CN201072389Y - Negative pressure closed sampling device - Google Patents
Negative pressure closed sampling device Download PDFInfo
- Publication number
- CN201072389Y CN201072389Y CNU200720155666XU CN200720155666U CN201072389Y CN 201072389 Y CN201072389 Y CN 201072389Y CN U200720155666X U CNU200720155666X U CN U200720155666XU CN 200720155666 U CN200720155666 U CN 200720155666U CN 201072389 Y CN201072389 Y CN 201072389Y
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- tail gas
- sampling
- negative
- pipe
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Abstract
The utility model provides a negative pressure closed sampling device and comprises a negative pressure generator for generating negative pressure, a tail gas absorber chamber which is used for absorbing tail gas and connected with the negative pressure generator through a dismountable negative pressure pipe, a sampling chamber which is used for placing sampling containers and connected with the tail gas absorber chamber through a dismountable gas intake pipe, with sample source through a dismountable sampling pipe and intakes atmospheric air through dismountable gas intake pipe. The gas intake pipe and (or) negative pressure pipe and (or) tail gas pipe and (or) sampling pipe are provided with at least one or more regulation valve (s). The utility model has the advantages that the possibility of contamination of resources is reduced due to that only sampling pipe enters a material container; pollution to the sampling container is prevented since that the sampling container is arranged in the closed sampling chamber; and steam from chemical materials is collected by the tail gas absorber chamber, which prevents spreading and damages arisen therefrom.
Description
Technical field
The utility model relates to a kind of sampler, particularly a kind of negative-pressure sealed formula sampler.
Background technology
Advanced person day by day along with the semiconductor technology processing procedure, employed electronic grade chemicals raw material requires more and more higher to cleanliness factor in the wafer manufacturing process, and these chemicals raw materials itself often have harmfulness to human body, therefore when the sampling of analytical chemicals raw material, both need avoid chemicals raw material and sample are polluted, again must danger the leakage and the diffusion of chemicals, so on sampling instrument, must make every effort to cleaning and safety requirements.
The utility model content
The purpose of this utility model is for convenience to the extraction of chemicals raw material and acid tank etc., and is not contaminated at the protection sample, and the staff does not make that sampling instrument is easy to reach cleaning and safe requirement when can not be subjected to the infringement of sample.
In view of above-mentioned purpose, the utility model provides a kind of negative-pressure sealed formula sampler, comprising:
Produce the negative pressure generator of negative pressure;
Absorb the tail gas absorption chamber of tail gas, connect negative pressure generator by dismountable negative pressure pipe;
Place the sampling hut of sampling container, connect the tail gas absorption chamber by dismountable offgas duct, connect sample source by dismountable stopple coupon, enter atmosphere gas by dismountable draft tube, have one or more variable valve on above-mentioned draft tube and/or negative pressure pipe and/or offgas duct and/or the stopple coupon.
As preferably, above-mentioned negative pressure generator connects an end of dismountable force pipe, feeds gas from force pipe.
As preferably, above-mentioned tail gas absorption chamber connects dismountable washing pipe, feeds to clean by the washing pipe and uses liquid.
As preferably, have the cleaning liquid of predetermined in the above-mentioned tail gas absorption chamber, the port that the washing pipe inserts the end in the tail gas absorption chamber is a funnel-form, this port is provided with chemical filter screen, and the cleaning in the immersion tail gas absorption chamber is with in the liquid.
As preferably, above-mentioned sampling hut and above-mentioned tail gas absorption chamber have openable window shape structure respectively.
As preferably, the bottom of above-mentioned sampling hut and above-mentioned tail gas absorption chamber has the exhaust valve on vent pipe and the vent pipe respectively.
As preferably, above-mentioned cleaning liquid is deionized water.
As preferably, above-mentioned sampling hut and above-mentioned tail gas receiving chamber are equipped with the scale of measuring internal pressure.
As preferably, the platform of shelving sampling container is arranged in the above-mentioned sampling hut.
The beneficial effects of the utility model are: only stopple coupon stretches in the material container, reduces the contaminated possibility of raw material; Sampling container places the sampling hut of sealing, avoids polluting; The tail gas absorption chamber is collected the steam of chemicals volatility of raw material, avoids diffusion to work the mischief.
Description of drawings
Fig. 1 is the negative-pressure sealed formula sampler of the utility model one preferred embodiment.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is done to introduce further, but not as to qualification of the present utility model.
The negative-pressure sealed formula sampler of the utility model one preferred embodiment as shown in Figure 1, this device comprises negative pressure generator 10, in this embodiment, it comprises venturi (Ventury) vacuum generator 11 and associated pipe, the main flow process of this device is: venturi vacuum generator 11 provides negative pressure, make to be attached thereto formation pressure reduction inside and outside the logical sampling hut 30, thereby the liquid of sampling is sucked collection in the sampling hut 30 that seals.For preventing that chemicals raw material diffusion of vapor from working the mischief, between venturi vacuum generator 11 and sampling hut 30, be communicated with a tail gas absorption chamber 20, dissolve absorption steam with deionized water (DI water) 24.
The negative-pressure sealed formula sampler of the utility model one preferred embodiment specifically comprises with lower device, it at first is venturi vacuum generator 11, have pressure regulation tube and pressure-regulating valve 41 on it, when needs venturi vacuum generator 11 produces negative pressure, pressure-regulating valve 41 is opened, venturi vacuum generator 11 produces negative pressure, pressure differential is arranged inside and outside making continuous tail gas absorption chamber 20; When venturi vacuum generator 11 did not need to produce negative pressure, pressure-regulating valve 41 cut out, and the tail gas absorption chamber is malleation.
Tail gas absorption chamber 20 is an air hermetic, comprises shell, has window with lock 31 on the shell, so that window 31 is put in order by opening, wiping, adjustment tail gas absorption chamber 20.Tail gas absorption chamber 20 and venturi vacuum generator 11 are connected by pipeline, thereby when venturi vacuum generator 11 produced negative pressure, tail gas absorption chamber 20 also presented negative pressure state.Tail gas absorption chamber 20 can connect dismountable washing pipe 22 and washing valve 43, so that feed the cleaning liquid 22 that absorbs steam as required, deionized water for example, shape tail gas absorption chamber 20 can will utilize the washing pipe to clean with the liquid 22 predetermined mark position of packing into, the below of washing pipe 22 is inserted and is cleaned with in the liquid 22, and the below port of washing pipe 22 is a funnel-form, takes out preventing, the port is provided with chemical filter screen 23, makes to clean the steam that can fully absorb the chemicals volatilization with liquid 22.Tail gas absorption chamber 20 can also connect scale 51, measures internal pressure.The bottom of tail gas absorption chamber 20 has the exhaust valve 47 on vent pipe and the vent pipe, uses liquid in order to discharge to clean.
Sampling hut 30 is a sealed chamber, comprise shell 37, the flat board 38 of settling sampling container 36 is contained in inside, have window with lock 32, so that take out sampling container 36, cleaning sampling hut 30 connects the water control pipe that has water control valve 44, so that feed cleaning liquid 22, for example deionized water that absorbs steam as required; Cleaning sampling hut 30 connects the stopple coupon that has sample valve 46, with so that sample flow go in the sampling container 36; Cleaning sampling hut 30 connects the adjustable pipe that has variable valve 42, with so that sampling hut 30 feeds gas as required, becomes malleation; Cleaning sampling hut 30 connects the offgas duct that has tail gas valve 45, with so that sampling hut 30 becomes negative pressure as required, makes tail gas flow into tail gas absorption chamber 20.In the present embodiment, an end of 30 is connected one in the sampling hut for offgas duct and adjustable pipe.Above-mentioned sampling hut 30 can also connect scale 52, measures internal pressure.The bottom of sampling hut 30 also has the exhaust valve 48 on vent pipe and the vent pipe, uses liquid in order to discharge to clean.
The use of the negative-pressure sealed formula sampler of the utility model one preferred embodiment may further comprise the steps, and these steps only are exemplary expression, and the person of ordinary skill in the field can draw multiple different implementation method according to above device explanation.
Before step 1, the sampling, by pressure regulation tube external gas body source, for example making pressure is 10～20psi compression drying air or N2 gas source with negative-pressure sealed formula sampler, feeds deionized water by water control pipe.
Step 2, when sampling, at first open 43 pairs of tail gas absorption chambers of water control valve 20 and carry out moisturizing and after mark is ordered liquid level, close water control valve 43.
Step 3, opening pressure valve 41 make venturi vacuum generator 11 produce negative pressure, thereby make and be attached thereto the logical tail gas absorption chamber 20 inside and outside pressure reduction that form.
Step 4, unlatching variable valve 42 keep sampling hut's 30 malleations, then open the window 32 of sampling hut 30, and clean sampling container 36 is placed stopple coupon outlet below, and the inlet of container is aimed at the outlet of stopple coupon substantially.
Step 5, close variable valve 42 after closing the window 32 of sampling hut 30.
Step 6, open tail gas valve 45, venturi vacuum generator 11 and tail gas absorption chamber 20 are connected by pipeline, and tail gas absorption chamber 20 is connected by the offgas duct that has tail gas valve 45 with sampling hut 30, so sampling hut's 30 same negative pressure state that are.
Step 7, the stopple coupon of cleaning inserted treat sampling container, open the sample valve 46 of stopple coupon and can take a sample.
The liquid level of sample is to suitably closing sample valve 46 after the liquid level (being generally 90%) in step 8, the visual sampling container.
Step 9, close tail gas valve 45, open variable valve 42, make gas from adjustable pipe, enter sampling hut 30, make sampling hut 30 reach barotropic state.
Step 10, open the window 32 of sampling hut 30, take out sampling container 36 after sampling container 36 is covered loam cake, and cover tight bottle cap.
Step 11, sampling container 36 carry out wash bottle with the sample chemical product, then to waste collection groove or bucket.
Step 12, repetitive routine step 4～step 11 three times obtain authentic sample.
After step 13, sampling finish, take out sampling container 36 from sampling hut 30, get a measuring cup and replace sampling container 36, place the original position of sampling container 36, repeating step 4～step 7 is drained the chemicals in the stopple coupon.
Step 14, stopple coupon is pulled down, cleaned and be placed in the clean container, for example preserve in the polybag.
Step 15, open variable valve 42, sampling hut 30 feeds gases, returns to the normal pressure state, and the window 32 of opening sampling hut 30 takes out measuring cups, with waste liquid to waste collection groove or bucket.
Step 16, unlatching tail gas valve 45, closing presure valve 41 makes tail gas absorption chamber 20 feed gases, is barotropic state.
Step 17, open exhaust valve 48 and close after with the discharge of wastewater in the tail gas absorption chamber 20.
Step 18,43 pairs of tail gas absorption chambers of unlatching washing valve are mended again into deionized water, close washing valve 43 after mark is ordered liquid level.
Step 19, repeating step 17～step 18 step 3 time are then with the deionized water emptying in the tail gas absorption chamber 20.
Step 20, open water control valve 44 and feed deionized waters, sampling hut's 20 usefulness deionized waters are cleaned, then open exhaust valve 47, close water control valve 44 and exhaust valve 47 respectively behind the discharge of wastewater in will sampling hut 20.
Step 21, for avoiding residual plasma water in the sampling hut 20, sampling hut 20 is dried with non-dust cloth, close the window 32 of upper sample chamber 30.
Step 22, close variable valve 42 and tail gas valve 45, the compression drying air of 10 external～20psi or N2 source of the gas and deionized water are removed, finish sample procedure.
Table 1 is the threshold switch complete list in the sampling procedure of the present utility model, therefrom can clearly find out the threshold switch situation in each stage.
Table 1
| The valve numbering | 41 | 42 | 43 | 44 | 45 | 46 | 47 | 48 |
| Feed plasma water | Close | Close | Open | Close | Close | Close | Close | Close |
| Produce negative pressure | Open | Close | Close | Close | Open | Close | Close | Close |
| The chemicals sampling | Open | Close | Close | Close | Open | Open | Close | Close |
| Discharge the pressure in the sampling hut | Close | Open | Close | Close | Close | Close | Close | Close |
| Cleaning | Close | Open | Close | Close | Open | Open | Close | Close |
| Discharging | Close | Open | Close | Close | Open | Close | Open | Open |
The above only is preferred embodiment of the present utility model; be not so limit scope of patent protection of the present utility model; so the so-called equivalent structure of all utilizations instructions of the present utility model and diagramatic content changes, or directly or indirectly apply to other correlative technology fields and all in like manner all be contained in the scope that the utility model contains.
Claims (9)
1. negative-pressure sealed formula sampler is characterized in that comprising:
Produce the negative pressure generator of negative pressure;
Absorb the tail gas absorption chamber of tail gas, connect negative pressure generator by dismountable negative pressure pipe;
Place the sampling hut of sampling container, connect the tail gas absorption chamber by dismountable offgas duct, connect sample source by dismountable stopple coupon, enter atmosphere gas by dismountable draft tube, have one or more variable valve on above-mentioned draft tube and/or negative pressure pipe and/or offgas duct and/or the stopple coupon.
2. negative-pressure sealed formula sampler according to claim 1 is characterized in that: above-mentioned negative pressure generator connects an end of dismountable force pipe, feeds gas from force pipe.
3. negative-pressure sealed formula sampler according to claim 1 and 2 is characterized in that: above-mentioned tail gas absorption chamber connects dismountable washing pipe, feeds to clean by the washing pipe and uses liquid.
4. negative-pressure sealed formula sampler according to claim 3, it is characterized in that: the cleaning liquid that has predetermined in the above-mentioned tail gas absorption chamber, the port that the washing pipe inserts the end in the tail gas absorption chamber is a funnel-form, this port is provided with chemical filter screen, and the cleaning of immersing in the tail gas absorption chamber is used in the liquid.
5. negative-pressure sealed formula sampler according to claim 4 is characterized in that: above-mentioned sampling hut and above-mentioned tail gas absorption chamber have openable window shape structure respectively.
6. negative-pressure sealed formula sampler according to claim 5 is characterized in that: the bottom of above-mentioned sampling hut and above-mentioned tail gas absorption chamber has the exhaust valve on vent pipe and the vent pipe respectively.
7. negative-pressure sealed formula sampler according to claim 6 is characterized in that: above-mentioned cleaning liquid is deionized water.
8. negative-pressure sealed formula sampler according to claim 6 is characterized in that: above-mentioned sampling hut and above-mentioned tail gas receiving chamber are equipped with the scale of measuring internal pressure.
9. negative-pressure sealed formula sampler according to claim 8 is characterized in that: the platform of shelving sampling container is arranged in the above-mentioned sampling hut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200720155666XU CN201072389Y (en) | 2007-07-30 | 2007-07-30 | Negative pressure closed sampling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200720155666XU CN201072389Y (en) | 2007-07-30 | 2007-07-30 | Negative pressure closed sampling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201072389Y true CN201072389Y (en) | 2008-06-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU200720155666XU Expired - Fee Related CN201072389Y (en) | 2007-07-30 | 2007-07-30 | Negative pressure closed sampling device |
Country Status (1)
| Country | Link |
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| CN (1) | CN201072389Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102410949A (en) * | 2011-07-26 | 2012-04-11 | 公安部上海消防研究所 | Sample preparation device for fire scene oxidant infrared spectrum testing |
| CN102759473A (en) * | 2011-04-20 | 2012-10-31 | 徕卡生物***努斯洛克有限公司 | Tissue sample handling apparatus |
| CN103852351A (en) * | 2014-03-25 | 2014-06-11 | 济钢集团有限公司 | Sampling device and sampling method for pumping gas sample in self-negative-pressure pipeline |
| CN103852352A (en) * | 2012-12-06 | 2014-06-11 | 中国人民解放军空军航空医学研究所 | Gas production negative-pressure equipment and gas detection system |
| CN107870105A (en) * | 2017-05-04 | 2018-04-03 | 湖北航天化学技术研究所 | A kind of small-scale solid rocket motor combustion product collection device |
| CN109540597A (en) * | 2017-09-21 | 2019-03-29 | 贵港市厚顺信息技术有限公司 | A kind of sulfuric acid sampler |
-
2007
- 2007-07-30 CN CNU200720155666XU patent/CN201072389Y/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759473A (en) * | 2011-04-20 | 2012-10-31 | 徕卡生物***努斯洛克有限公司 | Tissue sample handling apparatus |
| CN102759473B (en) * | 2011-04-20 | 2017-05-24 | 徕卡生物***努斯洛克有限公司 | Tissue sample handling apparatus |
| CN102410949A (en) * | 2011-07-26 | 2012-04-11 | 公安部上海消防研究所 | Sample preparation device for fire scene oxidant infrared spectrum testing |
| CN102410949B (en) * | 2011-07-26 | 2013-07-17 | 公安部上海消防研究所 | Sample preparation device for fire scene oxidant infrared spectrum testing |
| CN103852352A (en) * | 2012-12-06 | 2014-06-11 | 中国人民解放军空军航空医学研究所 | Gas production negative-pressure equipment and gas detection system |
| CN103852352B (en) * | 2012-12-06 | 2017-09-12 | 中国人民解放军空军航空医学研究所 | Gas production negative pressure equipment and gas detecting system |
| CN103852351A (en) * | 2014-03-25 | 2014-06-11 | 济钢集团有限公司 | Sampling device and sampling method for pumping gas sample in self-negative-pressure pipeline |
| CN103852351B (en) * | 2014-03-25 | 2016-04-13 | 济钢集团有限公司 | A kind of sampler of extracting gases sample in negative-pressure pipeline and sampling method |
| CN107870105A (en) * | 2017-05-04 | 2018-04-03 | 湖北航天化学技术研究所 | A kind of small-scale solid rocket motor combustion product collection device |
| CN109540597A (en) * | 2017-09-21 | 2019-03-29 | 贵港市厚顺信息技术有限公司 | A kind of sulfuric acid sampler |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080611 |