CN1786662A - Double hole type measural apparatus for scattering angle of laser beam - Google Patents
Double hole type measural apparatus for scattering angle of laser beam Download PDFInfo
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- CN1786662A CN1786662A CN 200510127368 CN200510127368A CN1786662A CN 1786662 A CN1786662 A CN 1786662A CN 200510127368 CN200510127368 CN 200510127368 CN 200510127368 A CN200510127368 A CN 200510127368A CN 1786662 A CN1786662 A CN 1786662A
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- ccd detector
- laser beam
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- light tube
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Abstract
The invention relates to two-hole type laser beam spread angle testing device. It solves the problem that the measuring precision of laser beam spread angle is low. It is made up optical antenna, two-hole diaphragm, long focus collimator, CCD detector, and computer with image collection card. Dish shaped plate body surface is set two circular holes. And the two holes are at the two side of the two-hole diaphragm axis. The former four are set with the same axis center. The imaging surface of the CCD detector is set at the focal plane of the long focus collimator. The signal input end of the CCD detector and the computer are connected. The invention adopts CCD detector to detect facula, and calculates its center position by image treating system. And its detecting precision error is less than 1 micron. And the detecting precision of laser shot beam spread angle can reach 0.1 micro rad. The invention has the advantages of reasonable design, reliable working, and large popularizing value.
Description
Technical field
The present invention relates to a kind of beam divergence angle proving installation of laser.
Background technology
The beam divergence angle of Laser emission is the important parameter of existing laser beam emitting device, to its accurately measure be the development of high-precision laser emitter with use in major issue.Current measuring methods is many determines the scattered laser beam angle by the exploring laser light energy distribution, but this method only limits the use of in the beam divergence angle of measurement Gaussian laser beam, inaccurate when being used for other type.Because laser beam emitting device is increasingly sophisticated at present, and semiconductor laser output laser energy distributes comparatively complicated, the measuring accuracy of prior art is subjected to very big restriction, when the emission beam divergence angle is only surveyed for the quasi-parallel light of tens of μ rad, can not accurately record the numerical value at scattered laser beam angle, be difficult to satisfy test request.
Summary of the invention
The purpose of this invention is to provide a kind of double hole type measural apparatus for scattering angle of laser beam, measure the low defective of beam divergence angle degree of accuracy of quasi-parallel laser to overcome existing measurement mechanism.The present invention is by optical antenna 1, diplopore diaphragm 2, long burnt parallel light tube 3, ccd detector 4 is formed with the computing machine 5 that has image pick-up card, have two circular hole 2-1 on the disc surfaces of discoid diplopore diaphragm 2, two circular hole 2-1 are symmetricly set on the both sides of diplopore diaphragm 2 axial lines, optical antenna 1, diplopore diaphragm 2, long burnt parallel light tube 3 and ccd detector 4 preface concentric successively are provided with, the imaging surface of ccd detector 4 is positioned on the focal plane of long burnt parallel light tube 3, and the signal output part of ccd detector 4 connects the signal input part of the computing machine 5 that has image pick-up card.When using device of the present invention and carrying out the scattered laser beam angular measurement, by tested optical system emission laser beam, laser beam is from optical antenna 1 incident, pass two circular hole 2-1 and long burnt parallel light tube 3, on ccd detector 4, become two points as hot spot, ccd detector 4 has its image information that collects the computing machine of image pick-up card by the data cable input, computing machine calculates two spot center respectively, utilizes two points just can calculate the beam divergence angle of laser beam as the focal length of the distance of hot spot and the known burnt parallel light tube 3 of length.Rotate diplopore diaphragm 2 around axis in addition, can obtain the beam divergence angle data of many group laser beams, the mean value of getting multi-group data can remove the accidental error of testing process, makes measurement more accurate.The invention provides a kind of measurement mechanism of brand-new laser transmitting system beam divergence angle.Adopt CCD to survey hot spot, and by image processing system the spot center position is accurately calculated, resolution can reach 0.1 pixel.For existing C CD manufacturing accuracy, utilize this device hot spot detecting for spaces trueness error less than 1 μ m.Cooperate long burnt parallel light tube, the measuring accuracy of Laser emission beam divergence angle can reach the order of magnitude of 0.1 μ rad, thereby satisfies the demand of high precision measurement.Reasonable in design, the reliable operation of device of the present invention has bigger promotional value.
Description of drawings
Fig. 1 is a structural representation of the present invention, and Fig. 2 is the geometric relationship synoptic diagram that the present invention calculates beam divergence angle, and Fig. 3 is the structural representation of diplopore diaphragm 2 in the embodiment two.
Embodiment
Embodiment one: specify present embodiment below in conjunction with Fig. 1 and Fig. 2.Present embodiment is by optical antenna 1, diplopore diaphragm 2, long burnt parallel light tube 3, ccd detector 4 is formed with the computing machine 5 that has image pick-up card, have two circular hole 2-1 on the disc surfaces of discoid diplopore diaphragm 2, two circular hole 2-1 are symmetricly set on the both sides of diplopore diaphragm 2 axial lines, optical antenna 1, diplopore diaphragm 2, long burnt parallel light tube 3 and ccd detector 4 preface concentric successively are provided with, the imaging surface of ccd detector 4 is positioned on the focal plane of long burnt parallel light tube 3, and the signal output part of ccd detector 4 connects the signal input part of the computing machine 5 that has image pick-up card.
Wherein, n is the number of pixel in the sample window, g
iBe the gray-scale value of pixel, B is a sampling threshold, and u (x) is a unit-step function, (x
i, y
i) be the coordinate of pixel.Choosing of sampling threshold by the intrinsic noise of system and sensor and the situation decision of bias light interference.Pixel gray-scale value to the sample window edge averages, and can estimate sampling threshold
W wherein and H are respectively with the horizontal and vertical number of pixels of sample window.
Utilize above-mentioned algorithm to calculate the center X of hot spot respectively
C1, Y
C1, X
C2, Y
C2, then hot spot spacing d is
As shown in Figure 2, the diplopore diaphragm 2 among Fig. 2, long burnt parallel light tube 3 and ccd detector 4 have all adopted the equivalent easy technique of painting, are convenient to geometric analysis, and by geometric relationship as can be known, this is apart from there being following relation between d and system under test (SUT) light beam beam divergence angle θ:
F ' is the focal length of long burnt parallel light tube 3, utilizes formula (1) can calculate system under test (SUT) scattered laser beam angle θ thus.
Embodiment two: specify present embodiment below in conjunction with Fig. 3.The difference of present embodiment and embodiment one is: the diameter phi of the circular hole 2-1 of diplopore diaphragm 2 and two circular hole 2-1 pitch of holes D sums equal the bore of optical antenna 1.Other composition is identical with embodiment one with annexation.So be provided with, two circular hole 2-1 pitch of holes D are maximal value basically, thereby make hot spot distance that two circular hole 2-1 are become on ccd detector 4 farthest, are convenient to accurate measurement.
Claims (2)
1, double hole type measural apparatus for scattering angle of laser beam, it is characterized in that it is by optical antenna (1), diplopore diaphragm (2), long burnt parallel light tube (3), ccd detector (4) and the computing machine (5) that has an image pick-up card are formed, have two circular holes (2-1) on the disc surfaces of discoid diplopore diaphragm (2), two circular holes (2-1) are symmetricly set on the both sides of diplopore diaphragm (2) axial line, optical antenna (1), diplopore diaphragm (2), long burnt parallel light tube (3) and ccd detector (4) preface concentric successively are provided with, the imaging surface of ccd detector (4) is positioned on the focal plane of long burnt parallel light tube (3), and the signal output part of ccd detector (4) connects the signal input part of the computing machine (5) that has image pick-up card.
2, double hole type measural apparatus for scattering angle of laser beam according to claim 1 is characterized in that diameter (φ) and two circular holes (2-1) pitchs of holes (D) sum of the circular hole (2-1) of diplopore diaphragm (2) equal the bore of optical antenna (1).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2005101273685A CN100370223C (en) | 2005-12-21 | 2005-12-21 | Double hole type measural apparatus for scattering angle of laser beam |
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CNB2005101273685A CN100370223C (en) | 2005-12-21 | 2005-12-21 | Double hole type measural apparatus for scattering angle of laser beam |
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CN1786662A true CN1786662A (en) | 2006-06-14 |
CN100370223C CN100370223C (en) | 2008-02-20 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101086530B (en) * | 2007-07-04 | 2011-03-30 | 中国航空工业第一集团公司第六一三研究所 | 1.064um laser range finder transmitting antenna debugging method and apparatus |
CN105547198A (en) * | 2016-02-23 | 2016-05-04 | 丹阳丹耀光学有限公司 | Lens split beam photoelectric angle measuring device and detection method thereof |
CN105606039A (en) * | 2015-12-22 | 2016-05-25 | 中国科学院长春光学精密机械与物理研究所 | Method and device for precisely measuring light source parallelism |
CN112219096A (en) * | 2018-03-23 | 2021-01-12 | 光原创新科技有限公司 | Method and system for measuring optical shear of a birefringent device beyond the diffraction limit |
CN112229607A (en) * | 2020-09-30 | 2021-01-15 | 西安理工大学 | Device and method for measuring far-field beam expansion and scintillation characteristics in turbulent atmosphere |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN85205319U (en) * | 1985-11-30 | 1987-11-07 | 陕西师范大学 | Laser divergance angle measuring meter |
JPH0446691A (en) * | 1990-06-14 | 1992-02-17 | Mitsubishi Heavy Ind Ltd | Method for measuring divergent angle of yag laser beam |
CN1180232C (en) * | 2001-08-20 | 2004-12-15 | 中国科学院光电技术研究所 | Laser beam divergence angle testing method |
CN100354621C (en) * | 2003-12-26 | 2007-12-12 | 中国科学院半导体研究所 | Laser divergence angle measuring instrument and measuring method |
-
2005
- 2005-12-21 CN CNB2005101273685A patent/CN100370223C/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101086530B (en) * | 2007-07-04 | 2011-03-30 | 中国航空工业第一集团公司第六一三研究所 | 1.064um laser range finder transmitting antenna debugging method and apparatus |
CN105606039A (en) * | 2015-12-22 | 2016-05-25 | 中国科学院长春光学精密机械与物理研究所 | Method and device for precisely measuring light source parallelism |
CN105606039B (en) * | 2015-12-22 | 2018-10-16 | 中国科学院长春光学精密机械与物理研究所 | A kind of method and device of precise measuring source collimation |
CN105547198A (en) * | 2016-02-23 | 2016-05-04 | 丹阳丹耀光学有限公司 | Lens split beam photoelectric angle measuring device and detection method thereof |
CN112219096A (en) * | 2018-03-23 | 2021-01-12 | 光原创新科技有限公司 | Method and system for measuring optical shear of a birefringent device beyond the diffraction limit |
CN112229607A (en) * | 2020-09-30 | 2021-01-15 | 西安理工大学 | Device and method for measuring far-field beam expansion and scintillation characteristics in turbulent atmosphere |
CN112229607B (en) * | 2020-09-30 | 2022-07-05 | 西安理工大学 | Device and method for measuring far-field beam expansion and scintillation characteristics in turbulent atmosphere |
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CN100370223C (en) | 2008-02-20 |
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