CN1889822A - Electromagnetic screening optical window with circular ring metal meshed gate structure - Google Patents
Electromagnetic screening optical window with circular ring metal meshed gate structure Download PDFInfo
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- CN1889822A CN1889822A CN 200610010066 CN200610010066A CN1889822A CN 1889822 A CN1889822 A CN 1889822A CN 200610010066 CN200610010066 CN 200610010066 CN 200610010066 A CN200610010066 A CN 200610010066A CN 1889822 A CN1889822 A CN 1889822A
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Abstract
An electromagnetic shielded optical window with ring type of metal cross hatch pattern structure is prepared as arranging ring type of metal cross hatch pattern units in two-dimensional orthogonal mode to from cross hatch pattern array then loading formed array on transparent substrate surface of optical window. The prepared product can be used to carry out electromagnetic shielding in medical treatment and aerospace cause.
Description
Technical field
The invention belongs to optical clear spare electromagnetic shielding fields such as communication apparatus, medical diagnostic equipment, secret facility and Aero-Space equipment, particularly a kind of electromagnetic shielding optical window with annulus metallic mesh structure.
Background technology
Extensive use along with various electronic equipments, the occasion of a lot of Application Optics windows all requires optical window also to have stronger broadband electromagnetic shielding ability when having the high grade of transparency, must carry out electromagnetic shielding as the optical window of aircraft and cause the cabin inner electronic equipment to lose efficacy, and prevent that important informations such as communication in the cabin, operation and data from appearing optical window with the electromagnetic radiation form and causing electromagnetic leakage in case harmful electromagnetic signal enters; Medical electromagnetic isolation chamber optical window will guarantee indoor electromagnetic wave overwhelming majority conductively-closed and prevent that the field operation personnel from being impaired one's health by electromagenetic wave radiation for a long time; The glass pane of important office spaces such as Party and government offices, commerce, scientific research will prevent that electronic equipment such as indoor computer important information when work from divulging a secret etc. to propagating to cause with the electromagnetic radiation form outside window when guaranteeing daylighting.The electromagnetic shielding of present this optical window mainly adopts metallic mesh, transparent conductive film, metal inducement transmission-type multi-layer film structure, band resistance type frequency-selective surfaces etc.
The transparent metal oxide film that transparent conductive film mainly refers to, that the most frequently used is tin indium oxide (ITO), the general transparent occasion in visible region that only is used for, shielding wave band broad, main deficiency is can not take into account broad indifferent through wave band and micro-wave screening.Metal inducement transmission-type multi-layer film structure includes individual layer or multi-layer thin metal film, and is stronger at the low frequency screening ability, and seeing through the zone mainly is visible light and ultraviolet region, and shortcoming is not high through regional transmitance.Band resistance type frequency-selective surfaces can be realized the electromagnetic shielding of single narrow wave band and a plurality of narrow wave bands, thereby be unsuitable for the broadband electromagnetic shielding generally by unit figure and size thereof rationally are set.For from very high frequency(VHF) (VHF) to microwave this most widely used broadband carry out electromagnetic shielding, guarantee again simultaneously optical window transparent in wider wave (as from infrared to the visible region) and keep higher transmittance, all there are various deficiencies in above-mentioned each technical scheme.Comparatively speaking, metallic mesh is owing to have adjustable structural parameters, and the net grid cycle can be realized high transmission rate with respect to infrared and visible wavelength is very big, and is very little again with respect to microwave wavelength, can realize in the low width wave band electro-magnetic screen function preferably.Traditional grid metallic mesh structure constitutes periodic unit by the metal groove of two-dimensional quadrature, but there are intrinsic contradiction in logical light characteristic of this grid grid and shielding character, be difficult to have simultaneously higher logical luminous energy power and screening ability, though be better than other technical scheme, but under the situation that electromagnetic shielding requires and transmittancy requires to improve constantly, can not satisfy actual needs fully.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned existing optical window electromangnetic spectrum scheme, particularly at the logical luminous energy power of grid grid existence and the contradictory problems of screening ability, the annulus metallic mesh structure that proposes a kind of novelty is used for the optical window electromagnetic shielding, enable to realize that with when the grid grid have identical structural parameters (cycle and live width) logical luminous energy power and screening ability improve simultaneously.
The present invention realizes by following technical scheme:
Electromagnetic shielding optical window with annulus metallic mesh structure by the metallic mesh unit with annulus profile, connects airtight to arrange by the two-dimensional quadrature arrangement mode and constitutes the net grid array and load on optical window transparent substrate surface.
The above-mentioned electromagnetic shielding optical window with annulus metallic mesh structure, described annulus is made of conducting metal or alloy, comprises gold, silver, copper, aluminium.
The above-mentioned electromagnetic shielding optical window with annulus metallic mesh structure, the metal thickness of described annulus part is greater than 200nm.
The above-mentioned electromagnetic shielding optical window with annulus metallic mesh structure, place, adjacent annulus point of contact has the metal cover part.
The above-mentioned electromagnetic shielding optical window with annulus metallic mesh structure will constitute adhesive linkage with chromium or titanium material between described annulus metallic mesh array and the optical window transparent material.
The above-mentioned electromagnetic shielding optical window with annulus metallic mesh structure, the described annulus cycle is less than 0.5 times of the minimum microwave wavelength of shielding.
The above-mentioned electromagnetic shielding optical window with annulus metallic mesh structure, the optical window of having the annulus metallic mesh will electrically connect with the external part of window frame or other form.
The above-mentioned electromagnetic shielding optical window with annulus metallic mesh structure is at the side surface plating anti-reflection film of optical window with the annulus metallic mesh.
The above-mentioned electromagnetic shielding optical window with annulus metallic mesh structure is at the surperficial protective film coating of described annulus metallic mesh.
This technical scheme has following beneficial effect:
1. in the one-period unit, the annulus net grid of same period and live width are compared with the grid grid, and the part area occupied that covers metal is littler, thereby the light transmittance of circular ring structure is higher, and this is one of superiority of annulus metallic mesh;
2. in the one-period unit, the annulus net grid of same period and live width are compared with the grid grid, the logical light degree of the minimum of grid grid is a Cycle Length, be doubling time length to the maximum, and the logical light degree of the maximum of circular ring structure is a Cycle Length, thereby the shield effectiveness of annulus net grid will be higher than the grid grid, this be annulus net grid structure superiority two;
3. the annulus net grid of same period and live width are compared with the grid grid, and senior diffraction energy ratio reduces and distribute more evenly, helps that the image quality of imaging system improves behind the optical window, this be annulus net grid structure superiority three.
Annulus net grid structure kept grid grid blocking wide waveband, seen through wide waveband, to the insensitive characteristic of polarization of ele, and do not cause other adverse effect.
5. the two-dimensional quadrature array arrangement is pressed in the annulus metallic mesh unit of the present invention's proposition, and is insensitive to the polarization of electromagnetic field to guarantee it.Adjacent annulus unit connects airtight conduction, owing to be that point is tangent between circle and the circle, for guaranteeing the conduction of connecting airtight of adjacent annulus, between their point of contacts certain area coverage must be arranged.
6. the optical window with net grid layer provided by the invention can plate anti-reflection film to increase light transmittance in one-sided or both sides; Net grid laminar surface can protective film coating prevent to scratch, and can also prevent that metal is corroded or oxygenated and reduces screening ability simultaneously.With respect to traditional grid metallic mesh, adopt the novel optical window of annulus metallic mesh can effectively improve transmittancy and micro-wave screening ability simultaneously.
Description of drawings
Accompanying drawing 1 is a kind of electromagnetic shielding optical window cross-sectional view with annulus metallic mesh structure of the present invention.
Accompanying drawing 2 is existing grid metallic mesh structural representations.
Accompanying drawing 3 is annulus metallic mesh structural representations of the present invention.
Accompanying drawing 4 is a kind of coverage mode schematic diagrames at place, the adjacent annulus of annulus metallic mesh of the present invention point of contact.
Accompanying drawing 5 is that annulus net grid of the present invention and existing grid grid light transmittance compare schematic diagram.
Accompanying drawing 6 is that existing grid grid compare schematic diagram at 12～18GHz shield effectiveness measured value and theoretical value.
Accompanying drawing 7 is that annulus net grid of the present invention compare schematic diagram in the grid grid theoretical value of 12～18GHz shield effectiveness measured value and same structure parameter.
Accompanying drawing 8 is existing senior diffraction of grid grid and relative intensity distribution schematic diagram thereof.
Accompanying drawing 9 is senior diffraction of annulus net grid of the present invention and relative intensity distribution schematic diagram thereof.
Embodiment
Annulus of the present invention is made of electric conductivity good metal or alloy and has certain thickness, and annulus is pressed the two-dimensional quadrature arranged distribution, and adjacent annulus covers the metal of proper area to guarantee all conductings between all annulus at the place, point of contact.Net grid layer can firmly be connected with the optical window transparent substrate as adhesive linkage by chromium or titanium etc.; Optical window with net grid layer can plate anti-reflection film to increase light transmittance in one-sided or both sides; Net grid laminar surface can protective film coating prevent to scratch, and can also prevent that metal is corroded or oxygenated and reduces screening ability simultaneously.With respect to traditional grid metallic mesh, adopt the novel optical window of annulus metallic mesh can effectively improve transmittancy and micro-wave screening ability simultaneously.
The present invention adopts the metal ring structure to replace grid structure as net grid construction unit, annulus is made of conductivity good metal or alloy material, as gold, silver, copper, aluminium etc., do adhesive linkage to increase mechanical strength with materials such as chromium or titaniums between annulus metal and the transparent material, the annulus metal structure has certain live width and thickness, and live width is the smaller the better, is generally several microns, thickness will make the conductivity of this layer metal near its dc conductivity, generally greater than 200nm.
Anti-reflection film and diaphragm can be plated as required in annulus metallic mesh outside.
The embodiment and the accompanying drawing of annulus net grid of the present invention are described in detail as follows:
Accompanying drawing 1 is a kind of typical preferred structural profile schematic diagram with electromagnetic shielding optical window of annulus metallic mesh of the present invention.5 annulus metallic mesh structure sheafs among the figure for the present invention's proposition; 4 is optical window transparent material substrate layer, and material can be any transparent material, as long as it can be processed metallic mesh 5 thereon by certain technological process simultaneously as the transparent optical window material that satisfies the use occasion requirement; 1 for connecting the adhesive linkage of optical window substrate 4 and net grid 5, in particular cases also can be without adhesive linkage, and when the net grid being loaded between two substrates, the preferred material of adhesive linkage is materials such as chromium, titanium; 2 for being plated in the protective layer on metallic mesh 5 surfaces, can be individual layer or multilayer, and purpose is to prevent that metal part long term exposure from causing corrosion and oxidation in air, reduce screening ability, simultaneously prevent that also metallic mesh 5 is scratched, but this layer be according to the operational environment demand of optical window, and nonessential; 3 is individual layer or multilayer anti-reflection film, and purpose is the transmittancy that strengthens optical window, according to job requirement, also can process in the outside of metallic mesh 5, and this layer structure requires also also nonessential according to operational environment.
Accompanying drawing 3 is annulus metallic mesh structural representations of the present invention, and net grid unit is the annulus sheet metal, and material is electric conductivity good metal or alloy, as gold, silver, copper, aluminium etc.; In the optical window plane, the two-dimensional quadrature arranged distribution is pressed in annulus sheet metal unit, each becket all closely is connected with becket on every side, does the covering (the cover part area is as far as possible little) of certain area at the place, point of contact of adjacent annulus, can guarantee between the point of contact being to electrically connect reliably for this reason.Accompanying drawing 4 is a kind of preferred connected modes, and wherein α is the live width of net grid, and the cover part (rectangle) that requires adjacent annulus point of contact is under the condition that guarantees c＞α, and b is the smaller the better by the processing technology level.According to the processing technology level, also can adopt other connecting mode.
The thickness of metal ring will make the conductivity of this layer metal near its dc conductivity, generally greater than 200nm.The overall diameter of annulus is g, and interior diameter is g-2 α, and choosing on the one hand of inner and outer diameter depends on the logical luminous energy power and the screening ability that will reach, and also will take into account the processing technology level on the other hand.This annulus metallic mesh is described in detail below in detail with respect to the performance improvement of traditional grid grid and the choosing method of annulus net grid parameter.
Annulus net grid structure as shown in Figure 3 and grid grid structure as shown in Figure 2, in the one-period unit, when same period and live width, the part area occupied that annulus net grid cover metal is littler, thereby the light transmittance of circular ring structure is higher.Accompanying drawing 5 was fixed for the cycle, and the light transmittance of two kinds of net grid structures compares schematic diagram during line width variation, and the light transmittance of visible annulus net grid will obviously be better than the grid grid.
In the one-period unit, the annulus net grid of same period and live width are compared with the grid grid, the logical light degree of the minimum of grid grid is a Cycle Length, be doubling time length to the maximum, and the logical light degree of the maximum of annulus net grid is a Cycle Length, thereby the shielding cut-off wavelength of annulus net grid is shorter, and shield effectiveness will be higher than the grid grid, and this has obtained experimental verification.In the actual processing because of the influence of various error components, two kinds of structures can guarantee the cycle unanimity, but be difficult to guarantee the consistency of live width, therefore theoretical value and the corresponding actual measurement shield effectiveness that calculates with the actual measurement live width respectively come comparison, result such as accompanying drawing 6, accompanying drawing 7.Accompanying drawing 6 is the comparison of grid grid blocking efficiency theory value and measured value, and visible measured value is lower than theoretical value, and this is rational; Accompanying drawing 7 usefulness actual measurement annulus live width compares by theoretical value and the annulus net grid actual measurement shield effectiveness value that the grid grid calculate, the measured value of annulus net grid is higher than the theoretical value of the grid grid of same structure parameter, and this theoretical value should be higher than the grid grid measured value of same structure parameter by the conclusion of accompanying drawing 6, obviously, when structural parameters were identical, the shield effectiveness of annulus net grid was better than the grid grid.
Because annulus net grid total light transmittance is better than the grid grid, then the valuable zero level light transmittance of imaging also is higher than the grid grid naturally, senior diffraction gross energy reduces simultaneously, and the stray light total amount reduces, and this is favourable to imaging.See that more senior diffraction energy distributes, accompanying drawing 8 and accompanying drawing 9 are respectively the position distribution and the relative intensity schematic diagram of existing grid grid and senior diffraction of annulus net grid of the present invention.By accompanying drawing 8 as seen, senior the diffraction that the intensity of grid grid is bigger mainly is distributed in two, and axially the relative intensity value is also bigger, and is also big to the imaging influence; And by accompanying drawing 9 as seen, senior diffracted intensity of annulus net grid structure distributes more even, the maximum relative intensity also maximum intensity than grid grid is little a lot, so annulus net grid have the effect of the stray light that level and smooth senior diffraction cause, and is favourable to the imaging of imaging system behind the optical window.
The optimal-design method of annulus metallic mesh of the present invention is: the ratio 2 α/g that is earlier required to determine net grid cycle and live width by the desired low pass light of optical window, minimum feature 2 α that can process according to the processing technology level determine the cycle g of annulus net grid then, the net grid of designing like this have optimum shield effectiveness, the net grid line is wide also unsuitable too small, generally be not less than 500nm, can significantly do not reduce with the dc conductivity that guarantees metal.
Annulus metallic mesh of the present invention can adopt following processing method processing and fabricating: make mask by modes such as mechanical scratching or electron-beam direct writings, chromium plating or titanium were as adhesive linkage after the optical window transparent substrate cleaned, metal-coated films on it, apply photoresist then, utilize manufactured mask to carry out photoetching, carry out dry method or wet etching at last, obtain annulus net gate pattern after removing photoresist.Also can save the mask manufacture link, and directly adopt the way of laser direct-writing to make annulus metallic mesh pattern.Other microelectronic processing technology flow process or binary optical elements making flow process etc. also can be used for making annulus net grid structure of the present invention.
Optical window material involved in the present invention is determined by practical application, can be simple glass, quartz glass, infra-red material, transparent resin material etc., annulus metal structure of the present invention will take suitable processing process to make it to be covered on the optical window fully according to the optical window material, and can electrically connect reliably to guarantee good electro-magnetic screen function with realizations such as window frames.In the practical application; can plate anti-reflection film with the optical window surface of annulus net grid and increase transmittancy; also can be corroded in the air or oxidation and reduce screening ability to prevent that metal structure is positioned over for a long time, be prevented also that net grid layer from suffering to scratch, wearing and tearing or other destruction at net grid laminar surface plating layer protecting film.
Below in conjunction with the accompanying drawings the specific embodiment of the present invention and test effect are described; but these explanation according to law regulations do not limit the scope of the invention; protection scope of the present invention is defined by the claims, and anyly comprises claim of the present invention or all is protection scope of the present invention based on its change.
Claims (9)
1. electromagnetic shielding optical window with annulus metallic mesh structure is characterized in that: by the metallic mesh unit with annulus profile, connect airtight to arrange by the two-dimensional quadrature arrangement mode and constitute the net grid array and load on optical window transparent substrate surface.
2. the electromagnetic shielding optical window with annulus metallic mesh structure according to claim 1, it is characterized in that: described annulus is made of conducting metal or alloy, comprises gold, silver, copper, aluminium.
3. the electromagnetic shielding optical window with annulus metallic mesh structure according to claim 1 and 2 is characterized in that: the metal thickness of described annulus part is greater than 200nm.
4. the electromagnetic shielding optical window with annulus metallic mesh structure according to claim 1 and 2 is characterized in that: place, adjacent annulus point of contact has the metal cover part.
5. the electromagnetic shielding optical window with annulus metallic mesh structure according to claim 1 and 2 is characterized in that: will constitute adhesive linkage with chromium or titanium material between described annulus metallic mesh array and the optical window transparent material.
6. the electromagnetic shielding optical window with annulus metallic mesh structure according to claim 1 and 2 is characterized in that: the described annulus cycle is less than 0.5 times of the minimum microwave wavelength of shielding.
7. the electromagnetic shielding optical window with annulus metallic mesh structure according to claim 1 and 2 is characterized in that: the optical window with the annulus metallic mesh will electrically connect with the external part of window frame or other form.
8. the electromagnetic shielding optical window with annulus metallic mesh structure according to claim 1 and 2 is characterized in that: at the side surface plating anti-reflection film of optical window with the annulus metallic mesh.
9. the electromagnetic shielding optical window with annulus metallic mesh structure according to claim 1 is characterized in that: at the surperficial protective film coating of described annulus metallic mesh.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006100100664A CN100403866C (en) | 2006-05-22 | 2006-05-22 | Electromagnetic screening optical window with circular ring metal meshed gate structure |
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| CNB2006100100664A CN100403866C (en) | 2006-05-22 | 2006-05-22 | Electromagnetic screening optical window with circular ring metal meshed gate structure |
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| CN100403866C CN100403866C (en) | 2008-07-16 |
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