CN1848002A - Technological parameter and specification controlling method and system - Google Patents
Technological parameter and specification controlling method and system Download PDFInfo
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- CN1848002A CN1848002A CN 200510064113 CN200510064113A CN1848002A CN 1848002 A CN1848002 A CN 1848002A CN 200510064113 CN200510064113 CN 200510064113 CN 200510064113 A CN200510064113 A CN 200510064113A CN 1848002 A CN1848002 A CN 1848002A
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- 238000000034 method Methods 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 claims abstract description 62
- 238000006243 chemical reaction Methods 0.000 claims abstract description 31
- 230000002596 correlated effect Effects 0.000 claims 1
- 230000002040 relaxant effect Effects 0.000 abstract 1
- 230000008569 process Effects 0.000 description 14
- 230000008859 change Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
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Abstract
The present invention reveals one kind of technological parameter and specification controlling method and system. the specification conversion is controlled with the specification control signal of the original control engineering while considering the technological conditions of the former engineering. In case of different manufacture conditions between the former engineering and the later engineering, different specification control may be reached through specification conversion, rather than relaxing the specification or adopting unique specification. Before specification conversion, the system checks the relevant settings automatically and stops the operation of the control bench to avoid error specification control if there is sufficient information for specification conversion.
Description
Technical field
The present invention relates to the control method of a kind of technological parameter and specification, and be particularly related to the process conditions of the preceding engineering of a kind of reference, and reach a kind of technological parameter of specification conversion and control and the control method of specification.
Background technology
In the indication mechanism of factory's manufacturing at present,, all can stipulate manufacturing specification (Specification) according to slip-stick artist's demand to each technology of online all products hereinafter to be referred as the benchmark intelligence channel.And at Bo Saidun manufacturing execution system (Poseidon manufacturing execution system), hereinafter to be referred as MES, control in, can be according to the indication under the benchmark information institute, according to the product of this product other (Prod ID) or manufacture (Technology), cooperate the variation of going up engineering sign indicating number (Process code) and board (Tool) to stipulate different specification control again.Meaning promptly under identical condition, comprises that like products is other, production method, and the engineering sign indicating number, can only reach according to different present boards to distinguish different specification control.
To the control aspect of product engineering quality, the benchmark intelligence channel is controlled by previous information gathering function (Feedforward function).The machine station information of engineering was for example made specification before this function can be collected, and made prescription (Recipe), decided the manufacturing prescription of control engineering board.But because of functional development to the greatest extent imperfect so that at line products if the manufacturing specification of engineering and make prescription before in only with reference to above-mentioned functions can't be stipulated different manufacturing specifications at each board.The existing practice can only be relaxed the manufacturing specification of object, can't custom-made belongs to the manufacturing specification of this board itself.
In a case,, will make wet etching (Wet) board of back engineering use different manufacturing prescriptions to make if the section difference of the thickness of being produced by preceding engineering is different.If can't formulate the specification that conforms with its technology, then will cause the quality bills of materials instability of board for different manufacturing prescriptions.
In another case, before the key stratum of engineering for example after the etching of transistor controls (TG) layer, by sweep electron microscope (Scanning electron microscope, SEM) (Critical dimension, CD) value can influence some electrical parameter and cause influences yield (Yield) to the critical size that measures out.(Self alignment control SAC) adopts various dose (Dosage) to adjust electrically in the mode of injecting by back engineering self-aligned control system and change.But,, possibly can't find in real time and deal with if unusual or internal processes execution error appear in board because present specification institution is loose.
Summary of the invention
Purpose of the present invention is exactly in the control method that a kind of technological parameter and specification are provided, and make to make executive subsystem and the process conditions of the specification control information of former control engineering and preceding engineering can be included in together and considered.And can be according to the difference of back engineering board, stipulate the manufacturing specification that belongs to this board and reach the achievement of strict control product specification.
Another object of the present invention is exactly in the control method that a kind of technological parameter and specification are provided, comprising setting a controlled variable group, and behind the parameter value in obtaining all controlled variable groups, can decide next manufacturing step according to predetermined condition, if information obtains quantity not sufficient, then stop to control the operation of board.
Another purpose of the present invention is in the control system that a kind of technological parameter and specification are provided, and it considers the various parameters of control board and previous board in the lump, by this to provide the control board a more accurate output specification.
The present invention proposes the control method of a kind of technological parameter and specification.At first from least one previous board, collect relevant information, then control the output specification of board according to collected relevant information decision.Wherein, previous board is the board to handling with a collection of object before the control board.
According to the control method of described technological parameter of preferred embodiment of the present invention and specification, when wherein the output specification of board was controlled in decision, collected relevant information comprised manufacturing prescription, manufacturing board and the Fabrication parameter of previous board from previous board.
According to the control method of described technological parameter of preferred embodiment of the present invention and specification, wherein, more with reference to the manufacturing board kind of control board and the manufacturing prescription of control board.
According to the control method of described technological parameter of preferred embodiment of the present invention and specification, last then judge by the control board with the output specification whether the processing that object was carried out is satisfied the criteria.
The present invention proposes the control method of a kind of technological parameter and specification, comprising setting one controlled variable group, and the parameter value of collecting the controlled variable in the controlled variable group.Wherein, the parameter value of at least one part controlled variable in the controlled variable group is to collect from least one previous board and get.Then, determine an output specification of a control board, and the parameter value amount of obtaining in the controlled variable group stops to control the operation of board when being less than a predetermined condition according to the parameter value of controlled variable group.Wherein, this previous board is the board to handling with a collection of object before the control board.
The present invention proposes the control system of a kind of technological parameter and specification in addition.This control system comprises that information provides subsystem, specification conversion and control subsystem and technology controlling and process subsystem.Wherein, information provides subsystem to collect and controls the relevant information of board, and with the relevant information of previous board before this control board to handling with a collection of object.Specification conversion and control subsystem is set the output specification of control board according to the information relevant with control board and previous board.The technology controlling and process subsystem is then according to the Fabrication parameter of this output specification with control control board.
According to above-mentioned, the product that need do the specification conversion is arranged originally, need benchmark intelligence agent's intervention, in artificial mode this product is changed manufacturing process, in the hope of reaching the requirement of different size.Treat to go back to former manufacturing process again after this product process ends.The present invention is because of setting related data in advance, and system just can change specification according to setting, and therefore can reduce a large amount of manually-operateds, more can avoid producing some unnecessary mistakes.
The control of some production can't be changed manufacturing process because of process factors, in order to conform with the specification of all products, must relax the bound of this specification, and might produce the problem that some can't be expected.The present invention causes different products all can meet the desired value of its regulation because of more rigorous for specification requirement, and relatively the quality of product also can obtain to promote.
The board characteristic of engineering is identical before some, but produced object specification differs widely, thereby can't the utilization of phase intermodulation note.The present invention is because of deciding the specification of control engineering according to the different qualities of preceding each board of engineering, so can reach the effect that production capacity was allocated, promoted to board mutually.In addition, whether the present invention is can also the self-verifying specification correct, uses the chance of wrong specification control in the hope of minimizing.
For above and other objects of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Fig. 1 is the control system calcspar of a kind of process specification conversion that illustrates according to a preferred embodiment of the present invention.
Fig. 2 is the control device calcspar of a kind of specification conversion that illustrates according to a preferred embodiment of the present invention.
Fig. 3 is the controlled step of a kind of specification conversion that illustrates according to a preferred embodiment of the present invention.
The reference numeral explanation
110: preceding engineering
120: manufacturing information
130,240: control engineering
140: the specification control information
150: the specification conversion and control
160: the back engineering
210: preceding engineering manufacturing information
211: make board
212: make prescription
213: Fabrication parameter
220: the specification control information
221: product is other
222: the control website
223: the control board
224: the specification conversion regime
230: control system
231: benchmark information subsystem
232: make executive subsystem
233: specification conversion and control subsystem
S310: benchmark information subsystem is collected manufacturing information
S320: make executive subsystem and download manufacturing information
S330: judge whether information is sufficient
S340: if the information deficiency then stops to make
S350: if the information abundance is then carried out the specification conversion
Embodiment
Fig. 1 is the control system calcspar of a kind of process specification conversion that illustrates according to a preferred embodiment of the present invention.Collect manufacturing information 120 in the board of engineering 110 at first in the past and import specification switching control system 150.And when object arrived the website of control engineering 130, the manufacturing executive subsystem in the control engineering 130 can be downloaded to specification switching control system 150 with the predefined specification control information 140 of user.After carrying out specification conversion via this system, again process specification is passed back the website of control engineering 130, the last process specification of regulation back engineering 160 according to this again.
Fig. 2 is the system block diagrams of the control system of a kind of technological parameter that illustrates according to another preferred embodiment of the present invention and specification.In the present embodiment, this control system 230 has comprised 231, one manufacturings of benchmark information subsystem executive subsystem 232, and a specification conversion and control subsystem 233.
In control system 230, at first can in benchmark information subsystem 231, set control information.These control informations can comprise the manufacturing information 210 of preceding engineering and meet the specification control information 220 of this control engineering website.Wherein, the manufacturing information 210 of preceding engineering comprises for example makes board (Tool) 211, manufacturing prescription (Recipe) 212, and Fabrication parameter (Parameter) 213.In addition, the specification control information for example can comprise then that product is other 221, control website 222, control board 223, and specification conversion regime 224.
After in benchmark information subsystem 231 setting being finished, benchmark information subsystem 231 can be downloaded to control information automatically makes executive subsystem 232.After object arrives the control website, to make executive subsystem 232 and the control information of downloading can be passed in the specification conversion and control subsystem 233, specification conversion and control subsystem 233 then carries out the specification conversion of current control board according to these control informations.Then, these are via the control information of specification conversion back gained, may comprise the coming of new parameter of current control board or new output specification etc., can be passed back and make executive subsystem 232.Last and manufacturing information is imported control engineering board 240 (that is the current control board that will control) control its technology by making executive subsystem 232.
Fig. 3 is the controlled step of specification conversion of the control method of a kind of technological parameter that illustrates according to another preferred embodiment of the present invention and specification.Step S310 collects relevant manufacturing information by benchmark information subsystem, comprising preceding engineering manufacturing information and specification control information.When all manufacturing information gatherings are finished, then carry out step S320, download manufacturing information from benchmark information subsystem by making executive subsystem.Step S330, before the specification conversion and control, whether system's this manufacturing information of meeting self-verifying is sufficient.Step S340, if when causing specification conversion and control subsystem to change specification because of the information of conditions such as the preceding engineering information of object or specification control information is not enough, system can send caution (Alarm) automatically, and this object also can't enter board and stop to make, to avoid using wrong specification control.Step S350 is if the data abundance then imports manufacturing information specification conversion and control subsystem and carries out the specification conversion.
Formerly in the case, the section difference of the thickness of being produced by preceding engineering is different, will make the wet etching board of back engineering use different manufacturing prescriptions to make.If use this to implement the control method of described parameter and specification, then can formulate the specification that conforms with its technology for different manufacturing prescriptions, then will improve the quality bills of materials problem of unstable of board.
Formerly in another case, the key stratum of preceding engineering is for example after the etching of transistor controls layer, and can be influenced some electrical parameter and be caused by the critical size value that sweep electron microscope measured out influences yield.Adopt various dose to adjust electrically and change in the mode of injecting by back engineering self-aligned control system.If use this to implement the control method of described parameter and specification, then can formulate the specification that conforms with its technology, and can when unusual or internal processes execution error appear in board, find in real time and deal with for different manufacturing boards.
In sum, under the control of specification conversion and control subsystem of the present invention, except the specification control information of former control engineering, in addition the process conditions of preceding engineering are included in together and considered, so can be according to the difference of back engineering board, stipulate the manufacturing specification that belongs to this board and reach the strict achievement of controlling product specification, improve the specification that general technology adopted and relax or the unified shortcoming of formulating single specification.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; anyly have the knack of this skill person; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is as the criterion when looking accompanying the claim person of defining.
Claims (11)
1. the control method of technological parameter and specification comprises:
From at least one a previous board and a control board, collect relevant information; And
According to collected relevant information, determine an output specification of this control board,
Wherein, this previous board is the board to handling with a collection of object before this control board.
2. the control method of technological parameter as claimed in claim 1 and specification more comprises:
According to collected relevant information, determine the Fabrication parameter of this control board.
3. the control method of technological parameter as claimed in claim 1 and specification, wherein, collected relevant information comprises manufacturing prescription, manufacturing board and the Fabrication parameter of this previous board from this previous board.
4. the control method of technological parameter as claimed in claim 1 and specification, wherein, the relevant information of collecting from this control board comprises the manufacturing board kind of this control board and the manufacturing prescription of this control board.
5. the control method of technological parameter as claimed in claim 1 and specification more comprises:
Judge whether the processing that object was carried out is satisfied the criteria with this output specification by this control board.
6. the control method of technological parameter and specification comprises:
Set a controlled variable group;
Collect the parameter value of the controlled variable in this controlled variable group, wherein, the parameter value of at least one part controlled variable in this controlled variable group is to collect from least one previous board and get; And
Determine an output specification of a control board according to the parameter value of this controlled variable group, and the parameter value amount of obtaining in this controlled variable group stops the operation of this control board when being less than a predetermined condition,
Wherein, this previous board is the board to handling with a collection of object before this control board.
7. the control method of technological parameter as claimed in claim 6 and specification, wherein, this controlled variable group comprise product not, control website, control board, preceding engineering manufacturing information and specification conversion regime one of them.
8. the control method of technological parameter as claimed in claim 6 and specification, wherein, from at least one previous board, collect and this controlled variable group in the parameter value of at least one part controlled variable, comprise this previous board the manufacturing prescription, make board and Fabrication parameter.
9. the control system of technological parameter and specification comprises:
One benchmark information subsystem, collect the information relevant with a control board and with the information of before this control board, a previous board of handling with a collection of object being correlated with;
One specification conversion and control subsystem according to information relevant with this control board and the information relevant with this previous board, is set an output specification of this control board; And
One makes executive subsystem, according to this output specification to control the Fabrication parameter of this control board.
10. the control system of technological parameter as claimed in claim 9 and specification, wherein, the information relevant with this control board comprises the identification parameter of this control board and the control website at this control board place.
11. the control system of technological parameter as claimed in claim 9 and specification, wherein, the information relevant with this previous board comprises the manufacturing prescription of this previous board, makes board and Fabrication parameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510064113 CN1848002A (en) | 2005-04-11 | 2005-04-11 | Technological parameter and specification controlling method and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510064113 CN1848002A (en) | 2005-04-11 | 2005-04-11 | Technological parameter and specification controlling method and system |
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| Publication Number | Publication Date |
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| CN1848002A true CN1848002A (en) | 2006-10-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200510064113 Pending CN1848002A (en) | 2005-04-11 | 2005-04-11 | Technological parameter and specification controlling method and system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104714532A (en) * | 2015-03-10 | 2015-06-17 | 杭州掌企科技有限公司 | Quality control method and device |
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2005
- 2005-04-11 CN CN 200510064113 patent/CN1848002A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104714532A (en) * | 2015-03-10 | 2015-06-17 | 杭州掌企科技有限公司 | Quality control method and device |
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