CN201010616Y - Radiant heater used for aluminum nitride material preparing techniques - Google Patents
Radiant heater used for aluminum nitride material preparing techniques Download PDFInfo
- Publication number
- CN201010616Y CN201010616Y CNU2007200627032U CN200720062703U CN201010616Y CN 201010616 Y CN201010616 Y CN 201010616Y CN U2007200627032 U CNU2007200627032 U CN U2007200627032U CN 200720062703 U CN200720062703 U CN 200720062703U CN 201010616 Y CN201010616 Y CN 201010616Y
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- tungsten
- arc
- sheet
- silk screen
- nitride material
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Abstract
A radial type heater for aluminum nitride material production process is provided. The heater comprises a cylindrical furnace body, wherein the cylindrical furnace body is formed by surrounding of 6 tungsten filament nets, the 6 tungsten filament nets are connected in tri-phase Y-Y connection manner, each adjacent two tungsten filaments are parallelly connected through an inner side arc-shaped tungsten piece and an outer side arc-shaped tungsten piece at the upper end thereof; each pair of arc-shaped tungsten pieces composed of the inner side arc-shaped tungsten piece and the outer side arc-shaped tungsten piece are respectively welded with a tungsten electrode to form an outgoing electrode, and the above 6 tungsten filament nets are fixed in a groove formed by an inner tungsten ring and an outer tungsten ring by welding. The utility model can well transmit the radiation heat to the aluminum nitride substrate on the technical tray; and has the advantages of good temperature uniformity in heating range, large surface power, good overall rigidity, long service life and good reliability.
Description
Technical field
The utility model relates to a kind of well heater, specifically suitable a kind of radiant heater that is used for aluminium nitride material preparation technology.
Technical background
Aluminium nitride (AlN) material is a kind of multi-functional wide-band gap material, uses very extensive in military high-technology field.When adopting the ultrahigh-temperature co-firing technology to prepare aluminium nitride material, good thermal field is one of them prerequisite.
Aluminium nitride is as the substrate and the optimal material of encapsulation of electronic devices and components, its manufacturing process is very complicated, a wherein the most key ring is the sintering of multilayer co-firing ceramic substrate, it is that the green sheet stock is placed on sintering in hydrogen, the nitrogen reducing atmosphere through wiring, lamination, lamination, green becomes ripe, metal powder material metallization in sintering, so be referred to as common burning.The metallization powder is refractory metals such as W, Mo, and goods are based on normal pressure-sintered.Temperature about 1850 ℃ is carried out sintering in mobile hydrogen, nitrogen reducing atmosphere, soaking time is 1～2h.Like this, the technology thermal field that requires well heater to provide must satisfy ultrahigh-temperature, temperature control is sensitive, thermal field is even, heater material can not produce processing condition such as pollution to the aluminium nitride goods.This well heater is in the reaction chamber of low pressure, sealing, and type of heating is a radiation heating, in the technology, has only when in the sheet of each substrate, all be heated evenly between sheet, can prepare just that thickness is even, planeness good, the aluminium nitride substrate of high conformity; Aluminium nitride preparation technology requires heating-cooling speed very fast (its processing atmosphere accurately changes rapidly synchronously) simultaneously, i.e. temperature control is sensitive.
From the above, during ultrahigh-temperature (1850 ℃), the power of well heater is big; Well heater is operated in the subatmospheric zone, requires steam under the thermo electric material high temperature to force down and does not react with aluminium nitride material; Temperature control is sensitive, then requires the thermal capacity of well heater little; Thermal field is even, then requires on the different positions of well heater radiation thermal field, and its temperature deviation is little.
The utility model content
At above technological deficiency, the purpose of this utility model provides a kind of radiant heater that is used for aluminium nitride material preparation technology, to adapt to aluminium nitride preparation technology requirement, makes it can satisfy high-power radiation requirement and obtains ideal temperature, the working reliability height.
For achieving the above object, technical solution of the present utility model is, a kind of radiant heater that is used for aluminium nitride material preparation technology, comprise a cartridge heater body, the barrel of described cartridge heater body is apart rearranged by six arc tungsten silk screens, and the lower end of described six tungsten silk screens places the annular groove that is made of interior tungsten ring and outer tungsten ring and welding is fixing with it; The upper end of described arc tungsten silk screen is one group with per two adjacent tungsten silk screens and forms three groups, every group each fixedly connected with outer arcuate tungsten sheet with the respective inside arc tungsten sheet in the outside with laying respectively at the tungsten silk screen inboard, and the inboard arc tungsten sheet of every group of tungsten silk screen upper end and outer arcuate tungsten sheet all form an extraction electrode with a tungsten electrode welding, form three extraction electrodes thus altogether.
Described tungsten silk screen is worked out by helically wound tungsten filament.
Referring to accompanying drawing, the utility model comprises a cartridge heater body (1), the barrel of described cartridge heater body (1) is apart rearranged by six arc tungsten silk screens (7), and the lower end of described six arc tungsten silk screens (7) places the annular groove that is made of interior tungsten ring (8) and outer tungsten ring (9) and welding is fixing with it; The upper end of described arc tungsten silk screen (7) is one group with per two adjacent arc tungsten silk screens and forms three groups, every group each fixedly connected with outer arcuate tungsten sheet (5) with the respective inside arc tungsten sheet (4) in the outside with laying respectively at arc tungsten silk screen (7) inboard, and the inboard arc tungsten sheet (4) of every group of arc tungsten silk screen upper end all is connected by tungsten rivet (6) with a tungsten electrode (3) with outer arcuate tungsten sheet (5), and welding formation one extraction electrode (2), form three extraction electrodes (2) thus altogether.As Fig. 5, arc tungsten silk screen (7) is worked out by helically wound tungsten filament, and tungsten filament helix adopts both forward and reverse directions to arrange that promptly the spiral of adjacent tungsten silk screen can reduce to be out of shape torsion around on the contrary, makes the Stability Analysis of Structures of well heater.Electron-bombardment welding or argon arc welding are all adopted in all welding in the described well heater.
During actual the use, three extraction electrodes of well heater insert the phase line of three-phase supply respectively, and the interior tungsten ring of described tungsten silk screen lower end and outer tungsten ring then connect the zero line of described power supply, constitute the Y-Y connection shown in figure (6) thus.During installation, the extraction electrode of well heater is fixedlyed connected by conductive clip with the water-cooled electrode on the bell and is hung in the stove, and repair and replacement are more convenient.
The described radiant heater that is used for aluminium nitride material preparation technology that the utility model provides, radiation thermal conduction is good, adds that good, the allowable surperficial power of pining in district's scope of temperature homogeneity is big, integral rigidity good, use the longevity long, reliability is high.
Description of drawings
Fig. 1 is a kind of embodiment perspective view;
Fig. 2 is vertical sectional structure chart of device shown in Figure 1;
Fig. 3 is the vertical view of device shown in Figure 1;
Fig. 4 is the deployed configuration synoptic diagram of device shown in Figure 1;
Fig. 5 is the tungsten silk screen programming structure of a kind of embodiment;
Fig. 6 is a dual star topology wiring schematic diagram of the present utility model;
In the drawings:
1-cartridge heater body 2-extraction electrode
The inboard arc tungsten of 3-tungsten electrode 4-sheet
5-outer arcuate tungsten sheet 6-tungsten rivet
The inboard tungsten ring of 7-tungsten silk screen 8-
9-outside tungsten ring
Embodiment
With reference to accompanying drawing (5), the utility model adopts at first that the footpath is the spiral of 4mm for 3.5mm pitch in the tungsten filament coiled of 1mm, the requirement of heater table area is determined the radical of every phase tungsten spiral according to heating power, be compiled into reticulated structure again, form the arc tungsten silk screen, the spacing between the wherein adjacent spiral is 2.25mm; With reference to accompanying drawing (1), (2), (3), (4), the mutual spacing of described six arc tungsten silk screens 7 equates, and its lower end places the annular groove that is made of interior tungsten ring 8 and outer tungsten ring 9 and welding is fixing with it; The upper end of described arc tungsten silk screen 7 is one group with per two adjacent arc tungsten silk screens and forms three groups, every group each fixedly connected with outer arcuate tungsten sheet 5 with the respective inside arc tungsten sheet 4 in the outside with laying respectively at arc tungsten silk screen 7 inboards, and the inboard arc tungsten sheet 4 of every group of arc tungsten silk screen upper end and outer arcuate tungsten sheet 5 all form an extraction electrode 2 with 3 welding of a tungsten electrode, form three extraction electrodes 3 thus altogether.
Claims (2)
1. radiant heater that is used for aluminium nitride material preparation technology, comprise a cartridge heater body, it is characterized in that, the barrel of described cartridge heater body is apart rearranged by six arc tungsten silk screens, and the lower end of described six tungsten silk screens places the annular groove that is made of interior tungsten ring and outer tungsten ring and welding is fixing with it; The upper end of described arc tungsten silk screen is one group with per two adjacent tungsten silk screens and forms three groups, every group each fixedly connected with outer arcuate tungsten sheet with the respective inside arc tungsten sheet in the outside with laying respectively at the tungsten silk screen inboard, and the inboard arc tungsten sheet of every group of tungsten silk screen upper end and outer arcuate tungsten sheet all form an extraction electrode with a tungsten electrode welding, form three extraction electrodes thus altogether.
2. the radiant heater that is used for aluminium nitride material preparation technology according to claim 1 is characterized in that described tungsten silk screen is worked out by helically wound tungsten filament.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200627032U CN201010616Y (en) | 2007-03-14 | 2007-03-14 | Radiant heater used for aluminum nitride material preparing techniques |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200627032U CN201010616Y (en) | 2007-03-14 | 2007-03-14 | Radiant heater used for aluminum nitride material preparing techniques |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201010616Y true CN201010616Y (en) | 2008-01-23 |
Family
ID=39045558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200627032U Expired - Fee Related CN201010616Y (en) | 2007-03-14 | 2007-03-14 | Radiant heater used for aluminum nitride material preparing techniques |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201010616Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107218817A (en) * | 2017-07-25 | 2017-09-29 | 苏州美腾炉业有限公司 | A kind of high temperature vacuum resistance furnace heater |
| CN114214606A (en) * | 2021-12-02 | 2022-03-22 | 中国工程物理研究院激光聚变研究中心 | Apparatus for initiated chemical vapor deposition |
-
2007
- 2007-03-14 CN CNU2007200627032U patent/CN201010616Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107218817A (en) * | 2017-07-25 | 2017-09-29 | 苏州美腾炉业有限公司 | A kind of high temperature vacuum resistance furnace heater |
| CN114214606A (en) * | 2021-12-02 | 2022-03-22 | 中国工程物理研究院激光聚变研究中心 | Apparatus for initiated chemical vapor deposition |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080123 |