CN1964583A - Molybdenum disilicides ceramic heater - Google Patents
Molybdenum disilicides ceramic heater Download PDFInfo
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- CN1964583A CN1964583A CN 200610153889 CN200610153889A CN1964583A CN 1964583 A CN1964583 A CN 1964583A CN 200610153889 CN200610153889 CN 200610153889 CN 200610153889 A CN200610153889 A CN 200610153889A CN 1964583 A CN1964583 A CN 1964583A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/018—Heaters using heating elements comprising mosi2
Abstract
The present invention provides molybdenum disilicides ceramic heater with excellent heat resistance and power paste resistance, high joining strength and excellent durability. The said molybdenum disilicides ceramic heater is composed of: a heat part of the silicon dioxide oxide with content of 5-25 volume % and a terminal part of the silicon dioxide oxide with content 30-60 volume %. Furthermore, an intermediate part of the silicon dioxide oxide with content greater than or equal to 15 volume % and less than 30 volume % is disposed between the heat part of the silicon dioxide oxide with content greater than or equal to 5 volume % and less than 15 volume % and the terminal part of the silicon dioxide oxide with content of 30-60 volume %.
Description
Technical field
The present invention relates to molybdenum disilicides ceramic heater.
Background technology
Molybdenum disilicides ceramic heater is (hereinafter referred to as " MoSi
2Be heater ") owing to form silicon dioxide (SiO
2) protective oxide layer and at high temperature show good oxidation resistent susceptibility, thereby be used as the high-temperature heater heater that in oxidizing atmosphere, uses.General MoSi
2Be that heater is by at MoSi
2Add in the powder and contain bentonitic clay mineral and make, in heater, contain the silica-based oxide phase of about 10～20 volume %.Clay mineral plays shaping additive, sintering aid, silicon dioxide protective film generates promoter and resistance is adjusted effects such as agent.
MoSi
2The manufacturing process that is heater is roughly, in material powder, add the adhesive of ormal weight and water and carry out mixingly, the clay of making is carried out extrusion modling, make the base substrate of regulation line footpath, length, this base substrate is carried out drying, sintering under defined terms, thereby obtain the heater blank.If adhesive has used a large amount of organic system materials, generally will be before sintering carry out degreasing in hydrogen atmosphere is medium.Because the heater blank at high temperature has excellent plasticity, at high temperature carries out the correction of linearity subsequently.
Particularly, the heater blank is applied electric current and makes himself heating, the tension load that under this state the two ends of heater blank is applied regulation carries out the correction of the linearity of heater.Because this operation is to carry out in atmosphere, has plastic temperature range at the heater blank, selective oxidation takes place in the silicon in the molybdenum disilicides pottery (Si), and perhaps the glass ingredient by being contained in the common additive forms vitreous dense oxidation film on the heater surface.If the heater surface forms oxide-film, then the strength characteristics of heater blank, resistance to oxidation characteristic are significantly improved.Be that the heater surface is pre-formed oxide-film all like this, generally at MoSi2.In addition, by carrying out above-mentioned processing, also the heater blank has been carried out sintering (energising sintering).
By the wire rod that obtains is like this carried out bending machining and joint, formed the heater of target shape.Representational U font MoSi
2The structure that is heater is that the diameter of portion of terminal is about 2 times of heat generating part diameter, has reduced the resistance of portion of terminal, only has heat generating part to reach a high temperature when the energising heating.As for the joint method of heat generating part and portion of terminal, generally be when the two is pressurizeed, heat the method for carrying out the solid-state diffusion joint by the resistance butt joint.
MoSi
2The endemism that is called " powder is stuck with paste (ぺ ス ト) " of the efflorescence owing to the matrix oxidation under 400～600 ℃ of temperature, can take place in based material, so, MoSi
2Be that heater is not suitable for using at low temperatures.For the heater that uses in the high-temperature heater, be exposed to portion of terminal in the low temperature environment and also be easy to the phenomenon that powder is stuck with paste takes place, cause poor flow, problem such as disrumpent feelings.
In non-patent literature 1, once reported, along with at MoSi
2The defective part or the crystal boundary place of system's pottery generate MoO
3And volumetric expansion that produces and high-vapor-pressure are to cause powder to stick with paste the reason of phenomenon.Therefore think that for preventing the powder paste, make fully fine and close material, it will be effective eliminating defectives such as crackle, hole.
In addition, in patent documentation 1, think because the MoO that on crystal boundary, forms
3And the crystal boundary that causes is peeled off the main cause that (separation) is generation powder paste, is therefore carrying out MoSi
2The material of system's pottery will reduce MoSi when designing as far as possible
2The crystal boundary of crystal grain.That is, when containing bentonitic clay mineral, interpolation to make the content of the silica-based oxide in the heater be higher than in the past.By being formed on MoSi
2There is the tissue of silica-based oxide phase in the crystal boundary place of crystal grain, can suppress the generation that powder is stuck with paste phenomenon.In addition, stick with paste the portion of terminal of phenomenon being easy to produce powder, have the material of such tissue, can improve the durability of heater by use.
But disclosed heater in the above-mentioned patent documentation 1 though can bring into play sufficient thermal endurance in smaller or equal to 1200 ℃ low-temperature heat stove, is used for having problems aspect the thermal endurance when the heating furnace of high temperature range use.That is,, fusing point is descended, produce distortion, bubble etc. when being exposed in the high temperature, can't bring into play function as heater owing to the content of silica-based oxide is high in heat generating part.
Patent documentation 1: the spy opens flat 11-317282 communique
Non-patent literature 1: black river, the 22nd time コ ロ one ジ ヨ Application セ ミ Na one, saprophage Fang Shi Association meeting, 1995,63-81 page or leaf
Summary of the invention
The objective of the invention is, a kind of MoSi excellent heat resistance and power paste resistance, still can stablize use for a long time at the high-temperature area that surpasses 1200 ℃ that has is provided
2It is heater.
In order to address the above problem MoSi of the present invention
2The feature that is heater is, is that the heat generating part of 5～25 volume % and the portion of terminal of 30～60 volume % constitute by the content of silica-based oxide.Wherein, preferably, the differential resistivity of heat generating part and portion of terminal is smaller or equal to 20%.
And, among the present invention, silica-based oxide content be more than or equal to 5 volumes, portion of terminal less than the heat generating part of 15 volume % and 30～60 volume % between, silica-based oxide content can also be set more than or equal to 15 volume %, less than the pars intermedia of 30 volume %.Wherein preferably, the differential resistivity of heat generating part and pars intermedia, portion of terminal and pars intermedia is smaller or equal to 20%.
MoSi of the present invention
2Be heater, because the content of the silica-based oxide of heat generating part is 5～25 volume %, the content of the silica-based oxide of portion of terminal is 30～60 volume %, thereby has good thermal endurance and power paste resistance.Wherein, be controlled at smaller or equal to 20% by the differential resistivity with heat generating part and portion of terminal, both heating temp that causes owing to energising in the time of can reducing to engage is poor, thereby can improve bond strength, improves reliability.Thereby can make the line footpath and have the good MoSi of interchangeability and thermal endurance and power paste resistance with general commercially available product
2It is heater.
In addition, at MoSi of the present invention
2Be in the heater, silica-based oxide content be more than or equal to 5 volume %, portion of terminal less than the heat generating part of 15 volume % and 30～60 volume % between, get involved silica-based oxide content for more than or equal to 15 volume %, less than the pars intermedia of 30 volume %, equally also can obtain good thermal endurance and power paste resistance.Wherein,, can improve bond strength, improve the reliability of heater by the differential resistivity between each parts is defined as smaller or equal to 20%.
Description of drawings
Fig. 1 is the related MoSi of first execution mode of the present invention
2It is the schematic diagram of heater.
Fig. 2 is the related MoSi of second execution mode of the present invention
2It is the schematic diagram of heater.
Cyclic curve schematic diagram when Fig. 3 is the expression energizing test.
The schematic diagram of representing resistance butt joint bonding method during Fig. 4.
Wherein, 1,2 is MoSi
2Be heater, 10 is heat generating part, and 20 is portion of terminal, and 22 is jointing end face, and 30 is pars intermedia.
Embodiment
Fig. 1 represents the related MoSi of first execution mode of the present invention
2It is heater.The MoSi that first execution mode is related
2Being heater 1, is that the heat generating part 10 of 5～25 volume % and the portion of terminal 20 of 30～60 volume % constitute by silica-based oxide content, adopts when the two is pressurizeed the resistance rendezvous method to heat the solid-state diffusion of carrying out and engages and make.Wherein, preferably, the content of the silica-based oxide of heat generating part 10 is 5～15 volume %.The end face of the end face 22 of portion of terminal 20 and the heat generating part 10 of U font engages.The surperficial oxide film of heat generating part 10 and portion of terminal 20 is covered with, and the oxidation film on the part of portion of terminal 20 is removed, and forms Al sputtered films of bismuth 24 in the above as electrode.
The content of the silica-based oxide of heat generating part 10 and portion of terminal 20 is controlled by the addition of clay mineral.With MoSi
2After powder and clay mineral mix, have the bar-shaped of special diameter, the green compact that obtain after the drying are carried out sintering, be made into the heater blank by extrusion molding formation.Wherein, the content of silica-based oxide is after aluminium oxide by using 1 μ m grinds the section polishing of heater, carries out graphical analysis by optical microscope photograph (* 1000) and obtains.Particularly, the optical microscope photograph of heater burnishing surface is put into Luzex F リ ア Le イ system image processing and analyzing device (the ニ レ コ of Co., Ltd. manufacturing) carry out image processing, with the area occupation ratio of the silica-based oxide obtained content as silica-based oxide.And area occupation ratio is got the mean value of 5 visual fields.
As the method that engages, the resistance butt joint of carrying out usually as shown in Figure 4 engages.Difference installing electrodes 130,132 on heat generating part 110 and portion of terminal 120, the state that is in contact with one another at the end face 122 of the end face 112 of heat generating part 110 and portion of terminal 120, to applying alternating current between electrode 130 and 132, make end face 112,122 add depress the heating and engage.Wherein, can regulate distance A, B from the jointing end face 112,122 of heat generating part and portion of terminal to electrode 130,132.That is, if increase the distance A of heat generating part 110 sides, then the length C apart from B or terminal gradient portion of portion of terminal 120 sides just shortens.Because heat generating part 110 is different with the content of the silica-based oxide of portion of terminal 120, the resistivity of the two is also different, between two parts, produce temperature difference during energising, adopt above-mentioned method heat generating part 110 can be adjusted to identical degree with the caloric value of portion of terminal 120.The result makes that temperature difference reduces between two parts, can carry out sufficient solid-state diffusion, thereby obtains the good heater of bond strength.
In addition, because the addition difference of clay mineral by changing the sintering temperature of silica-based oxide content different heat generating part 10 and portion of terminal 20, can reduce the differential resistivity between the two.Wherein, if the differential resistivity between the two smaller or equal to 20%, carries out sufficient solid-state diffusion when engaging, can obtain the good heater of reliability.And, in the occasion of using silica-based oxide content as the parts of tilt distribution, as long as the differential resistivity between near two kinds of parts the junction surface is smaller or equal to 20% at least.If portion of terminal is burnt till under higher temperature, then MoSi
2The particle generation particle of crystal and silica-based oxide is grown up.For this reason, as long as higher sintering temperature wishes to reduce the portion of terminal 20 of resistivity than sintering heat generating part 10 time, selected sintering condition makes the differential resistivity of heat generating part 10 and portion of terminal 20 get final product smaller or equal to 20%.The sintering of this moment preferably carries out in the atmosphere of inert gas such as argon gas or hydrogen.The differential resistivity of said here heat generating part and portion of terminal is meant the ratio of the room temperature resistivity of the difference of room temperature resistivity of the room temperature resistivity of portion of terminal and heat generating part and heat generating part.
If adjust resistivity, just do not need to adjust the jointing end face and the interelectrode distance of portion of terminal and heat generating part with said method.Can prevent from thus to increase the junction surface distortion in addition that is easy to produce because of the distance A of heat generating part one side, and when the length C apart from B or terminal gradient portion of portion of terminal one side shortens, owing to the oxidation of electrode 132 causes serious problems such as spark, wherein the oxidation of electrode 132 is that the heat that produced owing to engaging is transmitted to electrode 132 and produces.In addition, owing to there is no need directly to adjust resistivity, have interchangeability with general commercially available product, and can provide bond strength high heater by the line that changes portion of terminal.
Heat generating part 10 and portion of terminal 20 are burnt till under the same conditions, then, portion of terminal 20 is carried out heat treated once again in atmosphere, can make MoSi
2The particle of crystal and silica-based oxide becomes thick.In this case, as long as select heat-treat condition, feasible differential resistivity control with heat generating part gets final product within the specific limits.And, under the situation of in oxidizing atmosphere, heat-treating, on portion of terminal, form the silicon dioxide protective film of tens of μ m, thereby can further improve the power paste resistance of portion of terminal.
Like this,, make the two differential resistivity, can realize that the higher resistance butt joint of reliability engages smaller or equal to 20% by controlling burning till or the oxidation processes condition of silica-based oxide content different heat generating part 10 and portion of terminal 20.The mode of heating of this moment applies electric current and the step mode (with reference to Fig. 4) that heats, also can utilize MoSi to-be-connected body except above-mentioned
2The metallic conductivity of based material adopts the high-frequency induction mode.The high-frequency induction mode is under the state that pressurizes on heat generating part and the portion of terminal, twines induction coil around it, induction coil is applied high-frequency alternating current, in heater, induce vortex flow, utilize the resistance of vortex flow and heater to produce Joule heat, junction surface 10 and portion of terminal 20 are engaged.
Fig. 2 represents the related MoSi of the 2nd execution mode of the present invention
2It is heater.The MoSi that the 2nd execution mode is related
2It is heater 2, between silica-based oxide content is more than or equal to 5 volume %, portion of terminal 20 less than the heat generating part 10 of 15 volume % and 30～60 volume %, has silica-based oxide content more than or equal to 15 volume %, less than the pars intermedia 30 of 30 volume %.In the present embodiment, pars intermedia 30 has identical diameter with heat generating part 10, and an end face of pars intermedia 30 engages with heat generating part 10, and the other end engages with portion of terminal 20.In addition, in this structure, the silica-based oxide content of heat generating part 10, portion of terminal 20 and pars intermedia 30 is controlled by the addition of clay mineral.
The heater of Gou Chenging like this, be one pressurize in the face of between each parts, one side carries out solid-state diffusion by the heating of resistance rendezvous method and engages and form.Such formation with above-mentioned same, also can adopt the high-frequency induction mode to heat to-be-connected body except step mode.Wherein, by changing the firing temperature of the different heat generating part of silica-based oxide content 10, portion of terminal 20 and pars intermedia 30, can reduce the differential resistivity between the parts that engage.That is, under the temperature higher, burn till portion of terminal 20, make MoSi than pars intermedia 30 and heat generating part 10
2The grain growth of crystal and silica-based oxide reduces resistivity, and pars intermedia 30 burns till under the temperature between portion of terminal 20 and the heat generating part 10, preferably burns till under minimum temperature, makes heat generating part 10 that grain growth not take place.By such adjustment, the differential resistivity between the parts that engage is controlled at smaller or equal to 20%, can obtain having carried out heater abundant solid-state diffusion, that reliability is good.And, when using dioxide-containing silica that the parts of inclination are arranged, so long as the differential resistivity between near two kinds of parts the junction surface gets final product smaller or equal to 20% at least.The differential resistivity of said here heat generating part and pars intermedia, the difference of room temperature resistivity that is meant the room temperature resistivity of pars intermedia and heat generating part is with respect to the ratio of the room temperature resistivity of heat generating part, the differential resistivity of said portion of terminal and pars intermedia, the difference of room temperature resistivity that is meant the room temperature resistivity of portion of terminal and pars intermedia is with respect to the ratio of the room temperature resistivity of pars intermedia.
More than, to by MoSi
2Mutually and silica-based oxide phase composition 2 mutually based material be illustrated, but also go for using MoSi
2In a part of Mo replaced by W, by (Mo
1-x, W
x) Si
2The heater of the compound of (x=0.1～0.45) expression, and, use at MoSi
2In or at (Mo
1-x, W
x) Si
2Added in (x=0.1～0.45) and be selected from MoB, Mo
2B, MoB
2, Mo
2B
5, WB, W
2B, W
2B
5, SiC, HfB
2, ZrB
2, TiB, TiB
2, one or both or two or more compound among HfC, ZrC, the TiC MoSi
2It is heater.
Embodiment
Specific embodiment below is described.
Adjust MoSi
2Powder and bentonitic cooperation ratio are made heat generating part that silica-based oxide content is 10 volume % and the portion of terminal (embodiment 1) of 35 volume %.Wherein, the line of heat generating part directly is Φ 6mm, and the line of portion of terminal directly is Φ 12mm, with heat generating part and portion of terminal in Ar atmosphere, burnt till 2 hours in 1400 ℃.The heat generating part bending machining is formed U font shape (terminal minister 400mm, heating minister 670mm, root width are 60mm), then, carry out resistance with portion of terminal and dock joint, make heater as shown in Figure 1.Before joint, with the NC processing machine portion of terminal is processed into taper, make that the diameter of the face that engages with heat generating part of portion of terminal is Φ 6mm.The heater that obtains is installed in the electric furnace, is warming up to target temperature (temperature in the stove), after 10 hours, confirm whether to have (heat resistant tests) such as distortion, foaming in insulation under this temperature with 5 ℃/min programming rate.Wherein, as target temperature, estimate 7 temperature such as 1400 ℃, 1450 ℃, 1500 ℃, 1550 ℃, 1600 ℃, 1650 ℃, 1700 ℃.In addition, with the terminal material of silicon dioxide protective film of removing the surface in electric furnace, 500 ℃ of heating 100 hours down, whether confirm has powder to stick with paste (low-temperature oxidation test) after the heating.
The silica-based oxide content of making heat generating part and portion of terminal is the sample (comparative example 1) of 10 volume % and the sample (comparative example 2) of 35 volume %, carries out the test of heat resistant test and low-temperature oxidation similarly to Example 1, the results are shown in the table 1.
In comparative example 1,, show good thermal endurance, but in the low-temperature oxidation test, find the powder paste 1700 ℃ of insulation discovery distortion, foaming after 10 hours down.On the other hand, in comparative example 2, do not find the powder paste after the low-temperature oxidation test, but after 10 hours, produce bubble on the heater, distortion occurs 1450 ℃ of insulations.Relative therewith, in embodiment 1, find distortion, bubble after 10 hours 1700 ℃ of insulations, show good thermal endurance, in the low-temperature oxidation test, do not find the powder paste yet.
Table 1
| Silica-based oxide content (volume %) | The heat generating part heat resisting temperature (℃) | Whether there is powder to stick with paste after the low-temperature test | ||
| Heat generating part | Portion of | |||
| Embodiment | ||||
| 1 | 10 | 35 | 1700 | Do not have |
| Comparative example 1 | 10 | 10 | 1700 | Have |
| Comparative example 2 | 35 | 35 | ＜1450 | Do not have |
Embodiment 2,3,4
Similarly to Example 1, adjust MoSi
2Powder and bentonitic cooperation ratio are made heat generating part that silica-based oxide content is 10 volume % and the portion of terminal of 35 volume %.Wherein, the line of heat generating part directly is Φ 6mm, and the line of portion of terminal directly is Φ 12mm, and heat generating part was burnt till 2 hours in Ar atmosphere, under 1400 ℃.In addition, changing firing temperature is 1450 ℃, 1460 ℃, 1480 ℃ and makes 3 kinds of samples as portion of terminal (embodiment 2,3,4).The differential resistivity of resistivity under the room temperature of each portion of terminal and portion of terminal and heat generating part (difference of the room temperature resistivity of portion of terminal and the room temperature resistivity of heat generating part is with respect to the ratio of the room temperature resistivity of heat generating part) is as shown in table 2.And the room temperature resistivity of heat generating part is 0.29 μ Ω m.Heat generating part is carried out similarly to Example 1 bending process, form the U font after, each portion of terminal different with firing temperature carried out the resistance butt joint and engaged, and makes heater as shown in Figure 1.In addition, under identical condition, the making line directly is heat generating part and the portion of terminal of Φ 6mm, to the heater of made with between load point between spacing 20mm, the strong point spacing 40mm fix the load (bond strength) when measuring according to automatic recording curve figure that fracture takes place at the junction surface when applying load under the setting speed with 0.5mm/min.Each embodiment measures 10 samples separately respectively, the mean value of the bond strength of obtaining, and the result is as shown in table 2.
As shown in Table 2, improve firing temperature and make the sample of grain growth, room temperature resistivity reduces, and approaches the room temperature resistivity value of the low heat generating part of silica-based oxide amount.Also confirm in addition,, improved bond strength by the resistivity of heat generating part and portion of terminal is mutually close.Particularly, the room temperature resistance rate variance of portion of terminal and heat generating part obtains surpassing the high bond strength of 200MPa smaller or equal to 20% embodiment 3 and 4.
Table 2
| The firing condition of portion of terminal | The room temperature resistivity of portion of terminal (μ Ω m) | The room temperature resistance rate variance (%) of portion of terminal and heat generating part | Average splice intensity (MPa) | |
| Embodiment 2 | 1450 ℃, 2 hours | 0.37 | 27.6 | 123 |
| Embodiment 3 | 1460 ℃, 2 hours | 0.33 | 13.8 | 210 |
| Embodiment 4 | 1480 ℃, 2 hours | 0.31 | 6.9 | 224 |
Embodiment 5
Similarly to Example 1, adjust MoSi
2Powder and bentonitic cooperation ratio are made heat generating part that silica-based oxide content is 10 volume % and the portion of terminal of 35 volume %.Wherein, heat generating part and portion of terminal burnt till 2 hours in Ar atmosphere, under 1400 ℃ after, further with portion of terminal in atmosphere, 1500 ℃ of following heat treatment 5 hours.The room temperature resistivity of the portion of terminal of gained is 0.30 μ Ω m.The room temperature resistance rate variance of portion of terminal and heat generating part is 3.4%.Heat generating part is carried out bending similarly to Example 1, after the formation U font, dock and engage, make heater as shown in Figure 1 with portion of terminal resistance.
This U font heater is installed in the heat run stove, as shown in Figure 3,3 hours operation of 1600 ℃ of 5 hours → coolings of temperature in the 3 hours → maintenance stove that heats up repeatedly, the heat run of switching on.U font heater to embodiment 2～4 also carries out same energising heating sample.Write down the period that each heater comes off or breaks respectively, as shown in table 3.
Among the embodiment 2, come off at the junction surface of 50 circulation back heaters.In addition, among the embodiment 2～5, surpass and not find coming off and break of junction surface after 100 circulations yet, thereby affirmation, adjust the resistivity value of portion of terminal, improved the reliability of heater by firing condition.
Table 3
| The room temperature resistance rate variance (%) of portion of terminal and heat generating part | Cycle-index when coming off | |
| Embodiment 2 | 27.6 | 50 |
| Embodiment 3 | 13.8 | ＞100 |
| Embodiment 4 | 6.9 | ＞100 |
| Embodiment 5 | 17.2 | ＞100 |
Embodiment 6
Adjust MoSi
2Powder and bentonitic cooperation ratio are made the heat generating part that silica-based oxide content is 10 volume %, the pars intermedia of 15 volume % and the portion of terminal of 35 volume %.The room temperature resistivity that burns till each parts after 2 hours in Ar atmosphere, under 1400 ℃ is as shown in table 4.Wherein, the heat generating part of making and the line of pars intermedia directly are Φ 6mm, and the line of portion of terminal directly is Φ 12mm, engage with pars intermedia in order to make portion of terminal, and portion of terminal is processed into taper, and the composition surface of its front end is Φ 6mm.In addition, the length of pars intermedia is 10mm.With the heat generating part bending machining, form U font (portion of terminal length 400mm, heat generating part length 670mm, root width are 60mm), engage with pars intermedia by the resistance butt joint then, and then, pars intermedia is engaged by the resistance butt joint with portion of terminal, make heater as shown in Figure 2.The U font heater of gained is installed in the heat run stove, in atmosphere, carries out energizing test 100 circulation of each circulation for 1600 ℃ of 5 hours → coolings 3 hours (referring to accompanying drawing 3) of temperature in the 3 hours → maintenance stove that heats up.
The result of energizing test is, after 100 circulations, still can keep the form of heater, do not come off at the junction surface in the sample or breaks.By The above results as can be known,, relaxed the gradient of the resistivity between parts, improved the reliability of heater by at the pars intermedia that the value of silica-based oxide content between two kinds of parts is set between heat generating part and the portion of terminal.
Table 4
| Heat generating part | Pars intermedia | Portion of terminal | |
| Room temperature resistivity (μ Ω m) | 0.29 | 0.33 | 0.37 |
The preferred embodiments of the present invention more than have been described in detail in detail, but the present invention is not limited to described specific implementations, in the scope of the aim of being put down in writing of the present invention, can carries out various distortion and change in the claims.
Claims (4)
1. molybdenum disilicides ceramic heater, this ceramic heating element is made of heat generating part and portion of terminal, it is characterized in that the content of the silica-based oxide of described heat generating part is 5～25 volume %, the content of the silica-based oxide of described portion of terminal is 30～60 volume %.
2. molybdenum disilicides ceramic heater, this ceramic heating element is made of heat generating part, portion of terminal and the pars intermedia that is provided with between described heat generating part and portion of terminal, it is characterized in that, the silica-based oxide content of described heat generating part is more than or equal to 5 volume %, less than 15 volume %, the content of the silica-based oxide of described pars intermedia is more than or equal to 15 volume %, less than 30 volume %, and the content of the silica-based oxide of described portion of terminal is 30～60 volume %.
3. molybdenum disilicides ceramic heater according to claim 1 is characterized in that the differential resistivity of described heat generating part and described portion of terminal is smaller or equal to 20%
4. molybdenum disilicides ceramic heater according to claim 2 is characterized in that, the differential resistivity of described heat generating part and described pars intermedia is smaller or equal to 20%, and the differential resistivity of described portion of terminal and described pars intermedia is smaller or equal to 20%.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005-321739 | 2005-11-07 | ||
| JP2005321739A JP4632205B2 (en) | 2005-11-07 | 2005-11-07 | Molybdenum disilicide ceramic heating element |
| JP2005321739 | 2005-11-07 |
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| Publication Number | Publication Date |
|---|---|
| CN1964583A true CN1964583A (en) | 2007-05-16 |
| CN1964583B CN1964583B (en) | 2011-02-09 |
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| CN 200610153889 Expired - Fee Related CN1964583B (en) | 2005-11-07 | 2006-09-14 | Molybdenum disilicides ceramic heater |
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| CN (1) | CN1964583B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103796346A (en) * | 2014-02-27 | 2014-05-14 | 上海理工大学 | High-temperature nano-electrothermal film of double-film structure and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| EP2427412A4 (en) * | 2009-05-05 | 2013-01-16 | Sandvik Intellectual Property | Heating element |
| JP5986136B2 (en) * | 2014-04-30 | 2016-09-06 | Ｊｘ金属株式会社 | Method for manufacturing MoSi2 heating element |
| CN104302021B (en) * | 2014-09-30 | 2016-03-23 | 洛阳西格马炉业股份有限公司 | A kind of for electrically heated heater and preparation technology thereof |
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| CN85205099U (en) * | 1985-11-23 | 1986-10-01 | 刘长富 | Carbon fibre wire as heating element |
| CN1080109A (en) * | 1992-06-12 | 1993-12-29 | 王涛 | A kind of complex electrocaloric film |
| JPH06124772A (en) * | 1992-10-12 | 1994-05-06 | Toshiba Ceramics Co Ltd | Heating element for high temperature electric furnace |
| JP3657800B2 (en) * | 1998-02-20 | 2005-06-08 | 株式会社リケン | Molybdenum disilicide-based composite ceramic heating element and manufacturing method thereof |
| JP3768093B2 (en) * | 2000-11-24 | 2006-04-19 | 株式会社日鉱マテリアルズ | MoSi2 module heater with excellent heat uniformity |
| JP4823486B2 (en) * | 2004-03-29 | 2011-11-24 | Ｊｘ日鉱日石金属株式会社 | Heater mainly composed of MoSi2 having excellent pest resistance and method for producing the same |
-
2005
- 2005-11-07 JP JP2005321739A patent/JP4632205B2/en not_active Expired - Fee Related
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2006
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103796346A (en) * | 2014-02-27 | 2014-05-14 | 上海理工大学 | High-temperature nano-electrothermal film of double-film structure and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1964583B (en) | 2011-02-09 |
| JP4632205B2 (en) | 2011-02-16 |
| JP2007128796A (en) | 2007-05-24 |
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