WO2021012969A1 - Electric arc heating method and apparatus - Google Patents

Electric arc heating method and apparatus Download PDF

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Publication number
WO2021012969A1
WO2021012969A1 PCT/CN2020/101324 CN2020101324W WO2021012969A1 WO 2021012969 A1 WO2021012969 A1 WO 2021012969A1 CN 2020101324 W CN2020101324 W CN 2020101324W WO 2021012969 A1 WO2021012969 A1 WO 2021012969A1
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Prior art keywords
substrate
cathode
metal electrode
arc
heating
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PCT/CN2020/101324
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French (fr)
Chinese (zh)
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韩振斌
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韩振斌
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Publication of WO2021012969A1 publication Critical patent/WO2021012969A1/en

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/02—Details
    • H05B7/06—Electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/18—Heating by arc discharge
    • H05B7/20—Direct heating by arc discharge, i.e. where at least one end of the arc directly acts on the material to be heated, including additional resistance heating by arc current flowing through the material to be heated

Definitions

  • the present invention relates to the technical field of arc heating, and in particular, to an arc heating method and device for heating a substrate formed by powder compaction and/or sintering.
  • Heating refers to the process by which a heat source transfers heat energy to a colder object to heat it, which is a normal operation mode in life and production.
  • Heating methods can generally be divided into two categories: direct heating and indirect heating.
  • the existing heating methods mainly include arc discharge heating, direct current heating and microwave heating.
  • the direct current heating method has low thermal energy conversion efficiency and the microwave heating structure is too high. It is complicated and easily damages the microwave equipment at high temperature, so the arc discharge heating method is more popular.
  • the present invention provides an arc heating method and device for a matrix formed by powder compaction and/or sintering.
  • the first aspect of the present invention provides an arc heating method.
  • the arc heating method for heating a matrix formed by powder compaction and/or sintering includes:
  • the substrate is heated in a thermally conductive manner through the metal electrode.
  • the matrix includes a matrix formed by sintering boride powder.
  • the boride includes lanthanum hexaboride.
  • the material of the metal electrode is tungsten or tungsten alloy.
  • the base is a rod
  • the metal electrode is a pipe
  • the base is matched and inserted into the metal electrode.
  • the second aspect of the embodiments of the present application provides an arc heating device for a substrate formed by powder compaction and/or sintering.
  • an arc heating device for heating a substrate formed by pressing and/or sintering powder includes an arc generator and a vacuum chamber, and the anode and cathode of the arc generator are both located in the vacuum chamber The cathode is configured to provide thermal energy to the substrate in a thermally conductive manner.
  • the cathode is attached to the surface of the substrate, and the anode is arranged on a side of the cathode away from the substrate.
  • the cathode covers the substrate.
  • the substrate is a rod material
  • the cathode is a tube material
  • the substrate is matched and inserted into the cathode.
  • the substrate is a substrate sintered from lanthanum hexaboride powder, and the material of the cathode is metallic tungsten.
  • the arc heating method and device for a matrix formed by powder compaction and/or sintering of the present invention utilizes the high-density and high-temperature resistance characteristics of the arc generator cathode to allow it to receive arc heating. Under the bombardment of a large current, the metal electrode will not The phenomenon of cracking and damage occurs, and the high temperature generated can be indirectly heated to the base body formed by powder pressing or sintering through contact conduction, thereby ensuring the service life of the heated base body.
  • Figure 1 is a schematic flow chart of an arc heating method for a matrix formed by powder compaction and/or sintering
  • FIG. 2 is a schematic diagram of the structure of an arc heating device for a matrix formed by powder compaction and/or sintering
  • Figure 3 schematically shows a connection between the cathode and the substrate
  • Figure 4 schematically shows another connection between the cathode and the substrate
  • Figure 5 schematically shows another connection between the cathode and the substrate
  • Figure 6 schematically shows another connection between the cathode and the substrate
  • Figure 7 schematically shows a diagram of the connection relationship between the cathode and the anode
  • Figure 8 schematically shows another connection diagram between the cathode and the anode.
  • Fig. 9 schematically shows another connection diagram between the cathode and the anode.
  • orientation or positional relationship indicated by the terms “upper”, “lower”, “inner”, “middle”, “outer” etc. are based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present invention and its embodiments, and are not used to limit that the indicated device, element, or component must have a specific orientation, or be constructed and operated in a specific orientation.
  • connection can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or two devices, components, or The internal communication between the components.
  • connection can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or two devices, components, or The internal communication between the components.
  • the embodiments of this application provide an arc heating method, which is suitable for heating a matrix formed by direct compression of powder, a matrix formed by direct sintering of powder, or a product sintered by powder after compression, as shown in Figure 1.
  • the arc heating method includes the following steps: first, the metal electrode is configured to contact and connect with the substrate, and the melting point of the metal electrode is configured to be higher than the target heating temperature; then, in a vacuum environment, the metal electrode is bombarded away from the substrate by means of arc bombardment. On one side, the metal electrode is heated; finally, the metal electrode heated by the arc heats the substrate in a thermally conductive manner.
  • the metal electrode has the properties of high density and high temperature resistance, so under the bombardment of large current, the metal electrode will not crack and damage, and the high temperature generated by the arc bombardment can indirectly heat the substrate through contact conduction to heat the production
  • the temperature required in life avoids direct heating of the substrate through arc heating, and will not cause damage to the heated substrate, thereby ensuring the service life of the substrate.
  • the matrix in the above embodiments is preferably a matrix obtained by pressing and sintering powder.
  • the powder used to form the matrix includes but is not limited to oxides, borides, metals and clay minerals.
  • the borides include but are not limited to boron trioxide, boron nitride and lanthanum hexaboride.
  • Lanthanum hexaboride is the best material for making high-power electron lights, magnetrons, electron beams, and accelerator cathodes. It can be heated by heating lanthanum hexaboride. Under high temperature, lanthanum hexaboride will escape electrons, which can affect electrons. To be applied.
  • lanthanum hexaboride matrix embodiment refers to lanthanum boride-based ceramics crystalline phase, a cubic crystal form, purple, a density of 4.76g / cm3, melting point 2530 °C, linear expansion coefficient of 6.4 * 10 - 6 °C -1 , elastic modulus 460GPa, microhardness 2.76MPa, acid and alkali resistance, and excellent heat radiation.
  • the preparation method of the lanthanum hexaboride matrix can be: synthesize lanthanum hexaboride powder at high temperature with lanthanum trioxide and carbon tetraboride in an inert atmosphere or a reducing atmosphere; then sinter the lanthanum hexaboride under the protection of nitrogen according to a ceramic process It is a lanthanum hexaboride matrix.
  • the metal electrode is arranged in contact with the above-mentioned lanthanum hexaboride substrate, and then, in a vacuum environment, the side of the metal electrode away from the lanthanum hexaboride substrate is bombarded by arc bombardment, and the metal electrode is heated by the arc.
  • the lanthanum boride matrix is heated by heat conduction, and the lanthanum hexaboride matrix will escape electrons at high temperatures.
  • the material of the metal electrode used in the above-mentioned arc heating method is preferably a metal or alloy with high density and high temperature resistance, including but not limited to red copper, tungsten, and tungsten alloy.
  • the material of the metal electrode is selected to be metallic tungsten.
  • the melting point of tungsten is 3410° C., and generally does not crack under arc bombardment, which is an ideal metal electrode material in the embodiments of the present application.
  • the substrate is designed as a rod
  • the metal electrode is designed as a tube
  • the substrate is matched and inserted into the metal electrode, that is, the rod is matched and inserted into the tube.
  • the vacuum range of the vacuum environment in which the metal tungsten is heated by the arc bombardment is not greater than that can be adjusted according to specific needs, preferably 10 -4 -10 -2 Pa, which can ultimately ensure the effectiveness of the arc heating method Just implement it.
  • the inventors have determined the appropriate heating temperature to be 1200°C ⁇ 1800 through many experiments. °C, that is, by controlling the heating temperature range of 1200°C ⁇ 1800°C during the heating process of the lanthanum hexaboride matrix by metal tungsten, more electrons can be escaped. Most preferably, when the vacuum degree is 10 -3 Pa, the heating temperature is controlled to 1600° C. during the heating process of the lanthanum hexaboride matrix by metal tungsten.
  • an embodiment of the present application provides an arc heating device for heating the compacted and/or sintered powder Matrix.
  • the arc heating device includes an arc generator 1, a vacuum chamber 2 and a substrate 3.
  • the substrate 3 and the positive and cathode of the arc generator 1 are both located in the vacuum chamber 2, and the anode 4 and the cathode 5 of the arc generator 1
  • the material of the cathode 5 is metal
  • the cathode 5 is configured to provide heat energy to the base 3 in a thermally conductive manner
  • the anode is arranged on the side of the cathode 5 away from the base 3.
  • the specific working process of the arc heating device provided in the above embodiment may be: evacuating the vacuum chamber 2 to keep it at a certain degree of vacuum, turning on the power supply 7 to make the arc generator 1 work, and the arc generator 1 is provided for
  • the two arc-generating electrodes are arranged oppositely, on the same horizontal surface, and keep their ends out of contact.
  • a discharge arc is generated between the anode 4 and the cathode 5, and the metal as the cathode 5 is bombarded by a large current to generate heat. 5
  • the heat is transferred to the base 3 connected to it by means of heat conduction, and the base 3 is heated.
  • the cathode 5 In the arc heating device, because the metal cathode 5 has high density and high temperature resistance, the cathode will not crack and damage under the bombardment of large current, and the high temperature generated by the arc bombardment can be conducted through contact. Heating the substrate 3 indirectly avoids direct heating of the substrate 3 through arc heating, and will not cause damage to the heated substrate 3, thereby ensuring the service life of the substrate 3.
  • the cathode 5 in the above embodiment is used to receive the bombardment of the high-energy arc, and transfer the heat to the base 3 in the form of heat conduction after heating.
  • the contact connection between the two is used to realize heat conduction.
  • the specific connection between the cathode 5 and the base 3 can be In many forms.
  • the cathode 5 and the substrate 3 are attached to each other, that is, the cathode 5 is attached to the surface of the substrate 3, and the anode 4 is arranged on the side of the cathode 5 away from the substrate 3, so that the anode 4 and the cathode The arc generated between 5 will not bombard the substrate 3.
  • the cathode 5 includes a first section 501 and a second section 502 arranged perpendicular to each other, wherein one end of the second section 502 is connected to the middle of the first section 501, forming the cross section shown in FIG. A font-shaped cathode structure.
  • the side of the first section 501 of the cathode 5 facing away from the second section 502 faces the anode 4.
  • the right angle between the first section 501 and the second section 502 is used to fix the base 3, as shown in the figure.
  • the cathode 5 is configured to cover the base 3, and while increasing the contact area and improving the heat transfer efficiency, the base 3 can be fixed by the cathode 5, which can reduce the fixing structure in the overall structure.
  • the cross-sectional shape of the cathode 5 is U-shaped, and the substrate 3 is arranged inside the U-shaped of the cathode 5, and the substrate 3 is covered in three directions by the cathode 5;
  • the cross-sectional shape of the cathode 5 is a closed pattern, the substrate 3 is arranged inside the cathode 5, and the cathode 5 realizes the coating of the substrate 3 in four directions.
  • the cathodes shown in Figures 2 and 6 are all designed as tubes, the base 3 is designed as a rod, the cathode in Figure 2 is a round tube design, and the base 3 is set to match a cylindrical design that can be inserted into the cathode; the cathode in Figure 6 is a square tube design , The base 3 is configured to match the rectangular parallelepiped design that can be inserted into the cathode.
  • multiple sets of anodes 4 and cathodes 5 are arranged in the vacuum chamber 2, and the multiple cathodes 5 are uniformly arranged in a circular array, and the multiple anodes 4 are arranged in a circular array composed of the cathodes 5. internal.
  • the above arrangement can make full use of the space inside the vacuum chamber 2 to allow multiple groups of anodes 4 and cathodes 5 to work at the same time, and can heat multiple substrates 3 at the same time.
  • multiple anodes 4 are provided in the vacuum chamber.
  • the figures of this embodiment show three anodes 4, and one cathode 5 is provided in the vacuum chamber 2.
  • the cross-section of the cathode 5 It has a circular ring shape and surrounds the periphery of a plurality of anodes 4.
  • the above arrangement can make full use of the space inside the vacuum chamber 2 and allow multiple sets of anodes 4 to generate arc discharge with one cathode 5 at the same time.
  • the annularly arranged cathode 5 can obtain a larger surface area for heating the substrate.
  • one anode 4 is provided in the vacuum chamber.
  • the anode 4 shown in the drawings of this embodiment is cylindrical, and there are multiple cathodes 5 in the vacuum chamber 2.
  • the number of cathodes 5 shown in the figure is four, the four cathodes 5 are uniformly arranged in a circular array, and the anodes 4 are arranged inside the circular array composed of the cathodes 5.
  • the above arrangement can make full use of the space inside the vacuum chamber 2 to allow one anode 4 to arc discharge multiple cathodes 5 at the same time, and multiple substrates 3 can be heated by multiple cathodes 5 at the same time.
  • the arc heating device of this embodiment is to realize the arc heating method provided in embodiment 1 for heating the substrate formed by powder compaction and/or sintering, so all technical solutions in embodiment 1 are applicable
  • the substrate 3 may be a substrate sintered from lanthanum hexaboride powder, and the material of the cathode may be metallic tungsten, etc., which will not be repeated here.
  • the vacuum chamber 2 can be set in the workshop and is the main body of the arc heating equipment.
  • the function of the vacuum chamber is to provide a necessary vacuum environment for generating an arc between the electrodes of the arc generator, which can provide the vacuum required for arc generation, the vacuum pump 6 and the detection function components.
  • the vacuum degree refers to the use of a vacuum pumping system to make the gas in a certain space reach a certain vacuum degree during the arc generation process, and this vacuum degree can meet the vacuum degree required for arc generation, which can be based on specific requirements
  • the vacuum setting is beneficial to prevent oxidation of the metal electrode at high temperatures and protect the electrode; the vacuum pump 6 is used to maintain the required vacuum condition and pressure value for the vacuum chamber 2.
  • vacuum valves and control circuits for controlling the vacuum pumps can also be provided, which are applicable to the existing technology and will not be repeated here;
  • Functional components refer to real-time monitoring of pressure, temperature, etc. in the vacuum chamber 2.
  • Common tools include but not limited to RGA, vacuum gauge, spectrometer, etc., which are not vacuum chambers but can be attached to the vacuum chamber 2. It should be noted that, for ease of presentation, only an optional structure of the vacuum chamber is schematically shown in FIG. 2 of the present application, and the vacuum chamber 2 used to form a vacuum condition is not limited to the one shown in the drawings Structure and shape.
  • the power supply 7 in the above-mentioned embodiment is used to provide electric power to the entire system including the arc generator 1.
  • the voltage of the power supply 7 can be set from several volts to several thousand volts, and the current is from several amperes to several hundred amperes. During use, specific settings can be made according to the size of the heated lanthanum hexaboride matrix and the required temperature.
  • the anode 4 of the arc generator 1 is preferably made of high temperature resistant metal tungsten, and its shape includes but is not limited to a cylinder and a circular ring.
  • the optimal heating temperature is 1600°C, in order to obtain more precise temperature control
  • the heating temperature can be achieved by adjusting the output power of the power supply 7 to the arc generator 1.
  • both anode 4 and cathode 5 are made of metallic tungsten, and the shape of cathode 5 is processed into a tungsten tube as shown in Figure 2.
  • the specific dimensions of the tungsten tube are: inner diameter of 150mm, outer diameter of 185mm, and length
  • the base 3 is selected as a lanthanum hexaboride base, and the base 3 is a bar shaped as shown in Figure 2.
  • the size parameters are: diameter 149mm, length 350mm; the distance between anode 4 and cathode 5 is 10mm; the vacuum degree in the vacuum chamber 2 is maintained at 10 -3 Pa.
  • the output parameters of the power supply through the arc generator are: voltage 1150V.
  • the material of the anode 4 and the cathode 5 are both tungsten rhenium alloy, and the shape of the cathode 5 is processed into a tungsten tube as shown in Figure 5.
  • the specific size parameters of the tungsten tube are: the outer square ring size of the cross section is 20mm ⁇ 20mm , The size of the inner square ring is 17mm ⁇ 17mm, and the length of the tungsten tube is 300mm; the base 3 is selected as a lanthanum hexaboride base, and the base 3 is a bar processed into the shape shown in Figure 5.
  • the size parameter is: the cross-sectional size is 16.8 mm ⁇ 16.8mm, the length is 300mm; the distance between the anode 4 and the cathode 5 is 12mm; the vacuum in the vacuum chamber 2 is maintained at 10 -4 Pa.
  • the output power parameter of the arc generator is : Voltage is 1000V. After about 8s, a stable plasma flow is formed. After a stable arc is generated between the cathode and anode, the voltage will drop below 110V. At this time, the temperature of the lanthanum hexaboride matrix can be maintained at 1600°C.

Abstract

The present invention relates to the technical field of electric arc heating and, specifically, relates to an electric arc heating method and an apparatus, for use in heating a substrate formed by compressing and/or sintering a powder. The electric arc heating method comprises: configuring a metal electrode to be in contact and connected with the substrate, the melting point of the metal electrode being greater than a target heating temperature; in a vacuum environment, bombarding the side of the metal electrode facing away from the substrate by means of an electrical arc bombardment, thus heating the metal electrode; and heating the substrate via the metal electrode by means of heat conduction. The electric arc heating method and apparatus for the substrate formed by compressing and/or sintering the powder of the preset invention, utilizing the characteristics of high density and high temperature resistance of a cathode of an electric arc generator, allow the cathode to be heated by an electric arc, prevent the metal electrode from experiencing a phenomenon of cracking damages under the bombardment of a large current, and indirectly heat the substrate formed by compressing or sintering the powder with the generated high temperature by means of contact conduction.

Description

电弧加热方法及装置Arc heating method and device 技术领域Technical field
本发明涉及电弧加热技术领域，具体而言，涉及一种电弧加热方法及装置，用于加热由粉末压制和/或烧结成的基体。The present invention relates to the technical field of arc heating, and in particular, to an arc heating method and device for heating a substrate formed by powder compaction and/or sintering.
背景技术Background technique
加热是指热源将热能传给较冷物体而使其变热的过程，属于生活和生产中的常规操作方式。加热的方式一般可分为直接加热和间接加热两大类现有的加热方式主要有电弧放电加热、电流直接加热和微波加热的方式，其中电流直接加热的方式热能转化效率低，微波加热结构过于复杂，且在高温下容易损坏微波设备，因此电弧放电加热的方式更受青睐。Heating refers to the process by which a heat source transfers heat energy to a colder object to heat it, which is a normal operation mode in life and production. Heating methods can generally be divided into two categories: direct heating and indirect heating. The existing heating methods mainly include arc discharge heating, direct current heating and microwave heating. The direct current heating method has low thermal energy conversion efficiency and the microwave heating structure is too high. It is complicated and easily damages the microwave equipment at high temperature, so the arc discharge heating method is more popular.
现有的很多被加热体是通过粉末或颗粒类物质通过压制或烧结而成的制成品，虽然其经过压制或烧结后内部孔隙率降低，形成了具有较高机械能的致密结构。但是，对于该类被加热体而言，在实际操作中发现，通过电弧加热的方式进行加热，在高能电弧的轰击下，容易使得由粉末压制和/或烧结成的基体出现破损，使得基体出现开裂、破损为碎块或颗粒，导致被加热体的使用寿命变短，尤其是对于尺寸越大的该类被加热体，高能电弧加热出现破损的现象越严重。Many existing heated bodies are manufactured by pressing or sintering powder or granular materials, although their internal porosity decreases after pressing or sintering, forming a dense structure with higher mechanical energy. However, for this type of heated body, it has been found in actual operation that heating by means of arc heating, under the bombardment of the high-energy arc, is likely to cause damage to the matrix formed by powder compaction and/or sintering, causing the matrix to appear Cracks and breakages are fragments or particles, resulting in a shorter service life of the heated body. Especially for this type of heated body with a larger size, the damage caused by high-energy arc heating is more serious.
发明内容Summary of the invention
为了解决上述技术问题，本发明提供了一种由粉末压制和/或烧结成的基体的电弧加热方法及装置。In order to solve the above technical problems, the present invention provides an arc heating method and device for a matrix formed by powder compaction and/or sintering.
本发明的第一个方面，提供了一种电弧加热方法。The first aspect of the present invention provides an arc heating method.
根据本发明实施例提供的用于加热由粉末压制和/或烧结成的基体的电弧加热方法，其包括：According to an embodiment of the present invention, the arc heating method for heating a matrix formed by powder compaction and/or sintering includes:
配置金属电极与所述基体接触连接，所述金属电极的熔点高于目标加热温度；Configuring a metal electrode to be in contact with the substrate, and the melting point of the metal electrode is higher than the target heating temperature;
在真空环境下，通过电弧轰击的方式轰击所述金属电极背离所述基体的一侧，以对所述金属电极进行加热；In a vacuum environment, bombarding the side of the metal electrode away from the base by means of arc bombardment to heat the metal electrode;
通过所述金属电极对所述基体以热传导的方式加热。The substrate is heated in a thermally conductive manner through the metal electrode.
进一步的，所述基体包括由硼化物粉末烧结而成的基体。Further, the matrix includes a matrix formed by sintering boride powder.
进一步的，所述硼化物包括六硼化镧。Further, the boride includes lanthanum hexaboride.
进一步的，所述金属电极的材质为钨或钨合金。Further, the material of the metal electrode is tungsten or tungsten alloy.
进一步的，所述基体为棒材，所述金属电极为管材，所述基体匹配***在所述金属电极内。Further, the base is a rod, the metal electrode is a pipe, and the base is matched and inserted into the metal electrode.
本申请实施例的第二个方面，提供了一种由粉末压制和/或烧结成的基体的电弧加热装置。The second aspect of the embodiments of the present application provides an arc heating device for a substrate formed by powder compaction and/or sintering.
根据本发明实施例提供的用于加热由粉末压制和/或烧结成的基体的电弧加热装置，其包括电弧发生器和真空腔，所述电弧发生器的阳极和阴极均位于所述真空腔内，所述阴极被配置成以热传导方式向所述基体提供热能。According to an embodiment of the present invention, an arc heating device for heating a substrate formed by pressing and/or sintering powder includes an arc generator and a vacuum chamber, and the anode and cathode of the arc generator are both located in the vacuum chamber The cathode is configured to provide thermal energy to the substrate in a thermally conductive manner.
进一步的，所述阴极贴覆所述基体表面，所述阳极设置在所述阴极背离所述基体的一侧。Further, the cathode is attached to the surface of the substrate, and the anode is arranged on a side of the cathode away from the substrate.
进一步的，所述阴极包覆所述基体。Further, the cathode covers the substrate.
进一步的，所述基体为棒材，所述阴极为管材，所述基体匹配插在所述阴极内。Further, the substrate is a rod material, the cathode is a tube material, and the substrate is matched and inserted into the cathode.
进一步的，所述基体为由六硼化镧粉末烧结而成的基体，所述阴极的材质为金属钨。Further, the substrate is a substrate sintered from lanthanum hexaboride powder, and the material of the cathode is metallic tungsten.
本发明的由粉末压制和/或烧结成的基体的电弧加热方法及装置，利用电弧发生器阴极具有高密度耐高温的特性，使其接受电弧加热，在大电流的轰击下，金属电极不会出现崩裂损坏现象，且能将产生的高温通过接触传导的方式间接给有粉末压制或烧结成的基体加热，从而保证了被加热的基体的使用寿命。The arc heating method and device for a matrix formed by powder compaction and/or sintering of the present invention utilizes the high-density and high-temperature resistance characteristics of the arc generator cathode to allow it to receive arc heating. Under the bombardment of a large current, the metal electrode will not The phenomenon of cracking and damage occurs, and the high temperature generated can be indirectly heated to the base body formed by powder pressing or sintering through contact conduction, thereby ensuring the service life of the heated base body.
附图说明Description of the drawings
构成本发明的一部分的附图用来提供对本发明的进一步理解，使得本发明的其它特征、目的和优点变得更明显。本发明的示意性实施例附图及其说明用于解释本发明，并不构成对本发明的不当限定。在附图中：The drawings constituting a part of the present invention are used to provide a further understanding of the present invention, so that other features, purposes and advantages of the present invention become more apparent. The drawings and descriptions of the schematic embodiments of the present invention are used to explain the present invention, and do not constitute an improper limitation of the present invention. In the attached picture:
图1为由粉末压制和/或烧结成的基体的电弧加热方法的流程示意图；Figure 1 is a schematic flow chart of an arc heating method for a matrix formed by powder compaction and/or sintering;
图2为由粉末压制和/或烧结成的基体的电弧加热装置的结构示意图；2 is a schematic diagram of the structure of an arc heating device for a matrix formed by powder compaction and/or sintering;
图3示意性的给出了一种阴极与基体之间的连接方式；Figure 3 schematically shows a connection between the cathode and the substrate;
图4示意性的给出了另一种阴极与基体之间的连接方式；Figure 4 schematically shows another connection between the cathode and the substrate;
图5示意性的给出了再一种阴极与基体之间的连接方式；Figure 5 schematically shows another connection between the cathode and the substrate;
图6示意性的给出了再一种阴极与基体之间的连接方式；Figure 6 schematically shows another connection between the cathode and the substrate;
图7示意性的给出了一种阴极与阳极之间的连接关系图；Figure 7 schematically shows a diagram of the connection relationship between the cathode and the anode;
图8示意性的给出了另一种阴极与阳极之间的连接关系图；以及Figure 8 schematically shows another connection diagram between the cathode and the anode; and
图9示意性的给出了再一种阴极与阳极之间的连接关系图。Fig. 9 schematically shows another connection diagram between the cathode and the anode.
图中：In the picture:
1、电弧发生器；2、真空腔；3、基体；4、阳极；5阴极；6、真 空泵；7、电源。1. Arc generator; 2. Vacuum chamber; 3. Substrate; 4. Anode; 5 Cathode; 6. Vacuum pump; 7. Power supply.
具体实施方式Detailed ways
为了使本技术领域的人员更好地理解本发明方案，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分的实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都应当属于本发明保护的范围。In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is a part of the embodiments of the present invention, not all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
需要说明的是，本发明的说明书和权利要求书及上述附图中的术语“包括”和“具有”以及他们的任何变形，意图在于覆盖不排他的包含，例如，包含了一系列单元的***、产品或设备不必限于清楚地列出的那些单元，而是可包括没有清楚地列出的或对于这些产品或设备固有的其单元。It should be noted that the terms "including" and "having" in the description and claims of the present invention and the above-mentioned drawings and any variations of them are intended to cover non-exclusive inclusions, for example, a system including a series of units , Products or equipment are not necessarily limited to those clearly listed units, but may include their units that are not clearly listed or are inherent to these products or equipment.
在本发明中，术语“上”、“下”、“内”、“中”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系。这些术语主要是为了更好地描述本发明及其实施例，并非用于限定所指示的装置、元件或组成部分必须具有特定方位，或以特定方位进行构造和操作。In the present invention, the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "middle", "outer" etc. are based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present invention and its embodiments, and are not used to limit that the indicated device, element, or component must have a specific orientation, or be constructed and operated in a specific orientation.
并且，上述部分术语除了可以用于表示方位或位置关系以外，还可能用于表示其他含义，例如术语“上”在某些情况下也可能用于表示某种依附关系或连接关系。对于本领域普通技术人员而言，可以根据具体情况理解这些术语在本发明中的具体含义。In addition, some of the above terms may be used to indicate other meanings in addition to the position or position relationship. For example, the term "shang" may also be used to indicate a certain dependency relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in the present invention can be understood according to specific situations.
此外，术语“设置”、“连接”、“固定”应做广义理解。例如，“连接”可以是固定连接，可拆卸连接，或整体式构造；可以是机械连接，或电连接；可以是直接相连，或者是通过中间媒介间接相连，又或者是两个装置、元件或组成部分之间内部的连通。对于本领域普 通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。In addition, the terms "set", "connected" and "fixed" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or two devices, components, or The internal communication between the components. For those of ordinary skill in the art, the specific meaning of the above-mentioned terms in the present invention can be understood according to specific circumstances.
需要说明的是，在不冲突的情况下，本发明中的实施例及实施例中的特征可以相互组合。下面将参考附图并结合实施例来详细说明本发明。It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other if there is no conflict. Hereinafter, the present invention will be described in detail with reference to the drawings and in conjunction with the embodiments.
实施例1Example 1
本申请实施例提供了一种电弧加热方法，该方法适用于对由粉末直接压制而成的基体、由粉末直接烧结而成的基体或由粉末经过压制后烧结成的产品进行加热，如图1所示，该电弧加热方法包括以下步骤：首先，配置金属电极与基体接触连接，配置金属电极的熔点高于目标加热温度；然后，在真空环境下，通过电弧轰击的方式轰击金属电极背离基体的一侧，以对金属电极进行加热；最后通过经电弧加热后的金属电极对基体以热传导的方式加热。金属电极具有高密度、耐高温的性质，所以在大电流的轰击下，金属电极不会出现崩裂损坏现象，且能将电弧轰击产生的高温通过接触传导的方式间接给基体加热，以加热到生产生活中所需的温度，避免了通过电弧加热的方式直接加热基体，不会导致被加热的基体出现破损，从而保证了基体的使用寿命。The embodiments of this application provide an arc heating method, which is suitable for heating a matrix formed by direct compression of powder, a matrix formed by direct sintering of powder, or a product sintered by powder after compression, as shown in Figure 1. As shown, the arc heating method includes the following steps: first, the metal electrode is configured to contact and connect with the substrate, and the melting point of the metal electrode is configured to be higher than the target heating temperature; then, in a vacuum environment, the metal electrode is bombarded away from the substrate by means of arc bombardment. On one side, the metal electrode is heated; finally, the metal electrode heated by the arc heats the substrate in a thermally conductive manner. The metal electrode has the properties of high density and high temperature resistance, so under the bombardment of large current, the metal electrode will not crack and damage, and the high temperature generated by the arc bombardment can indirectly heat the substrate through contact conduction to heat the production The temperature required in life avoids direct heating of the substrate through arc heating, and will not cause damage to the heated substrate, thereby ensuring the service life of the substrate.
上述实施例中的基体优选为由粉末经压制、烧结后的基体，用于形成基体的粉末包括但不限于氧化物、硼化物、金属和黏土矿物等。其中硼化物包括但不限于三氧化二硼、氮化硼和六硼化镧。The matrix in the above embodiments is preferably a matrix obtained by pressing and sintering powder. The powder used to form the matrix includes but is not limited to oxides, borides, metals and clay minerals. The borides include but are not limited to boron trioxide, boron nitride and lanthanum hexaboride.
本申请实施例中的基体最好选择为六硼化镧基体，六硼化镧LaB 6现在已经成功应用于雷达航空航天、电子工业、仪表仪器、医疗器械、家电、冶金和环保等二十余个军事和高科技领域。六硼化镧是制作大功率电子光、磁控器、电子束以及加速器阴极的最佳材料，可以通过对六硼化镧进行加热，在高温下六硼化镧会逸出电子，可以对电子加 以应用。本申请实施例中的六硼化镧基体是指以硼化镧为主晶相的陶瓷，立方晶型，呈紫色，密度为4.76g/立方厘米，熔点2530℃，线膨胀系数6.4*10 -6℃ -1，弹性模量460GPa，显微硬度2.76MPa，耐酸碱，具有优良的热辐射性。六硼化镧基体的制备方法可以为：将三氧化二镧与四硼化碳在惰性气氛或还原气氛中高温合成六硼化镧粉末；然后将六硼化镧按照陶瓷工艺在氮气保护下烧结为六硼化镧基体。通过配置金属电极与上述的六硼化镧基体接触连接，然后，在真空环境下，通过电弧轰击的方式轰击金属电极背离六硼化镧基体的一侧，通过经电弧加热后的金属电极对六硼化镧基体以热传导的方式加热，在高温下六硼化镧基体会逸出电子。 The best choice for the substrate in the embodiments of this application is a lanthanum hexaboride substrate. LaB 6 has now been successfully used in radar, aerospace, electronics, instrumentation, medical equipment, home appliances, metallurgy, and environmental protection. A military and high-tech field. Lanthanum hexaboride is the best material for making high-power electron lights, magnetrons, electron beams, and accelerator cathodes. It can be heated by heating lanthanum hexaboride. Under high temperature, lanthanum hexaboride will escape electrons, which can affect electrons. To be applied. The present application embodiment lanthanum hexaboride matrix embodiment refers to lanthanum boride-based ceramics crystalline phase, a cubic crystal form, purple, a density of 4.76g / cm3, melting point 2530 ℃, linear expansion coefficient of 6.4 * 10 - 6 ℃ -1 , elastic modulus 460GPa, microhardness 2.76MPa, acid and alkali resistance, and excellent heat radiation. The preparation method of the lanthanum hexaboride matrix can be: synthesize lanthanum hexaboride powder at high temperature with lanthanum trioxide and carbon tetraboride in an inert atmosphere or a reducing atmosphere; then sinter the lanthanum hexaboride under the protection of nitrogen according to a ceramic process It is a lanthanum hexaboride matrix. The metal electrode is arranged in contact with the above-mentioned lanthanum hexaboride substrate, and then, in a vacuum environment, the side of the metal electrode away from the lanthanum hexaboride substrate is bombarded by arc bombardment, and the metal electrode is heated by the arc. The lanthanum boride matrix is heated by heat conduction, and the lanthanum hexaboride matrix will escape electrons at high temperatures.
上述的电弧加热方法中采用的金属电极的材质优选为具有高密度和耐高温特性的金属或合金，包括但不限于紫铜、钨和钨合金等。在一些实施例中，金属电极的材质选择为金属钨，钨的熔点高度3410℃，且在电弧轰击下一般不会发生崩裂，属于本申请实施例理想的金属电极材料。The material of the metal electrode used in the above-mentioned arc heating method is preferably a metal or alloy with high density and high temperature resistance, including but not limited to red copper, tungsten, and tungsten alloy. In some embodiments, the material of the metal electrode is selected to be metallic tungsten. The melting point of tungsten is 3410° C., and generally does not crack under arc bombardment, which is an ideal metal electrode material in the embodiments of the present application.
在一些实施例中，上述的电弧加热方法中基体设计为棒材，金属电极为设计为管材，基体匹配***在金属电极内，即棒材匹配***在管材内。通过棒材与管材的匹配连接，一方面，可以获得较大的接触面积，从而提高了六硼化镧基体与金属钨之间的热传导效率；另一方面，管材水平放置的情况下，可以对内部插接的棒材起到固定作用，只需要将棒材***即可，无需其他的固定结构。In some embodiments, in the above-mentioned arc heating method, the substrate is designed as a rod, the metal electrode is designed as a tube, and the substrate is matched and inserted into the metal electrode, that is, the rod is matched and inserted into the tube. Through the matching connection of the rod and the pipe, on the one hand, a larger contact area can be obtained, thereby improving the heat transfer efficiency between the lanthanum hexaboride matrix and the metal tungsten; on the other hand, when the pipe is placed horizontally, it can be The internally inserted rods play a fixed role, and only the rods need to be inserted without other fixing structures.
在上述实施例中，电弧轰击加热金属钨所处的真空环境的真空度范围不大于可以根据具体的需要来进行调节，优选为10 -4-10 -2Pa，最终能保证电弧加热方式的有效实施即可。 In the above embodiment, the vacuum range of the vacuum environment in which the metal tungsten is heated by the arc bombardment is not greater than that can be adjusted according to specific needs, preferably 10 -4 -10 -2 Pa, which can ultimately ensure the effectiveness of the arc heating method Just implement it.
当采用金属钨作为金属电极，对六硼化镧基体进行加热的情形下，为了实现在加热过程中逸出较多电子的目的，发明人通过多次试验确 定合适的加热温度为1200℃～1800℃，即通过金属钨对六硼化镧基体的加热过程中控制加热温度范围为1200℃～1800℃，可以获得较多的逸出电子。最为优选的，在真空度为10 -3Pa的情况下，通过金属钨对六硼化镧基体的加热过程中控制加热温度为1600℃。 When metal tungsten is used as the metal electrode to heat the lanthanum hexaboride matrix, in order to achieve the purpose of escaping more electrons during the heating process, the inventors have determined the appropriate heating temperature to be 1200℃～1800 through many experiments. ℃, that is, by controlling the heating temperature range of 1200℃～1800℃ during the heating process of the lanthanum hexaboride matrix by metal tungsten, more electrons can be escaped. Most preferably, when the vacuum degree is 10 -3 Pa, the heating temperature is controlled to 1600° C. during the heating process of the lanthanum hexaboride matrix by metal tungsten.
实施例2Example 2
为了实现实施例1所提供的用于加热由粉末压制和/或烧结成的基体的电弧加热方法，本申请实施例提供了一种电弧加热装置，用于加热由粉末压制和/或烧结成的基体。In order to realize the arc heating method for heating the matrix formed by powder compaction and/or sintering provided in Example 1, an embodiment of the present application provides an arc heating device for heating the compacted and/or sintered powder Matrix.
如图2所示，该电弧加热装置包括电弧发生器1、真空腔2和基体3，基体3和电弧发生器1的正阴极均位于真空腔2内，电弧发生器1的阳极4和阴极5的材质均为金属，阴极5被配置成以热传导方式向基体3提供热能，阳极设置在阴极5背离基体3的一侧。上述实施例提供的电弧加热装置的具体工作过程可以为：对真空腔2抽真空，使其保持在一定真空度，接通电源7使电弧发生器1工作，电弧发生器1上设置的用于产生电弧的两个电极相对设置，位于同一水平面上，并保持端部不接触，电弧发生器1通电时阳极4和阴极5之间产生放电电弧，大电流轰击作为阴极5的金属产生热量，阴极5将热量通过热传导的方式传递给与其连接的基体3，实现对基体3的加热。在电弧加热装置中，由于金属材质的阴极5具有高密度、耐高温的性质，所以在大电流的轰击下，阴极不会出现崩裂损坏现象，且能将电弧轰击产生的高温通过接触传导的方式间接给基体3加热，避免了通过电弧加热的方式直接加热基体3，不会导致被加热的基体3出现破损，从而保证了基体3的使用寿命。As shown in Figure 2, the arc heating device includes an arc generator 1, a vacuum chamber 2 and a substrate 3. The substrate 3 and the positive and cathode of the arc generator 1 are both located in the vacuum chamber 2, and the anode 4 and the cathode 5 of the arc generator 1 The material of the cathode 5 is metal, the cathode 5 is configured to provide heat energy to the base 3 in a thermally conductive manner, and the anode is arranged on the side of the cathode 5 away from the base 3. The specific working process of the arc heating device provided in the above embodiment may be: evacuating the vacuum chamber 2 to keep it at a certain degree of vacuum, turning on the power supply 7 to make the arc generator 1 work, and the arc generator 1 is provided for The two arc-generating electrodes are arranged oppositely, on the same horizontal surface, and keep their ends out of contact. When the arc generator 1 is energized, a discharge arc is generated between the anode 4 and the cathode 5, and the metal as the cathode 5 is bombarded by a large current to generate heat. 5 The heat is transferred to the base 3 connected to it by means of heat conduction, and the base 3 is heated. In the arc heating device, because the metal cathode 5 has high density and high temperature resistance, the cathode will not crack and damage under the bombardment of large current, and the high temperature generated by the arc bombardment can be conducted through contact. Heating the substrate 3 indirectly avoids direct heating of the substrate 3 through arc heating, and will not cause damage to the heated substrate 3, thereby ensuring the service life of the substrate 3.
上述实施例中的阴极5用于接受高能电弧的轰击，发热后将热量以热传导的形式传递给基体3，二者的接触连接用于实现热传导，阴极5与基体3之间的具体连接方式可以为多种形式。The cathode 5 in the above embodiment is used to receive the bombardment of the high-energy arc, and transfer the heat to the base 3 in the form of heat conduction after heating. The contact connection between the two is used to realize heat conduction. The specific connection between the cathode 5 and the base 3 can be In many forms.
可选的，如图3所示，阴极5与基体3之间为相互贴合，即阴极5贴覆基体3表面，阳极4设置在阴极5背离基体3的一侧，使得在阳极4与阴极5之间产生的电弧不会轰击到基体3。优选的，如图4所示，阴极5包括相互垂直设置第一段501和第二段502，其中第二段502的一端连接在第一段501的中部，形成图4所示的截面为T字形的阴极结构，阴极5的第一段501背离第二段502的一面朝向阳极4，第一段501和第二段502相连接的直角处用于固定基体3，如图所示，基体3此时可以设置有两个，每个基体3分别贴合在第一段501和第二段502上，可以增大基体3的受热面积。Optionally, as shown in FIG. 3, the cathode 5 and the substrate 3 are attached to each other, that is, the cathode 5 is attached to the surface of the substrate 3, and the anode 4 is arranged on the side of the cathode 5 away from the substrate 3, so that the anode 4 and the cathode The arc generated between 5 will not bombard the substrate 3. Preferably, as shown in FIG. 4, the cathode 5 includes a first section 501 and a second section 502 arranged perpendicular to each other, wherein one end of the second section 502 is connected to the middle of the first section 501, forming the cross section shown in FIG. A font-shaped cathode structure. The side of the first section 501 of the cathode 5 facing away from the second section 502 faces the anode 4. The right angle between the first section 501 and the second section 502 is used to fix the base 3, as shown in the figure. At this time, there can be two, and each base 3 is attached to the first section 501 and the second section 502 respectively, which can increase the heating area of the base 3.
可选的，阴极5被配置为包覆基体3，在增加接触面积，提高传热效率同时，可以通过阴极5实现对基体3的固定，可以在整体结构中减少固定结构。作为一种可选的实施方式，如图5所示，阴极5的截面形状为U字形，基体3设置在阴极5的U字形内部，通过阴极5实现对基体3三个方向的包覆；作为一种可选的实施方式，如图2和6所示，阴极5的截面形状为封闭的图形，基体3设置在阴极5的内部，通过阴极5实现对基体3四个方向的包覆。其中图2和6所示的阴极均设计为管材，基体3设计为棒材，图2中阴极为圆管设计，基体3设置为可匹配***阴极的圆柱设计；图6中阴极为方管设计，基体3设置为可匹配***阴极的长方体设计。Optionally, the cathode 5 is configured to cover the base 3, and while increasing the contact area and improving the heat transfer efficiency, the base 3 can be fixed by the cathode 5, which can reduce the fixing structure in the overall structure. As an optional embodiment, as shown in FIG. 5, the cross-sectional shape of the cathode 5 is U-shaped, and the substrate 3 is arranged inside the U-shaped of the cathode 5, and the substrate 3 is covered in three directions by the cathode 5; In an alternative embodiment, as shown in FIGS. 2 and 6, the cross-sectional shape of the cathode 5 is a closed pattern, the substrate 3 is arranged inside the cathode 5, and the cathode 5 realizes the coating of the substrate 3 in four directions. The cathodes shown in Figures 2 and 6 are all designed as tubes, the base 3 is designed as a rod, the cathode in Figure 2 is a round tube design, and the base 3 is set to match a cylindrical design that can be inserted into the cathode; the cathode in Figure 6 is a square tube design , The base 3 is configured to match the rectangular parallelepiped design that can be inserted into the cathode.
可选的，如图7所示，阳极4和阴极5在真空腔2内设置有多组，多个阴极5呈圆形阵列均匀排布，多个阳极4设置在阴极5组成的圆形阵列内部。上述的设置可以充分利用真空腔2内部的空间，允许多组阳极4和阴极5同时工作，可以同时为多个基体3进行加热。Optionally, as shown in FIG. 7, multiple sets of anodes 4 and cathodes 5 are arranged in the vacuum chamber 2, and the multiple cathodes 5 are uniformly arranged in a circular array, and the multiple anodes 4 are arranged in a circular array composed of the cathodes 5. internal. The above arrangement can make full use of the space inside the vacuum chamber 2 to allow multiple groups of anodes 4 and cathodes 5 to work at the same time, and can heat multiple substrates 3 at the same time.
可选的，如图8所示，阳极4在真空腔内设置有多个，本实施例附图给出的阳极4为3个，阴极5在真空腔2内设置有一个，阴极5的截面呈圆环状，环绕在多个阳极4的***。上述的设置可以充分利用真空腔2内部的空间，允许多组阳极4同时与一个阴极5之间产生 电弧放电，环形设置的阴极5可以获得更大的表面积用于加热基体。Optionally, as shown in FIG. 8, multiple anodes 4 are provided in the vacuum chamber. The figures of this embodiment show three anodes 4, and one cathode 5 is provided in the vacuum chamber 2. The cross-section of the cathode 5 It has a circular ring shape and surrounds the periphery of a plurality of anodes 4. The above arrangement can make full use of the space inside the vacuum chamber 2 and allow multiple sets of anodes 4 to generate arc discharge with one cathode 5 at the same time. The annularly arranged cathode 5 can obtain a larger surface area for heating the substrate.
可选的，如图9所示，阳极4在真空腔内设置有1个，本实施例附图给出的阳极4为圆柱状，阴极5在真空腔2内设置有多个，本实施例附图给出的阴极5的数量为4个，4个阴极5呈圆形阵列均匀排布，阳极4设置在阴极5组成的圆形阵列内部。上述的设置可以充分利用真空腔2内部的空间，允许一个阳极4同时对多个阴极5电弧放电，可以通过多个阴极5同时为多个基体3进行加热。Optionally, as shown in FIG. 9, one anode 4 is provided in the vacuum chamber. The anode 4 shown in the drawings of this embodiment is cylindrical, and there are multiple cathodes 5 in the vacuum chamber 2. In this embodiment The number of cathodes 5 shown in the figure is four, the four cathodes 5 are uniformly arranged in a circular array, and the anodes 4 are arranged inside the circular array composed of the cathodes 5. The above arrangement can make full use of the space inside the vacuum chamber 2 to allow one anode 4 to arc discharge multiple cathodes 5 at the same time, and multiple substrates 3 can be heated by multiple cathodes 5 at the same time.
需要说明的是，本实施例的电弧加热装置是为了实现实施例1所提供的用于加热由粉末压制和/或烧结成的基体的电弧加热方法，因此在实施例1中所有技术方案均适用于本实施例，例如，基体3可以为由六硼化镧粉末烧结而成的基体，阴极的材质可以为金属钨等等，此处不再赘述。It should be noted that the arc heating device of this embodiment is to realize the arc heating method provided in embodiment 1 for heating the substrate formed by powder compaction and/or sintering, so all technical solutions in embodiment 1 are applicable In this embodiment, for example, the substrate 3 may be a substrate sintered from lanthanum hexaboride powder, and the material of the cathode may be metallic tungsten, etc., which will not be repeated here.
在上述实施例中，真空腔2可以设置于车间内，是电弧加热设备的主体。真空腔的作用在于为实现电弧发生器的电极之间产生电弧提供必要的真空环境，其可提供电弧发生所需要的真空度、真空泵6及检测功能组件。其中，真空度是指在电弧发生过程中利用真空抽气***使在一定的空间内的气体达到一定的真空度，而这一真空度恰能满足电弧产生所要求的真空度，可以根据具体需求来合理设置，从另一个角度，真空度的设置有利于防止金属电极在高温下发生氧化，起到保护电极的作用；真空泵6用于为真空腔2维持所需要的真空条件及压力值，其包括但不限于机械泵、干泵、罗茨泵、分子泵和冷泵，当然，还可以设置真空阀门以及用于控制真空泵的控制电路，其适用于现有技术，此处不再赘述；检测功能组件是指为真空腔2内的压力、温度等提供实时监控，常用工具包括但不限于RGA、真空计、光谱仪等，其不属于真空腔但可以附着于真空腔2上。需要说明的是，为了方便展示，本申请附图2中仅示意性的示出了真空腔的一种可选结构，用于形成真空条件的真空腔2并不局限于附图中所展示的结构和形状。In the above embodiment, the vacuum chamber 2 can be set in the workshop and is the main body of the arc heating equipment. The function of the vacuum chamber is to provide a necessary vacuum environment for generating an arc between the electrodes of the arc generator, which can provide the vacuum required for arc generation, the vacuum pump 6 and the detection function components. Among them, the vacuum degree refers to the use of a vacuum pumping system to make the gas in a certain space reach a certain vacuum degree during the arc generation process, and this vacuum degree can meet the vacuum degree required for arc generation, which can be based on specific requirements From another point of view, the vacuum setting is beneficial to prevent oxidation of the metal electrode at high temperatures and protect the electrode; the vacuum pump 6 is used to maintain the required vacuum condition and pressure value for the vacuum chamber 2. Including but not limited to mechanical pumps, dry pumps, Roots pumps, molecular pumps, and cold pumps. Of course, vacuum valves and control circuits for controlling the vacuum pumps can also be provided, which are applicable to the existing technology and will not be repeated here; Functional components refer to real-time monitoring of pressure, temperature, etc. in the vacuum chamber 2. Common tools include but not limited to RGA, vacuum gauge, spectrometer, etc., which are not vacuum chambers but can be attached to the vacuum chamber 2. It should be noted that, for ease of presentation, only an optional structure of the vacuum chamber is schematically shown in FIG. 2 of the present application, and the vacuum chamber 2 used to form a vacuum condition is not limited to the one shown in the drawings Structure and shape.
上述实施例中的电源7，用于给包括电弧发生器1的整个***提供电力动力，电源7的电压可以设置从几伏到几千伏的直流电压，电流从几安到几百安，在使用过程中可根据被加热的六硼化镧基体的尺寸和需要的温度而进行具体设定。作为电弧发生器1的阳极4优选采用耐高温的金属钨制成，其形状包括但不限于圆柱体和圆环体。The power supply 7 in the above-mentioned embodiment is used to provide electric power to the entire system including the arc generator 1. The voltage of the power supply 7 can be set from several volts to several thousand volts, and the current is from several amperes to several hundred amperes. During use, specific settings can be made according to the size of the heated lanthanum hexaboride matrix and the required temperature. The anode 4 of the arc generator 1 is preferably made of high temperature resistant metal tungsten, and its shape includes but is not limited to a cylinder and a circular ring.
当采用金属钨作为阴极5，对六硼化镧基体进行加热的情形下，为了实现在加热过程中逸出较多电子的目的，最优的加热温度为1600℃，为了获得较为精确的温度控制，在阴极5以及六硼化镧基体具体的尺寸确定的情况下，加热温度可以通过调整电源7对电弧发生器1的输出功率来实现。When metal tungsten is used as the cathode 5 to heat the lanthanum hexaboride matrix, in order to achieve the purpose of escaping more electrons during the heating process, the optimal heating temperature is 1600°C, in order to obtain more precise temperature control In the case where the specific dimensions of the cathode 5 and the lanthanum hexaboride matrix are determined, the heating temperature can be achieved by adjusting the output power of the power supply 7 to the arc generator 1.
可选的，阳极4和阴极5的材质均选择为金属钨，阴极5的形状加工为如图2所示的钨管，钨管的具体尺寸参数为：内径为150mm，外径为185mm，长度为350mm；基体3选择为六硼化镧基体，基体3是形状加工为如图2所示的棒材，尺寸参数为：直径为149mm，长度为350mm；阳极4与阴极5之间的距离为10mm；真空腔2内真空度维持在10 -3Pa，在电弧没有发生时，通过电弧发生器的电源输出参数为：电压1150V，在大约10-12s后，形成稳定的等离子体流，使得阴阳极之间产生稳定的电弧后，电压会下降到70V以下，此时六硼化镧基体的温度可以保持在1600℃。 Optionally, both anode 4 and cathode 5 are made of metallic tungsten, and the shape of cathode 5 is processed into a tungsten tube as shown in Figure 2. The specific dimensions of the tungsten tube are: inner diameter of 150mm, outer diameter of 185mm, and length The base 3 is selected as a lanthanum hexaboride base, and the base 3 is a bar shaped as shown in Figure 2. The size parameters are: diameter 149mm, length 350mm; the distance between anode 4 and cathode 5 is 10mm; the vacuum degree in the vacuum chamber 2 is maintained at 10 -3 Pa. When the arc does not occur, the output parameters of the power supply through the arc generator are: voltage 1150V. After about 10-12s, a stable plasma flow is formed to make the yin and yang After a stable arc is generated between the electrodes, the voltage will drop below 70V, and the temperature of the lanthanum hexaboride matrix can be maintained at 1600°C.
可选的，阳极4和阴极5的材质均选择为钨铼合金，阴极5的形状加工为如图5所示的钨管，钨管的具体尺寸参数为：截面外方环尺寸为20mm×20mm，内方环尺寸为17mm×17mm，钨管的长度为300mm；基体3选择为六硼化镧基体，基体3是形状加工为如图5所示的棒材，尺寸参数为：截面尺寸为16.8mm×16.8mm，长度为300mm；阳极4与阴极5之间的距离为12mm；真空腔2内真空度维持在10 -4Pa，在电弧没有发生时，通过电弧发生器的电源输出电源参数为：电压1000V，在大约8s后，形成稳定的等离子体流，使得阴阳极之间产生稳定的电 弧后，电压会下降到110V以下，此时六硼化镧基体的温度可以保持在1600℃。 Optionally, the material of the anode 4 and the cathode 5 are both tungsten rhenium alloy, and the shape of the cathode 5 is processed into a tungsten tube as shown in Figure 5. The specific size parameters of the tungsten tube are: the outer square ring size of the cross section is 20mm×20mm , The size of the inner square ring is 17mm×17mm, and the length of the tungsten tube is 300mm; the base 3 is selected as a lanthanum hexaboride base, and the base 3 is a bar processed into the shape shown in Figure 5. The size parameter is: the cross-sectional size is 16.8 mm×16.8mm, the length is 300mm; the distance between the anode 4 and the cathode 5 is 12mm; the vacuum in the vacuum chamber 2 is maintained at 10 -4 Pa. When the arc does not occur, the output power parameter of the arc generator is : Voltage is 1000V. After about 8s, a stable plasma flow is formed. After a stable arc is generated between the cathode and anode, the voltage will drop below 110V. At this time, the temperature of the lanthanum hexaboride matrix can be maintained at 1600°C.
本说明书中部分实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。Some embodiments in this specification are described in a progressive manner, each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other.
以上仅是本发明的具体实施方式，使本领域技术人员能够理解或实现本发明。对这些实施例的多种修改对本领域的技术人员来说将是显而易见的，本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所发明的原理和新颖特点相一致的最宽的范围。The above are only specific embodiments of the present invention, so that those skilled in the art can understand or implement the present invention. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined in this document can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown in this document, but should conform to the widest scope consistent with the principles and novel features of the invention.

Claims (10)

  1. 一种电弧加热方法，用于加热由粉末压制和/或烧结成的基体，其特征在于，包括：An arc heating method for heating a matrix formed by powder compaction and/or sintering, characterized in that it comprises:
    配置金属电极与所述基体接触连接，所述金属电极的熔点高于目标加热温度；Configuring a metal electrode to be in contact with the substrate, and the melting point of the metal electrode is higher than the target heating temperature;
    在真空环境下，通过电弧轰击的方式轰击所述金属电极背离所述基体的一侧，以对所述金属电极进行加热；In a vacuum environment, bombarding the side of the metal electrode away from the base by means of arc bombardment to heat the metal electrode;
    通过所述金属电极对所述基体以热传导的方式加热。The substrate is heated in a thermally conductive manner through the metal electrode.
  2. 根据权利要求1所述的电弧加热方法，其特征在于，所述基体包括由硼化物粉末烧结而成的基体。The arc heating method according to claim 1, wherein the base body comprises a base body sintered with boride powder.
  3. 根据权利要求2所述的电弧加热方法，其特征在于，所述硼化物包括六硼化镧。The arc heating method according to claim 2, wherein the boride comprises lanthanum hexaboride.
  4. 根据权利要求1所述的电弧加热方法，其特征在于，所述金属电极的材质为钨或钨合金。The arc heating method according to claim 1, wherein the material of the metal electrode is tungsten or tungsten alloy.
  5. 根据权利要求1所述的电弧加热方法，其特征在于，所述基体为棒材，所述金属电极为管材，所述基体匹配***在所述金属电极内。The arc heating method according to claim 1, wherein the substrate is a rod, the metal electrode is a tube, and the substrate is matched and inserted into the metal electrode.
  6. 一种电弧加热装置，用于加热由粉末压制和/或烧结成的基体(3)，其特征在于，包括电弧发生器(1)和真空腔(2)，所述电弧发生器(1)的阳极(4)和阴极(5)均位于所述真空腔(2)内，所述阴极(5)被配置成以热传导方式向所述基体(3)提供热能。An arc heating device for heating a matrix (3) formed by powder pressing and/or sintering, characterized in that it comprises an arc generator (1) and a vacuum chamber (2). The arc generator (1) The anode (4) and the cathode (5) are both located in the vacuum chamber (2), and the cathode (5) is configured to provide heat energy to the substrate (3) in a thermally conductive manner.
  7. 根据权利要求6所述的电弧加热装置，其特征在于，所述阴极 (5)贴覆所述基体(3)表面，所述阳极(4)设置在所述阴极(5)背离所述基体(3)的一侧。The arc heating device according to claim 6, characterized in that the cathode (5) is attached to the surface of the substrate (3), and the anode (4) is arranged on the cathode (5) away from the substrate ( 3) One side.
  8. 根据权利要求6所述的电弧加热装置，其特征在于，所述阴极(5)包覆所述基体(3)。The arc heating device according to claim 6, characterized in that the cathode (5) covers the base (3).
  9. 根据权利要求8所述的电弧加热装置，其特征在于，所述基体(3)为棒材，所述阴极(5)为管材，所述基体(3)匹配插在所述阴极(5)内。The arc heating device according to claim 8, wherein the base (3) is a rod, the cathode (5) is a tube, and the base (3) is matched and inserted in the cathode (5) .
  10. 根据权利要求6所述的电弧加热装置，其特征在于，所述基体为由六硼化镧粉末烧结而成的基体，所述阴极的材质为金属钨。The arc heating device according to claim 6, wherein the substrate is a substrate sintered from lanthanum hexaboride powder, and the material of the cathode is metallic tungsten.
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