CN1789006A - 激光转写设备及使用该设备制造有机发光显示器的方法 - Google Patents
激光转写设备及使用该设备制造有机发光显示器的方法 Download PDFInfo
- Publication number
- CN1789006A CN1789006A CNA2005101127693A CN200510112769A CN1789006A CN 1789006 A CN1789006 A CN 1789006A CN A2005101127693 A CNA2005101127693 A CN A2005101127693A CN 200510112769 A CN200510112769 A CN 200510112769A CN 1789006 A CN1789006 A CN 1789006A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 238000012546 transfer Methods 0.000 title description 9
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 239000012044 organic layer Substances 0.000 claims abstract description 43
- 238000000034 method Methods 0.000 claims abstract description 42
- 239000010410 layer Substances 0.000 claims description 47
- 238000013518 transcription Methods 0.000 claims description 17
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- 238000000059 patterning Methods 0.000 claims description 10
- 238000010030 laminating Methods 0.000 claims description 9
- 229910010272 inorganic material Inorganic materials 0.000 claims description 8
- 239000011147 inorganic material Substances 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 7
- GVFOJDIFWSDNOY-UHFFFAOYSA-N antimony tin Chemical compound [Sn].[Sb] GVFOJDIFWSDNOY-UHFFFAOYSA-N 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 5
- 239000011368 organic material Substances 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 238000004528 spin coating Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 229920000767 polyaniline Polymers 0.000 claims description 3
- 229920000123 polythiophene Polymers 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 230000004888 barrier function Effects 0.000 claims description 2
- 239000002322 conducting polymer Substances 0.000 claims description 2
- 229920001940 conductive polymer Polymers 0.000 claims description 2
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229920000128 polypyrrole Polymers 0.000 claims description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- YMMGRPLNZPTZBS-UHFFFAOYSA-N 2,3-dihydrothieno[2,3-b][1,4]dioxine Chemical compound O1CCOC2=C1C=CS2 YMMGRPLNZPTZBS-UHFFFAOYSA-N 0.000 claims 1
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- 229910052751 metal Inorganic materials 0.000 description 6
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- 238000003475 lamination Methods 0.000 description 5
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- GKWLILHTTGWKLQ-UHFFFAOYSA-N 2,3-dihydrothieno[3,4-b][1,4]dioxine Chemical compound O1CCOC2=CSC=C21 GKWLILHTTGWKLQ-UHFFFAOYSA-N 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
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- 229910052741 iridium Inorganic materials 0.000 description 2
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Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/50—Forming devices by joining two substrates together, e.g. lamination techniques
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
- H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040082724A KR20060033554A (ko) | 2004-10-15 | 2004-10-15 | 레이저 열전사 장치 및 이를 이용한 유기전계 발광 소자의제조 방법 |
KR1020040082724 | 2004-10-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1789006A true CN1789006A (zh) | 2006-06-21 |
CN100446992C CN100446992C (zh) | 2008-12-31 |
Family
ID=36180307
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101127693A Active CN100446992C (zh) | 2004-10-15 | 2005-10-12 | 激光转写设备及使用该设备制造有机发光显示器的方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7837822B2 (zh) |
JP (1) | JP4489682B2 (zh) |
KR (1) | KR20060033554A (zh) |
CN (1) | CN100446992C (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100505335C (zh) * | 2007-01-08 | 2009-06-24 | 李毅 | 太阳能电池激光标刻设备 |
CN102282693A (zh) * | 2009-01-14 | 2011-12-14 | 皇家飞利浦电子股份有限公司 | 用于在衬底上沉积至少一个导电膜的方法 |
CN102522372A (zh) * | 2006-07-28 | 2012-06-27 | 株式会社半导体能源研究所 | 半导体器件的制造方法 |
CN107034513A (zh) * | 2015-11-03 | 2017-08-11 | 三星显示有限公司 | 激光结晶装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7534544B2 (en) * | 2007-10-19 | 2009-05-19 | E.I. Du Pont De Nemours And Company | Method of separating an exposed thermal transfer assemblage |
KR20090052656A (ko) * | 2007-11-21 | 2009-05-26 | 삼성전자주식회사 | 도너 기판 및 이를 이용한 표시 장치의 제조방법 |
KR100959111B1 (ko) * | 2008-03-27 | 2010-05-25 | 삼성모바일디스플레이주식회사 | 유기전계발광소자의 제조장치 및 제조방법 |
KR101156433B1 (ko) * | 2009-12-15 | 2012-06-18 | 삼성모바일디스플레이주식회사 | 박막 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법 |
US20110209749A1 (en) * | 2010-01-07 | 2011-09-01 | Korea Advanced Institute Of Science And Technology | Pattern transfer method and apparatus, flexible display panel, flexible solar cell, electronic book, thin film transistor, electromagnetic-shielding sheet, and flexible printed circuit board applying thereof |
KR20120119089A (ko) | 2011-04-20 | 2012-10-30 | 삼성디스플레이 주식회사 | 유기발광표시장치 제조방법 |
JP6055705B2 (ja) * | 2013-03-28 | 2016-12-27 | 株式会社Screenホールディングス | 転写装置および転写方法 |
WO2014157658A1 (ja) * | 2013-03-29 | 2014-10-02 | 大日本印刷株式会社 | 素子製造方法および素子製造装置 |
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JP3269678B2 (ja) * | 1992-11-30 | 2002-03-25 | 株式会社東芝 | 静電チャック装置および静電チャック方法 |
US6399143B1 (en) * | 1996-04-09 | 2002-06-04 | Delsys Pharmaceutical Corporation | Method for clamping and electrostatically coating a substrate |
US5998085A (en) * | 1996-07-23 | 1999-12-07 | 3M Innovative Properties | Process for preparing high resolution emissive arrays and corresponding articles |
EP0850779B1 (en) * | 1996-12-27 | 2001-05-02 | Omron Corporation | Method of marking an object with a laser beam |
WO1998042474A1 (fr) * | 1997-03-21 | 1998-10-01 | Kabushiki Kaisha Yaskawa Denki | Procede et materiel de marquage |
GB9803763D0 (en) | 1998-02-23 | 1998-04-15 | Cambridge Display Tech Ltd | Display devices |
TW486806B (en) * | 1998-10-30 | 2002-05-11 | Hitachi Ltd | Semiconductor integrated circuit apparatus and IC card |
US6114085A (en) * | 1998-11-18 | 2000-09-05 | Clariant Finance (Bvi) Limited | Antireflective composition for a deep ultraviolet photoresist |
US6114088A (en) * | 1999-01-15 | 2000-09-05 | 3M Innovative Properties Company | Thermal transfer element for forming multilayer devices |
KR100825691B1 (ko) | 1999-07-26 | 2008-04-29 | 가부시키가이샤 니콘 | 기판지지장치 및 기판처리장치 |
JP4590663B2 (ja) | 1999-10-29 | 2010-12-01 | セイコーエプソン株式会社 | カラーフィルタの製造方法 |
JP2001310490A (ja) | 2000-04-27 | 2001-11-06 | Fuji Photo Film Co Ltd | 画像形成方法 |
KR100342653B1 (ko) | 2000-08-24 | 2002-07-03 | 김순택 | 유기 전계발광소자의 제조 방법 |
JP2002086939A (ja) | 2000-09-20 | 2002-03-26 | Fuji Photo Film Co Ltd | 画像形成方法 |
JP3997738B2 (ja) * | 2001-03-14 | 2007-10-24 | 株式会社日立製作所 | 液晶表示素子の製造方法及びその製造装置 |
JP2003320466A (ja) * | 2002-05-07 | 2003-11-11 | Disco Abrasive Syst Ltd | レーザビームを使用した加工機 |
KR100483986B1 (ko) * | 2002-06-20 | 2005-04-15 | 삼성에스디아이 주식회사 | 인광 재료의 혼합물을 발광 재료로 사용한 고분자 유기전계 발광 소자 |
US6695030B1 (en) | 2002-08-20 | 2004-02-24 | Eastman Kodak Company | Apparatus for permitting transfer of organic material from a donor web to form a layer in an OLED device |
JP2004200598A (ja) * | 2002-12-20 | 2004-07-15 | Renesas Technology Corp | 半導体記憶装置および半導体装置 |
CN1759014A (zh) | 2003-03-13 | 2006-04-12 | 皇家飞利浦电子股份有限公司 | 标记方法和有标记的物体 |
JP2004306191A (ja) | 2003-04-07 | 2004-11-04 | Seiko Epson Corp | テーブル装置、成膜装置、光学素子、半導体素子及び電子機器 |
KR100623694B1 (ko) * | 2004-08-30 | 2006-09-19 | 삼성에스디아이 주식회사 | 레이저 전사용 도너 기판 및 그 기판을 사용하여 제조되는유기 전계 발광 소자의 제조 방법 |
-
2004
- 2004-10-15 KR KR1020040082724A patent/KR20060033554A/ko active Search and Examination
-
2005
- 2005-10-11 US US11/246,254 patent/US7837822B2/en active Active
- 2005-10-12 CN CNB2005101127693A patent/CN100446992C/zh active Active
- 2005-10-17 JP JP2005301366A patent/JP4489682B2/ja active Active
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102522372A (zh) * | 2006-07-28 | 2012-06-27 | 株式会社半导体能源研究所 | 半导体器件的制造方法 |
US8703579B2 (en) | 2006-07-28 | 2014-04-22 | Semiconductor Energy Laborator Co., Ltd. | Method of manufacturing semiconductor device |
CN102522372B (zh) * | 2006-07-28 | 2014-09-24 | 株式会社半导体能源研究所 | 半导体器件的制造方法 |
CN100505335C (zh) * | 2007-01-08 | 2009-06-24 | 李毅 | 太阳能电池激光标刻设备 |
CN102282693A (zh) * | 2009-01-14 | 2011-12-14 | 皇家飞利浦电子股份有限公司 | 用于在衬底上沉积至少一个导电膜的方法 |
CN102282693B (zh) * | 2009-01-14 | 2013-10-23 | 皇家飞利浦电子股份有限公司 | 用于在衬底上沉积至少一个导电膜的方法和*** |
CN107034513A (zh) * | 2015-11-03 | 2017-08-11 | 三星显示有限公司 | 激光结晶装置 |
US10898972B2 (en) | 2015-11-03 | 2021-01-26 | Samsung Display Co., Ltd. | Laser crystallizing apparatus |
CN107034513B (zh) * | 2015-11-03 | 2021-04-20 | 三星显示有限公司 | 激光结晶装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20060033554A (ko) | 2006-04-19 |
CN100446992C (zh) | 2008-12-31 |
JP2006114506A (ja) | 2006-04-27 |
US7837822B2 (en) | 2010-11-23 |
JP4489682B2 (ja) | 2010-06-23 |
US20060082640A1 (en) | 2006-04-20 |
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Address after: Gyeonggi Do, South Korea Patentee after: Samsung Display Co., Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung Mobile Display Co., Ltd. |