CN1851559A - Photoetching machine synchronous sequential control serial data communication method and system and use - Google Patents
Photoetching machine synchronous sequential control serial data communication method and system and use Download PDFInfo
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- CN1851559A CN1851559A CN 200610027273 CN200610027273A CN1851559A CN 1851559 A CN1851559 A CN 1851559A CN 200610027273 CN200610027273 CN 200610027273 CN 200610027273 A CN200610027273 A CN 200610027273A CN 1851559 A CN1851559 A CN 1851559A
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Abstract
Synchronous bus controller issues synchronizing information real time to work head motion control card, mask platform motion control card, and alignment motion control card through synchro data bus, said motion control card receiving synchronous bus controller interval synchronous signal and state synchronous signal and respectively synthesizing into optical fiber triggering signal and status signal, then sending to underlayer I/O control panel, alignment control system and leveling focusing control system. The present invention realizes real-time data communication and synchronization control among plurality of control units in step scan projection photoetching machine.
Description
Affiliated technical field
The invention belongs to the photoetching technique in the integrated circuit fabrication process, particularly the high-speed serial data communication method and system of controlling about a kind of advanced scanning projecting photoetching machine synchronous sequence.
Background technology
Photoetching is the operation of most critical in the ic processing, so litho machine is the equipment of most critical in the ic processing.Abroad as far back as just having proposed the notion of photoetching of future generation many years ago, and technology such as extreme ultraviolet linear light quarter, electron beam projection lithography, ion beam projection lithography have been carried out a large amount of research, but owing to many reasons such as technology, production efficiency, costs, these technology still are difficult to complete practicability at present.Account for the deep UV projection lithography equipment that remains of market leading position at present.
Current, what the overwhelming majority came into operation is the step and repeat lithography machine.In the step and repeat lithography machine, whole image field exposes simultaneously.This system is design and realization easily.Along with market improves constantly the demand that, high precision wide to large scale, fine rule, high-level efficiency, low cost integrated circuit are produced, semiconductor equipment has been brought unprecedented challenge.The step and repeat lithography machine adopts Polaroid technology, for the lens combination that increases image field requirement larger diameter as support, but this requirement has run into the dual restriction of technical factor and economic factors, thereby has limited the step and repeat lithography machine to more high precision, larger sized chip manufacture direction develop.
In this case, the scientific research personnel has developed a kind of novel litho machine---advanced scanning projecting photoetching machine.In the step-by-step scanning photo-etching device, exposure process and step and repeat lithography machine are different.Light beam projects on the mask face by a slit and transmission illumination system, mask with set at the uniform velocity by this Shu Guang.Simultaneously, silicon chip motion in the opposite direction below lens.This step-by-step scanning photo-etching device is compared with the step and repeat lithography machine, has lower distortion and more large-area image field; Simultaneously, the mask stage of the work stage of carrying silicon chip and carrying mask can both realize high-speed motion, makes step-by-step scanning photo-etching device have very high throughput rate, thereby has satisfied the demand of market to semi-conductor chip processing better.
The ultimate principle of advanced scanning projecting photoetching machine is seen Fig. 1, and Fig. 1 (a) is image field and slit exposure area schematic, and zone 10 is an image field, and its scope is greater than common step and repeat lithography machine, and step and repeat lithography machine image field is generally 22*22mm
2, step-by-step scanning photo-etching device can reach 26*33mm
2, zone 11 is the slit exposure zone shown in the shade.Fig. 1 (b) is the advanced scanning projecting photoetching machine working state schematic representation, step-by-step scanning photo-etching device is when carrying out exposure scanning, at first will treat on the silicon chip 27 that exposed areas moves to the below of lens 22, silicon slice placed is on work stage 21, and the motion that remains a constant speed in exposure process.The mask 26 on this motion and the mask stage 23 and the motion parts of scanning slit unit 24 in time be strict synchronism on the position, silicon chip surface remains in exposure process in the best focal plane of lens 22 always simultaneously.When illuminator 25 arrives assigned address in work stage 21 and mask stage 23 with command speed, by synchronous triggering and the light dosage 28 that provides exposure required is provided.
Step-by-step scanning photo-etching device is by mask stage 23 and the work stage 21 relative modes that are synchronized with the movement, and waits other submodule collaborative work with illumination, realizes exposure actions.Because the factor of decision exposure quality such as alignment precision, critical size requires each submodule precise synchronization on action sequence that participation exposes in the litho machine.
Step-by-step scanning photo-etching device is compared with the step and repeat lithography machine, need note synchronous problem more, this be because:
(1) to all submodules that relates to, scanning must be finished in the identical time period.Specifically, work stage and mask stage must be passed through track planned in advance in the identical time period; Illuminator must provide equally distributed correct dose in the identical time period; The slit control system must synchronously open and close its slit with mask stage.
(2) for all submodules that relates to, the initial moment of scanning must be identical with the finish time.Particularly, work stage and mask stage must begin to provide the moment of exposure dose in illuminator, arrive correct position with correct speed.
Can draw by above analysis,, require all submodules that relate on scanning sequence, to obtain strict conformance for the exposure scan-synchronized.
In addition, it is that actual scanning is prepared that the submodule that participates in exposing needs a period of time, and this time period is called setup time, is mainly used in the speed that laser instrument precharge and work stage and mask stage begin to quicken finally to reach and remain on appointment.The actual scanning time be meant illuminator provide light source, simultaneously work stage and mask stage with uniform motion, silicon chip uniform exposure, finish the required time of exposure actions.
Therefore, single pass was made of preparatory stage and actual scanning stage in the litho machine.
Because throughput rate and performance demands should be able to directly enter into scanning next time after single pass finishes, and not occur pausing in the middle of twice scanning, such scanning is called continuous exposure scanning.In order to realize continuous exposure scanning, require when carrying out current scanning, can prepare essential information for scanning next time.In the continuous exposure scanning, Sao Miao setup time and actual scanning time need be according to the information acquisitions of current scanning next time, so system can only plan by jump ahead; Simultaneously, in the continuous exposure synchronous scanning process, because the variation of external condition need be used the follow-up exposure parameter of before having finished of scanning information correction.
Can draw as drawing a conclusion from above analysis: realize the control of continuous exposure scan-synchronized, what need that specific mechanism guarantees the control module that relates in the scanning process is strict synchronism in time; In order to guarantee that the synchronizing signal error between each control module is strict controlled in the scope of permission, needs the synchro control system to control accurately in time; The advanced scanning projecting photoetching machine control system has a plurality of control modules, and control system is very complicated, so need a kind of communication modes of hard real time to guarantee synchro control process between each control module, the high-speed serial data communication mechanism of advanced scanning projecting photoetching machine synchronous sequence control designs for the real-time Data Transmission between a plurality of control modules and synchro control.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, realize real time data communication and synchro control thereof between a plurality of control modules of advanced scanning projecting photoetching machine.
For realizing this goal of the invention, the invention provides a kind of serial data communication system of litho machine synchronous sequence control, host computer and industrial computer CPU interconnection, industrial computer CPU board and isochronous bus controller, motion control card, laser numbered card link together, be connected between isochronous bus controller, motion control card, the laser numbered card and also can carry out exchanges data, motion control card and the corresponding I/O of lower floor control panel, track control system and leveling and focusing control system link to each other by the serial data link.Isochronous bus controller is issued synchronizing information to work stage motion control card, mask stage motion control card, alignment motion control card in real time by synchronous data bus, motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, comprehensive respectively one-tenth optical fiber trigger pip and status signal send to the I/O of lower floor control panel, track control system and leveling and focusing control system.
Wherein, described host computer and industrial computer CPU board are by the interconnection of Industrial Ethernet communication mode.Adopt the Virtualization Mode expansion bus to link together between described industrial computer CPU board and isochronous bus controller, motion control card, the laser numbered card.Adopt synchronous data bus to carry out exchanges data between described isochronous bus controller, motion control card, the laser numbered card.Described motion control card comprises work stage motion control card, alignment motion control card and mask stage motion control card, lower floor's I/O control panel comprises the I/O of work stage lower floor control panel and the I/O of mask stage lower floor control panel, wherein, the work stage motion control card links to each other by the serial data link with the I/O of work stage lower floor control panel; The mask stage motion control card links by serial data with the I/O of mask stage lower floor control panel and leveling and focusing control system respectively and links to each other; The alignment motion control card links by serial data with track control system and links to each other.
This law is bright also to provide a kind of serial data communication method of litho machine synchronous sequence control, may further comprise the steps: a. upper computer software is by user's input and the output exposure parameter is set etc. to the work stage mask stage real time operating system that comprises isochronous bus controller; B. work stage mask stage real time operating system sends the various synchro control relations of the comprehensive one-tenth of exposure parameter to isochronous bus controller to the synchro control relation by the Virtualization Mode expansion bus; C. isochronous bus controller concerns the actual synchronous data bus signal of comprehensive one-tenth according to given synchro control, guarantees the synchronous and state synchronized in servo interval of laser numbered card and motion control card; D. motion control card receives the synchronous and state synchronized signal in servo interval of isochronous controller, produces to interrupt giving the high-speed data process chip of motion control card to carry out real-time synchronous processing and servocontrol processing; E. the I/O of lower floor control panel, track control system and leveling and focusing control system receive the synchronous and state synchronized signal in servo interval, trigger the high-speed data process chip and carry out real-time synchronous processing.
Wherein, in the described steps d, motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, comprehensive respectively one-tenth optical fiber trigger pip and status signal, send to the I/O of lower floor control panel, track control system and leveling and focusing control system.Described fiber-optic signal transmits as a signal or data cell with 10, special one digit number is arranged according to distinguishing command signal and data-signal.Described fiber-optic signal Frame is surrounded by frame initiation command and frame end order, and Frame is divided into data frame head and Frame main body two parts, and the data frame head comprises Frame start address and data length information.Described fiber-optic signal Frame carries out a verification to per 4 data unit, and check information is followed 4 data cell back by verification and is sent out; If the result of receiving end verification and the check information that receives do not meet, expression Frame mistake, request repeat.Described fiber-optic signal Frame inserts a serial synch command in each checking data back.In the described steps d, motion control card with servo interval as the servo sample cycle.
The bright application that a kind of serial data communication method of litho machine synchronous sequence control also is provided of this law, may further comprise the steps: steps A: the exposure Control Software module that is positioned at host computer sends to the industrial computer CPU board to exposure parameter by Ethernet; Step B: the industrial computer CPU board receives exposure parameter, and by the operating system of industrial computer CPU board, the invoke synchronous driver module is transferred to isochronous bus controller to the corresponding synchronous controlled variable; Step C: the industrial computer CPU board starts isochronous bus controller by the invoke synchronous driver module; Step D: isochronous bus controller notice motion control card and laser numbered card, current state enters the preparation sweep phase, and work stage is moved to sweep starting point; Step e: the preparation sweep phase of isochronous bus controller control is finished, and isochronous bus controller interrupts to the request of industrial computer CPU board, and the current preparation sweep phase of notice industrial computer CPU board is finished; Step F: isochronous bus controller notice motion control card and laser numbered card, current state enters the actual scanning stage.And output laser explosure synchronizing signal, produce laser pulse; Step G: motion control card is finished scanning motion control according to the requirement of sweep phase.Simultaneously, motion control board sends to the I/O of lower floor control panel, leveling and focusing control system, track control system to servo interval synchronizing signal by high-speed serial data communication, guarantees servo synchronous and state synchronized.And notice enters the actual scanning state, finishes scanning motion control; Step H: the actual scanning stage of isochronous bus controller finishes, and isochronous bus controller interrupts to the request of industrial computer CPU board, and the notice industrial computer current actual scanning stage of CPU board finishes; Step I: if step D is returned in continuous sweep, otherwise to step J; Step J: isochronous bus controller notice motion control card, laser numbered card enter idle condition; Step K: the motion control card notice I/O of lower floor control panel, leveling and focusing control system and track control system enter idle condition.
The synchro control system of the multibus that the present invention realizes can obtain following effect in step-by-step scanning photo-etching device: the accurate synchro control that has realized a plurality of control modules in the exposure scanning process; Realize the reliability of exposure scanning, and then improved production efficiency; Realized of the real-time process control of industrial computer CPU board to synchronous scanning; The real-time and the reliability of servo-control system have been improved;
Description of drawings
Fig. 1 (a) is image field and slit exposure area schematic;
Fig. 1 (b) is the advanced scanning projecting photoetching machine working state schematic representation
Fig. 2 is the level block diagram of high-speed serial data communication mechanism of the present invention;
Fig. 3 (a) is the sending module block diagram of high-speed serial data communication mechanism of the present invention;
Fig. 3 (b) is the receiver module block diagram of high-speed serial data communication mechanism of the present invention;
Fig. 4 is a high-speed serial data communication host-host protocol block diagram of the present invention;
Fig. 5 is the block diagram that high-speed serial data communication mechanism of the present invention is applied to the scan-synchronized control procedure.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is done more detailed explanation:
The present invention is a kind of high-speed serial data communication mechanism of advanced scanning projecting photoetching machine synchronous sequence control, has realized the direct synchronizing signal control of a plurality of control modules of a kind of advanced scanning projecting photoetching machine exposure scanning.This process with the synchronous bus data transfer cycle as time of strictness control benchmark, the triggered time point of strict each synchronizing signal of control, thus realize data and signal between each control module in real time and synchronously.
Advanced scanning projecting photoetching machine is a very complicated control system, the synchronous requirement of a plurality of control modules and several data communication is arranged, to realize strict synchro control between each control module in order making, to have designed a kind of high-speed serial data communication mechanism of advanced scanning projecting photoetching machine synchronous sequence control.
Isochronous bus controller is the core controller of advanced scanning projecting photoetching machine synchro control.After all subsystems that participate in the synchronous scanning process consulted under the exposure Control Software, isochronous bus controller was implemented the real-time synchro control on the control module of whole scanning process.High-speed serial data communication mechanism has guaranteed the real-time control of a plurality of control modules.
The level block diagram of high-speed serial data communication mechanism as shown in Figure 2.
The control module that participates in high-speed serial data communication all has transmission and receiver module, the optical-fibre communications of motion control card control is a main control unit, by host-host protocol module (TRIGGER COMMAND) submodule, servo interval synchronizing signal-synchronous data bus that synchronous data bus is sent interrupts, convert optical fiber to and trigger (TRIGGER) signal, be transmitted to the I/O of lower floor control panel, track control system and leveling and focusing control system.Optical fiber trigger pip (TRIGGER) is a high priority preemptive type signal, has very high real-time.The receiving end of optical-fibre communications receives optical fiber trigger pip (TRIGGER) signal, produces the trigger pip of a hard real time at once, triggers corresponding real-time operation, has guaranteed the synchronous and state synchronization at servo interval.Simultaneously, host-host protocol sends to the I/O of lower floor control panel, track control system and leveling and focusing control system to synchronous state signal, guarantees the state synchronized between a plurality of control modules.
The structured flowchart of high-speed serial data communication mechanism is shown in Fig. 3 (a) and Fig. 3 (b).
The high-speed serial data communication sending module is shown in Fig. 3 (a).Isochronous bus controller produces the synchronous bus look-at-me and gives motion control card according to synchronous requirement, and after motion control card obtained signal, be decomposed into the operation of two steps: send synchronous triggering signal and synchronous state signal, baud rate was 200Mbps.
At first, use trigger pip mechanism in order to make the time-delay minimum of synchronous control signal.Because trigger pip is the hard real time command signal, has the highest transmission priority, so in case produce as the synchronous bus look-at-me of synchronous triggering signal, transmission TRIGGERCOMMAND submodule in the high-speed serial data communication mechanism is passed to the high speed fibre sending module to the serial data code of this signal correspondence in the very first time, the high speed fibre sending module is owing to receive the transmission request of limit priority, this signal is sent chip by the high speed fibre serial at once and convert serial signal to, and convert fiber-optic signal to by high speed fibre serial signal transmitter and send, guarantee that receiving end receives synchronous triggering signal in the shortest time.
Because the motion control calorie requirement is handled the synchronous bus look-at-me, considers the real-time requirement again, so use the highest interrupt priority level to the dsp chip on the motion control card.Have no progeny in the dsp chip response synchronous bus, synchronous state signal is passed through to send the Frame submodule at once, the status data signal is passed to the high speed fibre sending module, the high speed fibre sending module is according to the transmission requirement of data-signal, send chip by the high speed fibre serial and convert serial signal to, and convert fiber-optic signal to by the high speed fibre sender unit and send.
The high-speed serial data communication receiver module is shown in Fig. 3 (b).Isochronous bus controller is according to synchronous requirement, produce the synchronous bus look-at-me and give motion control card, after motion control card obtained signal, the high-speed serial data communication sending module sent to receiver module to synchronous triggering signal and synchronous state signal, and baud rate is 200Mbps.
After fiber-optic signal passes through the high speed fibre signal receiver, by high speed fibre serial received chip, serial data is converted to the identifiable data of high speed fibre receiver module again.The high speed fibre receiver module resolves into synchronous triggering signal and synchronous state signal to data-signal, passes to respectively to receive TRIGGERCOMMAND submodule and receiving data frames submodule.(the TRIGGERCOMMAND coming signal) of expression synchronous triggering signal is used for the synchro control of hard real time to be handled, and guarantees the strict synchronism of control.Synchronous state signal is passed to dsp chip, and Guarantee Status is synchronous.
Because high speed serial communication uses high speed fibre to carry out data transmission as carrier, therefore maximum communication baud rate is 200Mbps, makes the data transmission time-delay can guarantee in very little scope.The maximum delay of synchronous triggering signal guarantees that in 300ns the maximum delay of synchronous state signal guarantees in 400us.Therefore, by above mechanism, can guarantee the synchronous and state synchronized of control signal between a plurality of control modules.
The high speed fibre data-signal transmits as a signal or data cell with 10bit, special one digit number is arranged according to distinguishing command signal and data-signal, has strengthened the reliability of order and data in the high-speed serial data communication.Because the high speed fibre antijamming capability is very strong, optical signal transmission efficient height, therefore, even in the controling environment of very severe, the bit error rate of high speed fibre is also very low.
The transmission of Frame is used a kind of very effective and reliable Data Transport Protocol, as shown in Figure 4.Whole Frame is surrounded by frame initiation command and frame end order, and Frame is divided into data frame head and Frame main body two parts.The data frame head comprises Frame start address and data length information, has guaranteed the integrality of Frame.Simultaneously, in order further to strengthen reliability of data transmission, per 4 data unit are carried out a verification, check information is followed 4 data cell back by verification and is sent out.If the result of receiving end verification and the check information that receives do not meet, expression Frame mistake, request repeat.Simultaneously,, insert a serial synch command, reduce the step-out of serial data transmission in each checking data back in order further to strengthen reliability of data transmission.
Through the assurance of above-mentioned mechanism, high-speed serial data communication mechanism has extreme high reliability and stability when guaranteeing synchronous triggering signal and synchronous state signal.
Advanced scanning projecting photoetching machine needs the synchronous of a plurality of control modules in the process of stepping or scanning, guarantee the strict rapport between each unit.The steps include: that upper computer software is by user input with the output exposure parameter is set etc. to the work stage mask stage real time operating system (Vxworks) that comprises isochronous bus controller.Work stage mask stage real time operating system is the various synchro control relations of the comprehensive one-tenth of exposure parameter.Work stage mask stage real time operating system sends the synchro control relation to isochronous bus controller by the VME bus.Isochronous bus controller concerns the actual synchronous data bus signal of comprehensive one-tenth according to given synchro control, guarantees the synchronous and state synchronized in servo interval of laser numbered card and motion control card.Motion control card receives the synchronous and state synchronized signal in servo interval of isochronous controller, produces to interrupt giving the high-speed data process chip of motion control card to carry out real-time synchronous processing and servocontrol processing.Motion control card with servo interval as the servo sample cycle.Motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, comprehensive respectively one-tenth optical fiber trigger pip (TRGGER) and status signal, send to the I/O of lower floor control panel, guarantee the synchronous and state synchronized in the servo interval of the I/O of lower floor control panel.Motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, comprehensive respectively one-tenth optical fiber trigger pip (TRGGER) and status signal, send to track control system and leveling and focusing control system, guarantee the synchronous and state synchronized in servo interval of these two subsystems.The I/O of lower floor control panel, track control system and leveling and focusing control system receive the synchronous and state synchronized signal in servo interval, trigger the high-speed data process chip and carry out real-time synchronous processing.
From above-described process as can be seen, use high-speed serial data communication mechanism can effectively realize the synchronous of internal system laser numbered card, motion control card and the I/O of lower floor control panel, and effectively realize the track control system that work stage mask stage control system is outer and the synchro control of leveling and focusing control system, fully guarantee the real-time of synchronous control signal and participated in the real time coordination of the control module of whole step-scan synchronizing process.
For a better understanding of the present invention, use synchro control process of the present invention, we have proposed a specific embodiment, realize scanning projection photoetching process high speed serial data communication mechanism, and protection scope of the present invention is not limited to the scope that present embodiment is determined.
As shown in Figure 5, control system is by host computer, industrial computer CPU board, isochronous bus controller, motion control card, laser numbered card, track control system, and composition such as leveling and focusing control system.
Host computer adopts workstation or industry control PC, uses operating systems such as Unix or Windows; The industrial computer CPU board adopts as real time operating systems such as VxWorks, pSOS, RTLinux, WinCE; Host computer and industrial computer CPU board are by the interconnection of Industrial Ethernet communication mode.Adopt Virtualization Mode to expand (VME) bus between industrial computer CPU board and isochronous bus controller, motion control card, the laser numbered card and link together, so that carry out real-time embedded message exchange.Adopt self-defining synchronous data bus (SDB) to carry out exchanges data between isochronous bus controller, motion control card, the laser numbered card.The high speed fibre serial communication uses optical fiber cable to connect.The acp chip that isochronous bus controller, motion control card, laser numbered card use is FPGA, DSP etc.Exposure Control Software module is positioned at host computer; The scan control software module is positioned at the industrial computer CPU board.
In order to realize a plurality of control module synchro control, isochronous bus controller passes through synchronous data bus in real time to the work stage motion control card, the mask stage motion control card, alignment motion control card issue synchronizing information, motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, comprehensive respectively one-tenth optical fiber trigger pip (TRGGER) and status signal, send to the I/O of lower floor control panel, track control system and leveling and focusing control system guarantee the I/O of lower floor control panel, synchronous and the state synchronized in the servo interval of track control system and leveling and focusing control system
Based on the sequential synchro control system of above-mentioned multibus, be incorporated into the control of scanning photoetching machine continuous exposure scan-synchronized, concrete steps are as follows:
Steps A: the exposure Control Software module that is positioned at host computer sends to the industrial computer CPU board to exposure parameter by Ethernet.
Step B: the industrial computer CPU board receives exposure parameter, and by the Vxworks operating system of industrial computer CPU board, the invoke synchronous driver module is transferred to isochronous bus controller to the corresponding synchronous controlled variable.
Step C: the industrial computer CPU board starts isochronous bus controller by the invoke synchronous driver module.
Step D: isochronous bus controller notice motion control card and laser numbered card, current state enters the preparation sweep phase, and work stage is moved to sweep starting point.
Step e: the preparation sweep phase of isochronous bus controller control is finished, and isochronous bus controller interrupts to the request of industrial computer CPU board, and the current preparation sweep phase of notice industrial computer CPU board is finished.
Step F: isochronous bus controller notice motion control card and laser numbered card, current state enters the actual scanning stage.And output laser explosure synchronizing signal, produce laser pulse.
Step G: motion control card is finished scanning motion control according to the requirement of sweep phase.Simultaneously, motion control board sends to the I/O of lower floor control panel, leveling and focusing control system, track control system to servo interval synchronizing signal by high-speed serial data communication, guarantees servo synchronous and state synchronized.And notice enters the actual scanning state, finishes scanning motion control.
Step H: the actual scanning stage of isochronous bus controller finishes, and isochronous bus controller interrupts to the request of industrial computer CPU board, and the notice industrial computer current actual scanning stage of CPU board finishes.
Step I: if step D is returned in continuous sweep, otherwise to step J.
Step J: isochronous bus controller notice motion control card, laser numbered card enter idle condition.
Step K: the motion control card notice I/O of lower floor control panel, leveling and focusing control system and track control system enter idle condition.
That more than introduces only is based on several preferred embodiment of the present invention, can not limit scope of the present invention with this.Any method of the present invention is done replacement, the combination, discrete of step well know in the art, and the invention process step is done well know in the art being equal to change or replace and all do not exceed exposure of the present invention and protection domain.
Claims (13)
1, a kind of serial data communication system of litho machine synchronous sequence control is characterized in that:
Host computer and industrial computer CPU interconnection, industrial computer CPU board and isochronous bus controller, motion control card, laser numbered card link together, be connected between isochronous bus controller, motion control card, the laser numbered card and also can carry out exchanges data, motion control card and the corresponding I/O of lower floor control panel, track control system and leveling and focusing control system link to each other by the serial data link.
Isochronous bus controller is issued synchronizing information to work stage motion control card, mask stage motion control card, alignment motion control card in real time by synchronous data bus, motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, comprehensive respectively one-tenth optical fiber trigger pip and status signal send to the I/O of lower floor control panel, track control system and leveling and focusing control system.
2, the serial data communication system of advanced scanning projecting photoetching machine synchronous sequence control as claimed in claim 1 is characterized in that described host computer and industrial computer CPU board are by the interconnection of Industrial Ethernet communication mode.
3, the serial data communication system of advanced scanning projecting photoetching machine synchronous sequence control as claimed in claim 1 is characterized in that adopting between described industrial computer CPU board and isochronous bus controller, motion control card, the laser numbered card Virtualization Mode expansion bus to link together.
4, the serial data communication system of advanced scanning projecting photoetching machine synchronous sequence control as claimed in claim 1 is characterized in that adopting between described isochronous bus controller, motion control card, the laser numbered card synchronous data bus to carry out exchanges data.
5, the serial data communication system of advanced scanning projecting photoetching machine synchronous sequence control as claimed in claim 1, it is characterized in that described motion control card comprises work stage motion control card, alignment motion control card and mask stage motion control card, lower floor's I/O control panel comprises the I/O of work stage lower floor control panel and the I/O of mask stage lower floor control panel, wherein, the work stage motion control card links to each other by the serial data link with the I/O of work stage lower floor control panel; The mask stage motion control card links by serial data with the I/O of mask stage lower floor control panel and leveling and focusing control system respectively and links to each other; The alignment motion control card links by serial data with track control system and links to each other.
6, a kind of serial data communication method of litho machine synchronous sequence control is characterized in that may further comprise the steps:
A. upper computer software is by user input with the output exposure parameter is set etc. to the work stage mask stage real time operating system that comprises isochronous bus controller;
B. work stage mask stage real time operating system sends the various synchro control relations of the comprehensive one-tenth of exposure parameter to isochronous bus controller to the synchro control relation by the Virtualization Mode expansion bus;
C. isochronous bus controller concerns the actual synchronous data bus signal of comprehensive one-tenth according to given synchro control, guarantees the synchronous and state synchronized in servo interval of laser numbered card and motion control card;
D. motion control card receives the synchronous and state synchronized signal in servo interval of isochronous controller, produces to interrupt giving the high-speed data process chip of motion control card to carry out real-time synchronous processing and servocontrol processing;
E. the I/O of lower floor control panel, track control system and leveling and focusing control system receive the synchronous and state synchronized signal in servo interval, trigger the high-speed data process chip and carry out real-time synchronous processing.
7, the serial data communication method of a kind of litho machine synchronous sequence control as claimed in claim 6, it is characterized in that in the described steps d, motion control card receives the servo interval synchronizing signal and the state synchronized signal of isochronous bus controller, comprehensive respectively one-tenth optical fiber trigger pip and status signal, send to the I/O of lower floor control panel, track control system and leveling and focusing control system.
8, the serial data communication method of a kind of litho machine synchronous sequence control as claimed in claim 7, it is characterized in that described fiber-optic signal transmits as a signal or data cell with 10, special one digit number is arranged according to distinguishing command signal and data-signal.
9, the serial data communication method of a kind of litho machine synchronous sequence control as claimed in claim 7, it is characterized in that described fiber-optic signal Frame is surrounded by frame initiation command and frame end order, and Frame is divided into data frame head and Frame main body two parts, and the data frame head comprises Frame start address and data length information.
10, the serial data communication method of a kind of litho machine synchronous sequence control as claimed in claim 9, it is characterized in that described fiber-optic signal Frame carries out a verification to per 4 data unit, check information is followed 4 data cell back by verification and is sent out; If the result of receiving end verification and the check information that receives do not meet, expression Frame mistake, request repeat.
11, the serial data communication method of a kind of litho machine synchronous sequence control as claimed in claim 9 is characterized in that described fiber-optic signal Frame inserts a serial synch command in each checking data back.
12, the serial data communication method of a kind of litho machine synchronous sequence control as claimed in claim 6 is characterized in that in the described steps d, motion control card with servo interval as the servo sample cycle.
13, a kind of application of serial data communication method of litho machine synchronous sequence control is characterized in that may further comprise the steps:
Steps A: the exposure Control Software module that is positioned at host computer sends to the industrial computer CPU board to exposure parameter by Ethernet;
Step B: the industrial computer CPU board receives exposure parameter, and by the operating system of industrial computer CPU board, the invoke synchronous driver module is transferred to isochronous bus controller to the corresponding synchronous controlled variable;
Step C: the industrial computer CPU board starts isochronous bus controller by the invoke synchronous driver module;
Step D: isochronous bus controller notice motion control card and laser numbered card, current state enters the preparation sweep phase, and work stage is moved to sweep starting point;
Step e: the preparation sweep phase of isochronous bus controller control is finished, and isochronous bus controller interrupts to the request of industrial computer CPU board, and the current preparation sweep phase of notice industrial computer CPU board is finished;
Step F: isochronous bus controller notice motion control card and laser numbered card, current state enters the actual scanning stage.And output laser explosure synchronizing signal, produce laser pulse;
Step G: motion control card is finished scanning motion control according to the requirement of sweep phase.Simultaneously, motion control board sends to the I/O of lower floor control panel, leveling and focusing control system, track control system to servo interval synchronizing signal by high-speed serial data communication, guarantees servo synchronous and state synchronized.And notice enters the actual scanning state, finishes scanning motion control;
Step H: the actual scanning stage of isochronous bus controller finishes, and isochronous bus controller interrupts to the request of industrial computer CPU board, and the notice industrial computer current actual scanning stage of CPU board finishes;
Step I: if step D is returned in continuous sweep, otherwise to step J;
Step J: isochronous bus controller notice motion control card, laser numbered card enter idle condition;
Step K: the motion control card notice I/O of lower floor control panel, leveling and focusing control system and track control system enter idle condition.
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