CN1892828A - Adjustable magnetic recording medium and manufacturing method - Google Patents
Adjustable magnetic recording medium and manufacturing method Download PDFInfo
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- CN1892828A CN1892828A CN 200510081869 CN200510081869A CN1892828A CN 1892828 A CN1892828 A CN 1892828A CN 200510081869 CN200510081869 CN 200510081869 CN 200510081869 A CN200510081869 A CN 200510081869A CN 1892828 A CN1892828 A CN 1892828A
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Abstract
The present invention provides adjustable type magnetic recording media and preparing method. Said provided magnetic recording media contains a substrate and single-layer sublayer/buffer layer/recording membranous layer structure, utilizing proper sublayer configured between substrate and said buffer layer, then capable of adjusting said magnetic recording media magnetism and magnetic layer crystallizing preferred orientation. Said invented method can adjust magnetic recording media preferred orientation, preferred direction of magnetization, coercivity, magnetic textural anisotropy hysteresis curve angle type ratio etc property, to make magnetic recording media having vertical or parallel membrane layer surficial magnetism.
Description
[technical field]
The present invention system is about a kind of recording medium and preparation method thereof, particularly about a kind of magnetic recording medium and preparation method thereof.
[prior art]
Magnetic recording medium system utilizes the hysteresis characteristic of recording medium to store and the technology of playing data for broadcasting, is that numerical digit data " 1 " and " 0 " are represented in the variation of the direction of magnetization by recording medium, and then is stored.
The recording mode of magnetic recording medium is divided into two kinds of horizontal recording mode and perpendicular recordings according to the magnetic moment direction of its record bit, then commonly used in the horizontal recording mode at present.In the horizontal recording mode, the magnetic moment of record bit is to lie low on face, when still attempting dwindling the size of record bit if will promote recording density, can cause the increase of degaussing field, and produce the unsettled phenomenon of magnetic moment; At this moment, the data that write can can't reach the demand of superelevation recording density because of the relatively poor evanescence of its thermal stability.
Be meant then that as for perpendicular recording the magnetic moment system of record bit in the recording medium is perpendicular to face, and when the record bit dwindles, the record particle can form the structure of column, so its degaussing field is less, and can overcome the unsettled situation of magnetic moment that is caused when particle dwindles, complete reservation recorded data.
In order to reach 1Tb/in
2The target of above high record density, magnetic recording medium must have the characteristic of high coercive force (HC), high saturation amount (MS), the high incorgruous constant of magnetocrystalline (KU), little crystallite dimension (grain size) and good corrosion resistivity.When crystallite dimension is contracted to 10 how during rice, because the perpendicular recording medium more can overcome the problem of super paramagnetic than horizontal recording medium, therefore, compared to the horizontal recording mode, perpendicular recording more can effectively promote the recording density of magnetic recording medium.But because the difficulty on this art, be difficult to overcome as problems such as distances between design, magnetic head and the magnetic disc of magnetic head and pole, making that the magnetic recording medium of perpendicular recording always can't commercialization, is main hard disc recording mode in the horizontal recording mode still at present therefore.
In order to overcome the problem that magnetic recording medium can't be applied in horizontal recording and perpendicular recording simultaneously, the applicant is through concentrated test and research, and a spirit of working with perseverance, and proposes " adjustable magnetic recording medium and preparation method thereof "; It lies between substrate and recording layer in the magnetic recording medium, disposes suitable bottom and cushion, utilizes the variation in thickness of bottom to adjust the magnetic property of this magnetic recording medium and the crystallization preferential direction of magnetic recording layer; Utilize the inventive method, the preferential direction, direction of easy axis, coercive force, magnetic anomaly tropism of adjusting prepared magnetic recording medium by the variation of underlayer thickness and the angle type of B-H loop such as compare at character, make magnetic recording medium possess the magnetic property of perpendicular or parallel film surface.
[summary of the invention]
First conception of the present invention is to provide a kind of magnetic recording medium, this magnetic recording medium comprises a substrate, and on this substrate, be coated with a bottom, a cushion and a recording layer in regular turn, wherein write down series of strata and formed, can adjust the magnetic parameter of this magnetic recording medium by changing underlayer thickness by magnetic material.
According to above-mentioned conception, wherein this bottom system be selected from the group that constituted by one first metal, one first alloy, one first compound, one first oxide and one first slaine etc. one of them.
According to above-mentioned conception, wherein this first metal system be selected from the group that constituted by iron (Fe), cobalt (Co), nickel (Ni), platinum (Pt), silver (Ag), gold (Au), chromium (Cr), palladium (Pd), copper (Cu), iron (Fe), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn), ruthenium (Ru) and molybdenum (Mo) etc. one of them.
According to above-mentioned conception, wherein this first alloy system be selected from by first metal-non-metal alloy, one first metal-metal alloy, one first metal-semiconductor alloy and group that first metal-the semimetal alloy is constituted one of them.
According to above-mentioned conception, this first metal-metal alloy system, one chromium-base alloy (Cr-base alloy) wherein.
According to above-mentioned conception, wherein this chromium-base alloy (Cr-base alloy) be selected from the group that constituted by chromium ruthenium (CrRu) alloy, a chrome molybdenum (CrMo) alloy, chromium tungsten (CrW) alloy and chromium tantalum (CrTa) alloy etc. one of them.
According to above-mentioned conception, wherein this first oxide based magnesium oxide (MgO) and nickel monoxide (NiO) one of them.
According to above-mentioned conception, wherein this first slaine is monochlor(in)ate sodium (NaCl).
According to above-mentioned conception, wherein this thickness of this bottom is 0.5 ~ 200 rice how.
According to above-mentioned conception, wherein this magnetic parameter system is selected from the group that is made of than (Hysteresis Loop Squareness) the preferential direction (Preferred Orientation) of this magnetic recording medium, coercive force (Coercivity), magnetic anomaly tropism (Anisotropy) and B-H loop angle type.
According to above-mentioned conception, wherein these buffering series of strata be selected from the group that constituted by one second metal, one second alloy, one second compound, one second oxide and one second slaine etc. one of them.
According to above-mentioned conception, wherein this second metal system be selected from the group that constituted by iron (Fe), cobalt (Co), nickel (Ni), platinum (Pt), silver (Ag), gold (Au), chromium (Cr), palladium (Pd), copper (Cu), iron (Fe), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn), ruthenium (Ru) and molybdenum (Mo) etc. one of them.
According to above-mentioned conception, wherein this second alloy system be selected from by second metal-non-metal alloy, one second metal-metal alloy, one second metal-semiconductor alloy and group that second metal-the semimetal alloy is constituted one of them.
According to above-mentioned conception, this second metal-metal alloy system, one chromium-base alloy (Cr-base alloy) wherein.
According to above-mentioned conception, wherein this chromium-base alloy (Cr-base alloy) be selected from the group that constituted by chromium ruthenium (CrRu) alloy, a chrome molybdenum (CrMo) alloy, chromium tungsten (CrW) alloy and chromium tantalum (CrTa) alloy etc. one of them.
According to above-mentioned conception, wherein this second oxide based magnesium oxide (MgO) and nickel monoxide (NiO) one of them.
According to above-mentioned conception, wherein this second slaine is monochlor(in)ate sodium (NaCl).
According to above-mentioned conception, wherein the thickness of this cushion is 0.2 ~ 80 rice how.
According to above-mentioned conception, wherein these magnetic recording series of strata are made up of one of one first material and one second material alloy material.
According to above-mentioned conception, wherein this alloy material is a docrystalline alloy material or a monocrystalline alloy material.
According to above-mentioned conception, wherein this first material be chosen from Fe (Fe) with cobalt (Co) one of them.
According to above-mentioned conception, wherein this second material system be selected from platinum (Pt) and palladium (Pd) one of them.
According to above-mentioned conception, wherein the atom proportion of composing of this first material is 30% ~ 70%.
According to above-mentioned conception, wherein the atom proportion of composing of this first material is 40% ~ 60%.
According to above-mentioned conception, wherein this alloy material more comprises at least one the 3rd material.
According to above-mentioned conception, wherein the 3rd material system be selected from the group that constituted by silver (Ag), gold (Au), chromium (Cr), copper (Cu), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn), molybdenum (Mo), zirconium (Zr), vanadium (V), carbon (C), boron (B), zinc (Zn), ruthenium (Ru), phosphorus (P) and nitrogen (N) etc. one of them.
According to above-mentioned conception, wherein the thickness of this recording layer is 3 ~ 100 rice how.
According to above-mentioned conception, wherein the saturated magnetization amount of this recording layer is 100 to 1500emu/cm
3
Second conception of the present invention is to provide a kind of adjustable magnetic recording medium, and this adjustable magnetic recording medium comprises a substrate, and is coated with an adjustment layer, a cushion and a recording layer on this substrate in regular turn; Wherein these adjustment series of strata are in order to adjust the magnetic recording character of this magnetic recording medium.
According to above-mentioned conception, wherein these adjustment series of strata be selected from the group that constituted by a metal, an alloy, a compound, monoxide and one first slaine etc. one of them.
According to above-mentioned conception, this metal group that to be chosen from Fe (Fe), cobalt (Co), nickel (Ni), platinum (Pt), silver (Ag), gold (Au), chromium (Cr), palladium (Pd), copper (Cu), iron (Fe), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn), ruthenium (Ru) constituted with molybdenum (Mo) etc. one of them.
According to above-mentioned conception, wherein this alloy system be selected from by one metal-non-metal alloy, a metal-metal alloy, a metal-semiconductor alloy and group that one metal-the semimetal alloy is constituted one of them.
According to above-mentioned conception, this metal-metal alloy alloy system one chromium-base alloy (Cr-base alloy) wherein.
According to above-mentioned conception, wherein this chromium-base alloy (Cr-base alloy) be selected from the group that constituted by chromium ruthenium (CrRu) alloy, a chrome molybdenum (CrMo) alloy, chromium tungsten (CrW) alloy and chromium tantalum (CrTa) alloy etc. one of them.
According to above-mentioned conception, wherein this oxide based magnesium oxide (MgO) and nickel monoxide (NiO) one of them.
According to above-mentioned conception, wherein this slaine is monochlor(in)ate sodium (NaCl).
According to above-mentioned conception, wherein the thickness of this adjustment layer is 0.5 ~ 200 rice how.
According to above-mentioned conception, wherein this magnetic recording character system is selected from the group that is made of than (Hysteresis Loop Squareness) the preferential direction (Preferred Orientation) of magnetic recording medium, coercive force (Coercivity), magnetic anomaly tropism (Anisotropy) and B-H loop angle type.
According to above-mentioned conception, wherein this coercive force is 1000 ~ 25,000Oe.
According to above-mentioned conception, wherein this B-H loop angle type ratio is 0.5 ~ 1.
The 3rd conception of the present invention is to provide a kind of method that is used to make adjustable magnetic recording medium, and this method comprises the following step: a substrate (a) is provided; (b) on this substrate, form one deck and adjust layer, wherein should adjust layer tool specific thicknesses scope, to adjust the magnetic recording character of magnetic recording medium; (c) adjust layer in this and go up formation one cushion; And (d) on this cushion, form a recording layer.
According to above-mentioned conception, it is to utilize sputtering way and form this adjustment layer in first temperature in step (b), and wherein this first temperature is 20 ~ 800 ℃.
According to above-mentioned conception, wherein this first temperature is preferably 300 ~ 350 ℃.
According to above-mentioned conception, it is to utilize sputtering way and form this cushion in second temperature in step (c), and wherein this second temperature is 25 ~ 800 ℃.
According to above-mentioned conception, wherein this second temperature is preferably 300 ~ 350 ℃.
According to above-mentioned conception, it is to utilize sputtering way and form this magnetic recording layer in the 3rd temperature in step (d), and wherein the 3rd temperature is 100 ~ 800 ℃.
According to above-mentioned conception, wherein the 3rd temperature is preferably 250 ~ 450 ℃.
This case must be passed through following graphic and detailed description, in order to do being made the reader more understand in depth:
[description of drawings]
Fig. 1 is the making process flow diagram of adjustable magnetic recording medium of the present invention;
Fig. 2 system utilizes the schematic cross-section of the prepared adjustable magnetic recording medium of the inventive method;
Fig. 3 (a) is to be respectively the hysteresis graph of the embodiment of the invention () to the magnetic recording medium of embodiment (eight) to Fig. 3 (h);
Fig. 4 system according to embodiments of the invention () to embodiment (eight), in order to illustrate that chromium underlayer thickness and its angle type are than (S in this magnetic recording medium
∥, S
) relation and this chromium underlayer thickness and its coercive force (H
C ) relation
Fig. 5 is an X-ray diffraction collection of illustrative plates, in order to the microstructure of the FePt/Pt/Cr rete sequence in the magnetic recording medium of explanation the above embodiment of the present invention and the relation of chromium underlayer thickness; And
Fig. 6 is an atomic arrangement synoptic diagram between a FePt/Pt/Cr rete sequence interface, in order to the of heap of stone brilliant relation between the FePt/Pt/Cr rete in the magnetic recording medium of the present invention to be described.
[embodiment]
The method for making of adjustable magnetic recording medium of the present invention at first is described.
See also Fig. 1, it is the making flow process of adjustable magnetic recording medium of the present invention.At first, prepare a substrate, shown in step 11; On this substrate, form bottom (promptly adjusting layer), shown in step 12 with a specific thicknesses scope; Then adjust and form a cushion on the layer, shown in step 13 at this; At last, on this cushion, form a recording layer, shown in step 14; Promptly finish the method for making of adjustable magnetic recording medium of the present invention.
In the present invention, be the water-cooled high vacuum sputter system capable that utilization designs voluntarily, be coated with this adjustment layer and this cushion with sputtering way respectively at first temperature and second temperature, wherein this first temperature is 20 ~ 800 ℃, and this second temperature is 20 ~ 800 ℃.In addition, utilize sputtering way equally and form this recording layer in the 3rd temperature, wherein the 3rd temperature is 100 ~ 800 ℃.
The present invention system utilizes the adjustment layer of the bottom of specific thicknesses as this adjustable magnetic recording medium, with the crystallization preferential direction (PreferredOrientation) of adjusting this magnetic recording medium, coercive force (Coercivity), magnetic anomaly tropism (Anisotropy) and B-H loop angle type than character such as (Hysteresis Loop Squareness).This bottom can be constituted with nickel oxide oxides such as (NiO) or by sodium chloride by platinum (Pt), silver (Ag), gold (Au), chromium (Cr), palladium (Pd), copper (Cu), iron (Fe), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn) or molybdenum (Mo) metal of etc.ing or by magnesium oxide (MgO), and how meter its thickness be 0.5 ~ 200.
The buffering series of strata of this adjustable magnetic recording medium are made of platinum (Pt), silver (Ag), gold (Au), chromium (Cr), palladium (Pd), copper (Cu), iron (Fe), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn) or molybdenum (Mo) metal of etc.ing, and how meter its thickness be 0.2 ~ 80.
Polycrystalline alloy material or single crystal alloy material that employed in the present invention recording layer is made up of one first material and one second material at least; Wherein this first material be iron (Fe) or cobalt (Co) one of them, its shared atom proportion of composing is 30% ~ 70%, and is preferred range with 40% ~ 60%; And second material be platinum (Pt) or palladium (Pd) one of them.In addition, this recording layer also can comprise one the 3rd material, for example: silver (Ag), gold (Au), chromium (Cr), copper (Cu), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn), molybdenum (Mo), zirconium (Zr), vanadium (V), carbon (C), boron (B), zinc (Zn), phosphorus (P) or nitrogen (N) etc.The preferred thickness of this recording layer is 3 ~ 100 rice how, and its saturated magnetization amount is 100 to 1500emu/cm
3
Below promptly further specify details of the present invention with an example; In an embodiment, be with silicon substrate and 7059 serial corning glass substrates baseplate material as adjustable magnetic recording medium of the present invention, with chromium (Cr) layer as bottom (adjusting layer) material; With platinum (Pt) layer as cushioning layer material, and with iron platinum (FePt) layer as recording layer material.
At first, with acetone and anhydrous alcohol cleaning base plate, the substrate through cleaning up begins to such an extent that put into the vacuum chamber of sputter system capable; Be attached to aqueous vapor on the substrate, oxygen, nitrogen etc. when the atmosphere in order effectively to remove exposure of substrates, carry out thin-film-coating before, utilize radio frequency (RF) mode that substrate surface is carried out the cleaning of pre-sputter, the pre-sputter step of substrate is as follows:
(1) substrate is placed the attached cavity of sputter system capable, and forvacuum to 10
-7Below the Torr;
(2) feed argon gas (Ar) in this attached cavity, keeping argon pressure is 10mTorr;
(3) open r-f generator, the adjustment output power is 20W, utilizes argon gas that substrate surface is cleaned;
(4) substrate that cleaning is finished is sent in the sputter system capable vacuum cavity; And
(5) continue vacuum cavity was vacuumized about 30 ~ 60 minutes, the pressure of waiting is low to moderate 5 * 10
-9Can begin to be coated with film behind the Torr.
Then, just can be in being coated with required rete sequence on the clean base plate, it is as follows that it is coated with step:
(1) heated substrates to 350 ℃, and held temperature 20 minutes, make basal plate heated even;
(2) import argon gas, keeping argon pressure is 5mTorr;
(3) wait argon pressure stable after, (0 ~ 110nm) chromium underlayer is on this substrate, and its sputter condition is that DC power 100W, bias voltage-200V, microscope carrier rotating speed are 10rpm to utilize chromium (Cr) target to be coated with different-thickness;
(4) close the shield and the DC power of chromium target, and adjust argon pressure to 10mTorr, keeping substrate temperature is 350 ℃;
(5) wait argon pressure stable after, utilize platinum (Pt) target be coated with one thick 2 how the platinum cushion of rice on this chromium underlayer;
(6) close the shield and the DC power of platinum target, adjust the temperature to 450 ℃ of substrate, and to keep argon pressure be 10mTorr;
(7) wait argon pressure stable after, plating iron platinum (FePt) is layer on this platinum cushion altogether to utilize iron (Fe) target and platinum (Pt) target, wherein the thickness of this iron platinum layer is 20nm, promptly forms adjustable magnetic recording medium of the present invention;
(8) finish be coated with after, close the shield and the DC power of iron target and platinum target, under argon pressure 10mTorr, close the quartz heat lamp of sputter system capable, the beginning was taken out prepared adjustable magnetic recording medium when the film of waiting was cooled to below 100 ℃ in vacuum cavity, generation high-temperature oxydation phenomenon when avoiding contact with outside air.
See also Fig. 2, it is the schematic cross-section that utilizes the prepared adjustable magnetic recording medium of the inventive method; This adjustable magnetic recording medium comprises a substrate 20, it can be a silicon substrate or one 7059 serial healthy and free from worry substrates, comprises a bottom (underlayer) 21, a cushion (buffer layer) 22 and one recording layer (recording layer) 23 on this substrate 20 in regular turn; In this embodiment, this bottom 21 is a chromium (Cr) layer, and this cushion 22 is a platinum (Pt) layer, and this recording layer 23 is the magnetic recording layer that is made of ferroplatinum (FePt).
Embodiment (one)
Making step according to adjustable magnetic recording medium of the present invention, make the magnetic recording medium that recording layer/cushion/bottom is respectively FePt/Pt/Cr, wherein the thickness of recording layer (FePt layer) is 20nm, and the thickness of cushion (Pt layer) is 2nm, and the thickness of bottom (Cr layer) then is 0nm; The B-H loop that this magnetic recording medium presented is shown in Fig. 3 (a).
Embodiment (two)
Making step according to adjustable magnetic recording medium of the present invention, make the magnetic recording medium that recording layer/cushion/bottom is respectively FePt/Pt/Cr, wherein the thickness of recording layer (FePt layer) is 20nm, and the thickness of cushion (Pt layer) is 2nm, and the thickness of bottom (Cr layer) then is 10nm; The B-H loop that this magnetic recording medium presented is shown in Fig. 3 (b).
Embodiment (three)
Making step according to adjustable magnetic recording medium of the present invention, make the magnetic recording medium that recording layer/cushion/bottom is respectively FePt/Pt/Cr, wherein the thickness of recording layer (FePt layer) is 20nm, and the thickness of cushion (Pt layer) is 2nm, and the thickness of bottom (Cr layer) then is 20nm; The B-H loop that this magnetic recording medium presented is shown in Fig. 3 (c).
Embodiment (four)
Making step according to adjustable magnetic recording medium of the present invention, make the magnetic recording medium that recording layer/cushion/bottom is respectively FePt/Pt/Cr, wherein the thickness of recording layer (FePt layer) is 20nm, and the thickness of cushion (Pt layer) is 2nm, and the thickness of bottom (Cr layer) then is 30nm; The B-H loop that this magnetic recording medium presented is shown in Fig. 3 (d).
Embodiment (five)
Making step according to adjustable magnetic recording medium of the present invention, make the magnetic recording medium that recording layer/cushion/bottom is respectively FePt/Pt/Cr, wherein the thickness of recording layer (FePt layer) is 20nm, and the thickness of cushion (Pt layer) is 2nm, and the thickness of bottom (Cr layer) then is 50nm; The B-H loop that this magnetic recording medium presented is shown in Fig. 3 (e).
Embodiment (six)
Making step according to adjustable magnetic recording medium of the present invention, make the magnetic recording medium that recording layer/cushion/bottom is respectively FePt/Pt/Cr, wherein the thickness of recording layer (FePt layer) is 20nm, and the thickness of cushion (Pt layer) is 2nm, and the thickness of bottom (Cr layer) then is 70nm; The B-H loop that this magnetic recording medium presented is shown in Fig. 3 (f).
Embodiment (seven)
Making step according to adjustable magnetic recording medium of the present invention, make the magnetic recording medium that recording layer/cushion/bottom is respectively FePt/Pt/Cr, wherein the thickness of recording layer (FePt layer) is 20nm, and the thickness of cushion (Pt layer) is 2nm, and the thickness of bottom (Cr layer) then is 90nm; The B-H loop that this magnetic recording medium presented is shown in Fig. 3 (g).
Embodiment (eight)
Making step according to adjustable magnetic recording medium of the present invention, make the magnetic recording medium that recording layer/cushion/bottom is respectively FePt/Pt/Cr, wherein the thickness of recording layer (FePt layer) is 20nm, and the thickness of cushion (Pt layer) is 2nm, and the thickness of bottom (Cr layer) then is 110nm; The B-H loop that this magnetic recording medium presented is shown in Fig. 3 (h).
See also Fig. 3 (a) to Fig. 3 (h), they are respectively the B-H loop graph of a relation of the above-mentioned preferred embodiment of the present invention () to the adjustable magnetic recording medium of (eight), wherein the amount of magnetization M (emu/cm of longitudinal axis system this recording medium of expression
3), the expression of transverse axis system puts on the externally-applied magnetic field size H (kOe) of this magnetic recording medium; In each figure, symbol-■-represent the magnetic property of horizontal direction (∥), and symbol-zero-the represent magnetic property of vertical direction ().As seen from the figure, when chromium underlayer thickness was lower than 20nm, the horizontal angle type of this magnetic recording medium was than (S
∥) greater than its vertical angle type than (S
), so this magnetic recording medium presents the magnetic property of horizontal direction, as Fig. 3 (a) with shown in Fig. 3 (b); When chromium underlayer thickness reaches 20nm when above, the horizontal angle type of this magnetic recording medium is than (S
∥) then less than its vertical angle type than (S
), this, this magnetic recording medium was the magnetic property of vertical face direction expression this moment, and along with the increase of chromium underlayer thickness, the vertical angle type of this magnetic recording medium is than (S
) more and more near 1, as Fig. 3 (c) to shown in Fig. 3 (h).
See also Fig. 4, it is for according to the abovementioned embodiments of the present invention, in order to illustrate that chromium underlayer thickness and its angle type are than (S in this adjustable magnetic recording medium
∥, S
) relation and the coercive force (H of the perpendicular direction of this chromium underlayer thickness
C ) relation, the thickness of transverse axis system expression chromium underlayer wherein, the both sides longitudinal axis represents respectively that then the angle type of this magnetic recording medium is than (Squeness is S=Mr/Ms) with coercive force (Coercivity, H
C) size; In Fig. 4, the coercive force (H of symbol-△-this adjustable magnetic recording medium of expression
C ), symbol-■-with symbol-zero-represent respectively that then the horizontal angle type of this adjustable magnetic recording medium is than (S
∥) with the vertical angle type than (S
).
As shown in Figure 4, when the chromium underlayer thickness in this adjustable magnetic recording medium was 10nm, this magnetic recording medium can show horizontal magnetic property, and its horizontal angle type is than (S
∥) be about 0.9; And when chromium underlayer thickness reached 20nm, its vertical angle type was than (S
) can reach more than 0.9, this moment this magnetic recording medium be the magnetic property of vertical direction, back increase along with chromium underlayer thickness, the horizontal angle type of this magnetic recording medium is than (S
∥) can reduce gradually, wherein, when chromium underlayer thickness reached 110nm, the horizontal angle type of this magnetic recording medium was than (S
∥) only be about 0.15, show that the horizontal magnetic anomaly tropism of this magnetic recording medium can be suppressed along with the increase of underlayer thickness.
In addition, also can declare by Fig. 4 and know the vertical face coercive force (H of this magnetic recording medium
C ) can change with the chromium underlayer variation in thickness; When chromium underlayer thickness was 70nm, this magnetic recording medium had the highest vertical face coercive force (H
C ), its value is about 3600Oe.When chromium underlayer thickness during less than 70nm, vertical face coercive force can increase with the increase of chromium underlayer thickness; And when chromium underlayer thickness during greater than 70nm, vertical face coercive force size then increases with chromium underlayer thickness and reduces, wherein, when chromium underlayer thickness reaches 110nm, its vertical face coercive force (H
C ) be lower than 2000Oe.
See also Fig. 5, it is an X-ray diffraction collection of illustrative plates, in order to the microstructure of the FePt/Pt/Cr film in the magnetic recording medium of explanation the above embodiment of the present invention and the relation of chromium underlayer thickness.By among the figure as can be known, when not adding chromium underlayer, rarely seen L1 in the collection of illustrative plates
0The diffraction peak of FePt (111) phase, promptly the FePt layer is of heap of stone brilliant and form along the Pt (111) of below layer, thereby presents the character of monocrystalline FePt (111), shown in collection of illustrative plates A among Fig. 5.Yet when adding chromium underlayer, L1
0The diffraction peak of FePt (111) just disappears at once, and changes other L1 into
0The diffraction peak of FePt phase; Shown in collection of illustrative plates B among Fig. 5, when chromium underlayer thickness is 10nm, little or nothing L1
0FePt (001) forms, but its L1
0FePt (200) is but very obvious, and this represents L1
0The easy magnetizing axis of FePt phase [001] is to lie low on face, and this moment, the FePt/Pt/Cr rete can show the magnetic property of horizontal direction; When chromium underlayer thickness is 20nm, shown in collection of illustrative plates C among Fig. 5, this moment L1
0The structure of FePt (200) disappears, and transfers (002) orientation of high angle to, has also strengthened the diffraction peak intensity of (001), L1 simultaneously
0The easy magnetizing axis [001] in FePt (001) orientation is perpendicular to face, thereby this FePt/Pt/Cr rete has the magnetic anomaly tropism perpendicular to face.Along with the increase gradually of chromium underlayer thickness, the crystallinity of chromium (200) can be become better and better, also thereby strengthen L1
0The intensity of FePt (001) is shown in collection of illustrative plates D, E and F among Fig. 5; At this moment, this FePt/Pt/Cr rete shows vertical magnetic anomaly tropism.
See also Fig. 6, it is the of heap of stone brilliant synoptic diagram of FePt/Pt/Cr film, in order to the origin of the vertical magnetic anomaly tropism of FePt/Pt/Cr film in the magnetic recording medium of explanation the above embodiment of the present invention.Figure (a) is bcc Cr (a 002) face, its grating constant is 2.88 , and diagonal [110] length of Cr (002) face is 4.08 , figure (b) is Pt (a 001) face, and its grating constant is 3.92 , is FePt (001) face and scheme (c), its grating constant is 3.86 , the vertical view of its atom stack manner shown in figure (d), the film layer structure synoptic diagram shown in figure (e), and scheme (b) and (c) direction of arrow indication of top be that [100] of Cr, Pt and FePt lattice reach [110] direction.As shown in the above description, in magnetic recording medium of the present invention, because the degree that do not match (misfit) about 4.1% between diagonal [110] length of (002) face of chromium underlayer and (001) [100] of platinum layer, therefore platinum layer can become to grow up to the orientation of (001) along (002) face of chromium underlayer, and the degree that do not match (misfit) between (001) [100] of (001) [100] of platinum layer and iron platinum layer is about 1.6%, therefore the iron platinum layer can become to grow up to the orientation of (001) along (001) face of platinum layer, magnetic recording medium compared to known iron platinum group recording layer, adjustable magnetic recording medium of the present invention utilizes the chromium underlayer of suitable thickness to adjust layer as one, formed above it iron platinum layer is grown up along (002) face of chromium underlayer, and become vertical anisotropy recording layer with (001) preferential direction.In addition, if the thickness of chromium underlayer is less than 20nm,, therefore can make the platinum cushion that is sputtered on this bottom lose the orientation of (001) face because the crystal orientation of Cr (002) face is not obvious, arrange so that the easy magnetizing axis of iron platinum layer is inclined to the direction of parallel face, and obtain horizontal magnetic anomaly tropism.Therefore, just the direction of easy axis that can adjust this magnetic recording medium by the change of chromium underlayer thickness is perpendicular or parallel face direction, and (100 to 1500emu/cm for saturated magnetization amount size
3), the coercive force size (1000 ~ 25,000Oe), the angle type of magnetic anomaly tropism and B-H loop is than magnetic properties such as (0.5 ~ 1), this be at present known magnetic recording medium the peculiar advantage that can't reach.
Comprehensive the above, this case is a novelty, progress and tool industrial applicability and emulative invention in fact, deeply the tool dynamogenetic value.
The present invention must be thought and is to modify as all by the personage Ren Shi craftsman who is familiar with this skill, does not so take off as Protector that attached application range is desired.
Claims (11)
1. magnetic recording medium comprises:
One substrate;
One bottom, it is positioned on this substrate, adjusts the magnetic parameter of this magnetic recording medium by the thickness of this bottom;
One cushion, it is positioned on this bottom; And
One recording layer, it is positioned on this cushion, and these record series of strata are made up of a magnetic material.
2. according to the magnetic recording medium of claim 1, it is characterized in that, this bottom system be selected from the group that constituted by one first metal, one first alloy, one first compound, one first oxide and one first slaine etc. one of them, wherein:
This first metal system be selected from the group that constituted by iron (Fe), cobalt (Co), nickel (Ni), platinum (Pt), silver (Ag), gold (Au), chromium (Cr), palladium (Pd), copper (Cu), iron (Fe), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn), ruthenium (Ru) and molybdenum (Mo) etc. one of them;
This first alloy system be selected from by first metal-non-metal alloy, one first metal-metal alloy, one first metal-semiconductor alloy and group that first metal-the semimetal alloy is constituted one of them;
This first metal-metal alloy system, one chromium-base alloy (Cr-base alloy);
This chromium-base alloy (Cr-base alloy) be selected from the group that constituted by chromium ruthenium (CrRu) alloy, a chrome molybdenum (CrMo) alloy, chromium tungsten (CrW) alloy and chromium tantalum (CrTa) alloy etc. one of them;
This first oxide based magnesium oxide (MgO) and nickel monoxide (NiO) one of them; And/or this first slaine is monochlor(in)ate sodium (NaCl).
3. according to the magnetic recording medium of claim 1, it is characterized in that,
This thickness of this bottom is 0.5 ~ 200 rice how; And/or
This magnetic parameter system is selected from the group that is made of than (Hysteresis Loop Squareness) the preferential direction (PreferredOrientation) of this magnetic recording medium, coercive force (Coercivity), magnetic anomaly tropism (Anisotropy) and B-H loop angle type.
4. according to the magnetic recording medium of claim 1, it is characterized in that, these buffering series of strata be selected from the group that constituted by one second metal, one second alloy, one second compound, one second oxide and one second slaine etc. one of them, wherein:
This second metal system be selected from the group that constituted by iron (Fe), cobalt (Co), nickel (Ni), platinum (Pt), silver (Ag), gold (Au), chromium (Cr), palladium (Pd), copper (Cu), iron (Fe), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn), ruthenium (Ru) and molybdenum (Mo) etc. one of them;
This second alloy system be selected from by second metal-non-metal alloy, one second metal-metal alloy, one second metal-semiconductor alloy and group that second metal-the semimetal alloy is constituted one of them;
This second metal-metal alloy system, one chromium-base alloy (Cr-base alloy);
This chromium-base alloy (Cr-base alloy) be selected from the group that constituted by chromium ruthenium (CrRu) alloy, a chrome molybdenum (CrMo) alloy, chromium tungsten (CrW) alloy and chromium tantalum (CrTa) alloy etc. one of them;
This second oxide based magnesium oxide (MgO) and nickel monoxide (NiO) one of them; And/or
This second slaine is monochlor(in)ate sodium (NaCl).
5. according to the magnetic recording medium of claim 1, it is characterized in that the thickness of this cushion is 0.2 ~ 80 rice how.
6. according to the magnetic recording medium of claim 1, it is characterized in that these magnetic recording series of strata are by one
One of first material and one second material alloy material is formed, wherein:
This alloy material is a docrystalline alloy material or a monocrystalline alloy material;
This first material be chosen from Fe (Fe) with cobalt (Co) one of them;
This second material system be selected from platinum (Pt) and palladium (Pd) one of them;
The atom proportion of composing of this first material is 30% ~ 70%;
The atom proportion of composing of this first material is 40% ~ 60%;
This alloy material more comprises at least one the 3rd material; And/or
The 3rd material system be selected from the group that constituted by silver (Ag), gold (Au), chromium (Cr), copper (Cu), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn), molybdenum (Mo), zirconium (Zr), vanadium (V), carbon (C), boron (B), zinc (Zn), ruthenium (Ru), phosphorus (P) and nitrogen (N) etc. one of them.
7. according to the magnetic recording medium of claim 1, it is characterized in that,
The thickness of this recording layer is 3 ~ 100 rice how; And/or
The saturated magnetization amount of this recording layer is 100 to 1500emu/cm
3
8. adjustable magnetic recording medium comprises:
One substrate;
One adjusts layer, and it is positioned on this substrate, in order to adjust the magnetic recording character of this recording medium;
One cushion, it is positioned on this adjustment layer; And
One recording layer.
9. adjustable magnetic recording medium according to Claim 8 is characterized in that,
These adjustment series of strata be selected from the group that constituted by a metal, an alloy, a compound, monoxide and one first slaine etc. one of them;
This metal group that to be chosen from Fe (Fe), cobalt (Co), nickel (Ni), platinum (Pt), silver (Ag), gold (Au), chromium (Cr), palladium (Pd), copper (Cu), iron (Fe), tungsten (W), titanium (Ti), tantalum (Ta), niobium (Nb), manganese (Mn), ruthenium (Ru) constituted with molybdenum (Mo) etc. one of them;
This alloy system be selected from by one metal-non-metal alloy, a metal-metal alloy, a metal-semiconductor alloy and group that one metal-the semimetal alloy is constituted one of them;
This metal-metal alloy alloy system one chromium-base alloy (Cr-base alloy);
This chromium-base alloy (Cr-base alloy) be selected from the group that constituted by chromium ruthenium (CrRu) alloy, a chrome molybdenum (CrMo) alloy, chromium tungsten (CrW) alloy and chromium tantalum (CrTa) alloy etc. one of them;
This oxide based magnesium oxide (MgO) and nickel monoxide (NiO) one of them;
This slaine is monochlor(in)ate sodium (NaCl);
This magnetic recording character system is selected from the group that is made of than (Hysteresis Loop Squareness) the preferential direction (PreferredOrientation) of magnetic recording medium, coercive force (Coercivity), magnetic anomaly tropism (Anisotropy) and B-H loop angle type;
This coercive force is 1000 ~ 25,000Oe; And/or
This B-H loop angle type ratio is 0.5 ~ 1.
10. method that is used to make adjustable recording medium, this method comprises the following step:
(a) provide a substrate;
(b) on this substrate, form one and adjust layer, wherein should adjust layer tool one specific thicknesses scope, to adjust one of this adjustable recording medium magnetic recording character;
(c) adjust layer in this and go up formation one cushion; And
(d) on this cushion, form a recording layer.
11. the method according to claim 10 is characterized in that,
In step (b), be to utilize sputtering way and form this adjustment layer in first temperature, wherein this first temperature is 20 ~ 800 ℃;
This first temperature is 300 ~ 350 ℃;
In step (c), be to utilize sputtering way and form this cushion in second temperature, wherein this second temperature is 25 ~ 800 ℃;
This second temperature is 300 ~ 350 ℃;
In step (d), be to utilize sputtering way and form this magnetic recording layer in the 3rd temperature, wherein the 3rd temperature is 100 ~ 800 ℃; And/or
The 3rd temperature is 250 ~ 450 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510081869 CN1892828A (en) | 2005-07-01 | 2005-07-01 | Adjustable magnetic recording medium and manufacturing method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510081869 CN1892828A (en) | 2005-07-01 | 2005-07-01 | Adjustable magnetic recording medium and manufacturing method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102163433A (en) * | 2010-02-23 | 2011-08-24 | 昭和电工株式会社 | Thermally assisted magnetic recording medium and magnetic recording storage |
| CN104103290A (en) * | 2013-04-12 | 2014-10-15 | 昭和电工株式会社 | Magnetic recording medium and magnetic storage apparatus |
| TWI616872B (en) * | 2016-09-09 | 2018-03-01 | 國立中興大學 | Heat assisted magnetic recording medium |
-
2005
- 2005-07-01 CN CN 200510081869 patent/CN1892828A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102163433A (en) * | 2010-02-23 | 2011-08-24 | 昭和电工株式会社 | Thermally assisted magnetic recording medium and magnetic recording storage |
| CN102163433B (en) * | 2010-02-23 | 2013-12-25 | 昭和电工株式会社 | Thermally assisted magnetic recording medium and magnetic recording storage |
| CN104103290A (en) * | 2013-04-12 | 2014-10-15 | 昭和电工株式会社 | Magnetic recording medium and magnetic storage apparatus |
| CN104103290B (en) * | 2013-04-12 | 2017-06-23 | 昭和电工株式会社 | Magnetic recording media and magnetic memory apparatus |
| TWI616872B (en) * | 2016-09-09 | 2018-03-01 | 國立中興大學 | Heat assisted magnetic recording medium |
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