CN1948949B - Single light source vibration excitation vibration meter based on sine phase modulation - Google Patents
Single light source vibration excitation vibration meter based on sine phase modulation Download PDFInfo
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Abstract
A single light source vibration excitation vibration meter based on sine phase modulation has the structure that: the light source with the temperature controller is driven by a modulation driving power supply; the isolator, the coupler and the collimator are sequentially placed along the advancing direction of light emitted by the light source and connected with each other through the optical fiber section; the output end of the first photoelectric converter is connected with the input end of the first preamplifier, the output end of the second photoelectric converter packaged in the light source is connected with the input end of the second preamplifier, and the modulation signal output end of the modulation driving power supply, the output end of the first preamplifier and the output end of the second preamplifier are respectively connected with the first input end, the second input end and the third input end of the data processor; the output of the signal processor is connected to a signal monitor. The invention has simple structure, is easy to realize the photo-thermal excitation of the micro-resonator, and can simultaneously measure the frequency and the vibration amplitude of the resonance body to be measured with high precision.
Description
Technical field
The present invention relates to laser measurer of shock, particularly a kind of single light source measurer of shock based on sinusoidal phase modulation.
Background technology
Adopt micro structural component, the little resonant transducer of silicon that the attribute and the content of material composition is carried out high Precision Detection as NEMS (nanoelectromechanical systems) device and MEMS (microelectromechanical systems) device, since have highly sensitive, response speed is fast, size is little, cost is low, dependable performance, advantage such as can produce in batches, is one of international in recent years research focus.Wherein, the silicon micro-mechanical resonate sensor of employing light stimulus and light testing mode has the advantage of multiple advanced technology concurrently, has obtained this area research person's extensive concern.
In the correlative study in this field, adopt two light source experimental provisions mostly at present, i.e. two different LASER Light Source are adopted in the measurement of the excitation of micro-resonator and resonance signal thereof.Though this experimental provision is relatively easily realized the excitation and the detection of device, because the systematic comparison complexity has limited the development to the multihead system.In order to address the above problem, the excitation and vibration testing device of some single light sources has been proposed.(formerly technology 1 based on the autoexcitation silicon micro-resonator of Fabry-Perot (F-P) interference technique, J David Zook, David W.Bums, William R.Herb et al..Optically excited self-resonant microbeams, Sensors and Actuators[J] .1996, A52 (1-3), 92-98), this device does not need modulation source, can simplify sensor design, reduce cost, and realize the integrated sensing of a plurality of physical parameters easily, but existence is too high such as F-P chamber requirement on machining accuracy, excitation structure is subject to external interference, shortcomings such as need employing special device stable resonant oscillation state are never solved well; (formerly technology 2 based on the single light source device of intensity modulation detection mode, Liu Yueming, Liu Junhua, Zhang Shaojun.A laboratory study of photothermal excited silicon microresonators with coated film[J] .Acta Optica Sinica, 2003,23 (5), 529-533), the intensity modulation detection mode is adopted in the measurement of resonance signal, is subject to external interference, and measuring accuracy is lower; (formerly technology 3 for the device of employing single light source short optical pulse excitation micro-resonator, L.M.Zhang, D, Uttamchandani, B.Culshaw.Excitation of silicon microresonatorsusing short optical pulses[J] .Sensors and Actuators, 1990, A21-23,391-393), system architecture is simple, but signal Processing is difficulty relatively, and this device existence is high to the laser power requirement, needs the shortcoming of large-size resonator.
Summary of the invention
The objective of the invention is in order to overcome the deficiency of above-mentioned technology formerly, a kind of single light source measurer of shock based on sinusoidal phase modulation is provided.
Technical solution of the present invention is as follows:
A kind of single light source measurer of shock based on sinusoidal phase modulation, its structure is: the light source that has temperature controller is driven by modulation driving power supply; Put isolator, coupling mechanism successively along the source emissioning light working direction, described light source is linked to each other by first section optical fiber with isolator, link to each other by second section optical fiber between first port of described isolator and coupling mechanism, the 3rd port of this coupling mechanism links to each other with collimating apparatus through the 3rd section optical fiber, and second port of this coupling mechanism is connected with the first photoelectric commutator input end by the 4th section optical fiber; The input end of output termination first prime amplifier of this first photoelectric commutator, the output terminal that is encapsulated in second photoelectric commutator of light source inside links to each other with the input end of second prime amplifier, and the output terminal of the modulation signal output terminal of modulation driving power supply, the output terminal of first prime amplifier and second prime amplifier is connected with first input end, second input end and the 3rd input end of data processor respectively; The output terminal of this signal processor is connected with picture monitor.
The formation of described signal processor comprises: first divider and frequency tripling processor, the first input end of this first divider and second input end are second input end and the 3rd input end of signal processor, and the output terminal of first divider is connected with the second multiplier first input end mouth, the first multiplier first input end; The input end of described frequency tripling processor is the first input end of signal processor, the output terminal of described frequency tripling processor is connected with second input end of second multiplier, the second multiplier output terminal is connected with the input end of second low-pass filter, the output terminal of first multiplier is connected with the input end of first low-pass filter, the output terminal while of second low-pass filter and the first input end of totalizer, the first input end of subtracter connects, the output terminal while of first low-pass filter and second input end of totalizer, second input end of subtracter connects, the output terminal of totalizer is connected with second input end with the first input end of second divider respectively with the output terminal of subtracter, and the output terminal of second divider is the output terminal of signal processor.
Described modulation driving power supply provides direct drive electric current and AC driving electric current to light source, and the ac voltage signal of the AC driving current signal same frequency of light source can be exported and offer to its modulation signal output terminal.
Described light source is meant semiconductor laser, and its inside encapsulated second photoelectric commutator, and said second photoelectric commutator is a photodiode.
Described collimating apparatus is meant that its emergent light is the optical element of directional light, and its outgoing end face is coated with and increases anti-film, and its reflectivity R satisfies 0.08＜R＜0.73.
Described first photoelectric commutator is a photodiode, or photoelectric cell.
Described picture monitor is an oscillograph, or multimeter.
Described frequency tripling controller be ac voltage signal that will input frequency convert electronic component or the system that frequency is original 3 times ac voltage signal to.
The temperature of described temperature controller control light source only changes the temperature of light source in small range
The present invention has following significant advantage:
1, the present invention is based on the single light source measurer of shock of sinusoidal phase modulation, adopted the excitation and vibration testing system of full optical fibre Fizeau interference instrument structure as silicon micro-resonator, by adjusting the running parameter of interferometer, make its work under given conditions, from interference signal, demodulate the vibration signal of silicon micro-resonator again by the corresponding signal process method.System architecture is simple, does not need to adopt the resonant condition of special device systems stabilisation.
2, the present invention is based on the single light source measurer of shock of sinusoidal phase modulation, adopt special signal processing method from interference signal, to demodulate the vibration signal of silicon micro-resonator, can high-precisionly measure the vibration displacement of resonator.
3, the present invention is based on the single light source measurer of shock of sinusoidal phase modulation, adopt the exciting light source of interferometer light source, devices such as light source are not had specific (special) requirements, be easy to realize the photothermal excitation of micro-resonator as silicon micro-resonator.
Description of drawings
Fig. 1 is the structural representation of embodiment that the present invention is based on the single light source measurer of shock of sinusoidal phase modulation
Fig. 2 is the structured flowchart of signal processor of the present invention
Fig. 3 is the analog result that the resonator vibrates amplitude A changes with signal R
Fig. 4 is the measurement curve of signal R
Embodiment
The invention will be further described below by embodiment and accompanying drawing thereof, but should not limit protection scope of the present invention with this.
See also Fig. 1 and Fig. 2 earlier, Fig. 1 is the structural representation of embodiment that the present invention is based on the single light source measurer of shock of sinusoidal phase modulation, and Fig. 2 is the structural representation of signal processor of the present invention.As seen from the figure, the present invention is based on the single light source measurer of shock of sinusoidal phase modulation, its structure is: the light source 3 that has temperature controller 2 is driven by modulation driving power supply 1; Put isolator 4, coupling mechanism 5 successively along light source 3 emission light working direction, described light source 3 is linked to each other by first section optical fiber 301 with isolator 4, link to each other by second section optical fiber 501 between the first port a of described isolator 4 and coupling mechanism 5, the 3rd port c of this coupling mechanism 5 links to each other with collimating apparatus 6 through the 3rd section optical fiber 502, and the second port b of this coupling mechanism 5 is connected with first photoelectric commutator, 8 input ends by the 4th section optical fiber 503; The input end of output termination first prime amplifier 9 of this first photoelectric commutator 8, the output terminal that is encapsulated in second photoelectric commutator 10 of light source 3 inside links to each other with the input end of second prime amplifier 11, and the output terminal of the modulation signal output terminal of modulation driving power supply 1, the output terminal of first prime amplifier 9 and second prime amplifier 11 is connected with the 3rd input end x3 with first input end x1, the second input end x2 of data processor 12 respectively; The output terminal of this signal processor 12 is connected with picture monitor 13.
The formation of described signal processor 12 as shown in Figure 2, comprise: first divider 1201 and frequency tripling processor 1202, the first input end D1 of this first divider 1201 and the second input end D2 are the second input end X2 and the 3rd input end X3 of signal processor 12, and the output terminal of first divider 1201 is connected with second multiplier, 1203 first input end mouth M1, first multiplier, 1204 first input end M3; The input end of described frequency tripling processor 1202 is the first input end X1 of signal processor 12, the output terminal of described frequency tripling processor 1202 is connected with the second input end M2 of second multiplier 1203, second multiplier, 1203 output terminals are connected with the input end of second low-pass filter 1205, the output terminal of first multiplier 1204 is connected with the input end of first low-pass filter 1206, the output terminal while of second low-pass filter 1205 and the first input end A1 of totalizer 1207, the first input end S1 of subtracter connects, the output terminal while of first low-pass filter 1206 and the second input end A2 of totalizer 1207, the second input end S2 of subtracter connects, the output terminal of the output terminal of totalizer 1207 and subtracter 1208 is connected with the second input end D4 with the first input end D3 of second divider 1209 respectively, and the output terminal of this second divider 1209 is the output terminal of signal processor 12.
Described modulation driving power supply 1 provides direct drive electric current and AC driving electric current to light source, and the ac voltage signal of the AC driving current signal same frequency of light source can be exported and offer to its modulation signal output terminal.
Described collimating apparatus 6 is meant that its emergent light is the optical element of directional light, and its outgoing end face is coated with and increases anti-film, its reflectivity R satisfies 0.08＜R＜0.73, we can say that also described collimating apparatus 6 is the detecting heads that the present invention is based on the single light source measurer of shock of sinusoidal phase modulation.
Described first photoelectric commutator 8 is photodiodes, or photoelectric cell.
Described picture monitor (13) is an oscillograph, or multimeter.
Described frequency tripling controller 1202 be ac voltage signal that will input frequency convert electronic component or the system that frequency is original 3 times ac voltage signal to.
The course of work of measurer of shock of the present invention is as follows:
The detecting head of measurer of shock of the present invention is aimed at resonant body 7 to be measured, modulation driving power supply 1 provides direct drive electric current and simple alternating current drive current to light source 3, provide direct drive signal and simple alternating current drive signal to data processor 1, make the light wavelength sent by light source 3 and intensity by Sine Modulated, modulated light passes through isolator 4 successively, after coupling mechanism 5 and the collimating apparatus 6, this collimating apparatus 6 is that detecting head is aimed at resonant body 7 to be measured, modulation driving power supply provides direct drive signal and simple alternating current drive signal, makes the light wavelength sent by light source 3 and intensity by Sine Modulated; After modulated light passed through isolator 4, coupling mechanism 5 and collimating apparatus 6 successively, a part of light was reflected at collimating apparatus 6 and the end face that air has a common boundary, and produces reference light C, and another part transmitted light shines the surface of resonant body 7 to be measured with directional light T outgoing; The directional light T that shines resonant body 7 to be measured is after resonant body 7 reflections to be measured, and the thing light W of generation goes into to inject collimating apparatus 6, and C interferes with reference light, and the interference light signal of generation contains the displacement information of resonant body 7 to be measured; This interference light signal is received by first photo-electric conversion element 8, and changes light signal into electric signal through the second port b of coupling mechanism 5 output; First prime amplifier 9 amplifies back Input Data Process 12 to this electric signal, the light intensity that is encapsulated in second photoelectric commutator, 10 measurement light source 3 in the light source 3 changes, and the output signal of second photoelectric commutator 10 outputs to data processor 12 after amplifying by second prime amplifier 11.Resonant body 7 to be measured is under the irradiation of directional light T, because deformation takes place photo-thermal effect.Data processor 12 one of output and resonant body 7 Oscillation Amplitudes to be measured are electric signal R one to one, by picture monitor 13 observation signal R.When measurer of shock of the present invention is worked, increase the frequency of the AC driving signal of modulation driving power supply 1 output gradually, when the natural frequency of this signal frequency and resonant body 7 to be measured is consistent, the Oscillation Amplitude maximum of resonant body 7 to be measured, to reach resonant condition, the signal R of the signal R that this moment, picture monitor 13 showed during with resonant body 7 disresonance states to be measured compares, and an obvious variation is arranged.Obtain the resonance frequency of resonant body 7 to be measured by measuring-signal R.
λ(t)＝λ
0+β
1Δi(t) (1)
g(t)＝β
2[i
0+Δi(t)] (2)
Wherein, a is the amplitude of AC driving electric current, λ
0Be the centre wavelength of light source 3, β
1Be the variation factor of the wavelength of light source 3 with drive current, β
2Be the variation factor of the light intensity of light source 3 with drive current.
If the amplitude ratio of reference light C and thing light W is 1: 1, first photodetector, 8 detected interference light signals are:
S
0(t)＝I
B(t)+I
M(t)cos[z
1cos(ω
ct+θ)+α
0+a(t)] (3)
Wherein
I
B(t)＝g(t-τ
o)+g(t-τ
r) (4)
α
0(t)＝2πr
0/λ
0 (7)
α(t)＝4πr(t)/λ
0 (8)
I
B(t) and I
M(t) be respectively the incoherent part of interference signal and the amplitude modulation(PAM) of stem portion mutually; τ
0=l
0/ c, τ
r=l
r/ c, l
oAnd l
rBe respectively the light path of reference light C and thing light W, c is the light velocity: r
0Optical path difference when static between the end face of the end face of collimating apparatus 6 and resonant body to be measured 7; R (t) is the vibration displacement of resonant body 7 to be measured.
The Strength Changes that is encapsulated in the light source 3 that second photodetector in the light source 3 detects is:
I(t)＝β
2{i
0+αcos[ω
c(t-τ)+θ]} (9)
Wherein, τ is that light is propagated the time delay that causes.
Formula (3) and formula (9) are divided by, can obtain
S(t)＝C+Ccos[z
1cos(ω
ct+θ)+α
0+α(t)] (10)
Constant C does not change in time.
If displacement r (t)=Acos (ω of resonant body 7 to be measured
cT), then formula (10) can be written as:
S(t)＝C+Ccos[z
1cos(ω
ct+θ)+z
2cos(ω
ct)+α
0] (11)
By formula (6) as can be known, z
1With r
0Relevant, by adjusting the initial distance between collimating apparatus 6 and the resonant body to be measured 7, can make z
1Less relatively, so formula (11) can be similar to and is written as
S(t)≈C+Ccos[z
2cos(ω
ct)+α
0]
＝C+Ccosα
0[J
0(z
2)-2J
2(z
2)cos(2ω
ct)+…] (13)
-Csinα
0[2J
1(z
2)cos(ω
ct)-2J
3(z
2)cos(3ω
ct)+…]
Wherein, J
n(z
2) expression n rank Bessel's function.
By formula (13) as seen, from signal S (t), solve certain rank Bessel's function J
n(z
2), just can measure the Oscillation Amplitude of resonant body 7 to be measured.Yet the monodrome interval of Bessel's function is less, will limit the measurement range of this method.In addition, because r
0Be difficult to accurate measurement, so be difficult to provide sin (α
0) and cos (α
0) accurate numerical value, cause directly finding the solution certain rank Bessel's function and have difficulties from formula (13).
Therefore adopt signal processing system as shown in Figure 2 that interference signal is handled.With first photoelectric commutator, 8 detected interference signal S
0(t) and the Strength Changes signal I (t) of second photoelectric commutator, 10 detected light sources 3 send into first divider 1201 simultaneously, obtain signal S (t).S (t) is divided into two-way, and the sinusoidal modulation signal of one road signal and the output of modulation driving power supply modulation signal output terminal is imported the output signal of first multiplier, 1204, the first multipliers 1204 together and is imported first low-pass filter 1206 again, obtains signal S
1,
S
1＝-K
1Csinα
0J
1(z
2) (14)
K
1It is first gain coefficient.
Sinusoidal modulation signal input frequency tripling processor 1202 with the output of modulation driving power supply modulation signal output terminal, the signal of output is imported second multiplier 1203 with S (t), the output signal of second multiplier 1203 is imported second low-pass filter 1205, obtains signal S
2,
S
2＝K
2Csinα
0J
3(z
2) (15)
K
2It is second gain coefficient.
Again with S
1With S
2 Difference input summer 1207 and subtracter 1208, the output signal of totalizer 1207 and subtracter 1208 is output signal R after 1210 computings of second divider,
Resonant body 7 Oscillation Amplitude A to be measured (make K as shown in Figure 3 with the analog result that signal R changes
1=K
2).As seen, owing to adopt the Bessel's function ratioing technigue, reduced of the restriction of Bessel's function monodrome interval to a certain extent to measurement range.
The structural drawing of the embodiment of measurer of shock as shown in Figure 1, resonant body 7 to be measured are the semi-girders that adopt multi-layer compound structure, aluminize in the surface, long 1000 microns, wide 300 microns, thick 20 microns.The centre wavelength of semiconductor laser 3 is 1303.9nm, peak power output 2.5mw, its wavelength-modulated factor beta
1With the intensity modulated factor beta
2Be respectively 0.0188nm/mA, 0.1mW/mA.During test, adjust the initial distance of collimating apparatus and semi-girder, make r
0Be about 100 μ m; Adjust the amplitude of the AC driving signal of semiconductor laser 3, make a be about 1.5mA (z then
1Be about 0.0104); First gain coefficient and second gain coefficient are 10.Increase the frequency of semiconductor laser ac modulation signal gradually, when modulating frequency during away from the resonance frequency of resonant body 7 to be measured, the measurement curve that picture monitor shows is shown in Fig. 4 (a), and its mean value is about 1; When modulating frequency during in the 8.81kHz left and right sides, the measurement curvilinear motion that picture monitor shows is that its size is about 0.85 shown in Fig. 4 (b).This moment, resonant body 7 to be measured reached resonant condition, and its Oscillation Amplitude is about 135nm, and resonance frequency is 8.81kHz.
Part light is reflected at collimating apparatus 6 and the end face that air has a common boundary, and produces reference light R, and another part light shines the surface of resonant body 7 to be measured with directional light T outgoing, and after the thing light O that reflects went into to inject collimating apparatus 6, R interfered with reference light; The interference light that produces contains the displacement information of resonant body 7 to be measured, and this interference light is received by first photo-electric conversion element 8 through coupling mechanism 5 backs, changes light signal into electric signal; First prime amplifier 9 amplifies back input signal processor 12 to this electric signal.The light intensity that is encapsulated in second photoelectric commutator, 10 measurement light source 3 in the light source 3 changes, and the output signal of second photoelectric commutator 10 outputs to signal processor 12 after amplifying by second prime amplifier 11.Resonant body 7 to be measured is under the irradiation of directional light T, because deformation takes place photo-thermal effect.When the natural frequency of the frequency of the AC driving signal of modulation driving power supply output and resonant body 7 to be measured was consistent, the Oscillation Amplitude maximum of resonant body 7 to be measured reached resonant condition.Signal processor 12 one of output and resonant body 7 Oscillation Amplitudes to be measured are electric signal one to one, can observe this signal by picture monitor 13.
Below principle of work is done an explanation:
λ(t)＝λ
0+β
1Δi(t) (1)
g(t)＝β
2[i
0+Δi(t)] (2)
Wherein, α is the amplitude of AC driving electric current, λ
0Be the centre wavelength of light source 3, β
1Be the variation factor of the wavelength of light source 3 with drive current, β
2Be the variation factor of the light intensity of light source 3 with drive current.
If the amplitude ratio of reference light C and thing light W is 1: 1, first photodetector, 8 detected interference light signals are:
S
0(t)＝I
B(t)+I
M(t)cos[z
1cos(ω
ct+θ)+α
0+α(t)] (3)
Wherein
I
B(t)＝g(t-τ
o)+g(t-τ
r) (4)
α
0(t)＝2πr
0/λ
0 (7)
α(t)＝4πr(t)/λ
0 (8)
I
B(t) and I
M(t) be respectively the incoherent part of interference signal and the amplitude modulation(PAM) of stem portion mutually; τ
0=l
0/ c, τ
r=l
r/ c, l
oAnd l
rBe respectively the light path of reference light C and thing light W, c is the light velocity: r
0Optical path difference when static between the end face of the end face of collimating apparatus 6 and resonant body to be measured 7; R (t) is the vibration displacement of resonant body 7 to be measured.
The Strength Changes that is encapsulated in the light source 3 that second photodetector in the light source 3 detects is:
I(t)＝β
2{i
0+αcos[ω
c(t-τ)+θ]} (9)
Wherein, τ is that light is propagated the time delay that causes.
Formula (3) and formula (9) are divided by, can obtain
S(t)＝C+Ccos[z
1cos(ω
ct+θ)+α
0+α(t)] (10)
Constant C does not change in time.
If displacement r (t)=Acos (ω of resonant body 7 to be measured
cT), then formula (10) can be written as:
S(t)＝C+Ccos[z
1cos(ω
ct+θ)+z
2cos(ω
ct)+α
0] (11)
By formula (6) as can be known, z
1With r
0Relevant, by adjusting the initial distance between collimating apparatus 6 and the resonant body to be measured 7, can make z
1Less relatively, so formula (11) can be similar to and is written as
S(t)≈C+Ccos[z
2cos(ω
ct)+α
0]
＝C+Ccosα
0[J
0(z
2)-2J
2(z
2)cos(2ω
ct)+...] (13)
-Csinα
0[2J
1(z
2)cos(ω
ct)-2J
3(z
2)cos(3ω
ct)+...]
Wherein, J
n(z
2) expression n rank Bessel's function.
By formula (13) as seen, from signal S (t), solve certain rank Bessel's function J
n(z
2), just can measure the Oscillation Amplitude of resonant body 7 to be measured.Yet the monodrome interval of Bessel's function is less, will limit the measurement range of this method.In addition, because r
0Be difficult to accurate measurement, so be difficult to provide sin (α
0) and cos (α
0) accurate numerical value, cause directly finding the solution certain rank Bessel's function and have difficulties from formula (13).
Therefore adopt signal processing system as shown in Figure 2 that interference signal is handled.With first photoelectric commutator, 8 detected interference signal S
0(t) and the Strength Changes signal I (t) of second photoelectric commutator, 10 detected light sources 3 send into first divider 1201 simultaneously, obtain signal S (t).S (t) is divided into two-way, and the sinusoidal modulation signal of one road signal and the output of modulation driving power supply modulation signal output terminal is imported the output signal of first multiplier, 1204, the first multipliers 1204 together and is imported first low-pass filter 1206 again, obtains signal S
1,
S
1＝-K
1Csinα
0J
1(z
2) (14)
K
1It is first gain coefficient.
Sinusoidal modulation signal input frequency tripling processor 1202 with the output of modulation driving power supply modulation signal output terminal, the signal of output is imported second multiplier 1203 with S (t), the output signal of second multiplier 1203 is imported second low-pass filter 1205, obtains signal S
2,
S
2＝K
2Csinα
0J
3(z
2) (15)
K
2It is second gain coefficient.
Again with S
1With S
2 Difference input summer 1207 and subtracter 1208, the output signal of totalizer 1207 and subtracter 1208 is output signal R after 1210 computings of second divider,
Resonant body 7 Oscillation Amplitude A to be measured (make K as shown in Figure 3 with the analog result that signal R changes
1=K
2).As seen, owing to adopt the Bessel's function ratioing technigue, reduced of the restriction of Bessel's function monodrome interval to a certain extent to measurement range.
The structural drawing of the embodiment of measurer of shock as shown in Figure 1, resonant body 7 to be measured are the semi-girders that adopt multi-layer compound structure, aluminize in the surface, long 1000 microns, wide 300 microns, thick 20 microns.The centre wavelength of semiconductor laser 3 is 1303.9nm, peak power output 2.5mw, its wavelength-modulated factor beta
1With the intensity modulated factor beta
2Be respectively 0.0188nm/mA, 0.1mW/mA.During test, adjust the initial distance of collimating apparatus and semi-girder, make r
0Be about 100 μ m; Adjust the amplitude of the AC driving signal of semiconductor laser 3, make a be about 1.5mA (z then
1Be about 0.0104); First gain coefficient and second gain coefficient are 10.Increase the frequency of semiconductor laser ac modulation signal gradually, when modulating frequency during away from the resonance frequency of resonant body 7 to be measured, the measurement curve that picture monitor shows is shown in Fig. 4 (a), and its mean value is about 1; When modulating frequency during in the 8.81kHz left and right sides, the measurement curvilinear motion that picture monitor shows is that its size is about 0.85 shown in Fig. 4 (b).This moment, resonant body 7 to be measured reached resonant condition, and its Oscillation Amplitude is about 135nm, and resonance frequency is 8.81kHz.
Claims (7)
1. single light source measurer of shock based on sinusoidal phase modulation, be characterised in that its structure is: the light source (3) that has temperature controller (2) is driven by modulation driving power supply (1); Put isolator (4), coupling mechanism (5) successively along light source (3) emission light working direction, described light source (3) is linked to each other by first section optical fiber (301) with isolator (4), link to each other by second section optical fiber (501) between first port (a) of described isolator (4) and coupling mechanism (5), the 3rd port (c) of this coupling mechanism (5) links to each other with collimating apparatus (6) through the 3rd section optical fiber (502), and second port (b) of this coupling mechanism (5) is connected with first photoelectric commutator (8) input end by the 4th section optical fiber (503); The input end of output termination first prime amplifier (9) of this first photoelectric commutator (8), the output terminal that is encapsulated in inner second photoelectric commutator (10) of light source (3) links to each other with the input end of second prime amplifier (11), and the output terminal of the modulation signal output terminal of modulation driving power supply (1), first prime amplifier (9) is connected with first input end (x1), second input end (x2) and the 3rd input end (x3) of signal processor (12) respectively with the output terminal of second prime amplifier (11); The output terminal of this signal processor (12) is connected with picture monitor (13), the formation of described signal processor (12) comprising: first divider (1201) and frequency tripling processor (1202), the first input end (D1) of this first divider (1201) and second input end (D2) are second input end (X2) and the 3rd input end (X3) of signal processor (12), and the output terminal of first divider (1201) is connected with second multiplier (1203) first input end mouth (M1), first multiplier (1204) first input end (M3); The input end of described frequency tripling processor (1202) is the first input end (X1) of signal processor (12), the output terminal of described frequency tripling processor (1202) is connected with second input end (M2) of second multiplier (1203), second multiplier (1203) output terminal is connected with the input end of second low-pass filter (1205), the output terminal of first multiplier (1204) is connected with the input end of first low-pass filter (1206), the output terminal while of second low-pass filter (1205) and the first input end (A1) of totalizer (1207), the first input end of subtracter (S1) connects, the output terminal while of first low-pass filter (1206) and second input end (A2) of totalizer (1207), second input end (S2) of subtracter connects, the output terminal of the output terminal of totalizer (1207) and subtracter (1208) is connected with second input end (D4) with the first input end (D3) of second divider (1209) respectively, and the output terminal of second divider (1209) is the output terminal of signal processor (12).
2. single light source measurer of shock according to claim 1, it is characterized in that described modulation driving power supply (1) provides direct drive electric current and AC driving electric current to light source, and the ac voltage signal of the AC driving current signal same frequency of light source can be exported and offer to its modulation signal output terminal.
3. single light source measurer of shock according to claim 1 is characterized in that described light source (3) is meant semiconductor laser, and its inside encapsulated second photoelectric commutator, and said second photoelectric commutator is a photodiode.
4. single light source measurer of shock according to claim 1 is characterized in that described collimating apparatus (6) is meant that its emergent light is the optical element of directional light, and its outgoing end face is coated with and increases anti-film, and its reflectivity R satisfies 0.08＜R＜0.73.
5. single light source measurer of shock according to claim 1 is characterized in that described first photoelectric commutator is a photodiode, or photoelectric cell.
6. single light source measurer of shock according to claim 1 is characterized in that described picture monitor (13) is an oscillograph, or multimeter.
7. single light source measurer of shock according to claim 2, it is characterized in that described frequency tripling processor (1202) be will input the frequency inverted of ac voltage signal to become frequency be the electronic component or the system of original 3 times ac voltage signal.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1255630A (en) * | 1999-12-02 | 2000-06-07 | 中国科学院上海光学精密机械研究所 | Semiconductor laser vibration excitation vibration measurer |
| JP2006118989A (en) * | 2004-10-21 | 2006-05-11 | Hyogo Prefecture | Vibration measurement method and apparatus using electronic speckle interferometry |
| CN200972446Y (en) * | 2006-11-10 | 2007-11-07 | 中国科学院上海光学精密机械研究所 | Single light source vibration excitation vibration meter based on sine phase modulation |
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2006
- 2006-11-10 CN CN2006101181885A patent/CN1948949B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1255630A (en) * | 1999-12-02 | 2000-06-07 | 中国科学院上海光学精密机械研究所 | Semiconductor laser vibration excitation vibration measurer |
| JP2006118989A (en) * | 2004-10-21 | 2006-05-11 | Hyogo Prefecture | Vibration measurement method and apparatus using electronic speckle interferometry |
| CN200972446Y (en) * | 2006-11-10 | 2007-11-07 | 中国科学院上海光学精密机械研究所 | Single light source vibration excitation vibration meter based on sine phase modulation |
Non-Patent Citations (2)
| Title |
|---|
| Xuefeng Wang et al.A sinusoidal phase-modulating fiber-optic interferometerinsensitive to the intensity change of the light source.Optics & Laser Technology35.2003,35220-221. * |
| Yingming Liu et al.Study on silicon micro-resonators by using a novel opticalexcitation and detection apparatus.Chinese Optics Letters4 5.2006,4(5),309-310. * |
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