CN1974027A - Solution application device and metering method of supply volume, solution supply method - Google Patents
Solution application device and metering method of supply volume, solution supply method Download PDFInfo
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- CN1974027A CN1974027A CNA2006100647731A CN200610064773A CN1974027A CN 1974027 A CN1974027 A CN 1974027A CN A2006100647731 A CNA2006100647731 A CN A2006100647731A CN 200610064773 A CN200610064773 A CN 200610064773A CN 1974027 A CN1974027 A CN 1974027A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- Coating Apparatus (AREA)
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- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
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- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The invention provides a coating apparatus which can enhance measure precision of the supply quantity of the solution ejected from a nozzle and can improve the measure efficiency. The apparatus supplying the solution to a substrate, comprises: a plurality of coating nozzles 22 aligned to predefined direction for supplying the solution to the substrates, a hold base 7 of the substrate arranged at the top, a first linear motor 8 for relatively moving the hold base and the coating nozzles in a direction crossed with the predefined direct, a balance 41 for measure of the weight of the solution supplied by the coating nozzles, and a second linear motor 44 for moving the balance independent form the hold base in the predefined direction and a direction crossed with that.
Description
Technical field
The present invention relates to a kind of solution application device, metering to the metering method of the solution amount of substrate supply and the supply method of solution to coating of substrates solution.
Background technology
For example, in the manufacturing process of liquid crystal indicator, be useful on the film forming procedure that on glass system substrate, forms circuitous pattern.In this film forming engineering, on the plate face of substrate, for example form the functional film of alignment films and diaphragm etc.
Under the situation that forms functional film on the substrate, often use the solution that from nozzle, ejects this functional film of formation and it is coated in the applying device of the ink-jetting style on the plate face of substrate.
This applying device has the mounting table of conveyance substrate, above this mounting table, along with respect to the conveyance direction of substrate almost the direction configuration of quadrature be formed with a plurality of applicator heads of said nozzle.Thus, can on the substrate of conveyance, reach the solution that coating is ejected on the direction of intersecting with this direction in the conveyance direction from the nozzle of a plurality of applicator heads with predetermined interval.
In each applicator head, in the face of each nozzle is provided with piezoelectric element across the flexible plate.When piezoelectric element was applied voltage, above-mentioned flexible plate distortion just can be supplied with solution from said nozzle.
Even the piezoelectric element to each applicator head applies identical voltage, but since each applicator head according to from the pipe arrangement resistance of the supply source of solution with make precision, assembly precision etc. and characteristic is different, so in the solution amount of supply, produce difference.Often there is the situation in uneven thickness of the so-called functional film that forms in its result on substrate.
Therefore, in the past, after the voltage that is applied to each shower nozzle is set at predetermined value, the operator receives the solution of supplying with from nozzle with cup when each shower nozzle is applied voltage, measure this supply with being arranged on, carry out so-called the voltage that is applied on each applicator head being adjusted according to this measurement with the electronic scale of applying device diverse location.Before the running of applying device begins, carry out such adjustment, and carry out such adjustment termly.
But liquid crystal indicator has the tendency of maximization recently, and following therewith, substrate also maximizes.When substrate maximized, the quantity that is arranged on the applicator head in the applying device also for example often mostly was 20～50 or more than this.
When the quantity of applicator head increases, because the operator must be according to the quantity of applicator head, carry out repeatedly receiving from the liquid of each applicator head supply and with the such operation of scale measurement, strengthen the situation that exists so-called productivity ratio significantly to descend so bring operator's burden with cup.
As the solution of the functional film that forms alignment films etc., for example be under the situation of polyimide solution, in this solution, contain organic solvent.In the moment that begins to eject the solution that comprises solvent from the nozzle of applicator head, the beginning moisture absorption produces the time dependent situation of so-called weight.
For this reason, when the operator receives the solution of supplying with from applicator head with cup, under situation about being arranged on the scale check weighing amount of applying device diverse location, owing to need spended time to carrying out weight measurement from receiving solution, so, in this case, can not measure accurately from the weight of the solution of applicator head supply.
And, when scale and applying device are arranged on different places, usually measure the place and the place that applicator head is set of solution weight, in environment such as temperature and humidity, there are differences.Under this situation, even set the voltage that applicator head is applied, because it is poor not add environment, so can exist what is called can not set accurately from the situation of the solution amount of applicator head supply according to measuring structure.
Summary of the invention
The objective of the invention is to, a kind of certainty of measurement of the quantity delivered that can realize the solution supplied with from nozzle and solution application device, the measuring method of solution quantity delivered and the supply method of solution of this measurements efficiency of operation raising are provided.
The invention provides a kind of solution application device, it is supplied with solution and is applied to substrate, it is characterized in that, comprising:
Supply with a plurality of nozzles of the above-mentioned solution of coating along the predetermined direction configuration, to aforesaid substrate;
Mounting has the mounting table of aforesaid substrate in the above;
The 1st driving mechanism that this mounting table and above-mentioned applicator head are relatively moved on the direction of intersecting with above-mentioned predetermined direction;
Measurement is from the scale of the weight of the solution of said nozzle supply; And
Make this scale be independent of above-mentioned mounting table and reach the 2nd driving mechanism that moves on the direction of intersecting at above-mentioned predetermined direction with this predetermined direction.
The present invention is a kind of metering method of solution quantity delivered, utilizes the solution amount of scale metering from supplying with to substrate along a plurality of nozzles of predetermined direction configuration, it is characterized in that, comprising:
The operation that above-mentioned scale is relatively moved on above-mentioned predetermined direction with respect to said nozzle; And
According to moving of the above-mentioned predetermined direction of above-mentioned scale, utilize above-mentioned scale to receive, measure the operation of the solution of supplying with from a plurality of nozzles successively.
The invention provides a kind of solution supply method, have a plurality of nozzles, solution is ejected from these nozzles, it is characterized in that, comprising:
Eject the operation of the solution of droplet-like simultaneously from a plurality of nozzles;
Only extract the solution that goes out from a nozzle ejection the solution of a plurality of droplet-like that eject simultaneously from each nozzle, measure its weight, and the solution that goes out from each nozzle ejection is carried out the operation of this measurement; And
The weight of the solution of the droplet-like that goes out from a plurality of nozzle ejection and set the weight of each solution relatively so that the operation that they become identical.
The invention effect
According to the present invention, scale is set, it is mobile that it is independent of on the direction that mounting table can intersect at predetermined direction and with this predetermined direction, moves by means of this, just can utilize above-mentioned scale to receive the solution of measurement from each nozzle supply successively.
For this reason, owing to measure the weight of the solution of supplying with from each nozzle in the position that nozzle is supplied with coating solution to substrate, just can be the environment weight of measurement solution down of the environment that is used of solution shortly.
And, because scale can be independent of mounting table and move, so even drive line position into and arrange to being placed on substrate on the mounting table when supplying with coating solution, scale being kept out of the way therefrom.Thus, even during, also can walk abreast and carry out the maintenance of scale in the position of keeping out of the way to coating of substrates solution.Therefore, can realize the raising of certainty of measurement and operating efficiency.
Description of drawings
Fig. 1 is the front view of simple structure of the applying device of expression the 1st embodiment of the present invention.
Fig. 2 is the side view of the applying device shown in Fig. 1.
Fig. 3 is the longitudinal section of applicator head.
Fig. 4 is the following figure that expression forms the nozzle of applicator head.
Fig. 5 is the block diagram of expression control system.
Fig. 6 is the vertical view of scale.
Fig. 7 is arranged on the front view of the scale in the ways.
Fig. 8 is the vertical view of simple structure of the applying device of expression the 2nd embodiment of the present invention.
Fig. 9 is the side view of applying device shown in Fig. 8.
Figure 10 A shows the vertical view of shading member.
Figure 10 B is the cutaway view along the A-A line of the shading member shown in Figure 10 A.
Figure 11 is the control circuit figure that is used for making solution to eject from the nozzle of applicator head.
The explanation of symbol
4 ... ways, 7 ... mounting table, 8 ... the 1st linear motor (the 1st driving mechanism), 22 ... applicator head, 40 ... controlling organization, 41 ... scale, 44 ... the 2nd linear motor (the 2nd driving mechanism), 48 ... cup, 101 ... substrate, 102 ... guide rail, 103 ... mounting table, 34 ... nozzle, 128 ... shading member, 129 ... electronic balance (measuring mechanism), 131 ... hydrops portion, 132 ... through hole, 134 ... the 1st sensor (alignment sensor), 135 ... the 2nd sensor (alignment sensor), 137 ... discharging tube, 139 ... the cleaning member, 171 ... control device (controlling organization)
The specific embodiment
Below, with reference to the description of drawings embodiments of the present invention.
Fig. 1 to Fig. 7 represents the 1st embodiment of the present invention, is suitable for the applying device of the present invention shown in Fig. 1 and Fig. 2 and has approximate rectangular-shaped substrate 1.Precalculated position below this substrate 1 is provided with pin 2 respectively, is flatly supporting above-mentioned substrate 1.
As shown in Figure 2, the width both ends on above-mentioned substrate 1 are provided with buck plate 3 respectively along long side direction.Along long side direction ways 4 is set respectively in this width one end above buck plate 3.At these above ways 4, the cross section that the width both sides below the X platform 5 that makes in rectangular plate shape be arranged in parallel is approximately a pair of the 1st of the word of falling U shape and bears member 6 and engage the X platform 5 of supporting rectangular plate shape slidably.On X platform 5, the mounting table 7 littler than this X platform 5 is set.That is, mounting table 7 can move on directions X along above-mentioned ways 4 by above-mentioned X platform 5.
As shown in Figure 2, in above-mentioned ways 4, fixture 4a is set, bears the above-mentioned the 1st movable piece 6a is set in the member 6.That is, by above-mentioned fixing piece 4a and above-mentioned movable piece 6a form as the 1st driving mechanism the 1st linear motor 8.
For example, to above-mentioned mounting table 7, supply with the substrate W of the glass system of in the liquid crystal indicator of active matrix mode, using.By means of mechanisms such as vacuum suction and Electrostatic Absorption this substrate W absorption is remained on the above-mentioned mounting table 7.Therefore, can utilize above-mentioned X platform 5 driving the substrate W that remains on the mounting table 7 on the directions X.
At the long side direction middle part of above-mentioned substrate 1, vertically be provided with the support 11 of a type, so that stride across above-mentioned a pair of ways 4.Set up the mounting structure 12 that constitutes by corner post at the both sides of this support 11 upper level.
In above-mentioned mounting structure 12, be provided with shower nozzle table top 19 make its can along with go up and move as the Y direction of the directions X quadrature of the driving direction of above-mentioned X platform 5 (among Fig. 2 shown in the arrow).The Y drive source 21 that constitutes by pulse motor in the width one side setting of above-mentioned support 11.This Y drive source 21 can drive above-mentioned shower nozzle table top 19 along the Y direction.Have, the driving of the Y direction of shower nozzle table top 19 substitutes pulse motor, also can carry out with linear motor again.
In a side of above-mentioned shower nozzle table top 19, dispose by ink-jetting style along the Y direction and to eject a plurality of applicator heads 22 of formation as the solution (polyimide solution) of for example alignment films of functional film with point-like.In the present embodiment, for example two row in 7 applicator heads 22 of staggered configuration.
As shown in Figure 3 and Figure 4, above-mentioned each applicator head 22 comprises head body 28.Form head body 28 with tubular, its lower aperture is sealed with flexible plate 29.These flexible plate 29 usefulness spray nozzle plates 31 cover, and form a plurality of liquid chambers 32 between this spray nozzle plate 31 and above-mentioned flexible plate 29.
Each liquid chamber 32 is communicated to the main line 31A that forms respectively by not shown tap road in spray nozzle plate 31, by above-mentioned tap road each liquid chamber 32 is supplied with solution from above-mentioned main line 31A.Main line 31A, an end connect feed flow described later hole 33, and the other end connects recovery holes 37 described later.
In long side direction one end of above-mentioned head body 28, form the above-mentioned feed flow hole 33 that is communicated to above-mentioned liquid chamber 32.Supply with the above-mentioned solution that forms functional film from this feed flow hole 33 to above-mentioned each liquid chamber 32.Thus, be full of by solution in the above-mentioned liquid chamber 32.
As shown in Figure 4, in said nozzle dish 31, being the Y direction along the direction with the conveyance direction quadrature of substrate W wears a plurality of nozzles 34 with staggered.On above-mentioned flexible plate 29, as shown in Figure 3, with respect to above-mentioned each nozzle 34 a plurality of piezoelectric elements 35 are set respectively.
Each piezoelectric element 35 utilizes the drive division 36 that is arranged in the above-mentioned head body 28 to supply with driving voltage.Thus, piezoelectric element 35 is flexible, and flexible plate 29 be out of shape partly, from the nozzle 34 of these piezoelectric element 35 relative positions eject solution with point-like, and supply be coated in conveyance substrate W above.Therefore, on substrate W, form point-like solution and arrange the coating figure that forms with the ranks shape.Then, by each flow of solution that makes point-like, moistening expansion, this coating figure is bonding to become a film.
Have again,, just can change the size of the drop of the solution that ejects from the nozzle 34 relative with each piezoelectric element 35 if change the actuating quantity that the intensity of the voltage that piezoelectric element 35 is applied is controlled piezoelectric element 35.That is, can control quantity delivered from the solution of applicator head 22.
Long side direction the other end in above-mentioned head body 28 forms the above-mentioned recovery holes 37 that is communicated to above-mentioned liquid chamber 32.The solution of supplying with to liquid chamber 32 from above-mentioned feed flow hole 33 just can reclaim from above-mentioned recovery holes 37.That is, each 22 not only makes the solution that supplies to above-mentioned liquid chamber 32 eject from nozzle 34, also can reclaim solution from above-mentioned recovery holes 37 by above-mentioned liquid chamber 32.
As shown in Figure 5, utilize control device 40 controls to drive the drive division 36 that is arranged on each applicator head 22.That is, for example under the state that each applicator head 22 is installed on the shower nozzle table top 19, above-mentioned control device 40 just can be discerned X, the Y coordinate that is formed on each nozzle 34 in a plurality of applicator heads 22.Thus, can be along the position that above-mentioned Y direction control is ejected solution to substrate W.
Above-mentioned control device 40 not only can be controlled the driving of the drive division 36 of each applicator head 22, can also be controlled at the driving that drives the 1st linear motor 8 of X platform 5 on the directions X, drives the Y drive source 21 of the shower nozzle table top 19 that is provided with applicator head 22 on the Y direction.
As shown in Figure 1, in an end of above-mentioned ways 4 electronic scale 41 is set.That is,, a pair of the 2nd bear member 43 (only illustrating 1) and engage above-mentioned each ways 4 respectively slidably by what make that width both ends below the 1st movable link 42 are provided with, thereby support the 1st movable link 42 in an end of ways 4.
As electronic scale 41, can use by electromagnetic force equilibrium be measured thing weight, according to the size detection of electric current of this moment go out to be measured thing weight electromagnetic type scale and use output to detect the scale of pressure measuring unit formula of the weight of the thing that is measured corresponding to the load transition device (pressure measuring unit (ロ one De セ Le)) of the signal of weight.
Bear in the member 43 the above-mentioned the 2nd, as shown in Figure 7, be provided with the movable piece 43a that constitutes the 2nd linear motor 44 by the fixture 4a that is arranged on above-mentioned ways 4.Above-mentioned the 2nd linear motor 44 drives control by above-mentioned control device 40.Thus, can be along driving above-mentioned the 1st movable link 42 on the directions X of above-mentioned ways 4.
On above-mentioned the 1st movable link 42, the 2nd movable link 45 that can move along the Y direction with above-mentioned directions X quadrature is set.Long side direction one end at above-mentioned the 1st movable link 42 is provided with the Y drive source 46 that is made of pulse motor.By making this Y drive source 46 work, just can drive above-mentioned the 2nd movable link 45 along the Y direction.
On above-mentioned the 2nd movable link 45, above-mentioned scale 41 is set.Thus, can on directions X and Y direction, drive scale 41.That is, be formed in the 2nd driving mechanism that drives above-mentioned scale 41 on X, the Y direction with above-mentioned the 2nd linear motor 44 and above-mentioned Y drive source 46.
The cup 48 of opening above releasably mounting has on the compression zone 47 of above-mentioned scale 41.The top opening of this cup 48 forms greatlyyer than the area of plane of at least 1 applicator head 22.
Have again, in this embodiment, form cup 48 with following size, promptly 2 parts the width dimensions that opening has an applicator head 22 above it on directions X adds the length dimension of margin value, and the size that has 1 part length direction of applicator head 22 on the Y direction adds the length dimension of margin value.In addition, cup 48 has, and when the quantity delivered of setting from the solution of applicator head 22 described later, stores respectively the sufficient volume of the solution of supplying with from 7 applicator heads 22.
As described later, above-mentioned cup 48 receives the solution of supplying with from applicator head 22.When cup 48 received solution, scale 41 was exported this metering signal by the weight of compression zone 47 metering solution to above-mentioned control device 40.
Be provided with the support member 49 of the L word shape that is installed in above-mentioned the 2nd movable link 45 in the side of above-mentioned scale 41.In the upper end of this support member 49, be provided with rod-free cylinder 51.One side of the coupling member 53 of L word shape is installed on the slide block 52 of this rod-free cylinder 51.Shutter 54 is installed on the another side of this coupling member 53.This shutter 54 drives above-mentioned coupling member 53 by utilizing above-mentioned rod-free cylinder 51 between the position shown in the position shown in the solid line and the dotted line in Fig. 6, top opening that just can the above-mentioned cup 48 of switch.Have again, above-mentioned shutter 54 is set, make between the top opening of itself and cup 48 to have small gap.
By on directions X, driving above-mentioned the 1st movable link 42, just can make above-mentioned scale 41 be arranged in the below of the applicator head 22 that is arranged on above-mentioned support 11.By on the Y direction, driving above-mentioned the 2nd movable link 45, just can position so that the below of 1 applicator head 22 in the scale 41 of the below of applicator head 22 and a plurality of applicator heads 22 is relative.
Have again,, on directions X, drive above-mentioned X platform 5 and above-mentioned scale 41 by movable piece 6a, 43a are switched on.But, be arranged in the position different and drive on the directions X that the 1st of X platform 5 bears member 6 and drive the 2nd of scale 41 on directions X bears member 43 with above-mentioned ways 4.Therefore, above-mentioned X platform 5 and above-mentioned scale 41 can be controlled driving respectively to the 1st, the 2nd energising of bearing movable piece 6a, the 43a of member 6,43 by controlling respectively.
Be connected with guidance panel 56 (with reference to Fig. 5) on the above-mentioned control device 40.This guidance panel 56 is provided with the modes of application that is used to set to aforesaid substrate W coating solution, adjust the operated key of the adjustment modes etc. of the solution amount that ejects from each applicator head 36 by above-mentioned scale 41.
By giving above-mentioned control device 40 with the position teaching of 7 applicator heads 36 in advance, by means of the key operation of aforesaid operations panel 56, just can locate above-mentioned scale 41, make it face the below of each applicator head 22 successively.
By position detector 57 detected detection signals are outputed to the X that carries out above-mentioned scale 41 on the control device 40, the position teaching of Y direction.As position detector 57, though at length do not illustrate, for example, by will being attached on the 2nd linear motor 44 position detector 57 (with reference to Fig. 5) that is provided with from directions X, each signal that the Y direction is attached to the position detector 57 (with reference to Fig. 5) that is provided with on the Y drive source 46 outputs to control device 40 and just can detect.
For example, the operator makes the 2nd linear motor 44 and 46 work of Y drive source by the key operation of guidance panel 56, makes the cup 48 of scale 41 be arranged in the below that Fig. 2 is in No. 1 applicator head 22 of right-hand member.The position of scale 41 when control device 40 goes out this according to the signal detection from position detector 57 outputs.Then, this position is stored as the position location of the scale 41 of the applicator head 22 with respect to No. 1.
The position location of the scale 41 with respect to No. 2 to No. 7 is calculated by control device 40 configuration space according to the position location of the scale 41 of the applicator head 22 with respect to No. 1 and known each applicator head 22.
Have again, as previously mentioned, because cup 48 forms with following size, the top opening that is cup 48 has the length dimension that 2 parts the width dimensions that has applicator head 22 on directions X adds margin value, so, during the position location of the scale 41 of the applicator head 22 of teaching with respect to No. 1, the center of cup 48 also can be positioned at the centre with the applicator head 22 of staggered two row configurations.If like this, just only make 46 work of Y drive source, just can successively cup 48 be positioned at 7 applicator head 22 belows separately.
In addition, although understand the position location of operator's teaching with respect to the scale 41 of No. 1 applicator head 22, control device 40 calculates the position location of the scale 41 of the applicator head 22 with respect to the 2nd～No. 7, but also can be the position location of operator's teaching with respect to the scale 41 of all applicator heads 2.In addition, also can be control device 40 goes out position location with respect to the scale 41 of all applicator heads 22 according to the allocation position information calculations of applicator head 22.
In the applying device of said structure, before substrate W begun to apply solution, if or make applying device by preset time work, the solution amount with regard to energy measurement is supplied with from each applicator head 22 is set at this quantity delivered necessarily.
Under the situation of the quantity delivered of setting the solution that ejects from applicator head 22, select adjustment modes by the key operation of aforesaid operations panel 56.When selecting this adjustment modes, drive mounting table 7 as shown in Figure 1 on directions X, keep out of the way the below that makes the left end side of its substrate 1 from Fig. 1 promptly be arranged on the applicator head 22 on the support 11.Then, scale 41 is positioned at the below of the applicator head 22 of support 11 according to the teaching position.Scale 41 is positioned the below of No. 1 applicator head 22 in a plurality of applicator heads 22 at first.
Suppose location scale 41 on directions X, after driven opening device 54 makes the top opening of cup 48, from all nozzles 34 of No. 1 applicator head 22, according to cup 48 being supplied with solution as the voltage that imposes a condition, voltage application time and the injecting times set by control device 40.If supply solution is just by above the shutter 54 closed cups 48.Thus, owing to the solvent moisture absorption of the solution that can prevent to supply with cup 48 produces weight change, thereby can correctly carry out the weight measurement of solution by scale 41.
In addition, because by above the shutter 54 sealing cups 48, so, can prevent that also the liquid level of the solution that accumulates in the cup 48 is disturbed even above applying device, supplying with under the such atmosphere that flows downward of pure air.
For this reason, owing to can prevent the variation of the metering signal of the scale 41 that confusing of liquid level causes, even under the situation of using high-precision scale 41, also can correctly carry out the weight measurement of solution.Therefore, the size of the drop of the solution that ejects from nozzle 34 is applicable to the applying device of small functional film.
Then, when cup 48 was supplied with solution, scale 41 was to the metering signal of the weight of control device 40 these solution of input.In this embodiment, in more detail, control device 40 compares the metering signal and the metering signal after cup 48 supply solution are closed shutter 54 of the scale 41 before shutter 54 is opened, and obtains the weight of the solution of supplying with to cup 48 according to this difference.Then, solution weight of relatively obtaining and predefined setting value are differentiated the solution weight measure whether in the allowed band of setting value, promptly whether have obtained the quantity delivered of target.If measured value in permissible value, just judges that No. 1 the quantity delivered of applicator head 22 is good.
If exceed permissible value just be judged to be defective, obtain measured value and the setting value poor.Then, adjusting injection conditions makes the measured value and the value of setting not have difference.Carry out this adjustment by increase and decrease at the voltage that the piezoelectric element 35 that is provided with by each nozzle 34 applies.For example, when measured value and the setting value difference be D, injecting times is N, the nozzle quantity of applicator head 22 is under the situation of n, just can obtain the excessive or not enough Δ W of each injecting times and solution each nozzle 34 by Δ W=D/ (Nn).Then, set the voltage that piezoelectric element 35 is applied, making Δ W is 0 or in allowed band.
The relation of the quantity delivered by the solution obtaining voltage in advance and eject from nozzle 34 just can be set the voltage that under this situation piezoelectric element 35 is applied.
So like this,, just carry out measurement once more, confirm whether to obtain the quantity delivered of target from the quantity delivered of the solution of this applicator head 22 if finish the adjustment of No. 1 applicator head 22.And, if it is just qualified to obtain the target quantity delivered, if just do not repeated above-mentioned adjustment.
Have again, preestablish the upper limit of the number of repetition of adjustment, even if adjust to the quantity delivered that upper limit number of times also fails to obtain target, the information that the numbering by showing applicator head 22 in guidance panel 56 etc. can specific this applicator head 22, the person can not adjust to come the notifying operation.Situation about can not adjust is considered the situation of for example nozzle 34 obstructions of applicator head 22 etc.Therefore, under situation about can not adjust, exist unusually, just can carry out the cleaning of nozzle 34 and the replacing of applicator head 22 etc. according to this affirmation because the operator can confirm this applicator head 22.
So like this, if finish the adjustment of No. 1 applicator head 22, similarly successively the 2nd～No. 7 applicator head 22 carried out the adjustment of the quantity delivered of solution from right-hand member.And, when finishing the adjustment of all applicator heads 22, can in guidance panel 56, show this situation.In addition, scale 41 moves to the position of readiness of the directions X right-hand member shown in Fig. 1.
Have again, since control device 40 according to before cup 48 is supplied with solution and the difference of supplying with the metering signal behind the solution obtain the weight of this solution of supplying with to cup 48, even do not removing the solution that supplies to cup 48 in the metering each time, can carry out setting efficiently yet from the quantity delivered of the solution of applicator head 22.
In addition, also can this moment, to be set in the storage part (not shown) of control device 40 up to the higher limit that cup 48 becomes the metering number of times of the solution quantity delivered that brimmer carries out continuously, when each setting that finishes the quantity delivered of the solution of 1 applicator head 22, utilize the moment of control device 40, in guidance panel 56, show and urge the alarm of removing the solution in the cup 48 in the count value arrival higher limit of counting metering number of times.
In addition, can measure the higher limit of the solution weight that does not overflow in the cup 48 and can store in advance, and be set in the storage part (not shown) of control device 40, the actual weight, the upper weight limit value that compare solution in the cup 48 by control device 40, when actual weight reached the upper weight limit value, the setting of ending the solution quantity delivered shows in guidance panel 56 simultaneously urged the alarm of removing solution in the cup 48.
In addition, under this situation, control device 40 can be that condition ground carries out the actual weight of the solution in the cup 48 and the comparison of upper weight limit value to select above-mentioned adjustment modes also.The control device 40 of this moment, whether judgement exists the poor of the solution (hereinafter referred to as " setting desired solution amount ") of supplying with the anticipation total amount in allowing when 7 applicator heads 22 are carried out the setting of solution quantity delivered cup 48 between the higher limit of the weight of reality and weight.
And, exist above-mentionedly when poor when being judged to be, carry out the setting of the quantity delivered of solution, do not have above-mentionedly not carry out the setting of the quantity delivered of solution when poor when being judged to be, in guidance panel 56, show and urge the alarm of removing the solution in the cup 48.
In addition, control device 40 is when having carried out above-mentioned judgement, the difference of the actual weight of the solution in the cup 48 and the higher limit of weight is when setting 2 times of desired solution amount, in the moment in the setting of the solution quantity delivered that finishes this, in display floater 56, show and urge the alarm of removing the solution in the cup 48.
Thus, because after the quantity delivered of solution is set, in the solution coating of carrying out according to the selection of modes of application substrate W, can remove the solution of the cup 48 of the scale 41 that is positioned at position of readiness, so in adjustment modes, need not interrupt the setting of solution quantity delivered in order to remove the solution in the cup 48, can carry out the setting of the quantity delivered of solution efficiently.
Have, control device 40 can be obtained the weight of the reality of the solution in the cup 48 according to the difference of the metering signals of the metering signal of the scale 41 when empty in the cup 48 and scale 41 current points again.
Like this, applying device according to said structure, owing to can automatically measure successively, revise from the weight of the solution of a plurality of applicator heads 22 supplies, even so under the situation that substrate W maximizes and the quantity of applicator head 22 increases, also can carry out setting efficiently from the quantity delivered of the solution of each applicator head 22.
And, by on X, Y direction, driving scale 41, be located below applicator head 22, just can measure the solution weight of supplying with to the cup 48 that is positioned on the scale 41 from applicator head 22 then and there.And, utilize shutter 54 sealings to supply with the cup 48 of solution.Thus, before the solvent moisture absorption that contains in solution and weight change, owing to carry out the weight measurement of the solution supplied with from applicator head 22, because of this can improve certainty of measurement.
And, by on X, Y direction, driving scale 41, making itself and the position that applicator head 22 is set co-located basically, just can measure from the weight of the solution of each applicator head 22 supplies.That is and since the environment facies that use solution with reality with environment under carry out the weight measurement of solution and the correction of quantity delivered, so even also can set quantity delivered so accurately from the solution of each applicator head 22.
In addition, because control device 40 is positioned at scale 41 position of teaching successively, and owing to scale 41 correctly can be positioned at the position corresponding with each applicator head 22, because of this can positively be received in the solution of supplying with from applicator head 22 cup 48, can correctly measure the weight of the solution of supply.
In addition, because mobile scale 41 can make it be positioned at the position corresponding with each applicator head 22, because of the enough single scales 41 of this energy carry out setting from the solution quantity delivered of a plurality of applicator heads 22, can the simplification device structure.
By means of the 2nd linear motor 44, the mounting table 7 that scale 41 is independent of move by the 1st linear motor 8 moves on directions X, when to substrate W coating solution, can make the position of readiness place standby of scale 41 at directions X right-hand member shown in Figure 1.
Thus, even during, also can remove the conservative spot check of the scale 41 of the solution that accumulates in the cup 48 of scale 41 etc. simultaneously to substrate W coating solution.Therefore, can prevent to interrupt substrate W is applied the operation of solution in order to remove the solution in the cup 48, can carry out operation efficiently substrate W coating solution.
The applying device of above-mentioned the 1st embodiment both can make substrate W once by applying with respect to applicator head 22, also can make substrate W many times by applying.
In addition, when repeatedly passing through, each time by all utilizing Y drive source 22 that shower nozzle table top 19 is moved, applicator head 22 for example transported etc. in Y direction (orientation of nozzle 34) one by one with 1/2 of the arrangement pitch of nozzle 34 carry out under the situation that spacing sends to, also can carry out setting respectively apart from sending the position at each from the quantity delivered of the solution of each applicator head 22.
When carrying out like this, owing under the environment of the environment (case of bending of the solution supply pipe of temperature, humidity or solution head 22 etc.) that adapts to the actual use of solution, set the quantity delivered of solution, so when carrying out actual solution coating, just can more correctly reproduce the quantity delivered of the solution of setting.Therefore, precision can be improved, the homogenising of thickness of the functional film of formation can be improved further substrate W coating solution.
In above-mentioned the 1st embodiment,, also can be on directions X, to drive the structure of applicator head to coating of substrates solution though be that example describes with the situation that on directions X, drives substrate with respect to the applicator head that is positioned at the precalculated position.
The weight measurement of the solution that ejects from applicator head can be not yet be carried out in every applicator head and is carried out at each nozzle of applicator head.Therefore, the invention is not restricted to have the applying device of a plurality of applicator heads, also can be applicable in the applying device that in single applicator head, is equipped with a plurality of nozzle arrangements.In addition, under this situation, can be a group also with a plurality of nozzles, carry out the measurement of the quantity delivered of solution by each group.
In addition, can obtain the position of the nozzle location of relative scale this moment according to X, the Y coordinate of the nozzle of discerning by control device.In addition, the operator moves scale by the operation of guidance panel, and teaching also is fine with respect to the position location of each group of each nozzle and nozzle.
From the quantity delivered of the solution of the applicator head situation different with setting value, the adjustment that both can repeat quantity delivered also can give the alarm.Thus, the operator can the unusual applicator head of spot check.That is, confirm from all nozzles of unusual applicator head, whether to eject solution.Then, after getting rid of unusually, can also measure quantity delivered once more from the solution of this applicator head.
In addition, although understand the example of a scale 41, but also a plurality of scales can be set.Because the quantity that a plurality of scales 41 can reduce the applicator head 22 that a scale 41 bears is set, therefore can shorten the time set from the solution quantity delivered of applicator head 22 of carrying out, can carry out operation more efficiently.
In addition, describe, also can be suitable for the applicator head of alternate manner, for example the applicator head of piston mode and air pressurized mode though applicator head 22 is applicator heads with ink-jetting style.
In addition, though be mobile mounting table 7 conveyance substrates, also can, for example mounting table 7 has carrying devices such as roll shaft carrying mechanism, conveyance substrate on mounting table 7.
In addition, though be that the structure that scale 41 is moved on X, Y direction also can be to make scale 41 only at directions X, the structure that applicator head 22 independently moves separately in the Y direction when measuring the weight of the solution of supplying with from applicator head 22.
Then, with reference to Fig. 8 to Figure 11 the 2nd embodiment of the present invention is described.
The applying device of solution shown in Figure 8 comprises substrate 101.The pair of guide rails 102 of separation also is set with predetermined space along predetermined direction in this substrate 101 abreast.That can advance on this guide rail 102 is provided with mounting table 103, for example, can drive by not shown drive sources such as linear motors.The driving direction of mounting table 103 is the directions X shown in the arrow mark among Fig. 8.On mounting table 103, supply with the glass system substrate W that for example in liquid crystal indicator, uses, keep and support substrate W by device absorption such as electrostatic chuck and vacuum suction.
At the middle part of the directions X of above-mentioned substrate 101, vertically establishing pillar 104 with the both ends of the Y direction of directions X quadrature.A side and upper edge, another side Y direction in pair of posts 104 are set up with respect to directions X with predetermined space opposed 2 packaged matching boards 105.At the inner face of each buck plate 105, maintain each 4 applicator head 22 in a plurality of, the present embodiment.That is, add up to staggered at the inner face of 2 packaged matching boards 105 8 applicator heads 22 are set.
Because each applicator head 22 and Fig. 3 of the 1st embodiment structure shown in Figure 4 is identical, so identical part is given identical mark and omitted its explanation.
On above-mentioned guide rail 102, be provided with the same with above-mentioned mounting table 103, by means of the drive source of not shown linear motor etc. on directions X and can separate the metering usefulness platform 125 of driving with above-mentioned mounting table 103.In this metering with on platform 125, along metering with the long side direction of platform 125 be the Y direction can move be provided with the 1st movable body 126 and the 2nd movable body 127.For example can on the Y direction, drive the 1st, the 2nd movable body 126,127 respectively by not shown drive sources such as linear motors.
1st, the 2nd movable body 126,127 is being provided at predetermined intervals the 126a of mounting portion, 127a and the following mounting 126b of portion, 127b on the above-below direction.The shading member 128 of rectangular shape is set in the last mounting 126a of portion, 127a, among the 126b of mounting portion, the 127b electronic scale (to call " electronic balance " in the following text) 129 is being set down.
Shown in Figure 10 A, 10B, above-mentioned shading member 128 is formed on the hydrops portion 131 of the rectangle concavity of top opening.Y direction middle part along an end of the directions X of this hydrops portion 131 is provided with cone shape protuberance 133, connects its thickness direction and form through hole 132 in this protuberance 133.Size with solution that only can be by the droplet-like that ejects from a nozzle 34 of applicator head 22 forms this through hole 132.
For example, when forming the nozzle 34 of diameter 0.1mm at interval with 1mm in applicator head 22, for example the diameter with 0.2～0.4mm forms above-mentioned through hole 132.Thus, even when a plurality of nozzles 34 of Fig. 3 and applicator head 22 shown in Figure 4 eject solution simultaneously, also only from the solution that ejects in the face of the nozzle 34 of through hole 132 by through hole 132, the solution that ejects from other nozzle 34 can accumulate in the above-mentioned hydrops portion 131.Because through hole 132 is formed on protuberance 133, so can stop the solution that accumulates in the hydrops portion 131 to flow into through hole 132.
The size along the Y direction of above-mentioned hydrops portion 131 is set at along about 2 times or greater than the size of this size of the length dimension of the Y direction of the row of the nozzle 34 of above-mentioned applicator head 22.Thus, even the nozzle 34 at the end that makes the Y direction that is positioned at applicator head 22 is opposite under the state of through hole 132, from all nozzles 34 of applicator head 22 solution L that spues, solution that the nozzle 34 beyond the nozzle 34 that is opposite to through hole 132 ejects is ejected the above-mentioned hydrops portion 131.
By the solution of above-mentioned through hole 132, drip the acceptance division 129a (shown in Fig. 9) of above-mentioned electronic balance 129.Thus, even eject solution simultaneously from a plurality of nozzles 34, the also weight of the solution that can only eject from a nozzle 34 by 129 meterings of above-mentioned electronic balance.Here, in acceptance division 129a, can use the hypocraterimorphous reception ware of the cup 48 that is equivalent to the 1st embodiment.
On above-mentioned shading member 128, one side as alignment sensor along a pair of the 1st sensor 134 of being provided with of Y direction, one side along being provided with the 2nd sensor 135 in the directions X.1st, the 2nd sensor 134,135 for example is the reflection type optical sensor with light-projecting portion and light accepting part, when driving above-mentioned shading member 128 below applicator head 22, to detecting along a side of the Y direction of this applicator head 22 with along a side of directions X.Thus, can on X, Y direction, locate the 1st, the 2nd movable body 126,127 with respect to applicator head 22.
In position outage 136 is set apart from above-mentioned through hole 132 preliminary dimensions of above-mentioned hydrops portion 131.This outage 136 is connected to discharging tube 137 shown in Figure 10 B.Thus, the solution L that ejects to above-mentioned hydrops portion 131 with above-mentioned through hole 132 opposed nozzles 34 is discharged by above-mentioned discharging tube 137.
And, in an end of the Y direction of above-mentioned hydrops portion 131, the cleaning member of making by the rubber elastomeric material with the outstanding upward height setting of opening above above-mentioned hydrops portion 131 along directions X, form with the braid shape 139.Below applicator head 22, drive the 1st, the 2nd movable body 126,127 o'clock along the Y direction, the opening surface that utilizes above-mentioned cleaning member 139 wiping nozzles 34 be applicator head 22 below.Thus, can clean attached to the solution L below 22.The solution L that clears out of from applicator head 22 accumulates in the hydrops portion 131 by cleaning member 139, and discharges by discharging tube 137.
Figure 11 is the control circuit figure of solution feedway, with 171 being control device among the figure.This control device 171 is in control head controller 172, nozzle controller 173, also according on X, Y direction, locate, drive the 1st, the 2nd movable body 126,127, the through hole 132 that is arranged on shading member 128 is in successively and is arranged on a plurality of nozzles 34 opposed positions of 22 from the signal of the 1st, the 2nd sensor 134,135 that is arranged on above-mentioned the 1st, the 2nd movable body 126,127.
Above-mentioned controller 172,173 will drive signal according to the detection signal from the not shown encoder of the X that detects above-mentioned mounting table 103, Y coordinate and output to master unit 174.This master unit 174 has 1CPU the 175, the 1st transceiver 176, supplies with the power supply 177 of 24V DC voltage, and control is from the injection of the solution L of the nozzle 34 of a plurality of applicator heads 22.
In each applicator head 22, be provided with above-mentioned drive circuit portion 36.In this drive circuit portion 36, be provided with 2CPU 182.In the lock-out pulse of this 2CPU 182 inputs from above-mentioned 1CPU 175, also by the 2nd transceiver 183 of communicating by letter with above-mentioned the 1st transceiver 176 from said nozzle controller 173 to these 2CPU 182 input drive signals.
Above-mentioned 1CPU 175 can be according to the amount of movement of above-mentioned 103 directions X, with respect to a plurality of pulse signals, export a lock-out pulse to above-mentioned 2CPU 182 by above-mentioned control device 171 and above-mentioned applicator head controller 172 from not shown X encoder.
In 2CPU 182, be connected with and preserve coating memory of data 184.By to the synchronization pulse of the 2CPU of drive circuit portion 36 182 inputs, just read this coating data at this 2CPU 182 from above-mentioned 1CPU 175.To output to serial parallel data converter section 185 in the coating data that 2CPU 182 reads.
In serial parallel data converter section 185, be connected with the 1st transformation portion 186.The 1st transformation portion 186 according to will becoming the voltage of 0～90V from the 24V voltage transformation of the power supply 177 of above-mentioned master unit 174 from the voltage instruction of above-mentioned 2CPU 182, and outputs to above-mentioned serial parallel data converter section 185.In this serial parallel data converter section 185, be connected with a plurality of piezoelectric elements 35 that are arranged in above-mentioned each applicator head 22.
From 1CPU 175 when 2CPU 182 input sync signals, in above-mentioned serial parallel data converter section 185, from above-mentioned 2CPU 182 outputting oscillation signals.Thus, owing to, just can from nozzle 34, eject solution corresponding to this piezoelectric element 35 according to predetermined piezoelectric element 35 being applied voltage from the 1st transformation portion 186 from the coating data of memory 184.
Then, the program of setting from the emitted dose of the solution of the nozzle 34 of each applicator head 22 of the applying device that is arranged on said structure by measurement is described.Under the situation of coating solution on the substrate W, make and upload the mounting table 103 that is equipped with substrate W at upper surface and on directions X, move to the position shown in the dotted line from the position shown in Fig. 8 solid line.And, when substrate W passes through the below of applicator head 22, carry out from the nozzle 34 of each applicator head 22, ejecting solution.
Under the situation of measurement from the emitted dose setting of the solution of said nozzle 34, at first, shown in solid line among Fig. 8, if mounting table 103 is kept out of the way from the below of applicator head 22, by drive on the directions X stands for taking measurement 125 just can make the 1st, the 2nd movable body 126,127 be positioned at each applicator head 22 below.
If obtain the end position of the Y direction of applicator head 22, this just drives each movable body 126,127 respectively, and the 2nd sensor 135 that is arranged on shading member 128 is moved in the predefined scope on the Y direction.Control device 171, the output signal of the 2nd sensor 135 in moving according to this and the subsidiary output signal that is arranged on the not shown position detector on each movable body 126,127 detect along the position of the end of the diagram upside of the directions X of applicator head 22.
Then, control device 171 is obtained the position relation of applicator head 22 and each movable body 126,127 according to the end position of the directions X of obtaining for each applicator head 22 and the end position of Y direction.
Because according to the positional information of each nozzle 34 on the design data applicator head 22 and the positional information of the through hole 132 on the shading member 128 is known, so control device 171 according to predefined this known positional information and above-mentioned in the position relation of the applicator head obtained 22 and each movable body 126,127, obtain the relative position of each nozzle 34 and through hole 132.
According to each nozzle 34 so obtained like this and the relative position of through hole 132, control device 171 positions the 1st, the 2nd movable body 126,127, makes the through hole 132 that is arranged on each shading member 128 mutually opposed with each 37 nozzle 34 of 22 successively.
Have again, in shading member 128,2 the 1st sensors 134 are set along the Y direction.Thus, owing to can detect angle of inclination, just can carry out the location recognition of applicator head 22 in view of the above more accurately by 2 the 1st sensors 134 with respect to the directions X of applicator head 22.
When in above-mentioned through hole 132 and 7 37 nozzles 34 1 is mutually opposed, eject solution simultaneously from these 37 nozzles 34 of 22.Then, only from through hole 132 opposed 1 nozzle 34 solution that ejects splash into the acceptance division 129a of electronic balance 129 by above-mentioned through hole 132, carry out weight measurement.The solution weight of measuring is input in the control device 171, is stored in not shown storage part.Initial nozzle 34 is No. 1 nozzle 34.
Have again, control device 171 according to before No. 1 nozzle 34 ejects solution and the difference that ejects the output valve of the electronic balance 129 behind the solution calculate the weight that splashes into the solution the acceptance division 129a.For example, from each nozzle 34, eject for 1000 times under the situation of drop, just in acceptance division 129a, splash into 1000 solution.Before control device 171 is obtained this drop of 1000 and is dripped and after output valve poor of electronic balance 129, this difference is obtained as the weight of 1 the drop that ejects from No. 1 nozzle 34 according to 1000 parts of values of cutting apart.Then, in the weight of 1 part of this drop of storage portion stores of control device 171.
Have, the hydrops portion 131 that the solution that ejects 36 nozzles 34 outside 1 nozzle 34 that is opposite to through hole 132 ejects shading member 128 scans out the discharging tube 137 by outage 136 from that again.
Then, drive the 1st, the 2nd movable body 126,127, make through hole 132 mutually opposed, solution is ejected from 37 nozzles 34 of shower nozzle 22 simultaneously with No. 2 nozzle 34.Thus, only the solution that ejects from No. 2 nozzle 34 passes through through hole 132, and measures its weight by electronic balance 129.Below, similarly, measure weight from No. 3～No. 37 solution that nozzle 34 ejects.
So like this, when measuring the weight of the solution eject respectively from 37 nozzles 34 of 1 stature 22, the not shown comparing section by control device 171 compares the weight of these weight and desired value.When there is difference more than the permissible value in the weight of the solution that ejects with respect to target weight, it is outputed to 2CPU 182 from each nozzle 34.Target weight is stored in the not shown storage part of control device 171 in advance.
Thus, the magnitude of voltage that 2CPU 182 control applies by 185 pairs of serial parallel data converter sections and each nozzle 34 opposed piezoelectric element 35 from the 1st transformation portion 186 or the pulse width of voltage are so that the solution that ejects from each nozzle 34 is in the permissible value as the weight of target.
For example, control is applied to magnitude of voltage on the piezoelectric element 35 and adjusts under the situation of amount of the solution that ejects from nozzle 34, in advance storage voltage correction in the memory 184 of 2CPU 182.And, owing to need reduce emitted dose during for just (the weight ratio target weight of measurement is big), so 2CPU 182 control the 1st transformation portions 185 are so that be applied to magnitude of voltage drop-out voltage correction value only on the piezoelectric element 35 in the difference of the weight of the solution of sending from control device 171.On the contrary, owing to need increase emitted dose when the weight difference of solution is negative (the weight ratio target weight of measurement is little), 2CPU 182 controls the 1st transformation portion 185 is so that the magnitude of voltage that is applied on the piezoelectric element 35 is only gone up the up voltage correction.
So like this,, just utilize mechanism same as described above, measure the weight of the solution that from each nozzle 34, ejects once more, carry out by control device 171 with the action of target weight comparison if revise from the emitted dose of the solution of each nozzle 34.Result relatively, adjust if just finish in the permissible value of weight at target weight of the solution that in all nozzles 34, ejects, if exceed permissible value, just repeat to adjust, till the weight of the solution that ejects from all nozzles 34 is in the permissible value of target weight.
So like this, with regard to each nozzle 34 of 1 applicator head 22, after the setting work of end injection amount, other applicator head 22 is similarly carried out the setting action of emitted dose by control device 171.
As mentioned above, according to present embodiment, solution is ejected simultaneously from the whole of a plurality of nozzles 34 that are arranged on 1 applicator head 22, and only pass through above-mentioned through hole 132 from the solution L that through hole 132 opposed 1 nozzle 34 with shading member 128 eject this moment, measures weight by electronic balance 129.And, 37 nozzle 34 of applicator head 22 is carried out this measurement successively.
Owing to each nozzle 32 is carried out the setting of the supply of solution, so can be suppressed at the deviation of the emitted dose of each nozzle 32 in the applicator head 22.Thus, emitted dose homogenising can be made, the further homogenising of thickness of the functional film that forms can be realized from the solution of each nozzle 32.
As mentioned above, since can with reality in measure the weight of the solution that ejects from each nozzle 34 during to substrate W coating solution under the identical condition, if so set the weight of the solution that ejects from each nozzle 34 according to this measurement, just can make the weight of the solution that ejects from each nozzle 34 when substrate W is applied solution is needed value.That is, can form the functional film of uniform desirable thickness to substrate W.
In shading member 128, cleaning member 139 is set along directions X.Thus, for weight Y direction below applicator head 22 of measuring the solution that ejects from each nozzle 34 drives the 1st, the 2nd movable body 126,127 o'clock, owing to can make following one side of the front end side polished applicator head 22 of cleaning member 139 move cleaning member 139, just can clean solution attached to the opening surface of nozzle 34.
For example, in measuring the setting action of setting from the emitted dose of the solution of nozzle 34, every end is to the measurement of 1 nozzle 34, and movable body 126,127 is moved back and forth on the Y direction below wiping applicator head 22 whole.Have again, at this moment, utilize not shown driving mechanisms such as air cylinder to make the 126a of mounting portion, the 127a can lifting with respect to movable body 126,127, in above-mentioned reciprocal motion, when going to action, make the 126a of mounting portion, 127a move to the end that rises, make the upper end of cleaning member 139 be positioned at the wiping position that contacts below with applicator head 22, make the 126a of mounting portion, 127a move to the end that descends during the answer action, make the upper end of cleaning member 139 be positioned at the position of readiness that contacts below that does not have with applicator head 22.
After repeating the injection from the solution of nozzle 34, it is known being attached with solution below applicator head 22.And, when the adhesion amount of solution increases, because the opening that this solution can plug nozzle 34, can hinder spuing from the solution of nozzle 34.
Therefore, as mentioned above, in the setting work of emitted dose, because in the time of below utilizing cleaning member 139 wiping applicator heads 22, can prevent because of situation, so just can carry out measurement and setting more accurately from the emitted dose of each nozzle 34 attached to the following solution plug nozzle 34 of applicator head 22.
In addition, owing to can directly measure the weight of the solution that from each nozzle 34, ejects,, can make injection output correctly meet necessary injection output from each nozzle 34 so just can measure the injection output accurately with electronic balance.Its result to substrate W coating solution the time, can form the uniform functional film of the thickness that is speckless with uniform coating amount coating solution.
In the above-described embodiment, though can 2 movable bodys be set in platform in metering, measuring the weight of the solution that goes out from the nozzle ejection of 2 statures simultaneously, be not limited to the quantity of measuring with the movable body that is provided with in the platform, also can be more than 1 or 3.
In addition, make them become identical, also each nozzle 34 can be set at different weight though set the weight of the solution that ejects from each nozzle 34.
In addition, on one side although understand on one side and eject solution is measured the weight of the solution that ejects from each nozzle 34 example simultaneously, measure but the nozzle 34 that also can stop the part from all nozzles 34 ejects solution from all nozzles 34.For example, in the figure of the functional film that this forms on substrate W, only from the beginning eject under the situation of solution in 30 nozzles 34 in 22 37 nozzles 34, Yi Bian on one side only from these 30 nozzles 34, eject solution is measured the solution that ejects respectively from these 30 nozzles 34 weight simultaneously.Even in this case, also can be on one side from all nozzles 34 that use during to substrate W coating solution in reality, eject solution, measure the weight of the solution that from each nozzle 34 ejects on one side.Thus, make the injection output of the solution of adjusting according to this measurement become the coating amount that is fit to reality, can improve the quality of formed functional film.
In addition, though the situation that through hole 132 is set in the shading member 129 of rectangular plate shape has been described as shading member, but mainly, because the solution that only ejects from 1 nozzle 34 is passed through, can be so for example separate by the interval of the solution that only from 1 nozzle 34, ejects, dispose 2 rectangular slabs, the solution that ejects from other nozzle 34 with any reception in 2 rectangular slabs also is fine.
In addition, although understand the example calculate the weight of the drop that ejects from 1000 drop weight from nozzle 34, but also can be not the quantity of the drop that ejects not being limited to 1000 in order to measure weight, can be arbitrarily, even 1 also harmless.Although understand relatively one the weight of drop and the example of target weight, adjust the injection output but also can compare 1000 etc. many weight.
Claims (15)
1, a kind of solution application device, it is supplied with solution and is applied to substrate, it is characterized in that, comprising:
Supply with a plurality of nozzles of the above-mentioned solution of coating along the predetermined direction configuration, to aforesaid substrate;
Mounting has the mounting table of aforesaid substrate in the above;
The 1st driving mechanism that this mounting table and above-mentioned applicator head are relatively moved on the direction of intersecting with above-mentioned predetermined direction;
Measurement is from the scale of the weight of the solution of said nozzle supply; And
Make this scale be independent of above-mentioned mounting table and reach the 2nd driving mechanism that moves on the direction of intersecting at above-mentioned predetermined direction with this predetermined direction.
2, solution application device according to claim 1, it is characterized in that, have along the ways of the direction setting that intersects with above-mentioned predetermined direction, on this ways, be provided with above-mentioned mounting table and the 1st movable link movably, above-mentioned predetermined direction is provided with the 2nd movable link movably in the 1st movable link upper edge, and the 2nd movable link is provided with above-mentioned scale.
3, solution application device according to claim 1 is characterized in that, above-mentioned weighing-appliance has the cup of reception from the solution of said nozzle supply, and this cup relies on shutter can open and close opening above it.
4, solution application device according to claim 1 is characterized in that, has according to disposing the positional information of the above-mentioned predetermined direction of above-mentioned a plurality of nozzles, and above-mentioned scale is positioned at controlling organization with each corresponding position of nozzle successively.
5, solution application device according to claim 4 is characterized in that, has to be provided with said nozzle, to be configured in a plurality of applicator heads on the above-mentioned predetermined direction;
Above-mentioned controlling organization according to the positional information of the above-mentioned predetermined direction of above-mentioned a plurality of applicator heads with above-mentioned scale be positioned at successively with the corresponding position of each applicator head on.
6, solution application device according to claim 1, it is characterized in that having the shading member that can be arranged on the below of said nozzle with locating, the solution that goes out from 1 nozzle ejection is passed through;
The weight of the solution of above-mentioned shading member has been passed through in above-mentioned scale measurement.
7, solution application device according to claim 1 is characterized in that, has the controlling organization that the weight of the solution that will eject from each nozzle according to above-mentioned measurement is set identically.
8, solution application device according to claim 6, it is characterized in that, has substrate, this substrate is provided with the guide rail that can make above-mentioned to lead movably in a predetermined direction, above-mentioned shading member of guiding and above-mentioned measuring mechanism on above-mentioned guide rail, they are arranged to and can either move up in above-mentioned predetermined party, also can on the direction of intersecting with this predetermined direction, move.
9, solution application device according to claim 6, it is characterized in that, be provided with the alignment sensor that the above-mentioned predetermined direction of detection reaches the position of the direction of intersecting with predetermined direction at above-mentioned shading member, locate above-mentioned shading member with respect to said nozzle according to the detection of this alignment sensor.
10, solution application device according to claim 6, it is characterized in that, be provided with at above-mentioned shading member make on the direction that this shading member intersects below said nozzle, with above-mentioned predetermined direction when mobile, cleaning removes the cleaning member attached to the solution of the opening surface of said nozzle.
11, solution application device according to claim 6 is characterized in that, is formed with the hydrops portion that stores above-mentioned solution at above-mentioned shading member, is connected with the discharging tube of discharging solution in this hydrops portion.
12, a kind of solution application device, it is supplied with solution and is applied to substrate, it is characterized in that, comprising:
Supply with a plurality of nozzles of the above-mentioned solution of coating along the predetermined direction configuration, to aforesaid substrate;
Mounting has the mounting table of aforesaid substrate in the above;
The 1st driving mechanism that this mounting table and above-mentioned applicator head are relatively moved on the direction of intersecting with above-mentioned predetermined direction;
Measurement is from the scale of the weight of the solution of said nozzle supply; And
Make this scale be independent of the 2nd driving mechanism that above-mentioned mounting table moves on the direction with respect to above-mentioned applicator head contact or separation.
13, a kind of metering method of solution quantity delivered is utilized the solution amount of scale metering from supplying with to substrate along a plurality of nozzles of predetermined direction configuration, it is characterized in that, comprising:
The operation that above-mentioned scale is relatively moved on above-mentioned predetermined direction with respect to said nozzle; And
According to moving of the above-mentioned predetermined direction of above-mentioned scale, utilize above-mentioned scale to receive, measure the operation of the solution of supplying with from a plurality of nozzles successively.
14, the metering method of solution quantity delivered according to claim 12 is characterized in that, has the operation according to the quantity delivered of being revised the solution that each nozzle supplies with by the quantity delivered of the solution of above-mentioned scale metering.
15, a kind of supply method of solution has a plurality of nozzles, and solution is ejected from these nozzles, it is characterized in that, comprising:
Eject the operation of the solution of droplet-like simultaneously from a plurality of nozzles;
Only extract the solution that goes out from a nozzle ejection the solution of a plurality of droplet-like that eject simultaneously from each nozzle, measure its weight, and the solution that goes out from each nozzle ejection is carried out the operation of this measurement; And
The weight of the solution of the droplet-like that goes out from a plurality of nozzle ejection and set the weight of each solution relatively so that the operation that they become identical.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP305532/2005 | 2005-10-20 | ||
| JP2005305532 | 2005-10-20 | ||
| JP146472/2006 | 2006-05-26 | ||
| JP2006146472A JP4887076B2 (en) | 2006-05-26 | 2006-05-26 | Solution supply apparatus and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1974027A true CN1974027A (en) | 2007-06-06 |
| CN1974027B CN1974027B (en) | 2012-06-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2006100647731A Active CN1974027B (en) | 2005-10-20 | 2006-10-20 | Solution application device and metering method of supply volume, solution supply method |
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| Country | Link |
|---|---|
| KR (1) | KR100845880B1 (en) |
| CN (1) | CN1974027B (en) |
| TW (1) | TWI311500B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102233311A (en) * | 2010-04-23 | 2011-11-09 | 芝浦机械电子装置股份有限公司 | Semiconductor producing device |
| CN102066008B (en) * | 2008-02-18 | 2014-03-19 | 武藏工业株式会社 | Method for applying liquid material, device therefor |
| CN103676226A (en) * | 2012-08-31 | 2014-03-26 | 细美事有限公司 | Liquid crystal discharge quantity measuring unit, discharge quantity measuring method and substrate processing device |
| CN104148232A (en) * | 2013-05-13 | 2014-11-19 | 株式会社埃纳科技 | Application device and application method |
| CN105555416A (en) * | 2013-07-30 | 2016-05-04 | 荷兰应用自然科学研究组织Tno | Slot-die coating method and apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR101403966B1 (en) * | 2013-01-02 | 2014-06-10 | 주식회사 케이씨텍 | Slit nozzle tuning system |
| JP6026362B2 (en) * | 2013-07-09 | 2016-11-16 | 東京エレクトロン株式会社 | Substrate processing system, control method for substrate processing system, and storage medium |
| KR20160107034A (en) | 2015-03-03 | 2016-09-13 | 세메스 주식회사 | Detecting mehtod and Apparatus for treating substrate |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1227753A (en) * | 1967-07-13 | 1971-04-07 | ||
| GB1255090A (en) * | 1969-03-26 | 1971-11-24 | Nippon Kogei Kogyo Company Ltd | Apparatus for electrostatically coating powders on a workpiece |
| CN1262354C (en) * | 1995-07-24 | 2006-07-05 | 松下电器产业株式会社 | Binder coating device |
| US6209479B1 (en) * | 1998-12-30 | 2001-04-03 | Aeromatic-Fielder Ag | Apparatus for coating tablets |
| JP3876684B2 (en) * | 2000-12-21 | 2007-02-07 | セイコーエプソン株式会社 | Color filter manufacturing method, color filter manufacturing device, liquid crystal device manufacturing method, liquid crystal device manufacturing device, EL device manufacturing method, EL device manufacturing device, material ejection method, head control device, electronic apparatus |
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- 2006-10-17 TW TW095138195A patent/TWI311500B/en active
- 2006-10-19 KR KR1020060101890A patent/KR100845880B1/en active IP Right Grant
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102066008B (en) * | 2008-02-18 | 2014-03-19 | 武藏工业株式会社 | Method for applying liquid material, device therefor |
| CN102233311A (en) * | 2010-04-23 | 2011-11-09 | 芝浦机械电子装置股份有限公司 | Semiconductor producing device |
| CN103676226A (en) * | 2012-08-31 | 2014-03-26 | 细美事有限公司 | Liquid crystal discharge quantity measuring unit, discharge quantity measuring method and substrate processing device |
| CN103676226B (en) * | 2012-08-31 | 2016-08-10 | 细美事有限公司 | Liquid crystal discharge capacity measuring unit, discharge capacity measuring method and substrate board treatment |
| CN104148232A (en) * | 2013-05-13 | 2014-11-19 | 株式会社埃纳科技 | Application device and application method |
| CN104148232B (en) * | 2013-05-13 | 2017-04-12 | 株式会社埃纳科技 | Application device and application method |
| CN105555416A (en) * | 2013-07-30 | 2016-05-04 | 荷兰应用自然科学研究组织Tno | Slot-die coating method and apparatus |
| CN105555416B (en) * | 2013-07-30 | 2018-05-11 | 荷兰应用自然科学研究组织Tno | Channel mould coating method and apparatus |
| US10006124B2 (en) | 2013-07-30 | 2018-06-26 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Slot-die coating method and apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI311500B (en) | 2009-07-01 |
| CN1974027B (en) | 2012-06-13 |
| TW200732046A (en) | 2007-09-01 |
| KR100845880B1 (en) | 2008-07-14 |
| KR20070043642A (en) | 2007-04-25 |
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