CN200944126Y - ESD protection parameter real-time monitor - Google Patents
ESD protection parameter real-time monitor Download PDFInfo
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- CN200944126Y CN200944126Y CN 200620017090 CN200620017090U CN200944126Y CN 200944126 Y CN200944126 Y CN 200944126Y CN 200620017090 CN200620017090 CN 200620017090 CN 200620017090 U CN200620017090 U CN 200620017090U CN 200944126 Y CN200944126 Y CN 200944126Y
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Abstract
The utility model relates to a real-time monitor for ESD protection parameter, comprising a first CPU, a second CPU, a plurality of I/O ports, an electrostatic voltage switching circuit, a static-free hand ring signal processing circuit and a device grounding signal processing circuit. Wherein, a serial communications interface of the second CPU is connected with the first serial communications interface of the first CPU, and the second communications interface of the first CPU is connected with a communications interface circuit; the input end of the electrostatic voltage switching circuit is connected with the input interface of a electrostatic voltage signal while the output end of the electrostatic voltage witching circuit is respectively connected with the I/O port and an control interface of the first CPU; the output ends of the static-free hand ring signal processing circuit and the device ground signal processing circuit are both connected with the I/O port of the second CPU, and the input ends are respectively connected with the interface of the static-free hand ring and a device grounding interface. The utility model has the advantages of direct display of ESD mode of every working station, thereby the centralized monitoring of the whole working environment is made convenient, and the monitoring over the static environment in production process is made available, which endows the obtained ESD data with an integrity and traceability.
Description
Technical field
The utility model relates to the electrostatic monitoring instrument, more particularly, relates to a kind of ESD protection parameter real time monitoring instrument.
Background technology
Along with the development of microelectric technique, more and more higher to the requirement of production environment, production environment ESD (Electrostatic Discharge static discharge) controlling level directly has influence on the quality and the qualification rate of product.
At present, produce the relevant ESD parameter of station, be limited to factors such as manpower and output, can only regularly spot-check, concrete operation method and limitation are as follows:
Take a sample test ion blower balanced voltage, hand-kept with CPM (Charge Plate Monitor); With ZVM (Zero Voltage Monitor) monitoring electrostatic prevention hand circle, equipment ground state, but because CPM and ZVM do not have storage to reach and the function of compunlcation, so use manual read's number in the time of can only testing, the station state of not spot-check is unknown, because of what obtain is scattered data, can't review time and degree that the ESD controlled variable in the production run lost efficacy.
The utility model content
The technical problems to be solved in the utility model is, at the limitation of prior art (manually reading, record during test, data are scattered, can't review time and degree that the ESD controlled variable in the production run lost efficacy), a kind of static parameter real time monitoring instrument is provided, can and computer monitoring first machine communicate, realize monitoring in real time, gather, analyzing data, second and can review ESD controlled variable inefficacy in the production run.
The technical scheme that its technical matters that solves the utility model adopts is: construct a kind of ESD protection parameter real time monitoring instrument, comprise a CPU 7, the 2nd CPU 13, communication interface circuit 12, static voltage signal input interface, electrostatic potential signaling conversion circuit, control interface, electrostatic prevention hand circle interface 17, equipment ground interface 20, electrostatic prevention hand ring signal treatment circuit and equipment ground signal processing circuit; Serial communication interface on described the 2nd CPU13 links to each other with first serial communication interface of a CPU7, and second serial communication interface of a described CPU 7 links to each other with communication interface circuit 12; The input end of described electrostatic potential signaling conversion circuit links to each other with the static voltage signal input interface, and the one output terminal is connected in the I/O port on the described CPU 7, and its another output terminal links to each other with control interface; The output terminal of electrostatic prevention hand ring signal treatment circuit links to each other with the I/O port of the 2nd CPU 13, and its input end links to each other with electrostatic prevention hand circle interface 17; The output terminal of equipment ground signal processing circuit links to each other with the I/O port of the 2nd CPU 13, and its input end links to each other with equipment ground interface 20.
In ESD protection parameter real time monitoring instrument described in the utility model, second serial communication interface of a described CPU 7 is RS-422 with the communication protocol of monitoring main frame; Serial communication interface on described the 2nd CPU 13 links to each other by spi bus with first serial communication interface of a CPU 7.
In ESD described in the utility model protection parameter real time monitoring instrument, comprise two independently test interfaces 20 of electrostatic prevention hand circle test interface 17 and two separate equipment stake resistances; Each electrostatic prevention hand circle test interface 17 all links to each other with designated pin in the 2nd CPU 13 I/O ports by independent electrostatic prevention hand ring signal treatment circuit; Each equipment ground resistance test interface 20 all links to each other with designated pin in the 2nd CPU 13 I/O ports by independent equipment ground signal processing circuit.
In ESD protection parameter real time monitoring instrument described in the utility model, described signaling conversion circuit further comprises electrostatic potential signal input circuit 1, first order balanced valve amplifier 2, active filter 3, feedback amplifier 4, second level balanced valve amplifier 5, biased amplifier 6 and digital to analog converter 8; The input end of electrostatic potential signal input circuit 1 is connected to the static voltage signal input interface, the output terminal of electrostatic potential signal input circuit 1 is connected to the input end of first order balanced valve amplifier 2, the output terminal of first order balanced valve amplifier 2 is connected to the input end of active filter 3, the output of active filter 3 is divided into two-way: the one tunnel links to each other with feedback amplifier 4 input ends, feedback amplifier 4 output terminals link to each other with control interface, secondary balanced valve amplifier 5 is passed through on another road in turn, the amplification of biased amplifier 6 and digital-to-analog converter 8, after biasing and the digital to analog conversion, link to each other with designated pin in the I/O port of a described CPU 7.
In ESD protection parameter real time monitoring instrument described in the utility model, described electrostatic prevention hand ring signal treatment circuit further comprises first order hand ring signal amplifier 18, second level hand ring signal amplifier 19, electrostatic prevention hand ring signal test interface 17; Designated pin connects successively in the I/O port of described first order hand ring signal amplifier 18, second level hand ring signal amplifier 19, the 2nd CPU 13, electrostatic prevention hand ring signal is amplified and is sent to the I/O port of the 2nd CPU 13.
In ESD protection parameter real time monitoring instrument described in the utility model, described equipment ground signal processing circuit further comprises signal amplifier 21 and comparer 22; Designated pin is connected successively in the I/O port of described signal amplifier 21, comparer 22 and the 2nd CPU 13, with the equipment ground resistance signal through amplifying, be sent to after relatively the I/O port of the 2nd CPU 13.
In ESD protection parameter real time monitoring instrument described in the utility model, also include the display panel of LCDs and LED; Wherein, LCDs is used to show the balanced voltage of ion blower, and the state of electrostatic prevention hand circle and equipment ground shows with LED.
In ESD protection parameter real time monitoring instrument described in the utility model, the state of described electrostatic prevention hand circle is shown by three LED: just often green LED is luminous, and red LED is luminous when undesired, and yellow led is not luminous when connecting; The equipment ground state shows that by two independent LED just often green LED is luminous, and red LED is luminous when undesired.
In ESD protection parameter real time monitoring instrument described in the utility model, also have the I/O port acoustic-optic alarm outer to be connected on the described CPU 7 with being positioned at described monitor, make when described balanced voltage, electrostatic prevention hand circle stake resistance and equipment ground resistance any one when undesired, a CPU 7 sends alerting signal to described acoustic-optic alarm.
Implement ESD protection parameter real time monitoring instrument of the present utility model, have following beneficial effect:
Realize owing to collection, control, demonstration and transmission with balanced voltage, electrostatic prevention hand circle stake resistance, equipment ground resistance concentrate on the monitor, make things convenient for the monitoring of whole production environment; Owing to the data that record in real time can be delivered to the storage of monitoring first machine, can realize the static environmental monitoring of all round process, make the ESD data of acquisition have globality and trackability.
Description of drawings
The utility model is described in further detail below in conjunction with drawings and Examples, in the accompanying drawing:
Fig. 1 is the circuit function block diagram of the utility model ESD protection parameter real time monitoring instrument embodiment;
Fig. 2 is the first cpu circuit figure among the utility model ESD protection parameter real time monitoring instrument embodiment;
Fig. 3 is the circuit diagram of communication interface circuit among the utility model ESD protection parameter real time monitoring instrument embodiment;
Fig. 4 is the second cpu circuit figure among the utility model ESD protection parameter real time monitoring instrument embodiment;
Fig. 5 is the circuit diagram of electrostatic potential change-over circuit among the utility model ESD protection parameter real time monitoring instrument embodiment;
Fig. 6 is the circuit diagram of hand ring signal treatment circuit among the utility model ESD protection parameter real time monitoring instrument embodiment;
Fig. 7 is the circuit diagram of equipment ground signal processing circuit among the utility model ESD protection parameter real time monitoring instrument embodiment.
Embodiment
As shown in Figure 1, in ESD protection parameter real time monitoring instrument embodiment of the present utility model, this ESD protection parameter real time monitoring instrument comprises a CPU 7, the 2nd CPU 13, display panel; A static voltage signal input interface, a control interface, a communication interface circuit, two hand circle interfaces, two equipment ground interfaces, an electrostatic potential signaling conversion circuit, two hand ring signal treatment circuits and two equipment ground signal processing circuits.
Shown in Fig. 2,3, use the dual serial communication interface on the described CPU 7: SPI interface 10 and TX/RX; Wherein SPI interface 10 links to each other with SPI interface 15 (see figure 3)s on the 2nd CPU 13, and the data on the 2nd CPU 13 are read in a CPU 7; After the level conversion of TX/RX by photoelectrical coupler and RS-422 interface chip, form the signal of RS-422 agreement, and link to each other with communication interface 12, make the data on the CPU 7 and deliver to data on the CPU 7 by the 2nd CPU 13 and can deliver in the monitoring main frame through this interface in real time and store.
Be connected with one road balanced voltage signal of electrostatic potential signaling conversion circuit output on the I/O port of a described CPU 7, this signal is delivered on the LCDs by LCD interface 9 by a CPU 7, show current ion blower balanced voltage value, upload to the monitoring main frame by communication interface 12 simultaneously.Another road output of electrostatic potential signaling conversion circuit is connected to control interface; Its input end is connected on the static voltage signal input interface.
As shown in Figure 5, described electrostatic potential signaling conversion circuit comprises a plurality of functional circuits, and electrostatic potential signal input circuit 1, first order balanced voltage signal amplifier 2, active filter 3, feedback amplifier 6, second level balanced voltage signal amplifier 4, biased amplifier 5 and digital to analog converter 8 (see figure 2)s are arranged; By the input of the electrostatic potential signal of static voltage signal input interface input as described electrostatic potential signaling conversion circuit, by electrostatic potential signal input circuit 1, send into the input end of first order signal amplifier 2, its output terminal links to each other with the input end of active filter 3; The output of active filter 3 divides two-way, and one the tunnel outputs to the ion blower interface through feedback amplifier 6, constitutes negative-feedback circuit; Another road outputs on the special pin of I/O port of a described CPU 7 through second level balanced voltage signal amplifier 4, biased amplifier 5 and digital to analog converter 8 successively.Like this, just realized automatic collection, control, the demonstration of the balanced voltage of ion blower, and it has been transferred to the function that monitoring first machine stores.
In addition, the one CPU last 7 also has the designated pin acoustic-optic alarm outer with being positioned at described monitor in the I/O port to be connected, when in described balanced voltage, electrostatic prevention hand circle and the equipment ground state any one when undesired, the one CPU 7 produces alerting signal, designated pin output by above-mentioned I/O port, deliver on the above-mentioned warning device, produce sound and light alarm.This acoustic-optic alarm can place eminence, is convenient to observe.This alerting signal only after fault is excluded, is resetted and can be eliminated by the monitoring host software.
By top narration as can be known, it is to gather, show the balanced voltage of ion blower that first of a described CPU 7 wants function, and set up with the monitoring main frame and communicate by letter, above-mentioned balanced voltage is reached the data that pass to a CPU 7 by the 2nd CPU 13 be sent in the lump and monitor in the main frame.The 2nd CPU 13 then gathers the stake resistance state of electrostatic prevention hand round attitude and equipment, drives the LED that is positioned on the display board and shows, and be sent to a CPU 7.
In the present embodiment, described monitor comprise two independently, identical hand circle interface and signal processing circuit thereof; Two independently, identical equipment ground interface and signal processing circuit thereof.At this, each is that example is described with one.
The input end of described electrostatic prevention hand ring signal treatment circuit is connected on the described hand circle interface, and its output terminal is connected on the I/O port of described the 2nd CPU.As shown in Figure 6, electrostatic prevention hand ring signal treatment circuit comprises first order hand ring signal amplifier 18, second level hand ring signal amplifier 19, above-mentioned two-stage amplifier connects successively, be connected on the I/O port special pin of the 2nd CPU 13 after the electrostatic prevention hand ring signal amplification with 17 connections of hand circle interface, deliver to a CPU 7 and deliver to display panel by SPI interface 15 then, finish collection, demonstration, transmission and the storage of electrostatic prevention hand ring signal by LED interface 16.
The input end of described equipment ground signal processing circuit is connected on the described equipment ground terminal, and its output terminal is connected on the I/O port of described the 2nd CPU 13.As shown in Figure 7, described equipment ground signal processing circuit comprises signal amplifier 21 and comparer 22, above-mentioned amplifier 21 and comparer 22 connect successively, deliver to after the input signal processing and amplifying with equipment interface 20 that (special pin described herein is the different pins that belong on the same I/O port with the pin described in the hand ring signal treatment circuit on the special pin of I/O port of the 2nd CPU 13, specify by software), deliver to a CPU 7 and deliver to display panel by SPI interface 15 then, finish the collection of equipment ground signal by LED interface 16, show, transmission and storage.
Each hand round attitude and each equipment ground state all have one group of LED to show on display panel, hand round attitude correspondence that different is be yellow, red, green triplets, equipment ground state correspondence be red, green two one group, there is corresponding LED interface 16 to be connected on the display panel on described the 2nd CPU 13, light the LED of different colours with the difference of signal on the LED interface 16, wherein, when electrostatic prevention hand circle does not connect, its corresponding yellow led is luminous, when electrostatic prevention hand circle inserts but during abnormal state (resistance surpass setting threshold or static electricity on human body higher), its corresponding red LED is luminous, when electrostatic prevention hand round attitude just often (resistance in setting range and static electricity on human body be lower than setting threshold), its corresponding green LED is luminous; When the equipment resistance to earth on the equipment interface was higher than setting threshold, its corresponding red LED was luminous, and when the equipment resistance to earth on the equipment interface was lower than setting threshold, the green LED of its correspondence was luminous, and indication equipment ground connection is good.When above-mentioned state shows on display panel, be sent to a CPU 7 by the 2nd CPU 13, the one CPU 7 is with its balanced voltage state of gathering with self, deliver on monitoring first machine by serial communication interface (RS-422), finish real-time collection, monitoring, realize reviewed to the function of data.
Claims (9)
1, a kind of ESD protection parameter real time monitoring instrument, it is characterized in that, comprise a CPU (7), the 2nd CPU (13), communication interface circuit (12), static voltage signal input interface, electrostatic potential signaling conversion circuit, control interface, electrostatic prevention hand circle interface (17), equipment ground interface (20), electrostatic prevention hand ring signal treatment circuit and equipment ground signal processing circuit; Serial communication interface on described the 2nd CPU (13) links to each other with first serial communication interface of a CPU (7), and second serial communication interface of a described CPU (7) links to each other with communication interface circuit (12); The input end of described electrostatic potential signaling conversion circuit links to each other with the static voltage signal input interface, and the one output terminal is connected in the I/O port on the described CPU (7), and its another output terminal links to each other with control interface; The output terminal of electrostatic prevention hand ring signal treatment circuit links to each other with the I/O port of the 2nd CPU (13), and its input end links to each other with electrostatic prevention hand circle interface (17); The output terminal of equipment ground signal processing circuit links to each other with the I/O port of the 2nd CPU (13), and its input end links to each other with equipment ground interface (20).
2, ESD protection parameter real time monitoring instrument according to claim 1, it is characterized in that: second serial communication interface of a described CPU (7) is RS-422 with the communication protocol of monitoring main frame; Serial communication interface on described the 2nd CPU (13) links to each other by spi bus with first serial communication interface of a CPU (7).
3, ESD according to claim 2 protection parameter real time monitoring instrument is characterized in that: comprise two independently test interfaces (20) of electrostatic prevention hand circle test interface (17) and two separate equipment stake resistances; Each electrostatic prevention hand circle test interface (17) all links to each other with designated pin in the 2nd CPU (13) the I/O port by independent electrostatic prevention hand ring signal treatment circuit; Each equipment ground resistance test interface (20) all links to each other with designated pin in the 2nd CPU (13) the I/O port by independent equipment ground signal processing circuit.
4, ESD protection parameter real time monitoring instrument according to claim 3, it is characterized in that: described signaling conversion circuit further comprises electrostatic potential signal input circuit (1), first order balanced valve amplifier (2), active filter (3), feedback amplifier (4), second level balanced valve amplifier (5), biased amplifier (6) and digital to analog converter (8); The input end of electrostatic potential signal input circuit (1) is connected to the static voltage signal input interface, the output terminal of electrostatic potential signal input circuit (1) is connected to the input end of first order balanced valve amplifier (2), the output terminal of first order balanced valve amplifier (2) is connected to the input end of active filter (3), the output of active filter (3) is divided into two-way: the one tunnel links to each other with feedback amplifier (4) input end, feedback amplifier (4) output terminal links to each other with control interface, secondary balanced valve amplifier (5) is passed through on another road in turn, the amplification of biased amplifier (6) and digital-to-analog converter (8), after biasing and the digital to analog conversion, link to each other with designated pin in the I/O port of a described CPU (7).
5, ESD protection parameter real time monitoring instrument according to claim 4, it is characterized in that: described electrostatic prevention hand ring signal treatment circuit further comprises first order hand ring signal amplifier (18), second level hand ring signal amplifier (19); Designated pin connects successively in the I/O port of described first order hand ring signal amplifier (18), second level hand ring signal amplifier (19), the 2nd CPU (13), electrostatic prevention hand ring signal is amplified and is sent to the I/O port of the 2nd CPU (13).
6, ESD protection parameter real time monitoring instrument according to claim 5, it is characterized in that: described equipment ground signal processing circuit further comprises signal amplifier (21) and comparer (22); Designated pin is connected successively in the I/O port of described signal amplifier (21), comparer (22) and the 2nd CPU (13), with the equipment ground resistance signal through amplifying, be sent to after relatively the I/O port of the 2nd CPU (13).
7, according to each described ESD protection parameter real time monitoring instrument of claim 1-6, it is characterized in that: the display panel that also includes LCDs and LED; Wherein, LCDs is used to show the balanced voltage of ion blower, and the state of electrostatic prevention hand circle and equipment ground shows with LED.
8, ESD protection parameter real time monitoring instrument according to claim 7, it is characterized in that: the state of described electrostatic prevention hand circle is shown by three LED: just often green LED is luminous, and red LED is luminous when undesired, and yellow led is not luminous when connecting; The equipment ground state shows that by two independent LED just often green LED is luminous, and red LED is luminous when undesired.
9, ESD protection parameter real time monitoring instrument according to claim 8, it is characterized in that: a described CPU (7) goes up also has the I/O port acoustic-optic alarm outer with being positioned at described monitor to be connected, make when described balanced voltage, electrostatic prevention hand circle stake resistance and equipment ground resistance any one when undesired, a CPU (13) sends alerting signal to described acoustic-optic alarm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620017090 CN200944126Y (en) | 2006-07-20 | 2006-07-20 | ESD protection parameter real-time monitor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200620017090 CN200944126Y (en) | 2006-07-20 | 2006-07-20 | ESD protection parameter real-time monitor |
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| CN200944126Y true CN200944126Y (en) | 2007-09-05 |
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| CN 200620017090 Expired - Lifetime CN200944126Y (en) | 2006-07-20 | 2006-07-20 | ESD protection parameter real-time monitor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102213733A (en) * | 2010-04-01 | 2011-10-12 | 英业达股份有限公司 | Automatic electrostatic discharge detection system |
| CN103278708A (en) * | 2013-04-25 | 2013-09-04 | 西安电子科技大学 | ESD (electronic static discharge) monitoring equipment based on low-frequency noise |
| CN103884951A (en) * | 2012-12-21 | 2014-06-25 | 纬创资通股份有限公司 | Monitoring circuit and monitoring system for electrostatic discharge (ESD) protective device |
| CN104749437A (en) * | 2013-12-25 | 2015-07-01 | 上海华虹宏力半导体制造有限公司 | On-layout inter-IO ESD resistance checking method |
-
2006
- 2006-07-20 CN CN 200620017090 patent/CN200944126Y/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102213733A (en) * | 2010-04-01 | 2011-10-12 | 英业达股份有限公司 | Automatic electrostatic discharge detection system |
| CN103884951A (en) * | 2012-12-21 | 2014-06-25 | 纬创资通股份有限公司 | Monitoring circuit and monitoring system for electrostatic discharge (ESD) protective device |
| CN103278708A (en) * | 2013-04-25 | 2013-09-04 | 西安电子科技大学 | ESD (electronic static discharge) monitoring equipment based on low-frequency noise |
| CN103278708B (en) * | 2013-04-25 | 2016-01-20 | 西安电子科技大学 | A kind of ESD monitoring equipment based on low-frequency noise |
| CN104749437A (en) * | 2013-12-25 | 2015-07-01 | 上海华虹宏力半导体制造有限公司 | On-layout inter-IO ESD resistance checking method |
| CN104749437B (en) * | 2013-12-25 | 2018-02-06 | 上海华虹宏力半导体制造有限公司 | On domain between IO ESD resistance inspection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: SHENZHEN DEVELOPMENT MICROELECTRONICS CO., LTD. Assignor: Changcheng Development Science-Technology Co., Ltd., Shenzhen Contract record no.: 2010440020181 Denomination of utility model: ESD protection parameter real-time monitor Granted publication date: 20070905 License type: Exclusive License Record date: 20100914 |
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| CX01 | Expiry of patent term |
Granted publication date: 20070905 |
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| EXPY | Termination of patent right or utility model |