CN1110692C - Semiconductor laser vibration excitation vibration measurer - Google Patents
Semiconductor laser vibration excitation vibration measurer Download PDFInfo
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- CN1110692C CN1110692C CN99124197A CN99124197A CN1110692C CN 1110692 C CN1110692 C CN 1110692C CN 99124197 A CN99124197 A CN 99124197A CN 99124197 A CN99124197 A CN 99124197A CN 1110692 C CN1110692 C CN 1110692C
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- optical fiber
- vibration
- light source
- fibre
- semiconductor laser
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 18
- 230000005284 excitation Effects 0.000 title abstract description 7
- 239000013307 optical fiber Substances 0.000 claims abstract description 38
- 239000000523 sample Substances 0.000 claims abstract description 25
- RGNPBRKPHBKNKX-UHFFFAOYSA-N hexaflumuron Chemical compound C1=C(Cl)C(OC(F)(F)C(F)F)=C(Cl)C=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F RGNPBRKPHBKNKX-UHFFFAOYSA-N 0.000 claims description 11
- 230000035939 shock Effects 0.000 claims description 10
- 238000012544 monitoring process Methods 0.000 claims description 8
- 239000000835 fiber Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 8
- 238000012360 testing method Methods 0.000 abstract description 2
- 230000010354 integration Effects 0.000 abstract 1
- 230000033001 locomotion Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 230000000386 athletic effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012372 quality testing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
A semiconductor laser vibration exciting vibration meter comprises an excitation light source for generating a modulated excitation light beam, a vibration measuring light source for generating a vibration measuring light beam with constant light intensity, an optical fiber wave combiner, a wave combining optical fiber, a photoelectric detector, an optical fiber multiplexer and an optical fiber probe, wherein the end face of the optical fiber wave combiner is aligned to a sample to be measured, and the optical fiber probe is provided with a sinusoidal phase modulation. The vibration exciting light beam makes the tested sample produce vibration, the light beam reflected and returned by the vibration testing light beam which is emitted to the surface of the tested sample and the light beam reflected and returned by the end face of the optical fiber probe produce interference, and therefore the vibration frequency and the vibration amplitude can be measured simultaneously. The invention has the characteristics of multifunction, non-contact type, miniaturization, integration, good stability and high measurement precision.
Description
The present invention relates to a kind of semiconductor laser measurer of shock.It is the driving of low-light electro-mechanical system component movement and the effective tool that kinetic characteristic is measured, be again that low-light electromechanical parts prepare the important instrument of quality testing in the production run simultaneously, in the research of low-light electro-mechanical system, design and preparation will play an important role in producing.
In the prior art, people have used multiple mode: as electrostatic induction, contract in the mangneto Shen, electric heating deformation, Piezoelectric Driving, fork-like farm tools used in ancient China such as photic excitation drive the motion of low-light electro-mechanical system parts, and with parameters such as electricity, their displacement of optical mode measurement, speed, vibration frequency, amplitudes.
" single-chip-integrated gallium arsenide (GaAs) Laser Driven micromechanical resonator " (SCIENCE, Vol.260, p.786-789) and Japanese patent of invention JP5-10815, JP6-117913 " light stimulus oscillator sensor " 7May 1993,, have laser exciting and induced signal output function.This induced signal derives from the reaction that laser instrument injects light to the outside, and it is to be used for temperature, answers (pressure) power, and the device of a kind of specific function of physical quantities such as flow is not a kind of surveying instrument that can be applicable to different situations and different requirements.
" mechanical type laser strobe vibration control measuring instrument " (CN 86 2 10604 U) are actually a kind of electric signal generator of frequency stabilization control, it does not have the function with the Laser Driven object of which movement, do not have the function of small movements precision measurement yet, can not be used for the measurement in micro mechanical system field.
" measuring method for athletic posture and device thereof " (CN 1057907A) belongs to laser doppler measurement technique, do not have the function of excitation testee motion.
" contactless frequency-modulation optical fiber detector for displacement measuring " (CN 1042414A) is a kind of of optical fibre interference instrument.But it does not have the function of excitation testee motion, adopts the laser frequency-modulation technology on measuring principle.
The measurement mechanism (referring to patent WO 86/05271) that inventor " A Measuring Devices " proposes, (1) light path mainly adopts the bulk optics components and parts; (2) adopt frequency shifter to realize difference interference; (3) device only is used for the measurement of vibration frequency, ignores the accurate tolerance of amplitude.
The objective of the invention is in order to overcome the deficiency in the above-mentioned prior art, a kind of low-light electro-mechanical system component movement that can encourage as sample is provided, can measures the contactless semiconductor laser measurer of shock of its vibration frequency and amplitude parameter again simultaneously.It will have integrated, and will be multi-functional, advantage of wide range of application.
Semiconductor laser measurer of shock of the present invention, it comprises casing 10, is built-in with the exciting light source 1 and the vibration measuring light source 4 that has direct supply 5 of band exciting power of alterating and direct current 20 at casing 10.The output beam of exciting light source 1 is through the first input end O of exciting arm optical fiber 2 with optical fiber wave multiplexer 6
1Link to each other.Vibration measuring light source 4 output beams are through the second input end O of vibration measuring arm optical fiber 3 with optical fiber wave multiplexer 6
2Link to each other.The output terminal O of optical fiber wave multiplexer 6
3By closing the input end O of the glistening light of waves fine 7 and sonet multiplexer 8
4Join the first output terminal O of sonet multiplexer 8
5The interference optical fiber 9 that connects front end band fibre-optical probe 11.Fibre-optical probe 11 places on the piezoelectric ceramics 13 that has vibratory drive power supply 14, and fibre-optical probe 11 top end faces are aimed at the sample 12 that places outside the casing 10.The second output terminal O of sonet multiplexer 8
6By last output optical fibre 19 interfering beam is sent on the sensitive surface of photodetector 18.The output terminal of photodetector 18 is connected to the outer signal display monitor central monitoring system 17 of casing 10 and links to each other with computing machine 16 through A/D modular converter 15.Above said exciting light source 1 and vibration measuring light source 4 are semiconductor lasers, or other solid state lasers, or gas laser.Said optical fiber wave multiplexer 6 and sonet multiplexer 8 are fiber coupler or semiconductor coupling mechanism etc.Said signal display monitor central monitoring system 17 is oscillographs, or frequency meter etc.
The structure of aforesaid semiconductor laser measurer of shock of the present invention, as shown in Figure 1.Its course of work is to utilize the driving of exciting light source 1 through power of alterating and direct current 20, the light beam of launching the full strength modulation is by exciting arm optical fiber 2, enter optical fiber wave multiplexer 6 successively, close glistening light of waves fibre 7, sonet multiplexer 8 and interference optical fiber 9 are aimed at sample 12 irradiation through fibre-optical probe 11, make it to produce vibration; Meanwhile the vibration measuring light source 4 emission equal strength light beams that drive of direct supply 5 enter through vibration measuring arm optical fiber 3 and incide sample 12 surfaces with above-mentioned same light path and partial reflections turn back to fibre-optical probe 11, in interference optical fiber 9, produce interference with the light that directly returns from fibre-optical probe 11 top end face reflections, interference light signal is sent on the sensitive surface of photodetector 18 through sonet multiplexer 8 and last output optical fibre 19, be converted to the interference electric signal by photodetector 18, carry out data processing or, provide vibration frequency and Oscillation Amplitude through A/D modular converter 15 input computing machines 16 through signal display monitor central monitoring system 17.
If the amplitude of sample 12 is during less than half wavelength, the piezoelectric ceramics (PZT) 13 by band vibratory drive power supply 14 drives fibre-optical probes 11 and produces vibration relatively, and promptly additional on interference signal have sinusoidal modulation signal, so as to measuring atomic little Oscillation Amplitude.
Description of drawings:
Fig. 1 is the structural representation of semiconductor laser measurer of shock of the present invention.
The signal waveforms that Fig. 2 writes down in an embodiment and obtains for the present invention.Curve A is the electrical modulation waveform that AC power 20 drives 1 emission of exciting light source; Curve B is by the interference signal waveform after photodetector 18 opto-electronic conversion.
Advantage of the present invention:
1. the present invention's said structure as shown in Figure 1, exciting laser beam and vibration measuring laser beam are by optical fiber, optical fiber Two combine into one relays at same optical fiber for wave multiplexer 6, finishes excitation and vibration testing, realize integrated, contactless, Multi-functional, applied widely instrument.
2. the present invention adopts interference optical fiber 9, and fibre-optical probe 11 and sonet multiplexer 8 are born transmission and the interference of light, Be not subjected to the interference of electricity and the impact of external environment, so the good operating stability of instrument, and can implement remote measurement.
3. the fibre-optical probe among the present invention 11 places on the piezoelectric ceramics 13 with vibratory drive power supply 14, has The sinusoidal phase modulation function, so the certainty of measurement of Oscillation Amplitude can be up to nanometer scale.
4. the present invention is owing to adopt semiconductor laser, and optical fiber and fiber coupler have compact conformation, and firmly, volume is little, and is in light weight, and miniaturization is easy to carry, and is easy and simple to handle, uses flexible characteristic.
Embodiment 1:
Structure as shown in Figure 1.Exciting light source 1 and vibration measuring light source 4 all adopt semiconductor laser, and it comprises laser diode, PD light monitoring, have FC (ST, SC)/tail optical fiber of PC joint.Sample 12 is silicon micro mechanic resonators, is cantilever beam structure.Signal display monitor central monitoring system 17 adopts oscillograph.Obtain the result as shown in Figure 2 by computing machine 16 or signal display monitor central monitoring system 17.Among Fig. 2, curve A is for driving the electrical modulation waveform of exciting light source 1, curve B is the waveform that detects the silicon micro mechanic resonator vibration, the vibration frequency of the silicon micro mechanic resonator that records is 3.333KHz, in full accord with the driving modulating frequency of exciting light source 1, and also proved this point by two curves shown in Fig. 2.Recording vibration amplitude is 131nm.This has proved absolutely above-mentioned advantage of the present invention.
Claims (4)
1. semiconductor laser measurer of shock comprises:
＜1〉is built-in with the exciting light source (1) of band power of alterating and direct current (20) and the vibration measuring light source (4) of band direct supply (5) at casing (10);
＜2〉place the output terminal of the photodetector (18) in the casing (10) to be connected to place the outer signal display monitor central monitoring system (17) of casing (10) and link to each other with computing machine (16) by A/D modular converter (15);
It is characterized in that:
＜3〉output beam of exciting light source (1) is by the first input end (O of exciting arm optical fiber (2) with optical fiber wave multiplexer (6)
1) link to each other, the output beam of vibration measuring light source (4) is through the second input end (O of vibration measuring arm optical fiber (3) with optical fiber wave multiplexer (6)
2) link to each other;
＜4〉output terminal (O of optical fiber wave multiplexer (6)
3) input end (O of ECDC glistening light of waves fibre (7) and sonet multiplexer (8)
4) link to each other the first output terminal (O of sonet multiplexer (8)
5) connect the interference optical fiber (9) that front end has fibre-optical probe (11);
＜5〉fibre-optical probe (11) places on the piezoelectric ceramics (13) of band vibratory drive power supply (14), and the top end face of fibre-optical probe (11) is aimed at sample (12);
＜6〉the second output terminal (O of sonet multiplexer (8)
6) light beam that will produce interference through last output optical fibre (19) interference optical fiber (9) in is sent on the sensitive surface of photodetector (18).
2. semiconductor laser measurer of shock according to claim 1 is characterized in that said exciting light source (1) and vibration measuring light source (4) are semiconductor lasers, or other solid state laser, or gas laser.
3. semiconductor laser measurer of shock according to claim 1 is characterized in that said optical fiber wave multiplexer (6) and sonet multiplexer (8) are fiber couplers, or the semiconductor coupling mechanism.
4. semiconductor laser measurer of shock according to claim 1 is characterized in that said signal display monitor central monitoring system (17) is an oscillograph, or frequency meter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN99124197A CN1110692C (en) | 1999-12-02 | 1999-12-02 | Semiconductor laser vibration excitation vibration measurer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN99124197A CN1110692C (en) | 1999-12-02 | 1999-12-02 | Semiconductor laser vibration excitation vibration measurer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1255630A CN1255630A (en) | 2000-06-07 |
| CN1110692C true CN1110692C (en) | 2003-06-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN99124197A Expired - Fee Related CN1110692C (en) | 1999-12-02 | 1999-12-02 | Semiconductor laser vibration excitation vibration measurer |
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| CN (1) | CN1110692C (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1948949B (en) * | 2006-11-10 | 2010-07-07 | 中国科学院上海光学精密机械研究所 | Single light source vibration excitation vibration meter based on sine phase modulation |
| CN100547355C (en) * | 2007-11-14 | 2009-10-07 | 中国科学院上海光学精密机械研究所 | Single light source vibration exciting and measuring resonance sensor |
| CN101644880B (en) * | 2009-09-09 | 2011-04-27 | 中国科学技术大学 | Laser light projection display system and method thereof |
| CN102169012B (en) * | 2011-01-11 | 2014-04-09 | 中国科学院上海光学精密机械研究所 | Method for improving vibration measurement precision of semiconductor laser sine phase modulation interferometer |
| CN102155986B (en) * | 2011-03-07 | 2012-05-23 | 中国航空工业集团公司北京长城计量测试技术研究所 | Optical frequency metering and testing device for laser vibration measurer |
| CN209910815U (en) * | 2018-12-25 | 2020-01-07 | 茂莱（南京）仪器有限公司 | Laser interference low frequency vibration measurer |
-
1999
- 1999-12-02 CN CN99124197A patent/CN1110692C/en not_active Expired - Fee Related
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| CN1255630A (en) | 2000-06-07 |
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According to article 9 of the patent law and article 13 of the detailed rules for the implementation of the patent law: 99124197.5 of the invention patents in the current issue of authorization announcement, and at the same time corresponding to the 99251921.7 utility model patent to be given up, and in the 19 volume of the 23 issue of the new type of communique on the patent right to abandon the announcement. |
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