CN201181361Y - Double light source collimating light pipe - Google Patents
Double light source collimating light pipe Download PDFInfo
- Publication number
- CN201181361Y CN201181361Y CNU2008200570698U CN200820057069U CN201181361Y CN 201181361 Y CN201181361 Y CN 201181361Y CN U2008200570698 U CNU2008200570698 U CN U2008200570698U CN 200820057069 U CN200820057069 U CN 200820057069U CN 201181361 Y CN201181361 Y CN 201181361Y
- Authority
- CN
- China
- Prior art keywords
- light
- mirror
- aperture
- light source
- light path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 18
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 claims abstract description 5
- 238000009738 saturating Methods 0.000 claims description 12
- 229910052724 xenon Inorganic materials 0.000 claims description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 4
- 229910052753 mercury Inorganic materials 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 4
- 238000001228 spectrum Methods 0.000 abstract 1
- 230000001427 coherent effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 241000485082 Mammillaria prolifera Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Landscapes
- Spectrometry And Color Measurement (AREA)
Abstract
The utility model provides a double-light-source collimating light pipe, includes laser light path and luminous light path, the laser light path constitute by helium neon laser, spatial filter, second shutter, third speculum and shared mirror and collimating lens that pass through in proper order, luminous light path constitute by luminous light source, focusing mirror, first shutter, aperture, second mirror and first speculum and shared mirror and collimating lens in proper order, aperture and spatial filter's aperture be located respectively collimating lens's focus on. The utility model discloses can be in same collimating lens bore, the collimated light that an output single light source or two kinds of light source are constituteed, the collimated light of laser light path is high-quality parallel light, and luminous light path has the spectrum of broad. The method is mainly used for precise adjustment and calibration of optical devices, and is particularly suitable for adjusting the aplanatism of interference light paths.
Description
Technical field
The utility model relates to collimated light source, is a kind of collimating light pipe that has collimation lens, produces directional light, and light source is made up of He-Ne Lasers, light emitting diode or xenon lamp.Can in same bore, export the collimated light that independent a kind of light source or two kinds of light sources (one of them is He-Ne Lasers) are formed.Be mainly used in the precision adjustment and the demarcation of optical devices, be specially adapted to the aplanatic adjustment of optical interference circuit.
Background technology
In Michaelson (the perhaps Mach Zehnder type etc.) white light interferometer, need to adjust the two-way coherent light and satisfy strict aplanatism condition (optical path difference is near a millimeter magnitude).Formerly in the technology, white light generally commonly used and broad spectrum light source be as the debugging light source, the accurate optical path difference of adjusting two-way, up to the color fringe of seeing symmetry, path difference near micron dimension as aplanatic standard.In this process, at first utilize the long He-Ne Lasers of coherent length usually, to the path difference coarse regulation.Because the scope of adjusting path difference is by centimetre to micron, span is big, uncertain high, often needs several equipment to switch mutually, satisfies the needs of different moment path difference precision.This mode relies on technician's experience, multiple devices, adjustment time-consuming, not easy to operate.The beam divergence that is obtained by beam expanding lens simultaneously is big, is not high-quality collimated light, for the adjustment of high-accuracy optical devices with demarcate inapplicable.Therefore need a kind ofly possess multiple path difference simultaneously and adjust precision, high-quality collimating light pipe simple to operate.
Formerly (referring to " Lab of General Physics ", Meng Erxi edits technology [1], publishing house of Shandong University 1988.The adjustment of Michelson interferometer and use, p296) light source is made in the He-Ne Lasers source that utilizes described in, and links to each other with beam expanding lens, does tentatively to adjust.Change the sodium vapor lamp of spectral width then and observe, further adjust light path.Observe centrosymmetric color fringe with white light source at last, reach the interference aplanatism.Need repeatedly more exchange device, and testing light source finished by general beam expanding lens, the collimation of light beam can not guarantee.
Formerly technology [2] is (referring to the Newport Resource 2004, ' Spatial Filter ', p558) laser beam described in can be removed parasitic light through the spatial filter of microcobjective and pin hole composition, improves beam quality, obtains the pointolite of approximate ideal.It is positioned at the focus of collimating mirror, can obtains the highly plane wave of collimation.This only provides a kind of mode that obtains the high-quality collimated light beam, can not satisfy the needs that aplanatism is adjusted simultaneously.
Formerly technology [3] is (referring to U.S.Patent 6320689, semiconductor laser and optical systemhaving a collimator lens) a kind of diode collimated light source that is used for laser printer described in, adopt semiconductor laser as emissive source, produce directional light by aperture and collimation lens, project to toner cartridge through scanning objective.Because the needs of printer scan function, complex structure, it is big to remove the parasitic light energy loss.
Summary of the invention
The technical problems to be solved in the utility model is to overcome above-mentioned the deficiencies in the prior art, a kind of double light source collimating light pipe is provided, has the multiple light source of different coherent lengths, in the white light interference aplanatism is adjusted, provide multiple path difference to adjust precision and calibrating function, simple in structure, easy operating.
Technical solution of the present utility model is as follows.
A kind of double light source collimating light pipe, characteristics are that its formation comprises laser optical path and luminous light path, described laser optical path is made up of helium-neon laser, spatial filter, second shutter, the 3rd catoptron and shared saturating anti-mirror and collimation lens successively, described luminous light path is made up of illuminating source, focus lamp, first shutter, aperture, second catoptron and first catoptron and shared saturating anti-mirror and collimation lens successively, and the aperture of described aperture and spatial filter lays respectively on the focus of described collimation lens.
Described illuminating source is light emitting diode or xenon lamp or mercury lamp.
The size of described anti-mirror is more little to be beneficial to processing more, can increase the distance of anti-mirror to collimating mirror as far as possible.
Technique effect of the present utility model:
1, owing on the position of light emitting diode, can adopt xenon lamp or mercury lamp to replace, can obtain the collimated light of different spectral widths.Since on luminous light path, adopt simple structure, therefore strong to the universality of light source, be the advantage on this road.
2, on laser optical path, adopted spatial filter, so this road light can obtain high-quality collimated light.Under the monitoring of other wave surface detector device, can be adjusted into the approximate ideal plane wave.As the light path adjustment, can be used as the demarcation light source of the contour precision optical instrument of interferometer simultaneously on the one hand.
3, in a word, the utility model device has the multiple light source of different coherent lengths, in the white light interference aplanatism is adjusted, provides multiple path difference to adjust precision and calibrating function, simple in structure, easy operating.
Description of drawings
Fig. 1 is the light channel structure synoptic diagram of the utility model double light source collimating light pipe
Fig. 2 is the spacing synoptic diagram of each optical element
Fig. 3 is a LED source focus point synoptic diagram
Fig. 4 is he-ne laser tube light-resource fousing point synoptic diagram
Embodiment
The utility model is described in further detail below in conjunction with embodiment and accompanying drawing, but should not limit protection domain of the present utility model with this.
See also Fig. 1 earlier, Fig. 1 is the light channel structure synoptic diagram of the utility model double light source collimating light pipe, as seen from the figure, the formation of the utility model double light source collimating light pipe comprises laser optical path and luminous light path, described laser optical path is successively by helium-neon laser 12, spatial filter 11, second shutter 10, the 3rd catoptron 9 and shared saturating anti-mirror 2 and collimation lens 1 are formed, described luminous light path is successively by illuminating source 8, focus lamp 7, first shutter 6, aperture 5, second catoptron 4 and first catoptron 3 and shared saturating anti-mirror 2 and collimation lens 1 are formed, and the aperture of described aperture 5 and spatial filter 11 lays respectively on the focus of described collimation lens 1.
Described illuminating source 8 is a light emitting diode, or xenon lamp, or mercury lamp.
The total length of the utility model double light source collimating light pipe is limited by the focal length of collimating mirror, and the focal length of the general collimating mirror of bore diameter more than 150 millimeters is greater than 1 meter, and long use is inconvenient, and adopting the catoptron folded optical path is more excellent method.
The selection of each component size and the spacing of each optical element, referring to Fig. 2, Fig. 3 and Fig. 4:
Collimating mirror 1: bore light beam clear aperture D decision as required.The ratio of focal distance f and bore is generally greater than 8.
Saturating anti-mirror 2: adopting high quality optical glass, is d apart from collimating mirror 1
1, clear aperture is
First catoptron 3: the saturating anti-mirror 2 of distance is d
2, clear aperture is
Second catoptron 4: distance first catoptron 3 is d
3, clear aperture is
The 3rd catoptron 9: the saturating anti-mirror 2 of distance is d
4, clear aperture is
Condenser lens 7: focal length is f
2, bore is D
2
LED source 8: angle of divergence θ
1, light-emitting area diameter δ
1
He-ne laser tube 12: spot diameter δ
2
Aperture 5: diameter is δ
3, with the distance of second catoptron 4 be d
6 Illuminating source 8 is approximately through the hot spot that lens 7 focus on
The diameter δ of general aperture 5
3Get less than hot spot.Simultaneously
The desirable angle of divergence of the luminous light path that provides for collimating light pipe.
Spatial filter 11: the distance of the aperture of this spatial filter and the 3rd catoptron 9 is d
5, the diameter δ of aperture
4Be typically chosen in
The microcobjective focal length is f
3, λ is the He-Ne Lasers wavelength, δ
2(light intensity is reduced to e for the helium neon laser beam spot diameter
-2).Simultaneously
The desirable angle of divergence of the He-Ne Lasers light path that provides for collimating light pipe.
In the present embodiment, collimation lens 1 bore diameter D is 150mm, and focal distance f is 1600mm.Saturating anti-mirror 2 bore 125mm, apart from collimation lens 1 apart from d
1Be 700mm, from the horizontal by 45 degree.
The 3rd catoptron 9, bore 70mm is apart from d
4Be 490mm, parallel with saturating anti-mirror 2.Second shutter, 10 materials are iron plate, square length of side 20mm.The numerical aperture of microcobjective is 0.4 in the spatial filter 11, and enlargement ratio is 20, and aperture size 20 μ m are apart from d
5Be 310mm.The spot diameter 1mm of he-ne laser tube, power 2mW.
Experiment shows, the utlity model has the multiple light source of different coherent lengths, in the white light interference aplanatism is adjusted, provides multiple path difference to adjust precision and calibrating function, simple in structure, easy operating.
Claims (2)
1, a kind of double light source collimating light pipe, be characterised in that its formation comprises laser optical path and luminous light path, described laser optical path is successively by helium-neon laser (12), spatial filter (11), second shutter (10), the 3rd catoptron (9) and shared saturating anti-mirror (2) and collimation lens (1) are formed, described luminous light path is successively by illuminating source (8), focus lamp (7), first shutter (6), aperture (5), second catoptron (4) and first catoptron (3) and shared saturating anti-mirror (2) and collimation lens (1) are formed, and described aperture (5) and spatial filter (11) lay respectively on the focus of described collimation lens (1).
2, double light source collimating light pipe according to claim 1 is characterized in that described illuminating source (8) is light emitting diode or xenon lamp or mercury lamp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200570698U CN201181361Y (en) | 2008-04-09 | 2008-04-09 | Double light source collimating light pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200570698U CN201181361Y (en) | 2008-04-09 | 2008-04-09 | Double light source collimating light pipe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201181361Y true CN201181361Y (en) | 2009-01-14 |
Family
ID=40250860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200570698U Expired - Fee Related CN201181361Y (en) | 2008-04-09 | 2008-04-09 | Double light source collimating light pipe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201181361Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100547455C (en) * | 2008-04-09 | 2009-10-07 | 中国科学院上海光学精密机械研究所 | Double light source collimating light pipe |
| CN102519305A (en) * | 2011-10-31 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Device for monitoring and aligning infrared multispectral laser |
| CN104374473A (en) * | 2014-10-24 | 2015-02-25 | 涿州迅利达创新科技发展有限公司 | Optical system with pulse xenon lamp used for atomic absorption background correcting |
| CN104765159A (en) * | 2015-04-14 | 2015-07-08 | 赵智亮 | Fast-alignment auto-collimation laser parallel source |
| CN111082298A (en) * | 2020-01-17 | 2020-04-28 | 中国工程物理研究院激光聚变研究中心 | Automatic light path collimation method of off-axis eight-pass amplification laser system |
-
2008
- 2008-04-09 CN CNU2008200570698U patent/CN201181361Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100547455C (en) * | 2008-04-09 | 2009-10-07 | 中国科学院上海光学精密机械研究所 | Double light source collimating light pipe |
| CN102519305A (en) * | 2011-10-31 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Device for monitoring and aligning infrared multispectral laser |
| CN102519305B (en) * | 2011-10-31 | 2014-03-12 | 中国科学院长春光学精密机械与物理研究所 | Device for monitoring and aligning infrared multispectral laser |
| CN104374473A (en) * | 2014-10-24 | 2015-02-25 | 涿州迅利达创新科技发展有限公司 | Optical system with pulse xenon lamp used for atomic absorption background correcting |
| CN104374473B (en) * | 2014-10-24 | 2016-08-24 | 涿州迅利达创新科技发展有限公司 | Xenon flash lamp is for the optical system of Background Correction of Atomic Absorption Spectrometry |
| CN104765159A (en) * | 2015-04-14 | 2015-07-08 | 赵智亮 | Fast-alignment auto-collimation laser parallel source |
| CN111082298A (en) * | 2020-01-17 | 2020-04-28 | 中国工程物理研究院激光聚变研究中心 | Automatic light path collimation method of off-axis eight-pass amplification laser system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI741104B (en) | Compact beam shaping and steering assembly | |
| TWI666528B (en) | Supercontinuum radiation source and optical measurement system, alignment mark measurement system and lithographic apparatus comprising the same | |
| CN201181361Y (en) | Double light source collimating light pipe | |
| CN101441111B (en) | Grating diffraction efficiency tester with CCD multicolor machine | |
| CN102155997B (en) | Optical fiber type laser wavelength meter | |
| KR20080070863A (en) | Overlay metrology using the near infra-red spectral range | |
| CN102564588A (en) | Vertical incidence broadband spectrograph using optical fiber bundle for light splitting and an optical measurement system | |
| Parfenov et al. | Calibration of the spectral sensitivity of instruments for the near infrared region | |
| CN101793988A (en) | Method for accurately adjusting groove density in light path for making holographic grating | |
| CN103162831A (en) | Broadband polarization spectrometer and optical measurement system | |
| CN102087480B (en) | Method for adjusting real-time monitoring device in exposure light path of planar holographic grating | |
| JP2014511020A (en) | Apparatus for forming an interference grating on a sample | |
| CN101183041A (en) | Interferometer and method of use thereof | |
| CN100547455C (en) | Double light source collimating light pipe | |
| KR100763974B1 (en) | Method and apparatus for aligning optical axis for wavefront sensor for mid-infrared band | |
| CN103698005A (en) | Self-calibrated light source spectrum tuner | |
| CN108132026A (en) | Infrared visible ray dual wavelength transmission-type interference testing device in semiconductor | |
| CN101216610A (en) | Adjusting device and adjusting method for light path collimation of spatial filter | |
| CN102087481A (en) | Method for adjusting real-time monitor device in exposure path of concave holographic grating | |
| US20150070705A1 (en) | Autocorrelator | |
| CN105446082B (en) | Overlay error measurement apparatus and method | |
| CN102628804A (en) | Transmissivity determinator and method of detecting transmissivity | |
| US7595886B2 (en) | Wavelength monitor using interference signals | |
| WO2022049986A1 (en) | Pulse spectroscopy device and multi-fiber radiation unit | |
| JP5214777B2 (en) | Pseudo-sunlight irradiation device and spectrum adjustment method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090114 |