ℃/s.When treating that furnace temperature is lower than 300 ℃, waterworks 20 is installed on silica tube 2 and is started waterworks, make quartzy cooling rapidly, make the quick cooling purpose of furnace temperature to reach.When temperature drops to below 100 ℃, close compound vacuum gauge 5, turbomolecular pump 8, electromagnetism shutdown valve 7 and mechanical pump 6, close overhead control power supply and water coolant again.
Can not adopt waterworks yet, sample is slowly cooled off, with furnace temperature to reach requirement of experiment according to requirement of experiment.
By the FePt film that the room temperature magnetron sputtering is prepared, normally Fe and Pt atomic disorder are arranged, and are face-centered cubic (fcc) structure, can not be used as high-density magnetic storage recording medium.If the fcc-FePt film after the high vacuum anneal, will be obtained the FePt film in center of area four directions (fct).In fct-FePt, Fe atomic shell and Pt atomic shell are alternately arranged along the c axle, have high magnetocrystalline anisotropy energy, are the preferred material of super-high density magnetic storage medium.Crystal grain is tiny in the super-high density magnetic storage medium requirement film, has only the volume of single domain crystal grain to reduce, and the magnetic inversion volume is just little, and recording density just can increase substantially.Conventional furnace cooling annealed FePt film because rate of temperature fall is slow, causes in the film grain-size too to be grown up.When cooling off fast, can suppress the growth of crystal grain in the film to a great extent.Fig. 8 adopts high vacuum annealing furnace of the present utility model, and to the XRD figure after sedimentary FePt film cools off annealing fast on the glass substrate, the mean diameter that can calculate crystal grain according to the Scherrer formula only is 23nm.Fig. 9 is the magnetic hysteresis loop before and after the annealing of FePt film sample, and coercive force has only 2790e before the annealing, and annealing back coercive force is up to 47970e.As seen adopt fast the refrigerative high vacuum annealing furnace can make the thin film dielectrics material that satisfies the super-high density magnetic storage requirement.
Vacuum annealing furnace of the present utility model, maximum heating temperature can reach 1200 ℃ ± 3 ℃, and vacuum tightness can reach 2 * 10
-4Pa; Can carry out the while thermal annealing to a plurality of samples.Experimental requirement not only can realize vacuum annealing, can also be implemented in the annealing under the various protection gas shileds, and carries out the gas under the high temperature, solid reaction.
Claims (8)
1. vacuum annealing furnace, comprise worktable, electric furnace and silica tube, it is characterized in that: electric furnace (1) and Sample Room (4) are installed on worktable (3), and an end of silica tube (2) stretches in the electric furnace (1), and the other end is communicated with Sample Room (4) sealing by tightness system; Being connected with vacuum on the Sample Room (4) obtains and measuring system.
2. by the described vacuum annealing furnace of claim 1, it is characterized in that: described tightness system comprises gland (9) and waterway assembly (10), waterway assembly (10) is sheathed on the silica tube (2), one end of waterway assembly (10) and Sample Room (4) are tightly connected, and the other end is sealedly connected with gland (9).
3. by the described vacuum annealing furnace of claim 2, it is characterized in that: the hollow circuit cylinder of described waterway assembly (10) for being surrounded by inside and outside wall, leave the space between the inside and outside wall.
4. by the described vacuum annealing furnace of claim 2, it is characterized in that: between waterway assembly (10) and silica tube (2), also be provided with spacer (12), spacer (12) is sheathed on the silica tube (2), and both sides seal butt with gland (9) and waterway assembly (10) respectively by the 2nd O RunddichtringO (13).
5. by the described vacuum annealing furnace of claim 1, it is characterized in that: described electric furnace is equipped with running gear on (1), and electric furnace (1) can move back and forth on worktable (3) by running gear.
6. by the described vacuum annealing furnace of claim 5, it is characterized in that: described running gear comprises guide rail (14), wheel (15), axle (16) and wheel carrier (17), the below of electric furnace (1) is connected with base plate (18) by support (19), in the below of base plate (18) wheel carrier (17) is installed, wheel (15) is installed on the wheel carrier (17) by axle (16); Be equipped with guide rail (14) on the worktable (3), electric furnace (1) is connected and can moves back and forth on worktable (3) by wheel (15) and guide rail (14).
7. by the described vacuum annealing furnace of claim 1, it is characterized in that: this annealing furnace also is equipped with waterworks (20), comprise inside and outside wall and water inlet pipe (22), inside and outside wall surrounds hollow circuit cylinder, and water inlet pipe (22) is fixed on the outer wall and is connected with space between the inside and outside wall; On the periphery of inwall, be evenly equipped with a plurality of spout holes (21).
8. by the described vacuum annealing furnace of claim 1, it is characterized in that: described vacuum obtains and measuring system is positioned on the housing of worktable (3), comprise mechanical pump (6), electromagnetism shutdown valve (7) and turbomolecular pump (8), mechanical pump (6) is connected with turbomolecular pump (8) by electromagnetism shutdown valve (7), and the other end of turbomolecular pump (8) is connected in Sample Room (4); On Sample Room (4), also be provided with compound vacuum gauge (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200137080U CN201212046Y (en) | 2008-06-27 | 2008-06-27 | Vacuum annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200137080U CN201212046Y (en) | 2008-06-27 | 2008-06-27 | Vacuum annealing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201212046Y true CN201212046Y (en) | 2009-03-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNU2008200137080U Expired - Fee Related CN201212046Y (en) | 2008-06-27 | 2008-06-27 | Vacuum annealing furnace |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101871729A (en) * | 2010-06-24 | 2010-10-27 | 宝钢工程技术集团有限公司 | Material conveying method of horizontal vacuum furnace |
| CN102392113A (en) * | 2011-11-11 | 2012-03-28 | 上海工程技术大学 | Device and process for carrying out heat treatment on nanometer composite permanent-magnetic materials |
| CN103305667A (en) * | 2012-03-13 | 2013-09-18 | 天津海鸥表业集团有限公司 | Vacuum heat treatment equipment |
| CN112609057A (en) * | 2020-11-30 | 2021-04-06 | 常熟市欧迪管业有限公司 | Multi-station vacuum annealing furnace for titanium pipe machining |
| CN113493904A (en) * | 2020-03-19 | 2021-10-12 | 中国科学院沈阳科学仪器股份有限公司 | High-temperature high-vacuum annealing furnace |
-
2008
- 2008-06-27 CN CNU2008200137080U patent/CN201212046Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101871729A (en) * | 2010-06-24 | 2010-10-27 | 宝钢工程技术集团有限公司 | Material conveying method of horizontal vacuum furnace |
| CN102392113A (en) * | 2011-11-11 | 2012-03-28 | 上海工程技术大学 | Device and process for carrying out heat treatment on nanometer composite permanent-magnetic materials |
| CN103305667A (en) * | 2012-03-13 | 2013-09-18 | 天津海鸥表业集团有限公司 | Vacuum heat treatment equipment |
| CN113493904A (en) * | 2020-03-19 | 2021-10-12 | 中国科学院沈阳科学仪器股份有限公司 | High-temperature high-vacuum annealing furnace |
| CN112609057A (en) * | 2020-11-30 | 2021-04-06 | 常熟市欧迪管业有限公司 | Multi-station vacuum annealing furnace for titanium pipe machining |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: CAS SHENYANG SCIENTIFIC INSTRUMENTS CO., LTD. Free format text: FORMER NAME: SHENYANG SCIENTIFIC INSTRUMENT RESEARCH + MFG. CENTER CO., LTD., C.A.S |
|
| CP03 | Change of name, title or address |
Address after: Hunnan Shenyang 110197 Liaoning province Xinyuan street, No. 1 Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090325 Termination date: 20150627 |
|
| EXPY | Termination of patent right or utility model |