CN1818574A - Electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing - Google Patents

Electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing Download PDF

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Publication number
CN1818574A
CN1818574A CN 200610024989 CN200610024989A CN1818574A CN 1818574 A CN1818574 A CN 1818574A CN 200610024989 CN200610024989 CN 200610024989 CN 200610024989 A CN200610024989 A CN 200610024989A CN 1818574 A CN1818574 A CN 1818574A
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power
circuit
ultraviolet
signal
radiometer
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CN100465594C (en
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庄松林
瑚琦
顾铃娟
苏锦文
侯建伟
殷森余
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Shanghai Institute of Technical Physics of CAS
University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Abstract

An electric radiation meter of ultraviolet intensified type used for electrically calibrating heat release consists of main measurement circuit formed by photoelectrical automatic balance unit as well as data collection and power calculation unit, optical chopper and electric probe of heat release in ultraviolet intensified type. It is operated as using said balance unit to regulate electric heating power of said probe to let it be equal to light heating power of said probe then measuring electric heating power value by data collection and power calculation unit, finally carrying out digitalization process on electric power value and storing as well as displaying the result.

Description

Electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing
Technical field
The present invention relates to measuring technique, particularly relate to a kind of accurate measuring technique that is used to measure the electricity scaling of ultraviolet radiation power.
Background technology
In general, the measurement to Radiant UV Power has two kinds of methods, a kind of standard sources that is to use, a kind of standard detector that is to use.These two kinds of methods all will be passed through a series of value, thereby make the cumulative errors of transmitting constantly increase, and have influenced the result of final measurement.The existing actinometry standard of China is based on the chamber type thermoelectric pile of detector, and another standard is based on the black matrix of light source, but they all are difficult to use in ultraviolet band, and the error of measuring is also bigger.
Summary of the invention
At the defective that exists in the above-mentioned prior art, technical matters to be solved by this invention provides a kind of precision height that has, and is highly sensitive, the electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing that spectral measurement ranges is wide.
In order to solve the problems of the technologies described above, a kind of electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing provided by the present invention comprises main metering circuit part, high stable optical chopper and ultraviolet enhancement pyroelectricity probe; Wherein,
Main metering circuit part photoelectric automatic balancing system and data acquisition and power calculation system form;
Photoelectric automatic balancing system, become by prime amplifier, frequency-selecting amplifier, synchronous rectifier, compensation integrator, square-wave modulator and balance driver bank, the prime amplifier of its input end connects the pyroelectricity probe, the balance driver of its output terminal connects and the control pyroelectric detector heats with electrical way, its function is to be used to finish to the conversion of input optical signal with to the conditioning of electric signal, and the realization system is to the control of signal transformation.
Data acquisition and power calculation system, form by current-to-voltage converting circuit, A/D analog to digital conversion circuit and single chip machine controlling circuit, the current-to-voltage converting circuit of its input end connects the electrical heating output terminal of photoelectric automatic balancing system, and its function is collection, conversion, correction, storage and the demonstration that is used for the electric power Value Data that equates with optical power value.
The high stable optical chopper uses high precision, and the synchronous motor of high stability is to guarantee the balance of chopper wheel; Shine pyroelectric detector after light signal not only can being modulated, and can provide reference signal for phase lock circuitry;
When the logical light time of chopper, ultraviolet radiation makes detector export corresponding electric signal to the black laminar surface of ultraviolet enhancement pyroelectric detector gold; When chopper cut off light path, ultraviolet radiation no longer heated detector surface, and at this moment the current impulse that servo-drive system (photoelectric automatic balancing system) produces causes pyroelectric detector to produce signal by the electrical heating effect by the black layer of gold of detector surface.Servo-drive system (photoelectric automatic balancing system) constantly increases with the light heating signal also constantly increases the heating current amplitude, when two kinds of heating signals equate, that is to say that the temperature of detector surface reaches balance, and at this moment detector is output as zero.This moment, the light heating power just equals electrical heating power, just can obtain optical power value by data acquisition and power calculation systematic survey electric power value, at last electric power is carried out digitized processing and shows.Certainly because the existence of various errors after taking all factors into consideration, is carried out analysis corrections to measured value, just obtained final measurement.
Further, in described whole calibration measuring system, use the locking detection system of automatic zero set (AZS), adopted 50% duty cycle and an arrowband prime amplifier, and only used the fundamental frequency composition coupling of electrical heating and light heating; Incident radiation is modulated into the square wave of 14Hz, be detected the black absorption of the lip-deep gold of device, add thermoelectric (al) power and also be modulated into the 14Hz square wave, in golden black appliances resistance, produce voltage, both frequencies are identical, phase differential 180 degree replace heating element, and the size of the signal of element output is directly proportional with light heating and electrically heated difference power; Measurement electrical heating power size just can obtain optical power value.
Further, the structure of described data acquisition and power calculation system comprises:
One current-to-voltage converting circuit is used for collection, amplification, the conversion of electrical power signal;
One A/D analog to digital conversion circuit, input end connects the output terminal of current-to-voltage converting circuit, is used for the analog to digital conversion of electrical power signal;
One single chip machine controlling circuit, input end connects the output terminal of A/D analog to digital conversion circuit, and be used for power calculation and power correction: the output terminal of described single chip machine controlling circuit is connected keyboard and display control circuit, print output circuit and interface circuit etc. respectively;
One data storage circuitry is connected with single chip machine controlling circuit, is used for the data storage of data acquisition and power calculation system.
Further, described ultraviolet enhancement pyroelectricity probe designs the PMNT relaxor ferroelectric monocrystal that its material selection pyroelectric coefficient is very high for hanging structure.
Electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing provided by the invention is a kind of high precision absolute radiometer of measuring ultraviolet radiation power, and it belongs to the electricity substituted absolute radiometer of high precision.Because electric scaling radiometer can directly connect optical radiation tolerance and electric weight, obtain optical power value (annotate: what measure is electrical heating detector and the light electric power when adding the thermal detector balance, rather than the value of electrical signals of detector output) here by measuring electric weight.Because the measurement of electric power can have very high precision, so this has also just improved the precision to measuring light power.Electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing is on the basis of ultraviolet enhancement pyroelectric electric device, and the scope of measuring light radiation has been amplified ultraviolet region.It is traceable to the measurement standard of luminous power on the standard of electric power, therefore measures to have very high precision, can reach 1% uncertainty.Electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing has the precision height, and is highly sensitive, and spectral range can expand to characteristics such as ultraviolet region.Make in this way just the problem of tracing to the source of optics calibration to be converted into, rather than use as this optical standard of black matrix to the tracing to the source of electricity standard.So just improved degree of accuracy greatly.Electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing can be applicable to demarcate many occasions such as detector, standard lamp, radiation black matrix, laser powermeter, UV exposure meter.In the practical application, because electronic calibrating thermal electron-releasing radiometer has high precision, and instrumentation production very easily, so it has good Commercial Prospect and application and popularization value.
Description of drawings
Fig. 1 is electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing (ECPR) the system architecture schematic block diagram of the embodiment of the invention;
Fig. 2 is the structural representation block diagram of photoelectric automatic balancing system in the embodiment of the invention;
Fig. 3 is the structural representation block diagram of SCM Based data acquisition of the embodiment of the invention and power calculation system;
Fig. 4 is the structural drawing of the sensitive unit of pyroelectricity in the embodiment of the invention.
Embodiment
Below in conjunction with description of drawings embodiments of the invention are described in further detail, but present embodiment is not limited to the present invention, every employing analog structure of the present invention and similar variation thereof all should be listed protection scope of the present invention in.
The ultimate principle of a kind of ultraviolet enhancement electricity pyroelectricity radiometer measurement system that the embodiment of the invention provided is: when the logical light time of chopper, ultraviolet radiation is to the black laminar surface of ultraviolet enhancement pyroelectric detector gold, the black photo-thermal that absorbs of gold makes detector export corresponding electric signal; When chopper cut off light path, ultraviolet radiation no longer heated detector surface, and at this moment the current impulse that servo-drive system produces causes pyroelectric detector to produce signal by the electrical heating effect by the black layer of gold of detector surface.Servo-drive system constantly increases with the light heating signal also constantly increases the heating current amplitude, when two kinds of heating signals equate, that is to say that the temperature of detector surface reaches balance, and at this moment detector is output as zero.This moment, the light heating power just equals electrical heating power, measures the electric power value and just can obtain optical power value, at last electric power is carried out digitized processing and shows.Certainly because the existence of various errors after taking all factors into consideration, is carried out analysis corrections to measured value, just obtained final measurement.In whole calibration measuring system, used the locking detection system of automatic zero set (AZS), adopt 50% duty cycle and an arrowband prime amplifier, and only use the fundamental frequency composition coupling of electrical heating and light heating.Incident radiation is modulated into the square wave of 14Hz, be detected the black absorption of the lip-deep gold of device, add thermoelectric (al) power and also be modulated into the 14Hz square wave, in golden black appliances resistance, produce voltage, both frequencies are identical, phase differential 180 degree replace heating element, and the size of the signal of element output is directly proportional with light heating and electrically heated difference power.Measurement electrical heating power size just can obtain optical power value.
The theory diagram of a kind of electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing that the embodiment of the invention provided is referring to shown in Figure 1, and its circuit structure comprises main metering circuit part, high stable optical chopper and ultraviolet enhancement pyroelectricity probe; Wherein,
Main metering circuit part
Main metering circuit part is by forming as the photoelectric automatic balancing system of analog servo system and SCM Based data acquisition and power calculation system;
Photoelectric automatic balancing system, become by prime amplifier, frequency-selecting amplifier, synchronous rectifier, compensation integrator, square-wave modulator and balance driver bank, its input end connects the pyroelectricity probe, its function is to be used to finish to the conversion of input optical signal with to the conditioning of electric signal, and the realization system is to the control of signal transformation.
The photoelectric automatic balancing system functional-block diagram as shown in Figure 2; Comprise:
One pyroelectric electric device is used for output work rate variance electric signal;
One prime amplifier, input end connects pyroelectric electric device, is used for the amplification of difference power electric signal;
One frequency-selecting amplifier, input end connects the output terminal of prime amplifier, is used for the frequency-selective filtering of difference power electric signal, and frequency-selecting amplifier is transferred on fundamental frequency, with the outer noise of filtering passband, reduces the overload of synchronous rectifier; And the higher hamonic wave in the filtered signal;
One synchronous rectifier, input end connects the output terminal of frequency-selecting amplifier, and signal is carried out synchronous rectification;
One compensation integrator, input end connects the output terminal of synchronous rectifier, and signal is compensated integration, and the compensation integrator is determining the frequency response of system, and comes systems stabilisation with very high DC current gain;
One square-wave frequency modulation (electrical heating) device, input end connects the output terminal of compensation integrator, is used for the direct current signal of compensation integrator output is changed into the electrical heating signal of polarity alternation;
One balance (excitation) driver, input end connects the output terminal of square-wave frequency modulation (electrical heating) device, reference input connects derived reference signal, and by derived reference signal input with reference to square wave, the balanced excitation driver produces the voltage output of two-way waveform symmetry, carry out push-pull drive, heat for pyroelectricity (detection) device with electricity;
When pyroelectric electric device receives radiation, compensation integrator output dc voltage raises, electrical heating power also rises thereupon, when two heating powers equate, the output of pyroelectric electric device no signal, compensation integrator input current is zero, and its output remains unchanged, and equals luminous power thereby regulate electric power automatically.
Photoelectric automatic balancing system is tracking illumination radiation size automatically, and produces self-adjustable pulse of electrical power simultaneously and go to heat the pyroelectric detector surface, and when light heating that is subjected to when detector surface and electrical heating reached thermal equilibrium, detector was output as zero.That is to say that this photoelectric automatic balancing system can realize automatically that electrical heating detector surface and light heating detector surface have same effect, and makes detector reach thermal equilibrium.
For the size of measuring radiation luminous power, can obtain by the electric power value that the measuring light electrical alternations adds behind the heat-sensing unit surface balance; The theory diagram of SCM Based data acquisition and power calculation system as shown in Figure 3, its structure comprises:
One current-to-voltage converting circuit is used for collection, amplification, the conversion of electrical power signal;
One A/D analog to digital conversion circuit, input end connects the output terminal of current-to-voltage converting circuit, is used for the analog to digital conversion of electrical power signal;
One single chip machine controlling circuit, input end connects the output terminal of A/D analog to digital conversion circuit, and be used for power calculation and power correction: the output terminal of described single chip machine controlling circuit is connected keyboard and display control circuit, print output circuit and interface circuit etc. respectively
One data storage circuitry is connected with single chip machine controlling circuit, is used for the data storage of data acquisition and power calculation system.
The high stable optical chopper
The frequency stability of optical chopper is very high, and to guarantee measuring stability, it shines pyroelectric detector after light signal not only can being modulated, and can provide reference signal for phase lock circuitry.The high stable optical chopper uses high precision, and the motor of high stability guarantees the balance of chopper wheel simultaneously.Adopt the high-precise synchronization motor, adopt single-chip microcomputer frequency adjustable control circuit, by RS232 and computing machine communication.
Ultraviolet enhancement pyroelectricity probe
The pyroelectricity probe adopts the ultraviolet enhancement device, and structure is seen shown in Figure 4, the PMNT relaxor ferroelectric monocrystal that the material selection pyroelectric coefficient is very high, area 10 * 10mm 2, have good homogeneous and smooth spectral response curve, adopt the hanging structure design.

Claims (4)

1, a kind of electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing is characterized in that, comprises main metering circuit part, high stable optical chopper and ultraviolet enhancement pyroelectricity probe; Wherein,
Main metering circuit part is made up of photoelectric automatic balancing system and data acquisition and power calculation system:
Photoelectric automatic balancing system, become by prime amplifier, frequency-selecting amplifier, synchronous rectifier, compensation integrator, square-wave modulator and balance driver bank, the prime amplifier of its input end connects the pyroelectricity probe, the balance driver of its output terminal connects and the control pyroelectric detector heats with electrical way, its function is to be used to finish to the conversion of input optical signal with to the conditioning of electric signal, and the realization system is to the control of signal transformation;
Data acquisition and power calculation system, form by current-to-voltage converting circuit, A/D analog to digital conversion circuit and single chip machine controlling circuit, the current-to-voltage converting circuit of its input end connects the electrical heating output terminal of photoelectric automatic balancing system, and its function is collection, conversion, correction, storage and the demonstration that is used for the electric power Value Data that equates with optical power value;
The high stable optical chopper uses the synchronous motor of high precision, high stability; Shine pyroelectric detector after light signal not only can being modulated, and can provide reference signal for phase lock circuitry;
During measurement, photoelectric automatic balancing system is regulated the electrical heating power of pyroelectric detector, make its light heating power that equals detector,, at last the electric power value is carried out digitized processing and storage and demonstration again by data acquisition and power calculation systematic survey electrical heating power value.
2, electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing according to claim 1, it is characterized in that, in described whole calibration measuring system, be provided with the locking detection system of automatic zero set (AZS), adopt 50% duty cycle and an arrowband prime amplifier, and only use the fundamental frequency composition coupling of electrical heating and light heating; Incident radiation and add the square wave that thermoelectric (al) power all is modulated into 14Hz, both frequencies are identical, phase differential 180 degree, heating element alternately, the size of the signal of element output heats with light and electrically heated difference power is directly proportional.
3, electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing according to claim 1 is characterized in that, the structure of described data acquisition and power calculation system comprises;
One current-to-voltage converting circuit is used for collection, amplification, the conversion of electrical power signal;
One A/D analog to digital conversion circuit, input end connects the output terminal of current-to-voltage converting circuit, is used for the analog to digital conversion of electrical power signal;
One single chip machine controlling circuit, input end connects the output terminal of A/D analog to digital conversion circuit, and be used for power calculation and power correction: the output terminal of described single chip machine controlling circuit is connected keyboard and display control circuit, print output circuit and interface circuit respectively;
One data storage circuitry is connected with single chip machine controlling circuit, is used for the data storage of data acquisition and power calculation system.
4, electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing according to claim 1 is characterized in that, described ultraviolet enhancement pyroelectricity probe is hanging structure, and its material is the PMNT relaxor ferroelectric monocrystal.
CNB2006100249895A 2006-03-23 2006-03-23 Electronic calibrating thermal electron-releasing radiometer with ultraviolet reinforcing Expired - Fee Related CN100465594C (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102077467A (en) * 2008-07-08 2011-05-25 香港中文大学 Sensor interface devices and amplifiers
CN101655390B (en) * 2009-09-07 2011-07-20 中国兵器工业第二〇五研究所 Laser absolute radiation transfer standard device
CN102435320A (en) * 2011-10-13 2012-05-02 上海理工大学 Digital automatic frequency locking photoelectric equivalent balance system of electrical calibration heat radiometer
CN103376156A (en) * 2012-04-20 2013-10-30 肖晓飞 Optical power collection system with software
CN104198036A (en) * 2014-09-10 2014-12-10 上海理工大学 Power measuring circuit
CN104198037A (en) * 2014-09-10 2014-12-10 上海理工大学 Digital balance drive device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85200370U (en) * 1985-04-01 1985-09-10 中国科学院电子学研究所 Laser powermeter responded to all wavelengths
CN2047010U (en) * 1989-03-20 1989-11-01 中国科学院物理研究所 Dk type laser dynamometer
CN2071334U (en) * 1989-12-06 1991-02-13 中国科学院物理研究所 Lead zirconium titanate heat discharge laser power meter
US5281818A (en) * 1990-06-11 1994-01-25 Matsushita Electric Industrial Co., Ltd. Pyro-electric type infrared detector
JPH0894435A (en) * 1994-09-22 1996-04-12 Matsushita Electric Ind Co Ltd Ultraviolet radiation detector
CN2876738Y (en) * 2006-03-23 2007-03-07 上海理工大学 Electrical calibrator for UV radiation testing

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102077467A (en) * 2008-07-08 2011-05-25 香港中文大学 Sensor interface devices and amplifiers
CN101655390B (en) * 2009-09-07 2011-07-20 中国兵器工业第二〇五研究所 Laser absolute radiation transfer standard device
CN102435320A (en) * 2011-10-13 2012-05-02 上海理工大学 Digital automatic frequency locking photoelectric equivalent balance system of electrical calibration heat radiometer
CN102435320B (en) * 2011-10-13 2013-06-26 上海理工大学 Digital automatic frequency locking photoelectric equivalent balance system of electrical calibration heat radiometer
CN103376156A (en) * 2012-04-20 2013-10-30 肖晓飞 Optical power collection system with software
CN104198036A (en) * 2014-09-10 2014-12-10 上海理工大学 Power measuring circuit
CN104198037A (en) * 2014-09-10 2014-12-10 上海理工大学 Digital balance drive device

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