CN100556266C - A kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure - Google Patents
A kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure Download PDFInfo
- Publication number
- CN100556266C CN100556266C CNB2008100639876A CN200810063987A CN100556266C CN 100556266 C CN100556266 C CN 100556266C CN B2008100639876 A CNB2008100639876 A CN B2008100639876A CN 200810063987 A CN200810063987 A CN 200810063987A CN 100556266 C CN100556266 C CN 100556266C
- Authority
- CN
- China
- Prior art keywords
- metallic mesh
- annulus
- optical window
- double
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 59
- 229910052751 metal Inorganic materials 0.000 claims abstract description 46
- 239000002184 metal Substances 0.000 claims abstract description 46
- 239000000758 substrate Substances 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 17
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000007888 film coating Substances 0.000 claims description 2
- 238000009501 film coating Methods 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 238000002834 transmittance Methods 0.000 abstract description 21
- 230000005540 biological transmission Effects 0.000 abstract description 20
- 238000001228 spectrum Methods 0.000 abstract description 5
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 89
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 238000012216 screening Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000006117 anti-reflective coating Substances 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Abstract
A kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure belongs to optical clear spare electromangnetic spectrum field, the electromagnetic shielding optical window loads on the optical window both sides by two-layer annulus metallic mesh and constitutes, every layer of annulus metallic mesh connects airtight the formation of arranging by the metal ring unit by the two-dimensional quadrature arrangement mode, and the annulus overall diameter of two-layer annulus metallic mesh greater than the pi/2 of the conventional monolayers grid metallic mesh grid length of side doubly, the spacing of two-layer annulus metallic mesh is 2～4 times of annulus overall diameter, with respect to conventional monolayers grid metallic mesh, optical window with double-layer circular ring metallic mesh structure is not when reducing light transmittance, increased substantially shield effectiveness, and homogenizing senior diffraction energy distribute, solved high transmission rate in the existing optical window electromangnetic spectrum, the problem that forceful electric power magnetic screen efficient and the influence of low image quality can not take into account simultaneously.
Description
Technical field
The invention belongs to optical clear spare electromagnetic shielding fields such as Aero-Space equipment, communication apparatus and secret facility, particularly a kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure.
Background technology
Extensive use along with various electronic equipments, electromagnetic wave is used the broadening of frequency spectrum and the increase of intensity, the optical window that fields such as Aero-Space equipment are used has proposed more and more higher requirement, its concentrated reflection be exactly require optical window have the high grade of transparency and to image quality influence little in, also have superpower broadband electromagnetic shielding ability.Particularly in Aero-Space equipment field, require the optical window of aircraft guaranteeing that the high grade of transparency is with when finishing detection or imaging task, the inside and outside electromagnetic signal in realization cabin that must be high-quality is isolated, shield external electromagnetic interference and harmful electromagnetic signal on the one hand, in order to avoid cause the cabin inner electronic equipment to lose efficacy, electromagnetic signal appears optical window and causes electromagnetic leakage when preventing cabin inner electronic equipment work on the one hand.For secret facilities such as Party and government offices, military commanding place, important R﹠D institutions, also need the glass pane in its house when guaranteeing daylighting, carry out design of Electromagnetic Shielding, important information is propagated to cause to outside window with the electromagnetic radiation form and is divulged a secret when preventing electronic device works such as indoor electric brain.The electromagnetic shielding of optical window mainly adopts technology such as transparent conductive film, metal inducement transmission-type multi-layer film structure, band resistance type frequency-selective surfaces and metallic mesh to realize at present.
Transparent conductive film mainly refers to transparent metal oxide film, the most frequently used is tin indium oxide, can shield the microwave band of broad, but indifferent thereby shield effectiveness is not good to microwave attenuation, and the occasion that generally only is used for visible light can not be taken into account the transmission region of broad.Metal inducement transmission-type multi-layer film structure includes individual layer or multi-layer thin metal film, and is stronger to low frequency micro-wave screening ability, yet transmission region is mainly visible light and ultraviolet light, and light transmittance is not high.Band resistance type frequency-selective surfaces can be realized the electromagnetic shielding of single narrow wave band or a plurality of narrow wave bands, but be difficult to realize the broadband electromagnetic shielding generally by the figure and the size of its unit of precise design.Carry out the forceful electric power magnetic screen for this most widely used broadband from very high frequency(VHF) to the microwave, guarantee again simultaneously optical window in the transmission region of broad (as from infrared to the visible region) have high transparency, all there is tangible deficiency in above-mentioned each technical scheme.Comparatively speaking, the structural parameters of metallic mesh can be controlled flexibly, particularly when net grid cycle during in millimeter or submillimeter magnitude, because it is much larger than infrared and visible wavelength, high transmission rate can be realized, and, stronger low width wave band electromagnetic shielding can be realized much smaller than microwave wavelength, the feasible optical window electromangnetic spectrum based on metallic mesh frequency filtering principle of this characteristic has obtained to pay close attention to widely and study, for example:
1. patent 03135313.5 " a kind of electromagnetic shielding observation window " is combined into electromagnetic armouring structure with substance or multi-metal silk screen and based semiconductor quantum well structure, can realize the shield effectiveness of 10GHz with the interior 50dB of surpassing, this structure reaches more than 50% at the light transmittance of the high regional transmission of visible light;
2. patent 93242068.0 " electromagnetic shielding glass " is pressed from both sides conductive metal mesh between layer glass, makes it to be bonded on the window frame of metal to constitute electromagnetic armouring structure with conductive transparent film at glass outer side, and this structure has certain daylighting;
3. patent 94231862.5 " no Moire fringe electromagnetic shielding observation window " adopts by the parallel placement of the different wire netting of two number of layers, and their warps or parallel have certain included angle, overcomes the Moire fringe phenomenon to reach, and realizes the visual field more clearly;
4. patent 02157954.7 " high shielding effect Tempest glass " respectively has one deck polycarbonate film in the woven wire both sides, the film outside respectively attaches one deck glass, last hot pressing forms electromagnetic armouring structure, and this structure reaches at light transmittance under 60% the situation, has stronger shield effectiveness;
5. patent 200610084149.8 " electromagnetic shielded film and manufacture method thereof " has been described a kind of high transparency electromagnetic wave shield film with metal mesh pattern that is formed by photoetching process, and the main purpose of this invention is to reduce the metal consumption and overcomes to use between metal level and film substrate to solidify the environmental pollution that glue causes;
Above-mentioned each scheme can realize effectiveness and certain light transmittance preferably owing to adopt the core devices of metallic mesh (or woven wire) as shielding.But metal current net grid are mainly the traditional grid grid structure shown in the accompanying drawing 2, there are intrinsic contradiction in its transmittancy and screening ability, be difficult to take into account simultaneously high transmission rate and forceful electric power magnetic screen efficient, and senior diffraction energy of grid metallic mesh mainly concentrates on the mutually perpendicular diaxon, image quality there is certain influence, even requires occasion to be difficult to use at high imaging quality.Patent 200610010066.4 " the electromagnetic shielding optical window with annulus metallic mesh structure " proposes to be built into the annulus metallic mesh with metal ring, effectively avoid senior diffraction energy of grid metallic mesh to concentrate the shortcoming that distributes, and can alleviate the contradiction of its transmittancy and screening ability.Yet people are improving constantly the transmittancy of electromagnetic shielding optical window and the requirement of electromagnetic shielding ability, especially in Aero-Space equipment field, when having required optical window to reach 95% light transmittance, in the shield effectiveness that is lower than more than the microwave frequency range realization 30dB of 20GHz, this makes that existing technology is difficult to realize.Although conspicuous, the number of plies that increases metallic mesh can improve shield effectiveness, and patent 94231862.5 and patent 200610084149.8 just mentioned once that directly a plurality of net grid being stacked up to cause transmittancy significantly to reduce as described above.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned existing optical window electromangnetic spectrum scheme, the problem that exists high transmission rate and forceful electric power magnetic screen efficient not to take into account at conventional monolayers grid metallic mesh particularly, a kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure is proposed, utilize the Different Effects rule of double-level-metal net grid spacing to light transmission and shielding properties, select the cycle and the spacing of net grid, to be implemented under the constant substantially situation of light transmittance, increase substantially shield effectiveness.
The technical solution used in the present invention is: this window is made of the both sides that two-layer annulus metallic mesh is placed in parallel in optical window transparent substrate or substrate, two-layer annulus metallic mesh has identical unit profile and structural parameters, and all connect airtight to arrange by the two-dimensional quadrature arrangement mode and constitute the net grid array by metallic mesh unit with annulus profile, adjacent annulus covers the metal of proper area at the place, point of contact, the annulus overall diameter of two-layer annulus metallic mesh greater than the pi/2 of the existing individual layer grid metallic mesh grid length of side doubly, the spacing of two-layer annulus metallic mesh is 2～4 times of annulus overall diameter.
The above-mentioned electromagnetic shielding optical window with double-layer circular ring metallic mesh structure, described annulus overall diameter must be less than 0.5 times of shielding minimum wavelength.
The above-mentioned electromagnetic shielding optical window with double-layer circular ring metallic mesh structure, described annulus part is made of electric conductivity good metal or alloy, and metal thickness is greater than 200nm.
The above-mentioned electromagnetic shielding optical window with double-layer circular ring metallic mesh structure will constitute adhesive linkage with chromium or titanium material between described annulus metallic mesh and the optical window transparent substrate material.
The above-mentioned electromagnetic shielding optical window with double-layer circular ring metallic mesh structure, described optical window with the double-layer circular ring metallic mesh will electrically connect with the external part of window frame or other form.
The above-mentioned electromagnetic shielding optical window with double-layer circular ring metallic mesh structure is at the surface of annulus metallic mesh plating anti-reflection film.
The above-mentioned electromagnetic shielding optical window with double-layer circular ring metallic mesh structure is at the surperficial protective film coating of annulus metallic mesh.
Novelty of the present invention and the good result that has are as follows:
1. utilize the spacing (substrate bed thickness) of double-level-metal net grid very little to the light transmission influence, and shielding properties is influenced outstanding feature, the double-deck spacing of optimized choice is 2～4 times of annulus overall diameters, so that between the double-level-metal net grid electromagnetic coupled the strongest, can significantly improve shield effectiveness, and this moment, light transmission was unaffected substantially, and this is one of novelty of double-layer circular ring net grid structure;
2. utilize the light transmittance and the net grid porosity of double-level-metal net grid in close relations, and be subjected to Double-level Reticulated grid spacing to influence little characteristics, with cycle of double-layer circular ring metallic mesh be the annulus overall diameter increase for individual layer grid grid cycle be that the pi/2 of the grid length of side is doubly above to increase its porosity, make it to compare with existing individual layer grid grid, light transmission can not reduce, avoided individual layer grid grid simple superposition is caused the significantly reduced shortcoming of transmittancy, this be the double-layer circular ring metallic mesh novelty two;
3. adopt the annulus metallic mesh as basic screen unit, the characteristic that senior diffraction energy of the homogenizing of utilizing the continuous metal annulus to have distributes, can overcome the concentrated shortcoming that distributes of senior diffraction energy that traditional grid metallic mesh exists, help improving image quality, this be the double-layer circular ring metallic mesh novelty three;
4. the double-layer circular ring metallic mesh that proposes of the present invention, the two layers of mesh grid are arranged in parallel, and the two-dimensional quadrature array arrangement is all pressed in the annulus unit of every layer of net grid, can make its polarized state to incident electromagnetic wave insensitive;
5. the double-layer circular ring metallic mesh of the present invention's proposition has kept traditional grid metallic mesh shielding wide waveband, the wide advantage of transmission region, and has not caused other adverse effect.
Description of drawings
Accompanying drawing 1 is a kind of electromagnetic shielding optical window cross-sectional view with double-layer circular ring metallic mesh structure of the present invention.
Accompanying drawing 2 is existing individual layer grid metallic mesh structural representations.
Accompanying drawing 3 is double-layer circular ring metallic mesh structural representations of the present invention.
Accompanying drawing 5 is that double-layer circular ring metallic mesh of the present invention and existing individual layer grid metallic mesh light transmittance compare schematic diagram.
Accompanying drawing 6 is that double-layer circular ring metallic mesh of the present invention and existing individual layer grid metallic mesh shield effectiveness compare schematic diagram.
Embodiment
Embodiment and accompanying drawing with electromagnetic shielding optical window of double-layer circular ring metallic mesh structure of the present invention is described in detail as follows:
Accompanying drawing 1 is a kind of typical preferred structural profile schematic diagram with electromagnetic shielding optical window of double-layer circular ring metallic mesh structure of the present invention.3 and 7 are respectively individual layer annulus metallic mesh structure sheaf among the figure, and their structural parameters are identical, and are arranged in parallel; 5 is optical window transparent material substrate layer among the figure, and material can be any transparent material, as long as it can be processed annulus metallic mesh 3 and 7 thereon by certain technological process simultaneously as the transparent optical window material that satisfies the use occasion requirement; 4 for connecting the adhesive linkage of optical window substrate 5 and annulus metallic mesh 3 among the figure, 6 for connecting the adhesive linkage of optical window substrate 5 and annulus metallic mesh 7, the preferred material of adhesive linkage is materials such as chromium, titanium, in particular cases also can maybe the net grid be loaded between two substrates as directly making the net grid without adhesive linkage at the substrate surface splash-proofing sputtering metal; 2 for being plated in the protective layer on annulus metallic mesh 3 surfaces among the figure, 8 for being plated in the protective layer on annulus metallic mesh 7 surfaces, protective layer 2 and 8 can be individual layer or sandwich construction, from be that the metal part long term exposure that prevents the net grid causes corrosion and oxidation in air, reduce screening ability, simultaneously prevent that also metallic mesh 3 and 7 is scratched, but protective layer is according to the operational environment demand of optical window, and nonessential; 1 and 9 is individual layer or multilayer antireflective coating among the figure, and purpose is the transmittancy that strengthens optical window, and antireflective coating 1 and 9 can be used simultaneously according to the operational environment requirement, also can also can all need not only with one.
Accompanying drawing 3 is double-layer circular ring metallic mesh structural representations of the present invention, and the annulus metallic mesh that the double-layer structure parameter is identical is arranged in parallel and is distributed in optical window substrate both sides.Net grid unit is the annulus sheet metal, material is electric conductivity good metal or alloy, as gold, silver, copper, aluminium etc., for guaranteeing good electrical conductivity, require the thickness of metal ring generally to be greater than 200nm, so that the conductivity of this layer metal is near its dc conductivity; In net grid plane, the two-dimensional quadrature arranged distribution is pressed in annulus sheet metal unit, each becket is all located close-coupled with four adjacent metal rings on every side at the point of contact, for guaranteeing that between the metal ring tangent point be to electrically connect reliably, the metal of making certain area at the place, point of contact of adjacent metal ring covers (the cover part area is as far as possible little), accompanying drawing 4 is a kind of preferred connecting modes, wherein a is the live width of metallic mesh, the cover part (rectangle) that requires adjacent annulus point of contact is under the condition that guarantees c＞a, and b is the smaller the better by the processing technology level.According to different processing method and technological levels, place, annulus point of contact also can adopt other connecting mode.According to the electromagnetic scattering theory, the annulus cycle is annulus overall diameter g
rBe less than 0.5 times that shields minimum wavelength,, realize good shield effectiveness so that its scattered field is main to scattering later on behind the electromagnetic wave incident annulus metallic mesh.
Conspicuous, when double layer of metal net grid simple superposition to a time-out, when improving shield effectiveness, can cause the reduction of transmittancy.For transmittancy and the screening ability that makes double-level-metal net grid obtains best balance, the relation of the light transmission of needs research double-level-metal net grid and the structural parameters (net grid cycle, live width and double-deck spacing) of shielding properties and net grid, and then select optimum net grid structural parameters, so that the Double-level Reticulated grid obtain best shield effectiveness, reach high transmittancy simultaneously.The choosing of structural parameters of double-layer circular ring metallic mesh of the present invention is described in detail in detail below, with and with respect to the performance improvement of conventional monolayers grid grid.
For the individual layer grid metallic mesh shown in the accompanying drawing 2, its light transmittance T
sCan be by its cycle g
sWith live width a
sBe expressed as:
For the double-layer circular ring metallic mesh shown in the accompanying drawing 3, scalar diffraction theory the analysis showed that, spacing h
rTo its light transmittance T
DrInfluence very little, light transmittance T
DrCan only use the cycle g of annulus metallic mesh
rWith live width a
rBe expressed as follows:
For making the double-layer circular ring metallic mesh have identical light transmittance, i.e. T with individual layer grid metallic mesh
s=T
Dr, can unite to find the solution by formula (1) and (2) and obtain:
Formula (3) promptly is a double-layer circular ring metallic mesh when having identical light transmittance with individual layer grid metallic mesh, the relation between their structural parameters (cycle and live width).Because the wide thin more performance of net grid line is good more, suppose all enchashment minimum widiths of having technology to process of annulus net grid and grid grid, make a
s=a
r=a, then formula (3) becomes:
In order to realize high transmission rate, require g
r＞＞a, can further be obtained by formula (4) this moment:
Formula (5) promptly is under the wide the same terms of net grid line, the relation when the double-layer circular ring metallic mesh has identical light transmittance with individual layer grid metallic mesh between their cycles.But adding difficult assurance consistency in man-hour because the net grid line is wide, therefore, its cycle suitably can amplified, selecting g according to actual conditions in order to ensure the light transmission of double-layer circular ring metallic mesh
r＞π g
s/ 2, the annulus overall diameter of promptly two-layer annulus metallic mesh greater than the pi/2 that has the individual layer grid metallic mesh grid length of side doubly.
Because the spacing of double-level-metal net grid is very little to its light transmission influence, this just provides one to optimize variable for the optimization of double-level-metal net grid blocking performance.Strict electromagnetic scattering vector theory the analysis showed that, the shield effectiveness of double-level-metal net grid increases sharply with the increase of spacing, and increase trend begins to slow down rapidly after spacing reaches 3 times of net grid cycles, on the other hand, double-level-metal net grid are a kind of typical Fabry-Perot structures in microwave band, and along with the increase of spacing, its first transmission resonance frequency will move to the low frequency microwave region, even reach the shielding wave band that people are concerned about, cause shielding properties to reduce.Based on the above-mentioned theory analysis result, for being implemented in 20GHz and even 40GHz with the good shield effectiveness of interior low frequency microwave band, the spacing of double-layer circular ring metallic mesh should not surpass 2mm, to avoid the adverse effect of transmission resonance effect, putting before this, it is 2～4 times of annulus overall diameter that optimal spacing is chosen as annulus net grid cycle, and good more near 4 efficiency-timed fruits more.
The annulus metallic mesh has the equally distributed advantage of diffraction senior time, and when forming bilayer, scalar diffraction theory the analysis showed that the double-layer circular ring metallic mesh still keeps the equally distributed characteristic of diffraction senior time.Thereby when selecting the structural parameters of double-layer circular ring metallic mesh by mentioned above principle, because the total light transmittance of double-layer circular ring net grid is not less than individual layer grid metallic mesh, the stray light total amount that is senior diffraction generation reduces, and because the even distribution of its senior diffraction energy, the stray light that causes total amount to reduce is evenly distributed again, thereby senior diffraction of double-layer circular ring metallic mesh is littler than individual layer grid metallic mesh to the influence of image quality.
Validity in order to verify that above-mentioned double-layer circular ring metallic mesh structural parameters are selected has prepared the metallic mesh exemplar by the ultraviolet photolithographic technology, and wherein the cycle of double-layer circular ring metallic mesh exemplar is g
r=320 μ m, live width is a
r=3.52 μ m, double-deck spacing is h
r=1mm, the cycle of grid metallic mesh exemplar is g
s=160 μ m, live width is a
s=2.97 μ m, substrate thickness are h
s=1mm, the backing material of two net grid exemplars is quartz glass.Respectively experiment test has been carried out in light transmittance, electromagnetic shielding efficiency and the diffraction spot distribution of two net grid exemplars.
Accompanying drawing 5 is that double-layer circular ring metallic mesh exemplar and individual layer grid metallic mesh exemplar light transmittance measured result compare schematic diagram, experimental result shows, their light transmittance is very approaching, all reaches more than 90% at visible light wave range, can reach more than 95% at the wave band of 520～680nm.
Accompanying drawing 6 is that double-layer circular ring metallic mesh exemplar and individual layer grid metallic mesh exemplar shield effectiveness measured result compare schematic diagram, experimental result shows, the double-layer circular ring metallic mesh improves more than the 12dB than the shield effectiveness of individual layer grid metallic mesh, surpasses 35dB at 18GHz with interior microwave band shield effectiveness.
Accompanying drawing 7 is diffraction spot distribution measured drawings of double-layer circular ring metallic mesh exemplar, and accompanying drawing 8 is diffraction spot distribution measured drawings of individual layer grid metallic mesh exemplar, and measured result shows that senior diffraction of double-layer circular ring metallic mesh distributes more even.
Above experimental result proves absolutely, select the structural parameters of double-layer circular ring metallic mesh by mentioned above principle after, with respect to existing individual layer grid metallic mesh, under the situation that light transmittance does not reduce, shield effectiveness has obtained significantly to improve, and senior time diffraction is evenly distributed, and can satisfy certain applications to realizing the requirement of high transmission rate, forceful electric power magnetic screen efficient and the influence of low image quality simultaneously.Progress along with process technology, the live width of metallic mesh can further reduce, its cycle also corresponding reducing, the double-layer circular ring metallic mesh can be realized higher light transmittance and stronger shield effectiveness, satisfy the instructions for use of not serving occasion, as the shielding millimeter wave band.
Annulus metallic mesh of the present invention can adopt following processing method to make: make mask by modes such as mechanical scratching or laser beam, ion beam and electron-beam direct writings, after the transparent substrates of choosing thickness (being double-deck spacing) cleaned, (materials such as perhaps first chromium plating, titanium are as adhesive linkage to become metallic film in its both sides sputter, metal-coated films again on it), apply photoresist then, utilize manufactured mask to carry out photoetching, carry out dry method or wet etching at last, the back of removing photoresist all obtains annulus metallic mesh pattern in the substrate both sides.In addition, also can save the mask manufacture link, and the way that directly adopts laser direct-writing is made annulus metallic mesh pattern in the substrate both sides, and other microelectronic processing technology flow process or binary optical elements making flow process etc. also can be used for making double-layer circular ring metallic mesh of the present invention.
Accompanying drawing 1 is as a preferred embodiment, and wherein transparent substrates 5 itself promptly can be the optical window that need carry out electromagnetic shielding; In addition, under the bigger situation of the thickness of optical window own or because the restriction of using, also can be by selecting the transparent substrates of suitable thickness and material, with the making of the structural integrity of accompanying drawing 1, a side that then its integral body is loaded into optical window is to realize electromagnetic shielding earlier.
Optical window material involved in the present invention is determined by practical application, can be simple glass, optical glass, quartz glass, infra-red material, transparent resin material, flexible clear materials etc., double-layer circular ring metal structure of the present invention will take suitable processing process to make it to be covered on the optical window fully according to the optical window material, and can electrically connect reliably to guarantee good electro-magnetic screen function with realizations such as window frames.In the practical application; anti-reflection film can be plated in the both sides of annulus metallic mesh increases transmittancy; also can be corroded in the air or oxidation and reduce screening ability to prevent that metal structure is positioned over for a long time, be prevented also that net grid layer from suffering to scratch, wearing and tearing or other destruction at net grid laminar surface plating layer protecting film.
Claims (7)
1. electromagnetic shielding optical window with double-layer circular ring metallic mesh structure, it is characterized in that this window is made of the both sides that two-layer annulus metallic mesh is placed in parallel in optical window transparent substrate or substrate, two-layer annulus metallic mesh has identical unit profile and structural parameters, and all connect airtight to arrange by the two-dimensional quadrature arrangement mode and constitute the net grid array by metallic mesh unit with annulus profile, adjacent annulus covers the metal that reliably electrically connects between assurance metal ring tangent point at the place, point of contact, the annulus overall diameter of two-layer annulus metallic mesh greater than the grid length of side doubly at the pi/2 of the individual layer grid metallic mesh electromagnetic shielding optical window grid length of side of millimeter or submillimeter magnitude, the spacing of two-layer annulus metallic mesh is 2～4 times of annulus overall diameter.
2. the electromagnetic shielding optical window with double-layer circular ring metallic mesh structure according to claim 1 is characterized in that the annulus overall diameter must be less than 0.5 times of shielding minimum wavelength.
3. the electromagnetic shielding optical window with double-layer circular ring metallic mesh structure according to claim 1 it is characterized in that the annulus part is made of electric conductivity good metal or alloy, and metal thickness is greater than 200nm.
4. the electromagnetic shielding optical window with double-layer circular ring metallic mesh structure according to claim 1 is characterized in that will constituting adhesive linkage with chromium or titanium material between annulus metallic mesh and the optical window transparent substrate material.
5. the electromagnetic shielding optical window with double-layer circular ring metallic mesh structure according to claim 1 is characterized in that will electrically connecting with window frame with the optical window of double-layer circular ring metallic mesh.
6. the electromagnetic shielding optical window with double-layer circular ring metallic mesh structure according to claim 1 is characterized in that at the surface of annulus metallic mesh plating anti-reflection film.
7. the electromagnetic shielding optical window with double-layer circular ring metallic mesh structure according to claim 1 is characterized in that the surperficial protective film coating at the annulus metallic mesh.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2008100639876A CN100556266C (en) | 2008-02-04 | 2008-02-04 | A kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2008100639876A CN100556266C (en) | 2008-02-04 | 2008-02-04 | A kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101222839A CN101222839A (en) | 2008-07-16 |
| CN100556266C true CN100556266C (en) | 2009-10-28 |
Family
ID=39632335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2008100639876A Expired - Fee Related CN100556266C (en) | 2008-02-04 | 2008-02-04 | A kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100556266C (en) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101917837B (en) * | 2010-07-28 | 2011-11-16 | 哈尔滨工业大学 | Electromagnetic shielding conformal optical window with longitude and latitude-shaped mesh structure |
| CN102092680A (en) * | 2011-01-12 | 2011-06-15 | 扬州蓝剑电子***工程有限公司 | Preparation and post-treatment device of multi-parameter accurate and adjustable multi-system microwave assisted nano-material |
| CN103874404B (en) * | 2014-02-14 | 2015-09-16 | 哈尔滨工业大学 | There is the intersection angular distribution metal ring array electric magnetic screen optical window of the sub-annulus of inscribe |
| CN103763896B (en) * | 2014-02-14 | 2015-07-29 | 哈尔滨工业大学 | The electromagnetic shielding optical window of double-layer staggered multicycle metal ring nested array |
| CN103813700B (en) * | 2014-02-14 | 2015-09-16 | 哈尔滨工业大学 | Based on the electromagnetic shielding optical window of multicycle metal ring two-dimensional quadrature nested array |
| CN103763902B (en) * | 2014-02-14 | 2016-03-09 | 哈尔滨工业大学 | Based on the electromagnetic shielding optical window of four circumscribed orthocycle rings and sub-annulus unit |
| CN103763903B (en) * | 2014-02-14 | 2017-06-09 | 哈尔滨工业大学 | Donut two-dimensional quadrature distribution array electromagnetic shielding optical window with the sub- annulus of inscribe |
| CN103763904B (en) * | 2014-02-14 | 2015-07-29 | 哈尔滨工业大学 | There is the donut angular distribution array electric magnetic screen optical window of the sub-annulus of inscribe |
| CN103763899B (en) * | 2014-02-14 | 2017-06-13 | 哈尔滨工业大学 | Orthogonal circle ring array electromagnetic shielding optical window with two groups of circumscribed annulus and sub- annulus |
| CN103763901B (en) * | 2014-02-14 | 2015-07-29 | 哈尔滨工业大学 | Based on the electromagnetic shielding optical window of the tangent annulus of angular distribution and the sub-circle ring array of inscribe |
| CN103763897B (en) | 2014-02-14 | 2015-06-17 | 哈尔滨工业大学 | Multi-period driving and driven nested circular ring array electromagnetic shielding optical window with concentric circular rings |
| CN103763900B (en) * | 2014-02-14 | 2017-06-13 | 哈尔滨工业大学 | Orthogonal annulus and sub- circle ring array electromagnetic shielding optical window with circumscribed connection annulus |
| CN103813701B (en) * | 2014-02-14 | 2015-07-29 | 哈尔滨工业大学 | Double-deck triangle and quadrature hybrid distribution annulus and sub-circle ring array electromagnetic shielding optical window |
| CN103763905B (en) * | 2014-02-14 | 2015-06-17 | 哈尔滨工业大学 | Array electromagnetic shielding optical window with three-period externally-tangent circular rings and internally-tangent sub circular rings |
| CN103826428B (en) | 2014-02-14 | 2015-07-29 | 哈尔滨工业大学 | Based on triangle and quadrature hybrid distribution annulus and the electromagnetic shielding optical window of sub-circle ring array |
| CN103813702B (en) * | 2014-02-14 | 2017-06-09 | 哈尔滨工业大学 | Double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetic shielding optical window of inscribe |
| CN103763898B (en) * | 2014-02-14 | 2015-07-29 | 哈尔滨工业大学 | Based on the electromagnetic shielding optical window of the nested annulus orthogonal array of multicycle principal and subordinate |
| CN106413361B (en) * | 2015-07-28 | 2021-02-05 | 哈尔滨工业大学 | Electromagnetic shielding optical window with double graphene absorption layers and double metal mesh grid structures |
| CN105633592B (en) * | 2016-03-24 | 2018-08-24 | 电子科技大学 | artificial electromagnetic shielding material |
| CN106714538A (en) * | 2017-01-03 | 2017-05-24 | 哈尔滨工业大学 | Infrared band three-band-pass optical window electromagnetic shielding structure |
| CN110572998B (en) * | 2019-09-27 | 2021-04-16 | 南京理工大学 | Miniaturized transparent electromagnetic shielding body based on hollowed-out regular hexagonal grid structure |
| CN113056183B (en) * | 2021-01-18 | 2022-10-28 | 哈尔滨工业大学 | Electromagnetic shielding optical window with mesh grid structure based on medium-ultrathin doped metal-medium |
| CN115618447B (en) * | 2022-12-08 | 2023-03-10 | 中国人民解放军国防科技大学 | Three-dimensional random hexagonal metal mesh structure and design method thereof |
-
2008
- 2008-02-04 CN CNB2008100639876A patent/CN100556266C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101222839A (en) | 2008-07-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100556266C (en) | A kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure | |
| CN100553423C (en) | A kind of electromagnetic shielding optical window with double-layer pane metallic mesh structure | |
| CN100403866C (en) | Electromagnetic screening optical window with circular ring metal meshed gate structure | |
| CN103763897B (en) | Multi-period driving and driven nested circular ring array electromagnetic shielding optical window with concentric circular rings | |
| CN103826428B (en) | Based on triangle and quadrature hybrid distribution annulus and the electromagnetic shielding optical window of sub-circle ring array | |
| CN103813702A (en) | Double layer staggered orthogonal tangent circular ring and internally tangent sub-circular ring array electromagnetic shielding light window | |
| CN106413359A (en) | Bidirectional wave absorption strong electromagnetic shielding optical window of multilayer graphene mesh/metal mesh laminated structure | |
| CN103813701B (en) | Double-deck triangle and quadrature hybrid distribution annulus and sub-circle ring array electromagnetic shielding optical window | |
| CN103874404B (en) | There is the intersection angular distribution metal ring array electric magnetic screen optical window of the sub-annulus of inscribe | |
| CN103763907B (en) | To distribute tangent annulus and inscribe sub-circle ring array electromagnetic shielding optical window based on two-dimensional quadrature | |
| CN103763896B (en) | The electromagnetic shielding optical window of double-layer staggered multicycle metal ring nested array | |
| CN103763908B (en) | Based on the electromagnetic shielding optical window of multicycle metal ring nested array | |
| CN106714533A (en) | Graphene/double-layer-metal-mesh--included transparent electromagnetic shielding device with bidirectional wave absorbing effect | |
| CN103763900A (en) | Orthogonal circular ring and sub circular ring array electromagnetic shielding optical window with externally-tangent connecting circular rings | |
| CN103763903A (en) | Two-dimensional orthogonal concentric circular ring distribution array electromagnetic shielding optical window with internally-tangent sub circular rings | |
| CN103763902B (en) | Based on the electromagnetic shielding optical window of four circumscribed orthocycle rings and sub-annulus unit | |
| CN103763901B (en) | Based on the electromagnetic shielding optical window of the tangent annulus of angular distribution and the sub-circle ring array of inscribe | |
| CN103763906B (en) | Circumscribed annulus connects the angular distribution circle ring array electromagnetic shielding optical window with sub-annulus | |
| CN103763899A (en) | Orthogonal circular ring array electromagnetic shielding optical window with two sets of externally-tangent circular rings and sub circular rings | |
| CN103813700B (en) | Based on the electromagnetic shielding optical window of multicycle metal ring two-dimensional quadrature nested array | |
| CN103763904B (en) | There is the donut angular distribution array electric magnetic screen optical window of the sub-annulus of inscribe | |
| CN103763905B (en) | Array electromagnetic shielding optical window with three-period externally-tangent circular rings and internally-tangent sub circular rings | |
| CN103763898B (en) | Based on the electromagnetic shielding optical window of the nested annulus orthogonal array of multicycle principal and subordinate | |
| CN103763909A (en) | Arraye electromagnetic shielding optical window with concentric circular ring clusters and internally-tangent sub circular rings | |
| CN106413363A (en) | Dual-layer metal mesh strong electromagnetic shielding optical window possessing graphene interlayers and dual external absorption layers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091028 |