CN1769151A - Method for delivering to cabin - Google Patents
Method for delivering to cabin Download PDFInfo
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- CN1769151A CN1769151A CN 200410089710 CN200410089710A CN1769151A CN 1769151 A CN1769151 A CN 1769151A CN 200410089710 CN200410089710 CN 200410089710 CN 200410089710 A CN200410089710 A CN 200410089710A CN 1769151 A CN1769151 A CN 1769151A
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- cabin
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- cabins
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- 238000000034 method Methods 0.000 title claims abstract description 69
- 235000012431 wafers Nutrition 0.000 claims description 128
- 230000008569 process Effects 0.000 claims description 38
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000013078 crystal Substances 0.000 abstract 3
- 230000008859 change Effects 0.000 description 14
- 238000007726 management method Methods 0.000 description 8
- 239000000047 product Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000009183 running Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a cabin distribution method for distributing several crystal plates to one machine, while the machine comprises several cabins for processing the crystal plates according to the formulas. And the distribution method comprises: setting the conditions of machine and cabins, judging if said formulas can be processed according to the condition of cabins, and distributing the crystal plates to machine according selected formulas to be processed.
Description
Technical field
The invention provides a kind of dispensing (dispatch) method of semiconductor board, refer in particular to the method that a kind of state according to the cabin is sent wafer.
Background technology
In semiconductor fabrication, different semiconductor products can be distributed to each semiconductor board according to different technical recipes (recipe) and carry out processed, and each board includes a plurality of cabins (chamber), and define a plurality of technical recipes and come semiconductor product is carried out wafer (wafer) processing, wherein each technical recipe defines path, a cabin, and path, cabin record board employed cabin when carrying out technical recipe and coming wafer process.Please refer to Fig. 1, Fig. 1 is the scheme drawing of known wafer delivery structure, and a plurality of wafers 12,14 are delivered to a board 20 by branch and carried out wafer process according to pairing technical recipe.Board 20 includes a plurality of load ports 22,24 and a plurality of cabin 26,28, load port 22 is connected to cabin 26, and load port 24 is connected to cabin 28, and board 20 definition are corresponding to two technical recipes in path, two cabins, article one, be cabin 26, another is cabin 28.Suppose that wafer 12 and wafer 14 pairing manufacturing paths all need carry out wafer process via cabin 26 or cabin 28, wafer 12 will be delivered to the load port 22 and load port 24 of board 20 respectively with wafer 14 by branch, load port 22 is sent to cabin 26 with wafer 12 and carries out wafer process, load port 24 then is sent to wafer 14 cabin 28 and carries out wafer process, then the cabin 26 of board 20 and cabin 28 can be carried out the processed of wafer 12 and wafer 14 respectively, make board 20 reach the highest utilization ratio.
When 26 faults of cabin, can't carry out wafer process by cabin 26 12 of the wafers of load port 22 and handle, and must seek in the corresponding technical recipe of institute other path, cabin again, promptly wafer 12 can also carry out the wafer process processing by cabin 28.Yet, load port 22 is not connected to cabin 28, so must take out the wafer of having waited at load port 22 12 earlier, wafer 12 is being transferred to load port 24 again, carry out the wafer process processing to be sent to cabin 28, though cabin 26 and cabin 28 are all within same board 20, the difference of load port must expend the extra time and transmits the processing wafer because of connection, causes the prolongation of wafer process time.Generally speaking, among known wafer delivery structure, wafer is delivered to load port according to cooresponding technical recipe by branch, carry out wafer process to wait for the cabin, and during the et out of order problem of a certain cabin and the wafer that causes being sent to carry out processed according to original path, cabin the time, divided the wafer of delivering to load port to be sent again, can't learn in real time that the state in cabin is sent wafer in each board, thereby causing the prolongation of wafer process time, the overall operation usefulness of system is also thereby reduce.
Summary of the invention
Therefore, main purpose of the present invention is to provide a kind of state according to the cabin to send the method for wafer, to address the above problem.
According to the present invention, a kind of method for delivering to cabin is disclosed, be used for a plurality of wafers are sent in a board, board includes a plurality of cabins, be used for coming wafer process according to a plurality of technical recipes, the dispensing management process include set board and etc. the state in cabin, judge according to the state in cabin whether technical recipe can be carried out, and send wafer to board according to executable technical recipe, make the cabin to wafer process.
Method for delivering to cabin of the present invention is sent wafer according to the state in board and cabin, when the arbitrary cabin et out of order in arbitrary board, the state in cabin then real-time response to delivery system, the path, cabin that comprises this fault cabin then can't be carried out, for the wafer that originally needs this path, cabin to process, then seek other path, executable cabin again according to pairing technical recipe, divide and deliver to other not cabin of fault, and can not take place known delivery structure in the problems such as wafer that retransfer, and the state in cabin also can be learnt to carry out more complete management in real time by delivery system, therefore retransfer when the present invention not only can save the cabin fault time of wafer, more can improve the overall efficiency of system.
Description of drawings
Fig. 1 is the scheme drawing of known wafer delivery structure.
Fig. 2 is the scheme drawing of wafer delivery structure of the present invention.
Fig. 3 is for setting the diagram of circuit of semiconductor board according to the inventive method.
Fig. 4 is the diagram of circuit of wafer dispensing of the present invention.
Fig. 5 is the example of wafer delivery structure of the present invention.
Fig. 6 is the scheme drawing of the technical recipe of wafer among Fig. 5.
Fig. 7 is the diagram of circuit of the present invention with manual type management board.
The reference numeral explanation
20,40,90 boards
12,14,32,34,96,98 wafers
22,24,42,44,86,88 load ports
26,28,46,48,81,82,83,84,85 cabins
50～78 steps
The specific embodiment
Please refer to Fig. 2, Fig. 2 is delivered to a board 40 by branch and carries out wafer process according to pairing technical recipe for the scheme drawing of wafer delivery structure of the present invention, a plurality of wafers 32,34.Board 40 includes a plurality of load ports 42,44 and a plurality of cabin 46,48, load port 42 is connected to cabin 46 and cabin 48, and load port 44 also is connected to cabin 46 and cabin 48, board 40 definition are corresponding to two technical recipes in path, two cabins, article one, be cabin 46, another is cabin 48.Suppose that wafer 32 and wafer 34 pairing manufacturing paths all need carry out wafer process via cabin 46 or cabin 48, wafer 32 will be delivered to the load port 42 and load port 44 of board 40 respectively with wafer 34 by branch, load port 42 is sent to cabin 46 with wafer 32 and carries out wafer process, load port 44 then is sent to wafer 34 cabin 48 and carries out wafer process, then the cabin 46 of board 40 and cabin 48 can be carried out the processed of wafer 32 and wafer 34 respectively, make board 40 reach the highest utilization ratio.
When 46 faults of cabin, 32 of the wafers that former setting is handled via cabin 46 can't carry out, and must seek in the corresponding technical recipe of institute other path, cabin again, and for example wafer 32 can also carry out the wafer process processing by cabin 48.Below utilize the preferred embodiments of the present invention to describe.
In order to carry out wafer dispensing and managing semiconductor board 40 more efficiently, before semiconductor board 40 runnings, delivery system must be set board 40 and cabin 46,48 earlier, again according to technical recipe dispensing wafer 32,34.Please refer to Fig. 3, Fig. 3 is the diagram of circuit of setting semiconductor board 40 according to method of the present invention, and its flow process includes the following step:
Step 50: the state of setting board 40 and cabin 46,48 is " awaiting orders ", " production " or " fault ".Wherein, state does not carry out wafer process and can receive wafer 32,34 to process for " awaiting orders " expression cabin 46,48; State is carrying out wafer process for " production " expression cabin 46,48; State can't receive wafer 32,34 to process for " fault " expression cabin 46,48;
Step 52: the technical recipe that defines required execution according to the product category of each wafer 32,34;
Step 54: for each technical recipe defines path, a cabin, each path, cabin record board 40 is carried out technical recipes spendable cabin with to wafer process the time, wherein the path, cabin is represented with operator, operator comprise " with " (AND) and pairing two cabins of " or " (OR) " with " expression operator both sides all must use, and " or " pairing two cabins of expression operator both sides can select wherein one carry out the processing of wafer.For example: path, a cabin is if be expressed as " 46 and 48 " (" 46 and 48 "), on behalf of two cabins 46,48, it all must use, and if a cabin path representation is " 46 or 48 " (" 46or 48 "), on behalf of 46,48 need in two cabins, it wherein use and get final product in a cabin;
Step 56: the precedence of setting the path, cabin of each technical recipe; And
Step 58: enable board 40.
Wherein, before board is carried out technical recipe, can determine the precedence in the path, cabin of each technical recipe earlier.Precedence during the path, cabin can be subjected to the state in cabin 46,48 and the influence of product category, and its pairing wafer of path, cabin with higher prior preface can preferentially be delivered to cabin 46,48 by branch and handles.For instance, if when the state in cabin 46 is " fault ", then all paths, cabin that must use cabin 46 can be judged as and can not carry out, and relatively the precedence in these paths, cabin can be considered minimum.In addition, because of the demand of manufacturing line, some product can be classified as needs preferential production, in such cases, being used for producing its path, cabin of the required technical recipe of this series products can be raised, so that can be handled to the cabin by the allotment of labor as quickly as possible in order to the wafer that manufactures this series products.
After board 40 starts, can according to wafer distributing method of the present invention wafer be delivered to board 40 in 32,34 minutes to carry out wafer process again.Please refer to Fig. 4, Fig. 4 is the diagram of circuit of wafer distributing method of the present invention, and its flow process comprises the following step:
Step 60: delivery system begins to send wafer 32,34;
Step 62: judge in 32,34 pairs of emergency chamber paths of wafer, whether pairing cabin 46,48 is " awaiting orders " or " production " state, if cabin 46,48 is " awaiting orders " or " production " state, then continue execution in step 64, if cabin 46,48 is for " awaiting orders " or " production " state, " fault " state just, representative can't be made, then wafer was not delivered to board 40 in 32,34 minutes, and get back to step 60 and use other path, executable cabin to send;
Step 64: the use precedence according to cabin 46,48 was delivered to board 40 in 32,34 minutes with wafer, made cabin 46 or 48 pairs of wafers 32,34 in the board 40 carry out wafer process;
Step 66: whether the state of judging board 40 and cabin 46,48 needs to change, and then continues execution in step 68 if need to change, and rebound step 60 continues the next processed wafer of dispensing if need not change then.For example after wafer 32 or 34 is sent to cabin 46 or 48, for avoiding repeating wafer 32 or 34 is sent to the cabin 46 or 48 that has processed, or adjust the preferred path that wafer is made, cabin 46 or 48 " awaiting orders " state originally must be changed into " production " state.In addition, if cabin 46 or 48 handles two batches of wafers continuously, the intact back of current a collection of processing of wafers and when needing to handle a collection of wafer in back, cabin 46 or 48 state can be maintained under the state of " production "; And
Step 68: the state that changes board 40 and cabin 46,48 is " awaiting orders ", " production " or " fault ", and the state of board 40 can change automatically according to the state in cabin 46,48.
For more detailed description dispensing management process of the present invention, please refer to Fig. 5 and explain the mechanism of sending wafer according to the state and the technical recipe in board and cabin, Fig. 5 is the scheme drawing of wafer delivery structure of the present invention.Wherein board 90 comprises a plurality of load ports 86,88 and a plurality of cabin 81,82,83,84,85, load port 86 is connected to cabin 81, and load port 88 also is connected to cabin 82, and wafer 96,98 can be sent to cabin 81,82,83,84,85 to process via load port 86,88 respectively.With the board 40 of Fig. 2 similarly, board 90 also can define a plurality of technical recipes and send to when wafer 96,98 with record and add required path, cabin of going through in man-hour in the board 90.Please refer to Fig. 6, Fig. 6 is the scheme drawing of the technical recipe of wafer 96,98 among Fig. 5, technical recipe 1 is the technical recipe of wafer 96, definition path, a cabin is also represented with operator: (81 and 83 and 84) or (81 and 82 and 85) promptly: (81 and, 83 and 84) or (81 and, 82 and 85), promptly wafer 96 must be in regular turn via the processing in cabin 81,83,84 or in regular turn via the processing in cabin 81,82,85; Technical recipe 2 is the technical recipe of wafer 98, and definition path, a cabin is also represented with operator: (82 and 85) promptly: (82 and 85), promptly wafer 98 must be via the processing of cabin 82 and 85.
Wherein, cabin 82 can receive by the wafer 98 of load port 88 transmission or by cabin 81,84 wafers of being processed 96, if all cabins 81～85 of hypothesis board 90 are all armed state, and beginning is with (81 and 83 and 84) i.e. path, the cabin processed wafer 96 and with (82 and 85) promptly of (81 and, 83 and 84): path, the cabin processed wafer 98 of (82 and 85), the path, cabin (81 and 83 and 84) of causing wafer 96 afterwards when cabin 83 faults is promptly: (81 and, 83 and 84) in the time of can't being performed, and board 90 can be with another path, still executable cabin (81 and 82 and 85) promptly: (81 and, 82 and 85) replace original path, cabin (81 and 83 and 84) promptly: (81 and, 83 and 84).Thus, make path, cabin (81 and 83 and 84) promptly when cabin 83 faults: (81 and, 83 and 84) are in the time of can not being performed, board 90 can will originally be set for and must carry out path, cabin (81 and 83 and 84) promptly: the wafer 96 of (81 and, 83 and 84), change and set for to carry out path, cabin (81 and 82 and 85) promptly: (81 and, 82 and 85), finish the relevant manufacturing of technical recipe 1.
In management board 40 and cabin 46,48 o'clock as shown in Figure 2, must use manual type to handle some special statuss under some situation, for example, when part cabin 46,48 need be safeguarded, just must use manual type to interrupt the running in cabin 46,48, and the state in the cabin 46,48 of being safeguarded simultaneously must change to " fault ", so that the unlikely cabin 46,48 that is transferred into of wafer.Please also refer to Fig. 2 and Fig. 7, Fig. 7 is the diagram of circuit of the present invention with manual type management board, and its flow process comprises the following step:
Step 70: the user judges whether the board 40 and the state in cabin 46,48 need to change;
Step 72: the user for board 40 and cabin 46,48 select its state that must change over;
Step 74: can not influence the running in other cabin 46,48 in order to ensure changing the action of board 40 with cabin 46,48 states, must can change its state in changing preceding earlier judge whether of board 40 with cabin 46,48 states, if can change its state then continues execution in step 76, if can't change then execution in step 78 of its state;
Step 76: need change into selected state with cabin 46,48 by change state board 40; And
Step 78: finish manual type management board.
Compared to known technology, method for delivering to cabin of the present invention is sent wafer according to the state in board and cabin, when the arbitrary cabin et out of order in arbitrary board, the state in cabin then real-time response to delivery system, the path, cabin that comprises this fault cabin then can't be carried out, for the wafer that originally needs this path, cabin to process, then seek other path, executable cabin again according to pairing technical recipe, or deliver to other not cabin of fault via the delivery system branch according to identical path, cabin, and can not take place known delivery structure in the problems such as wafer that retransfer, and the state in cabin also can be learnt to do more complete management in real time by delivery system, therefore retransfer when the present invention not only can save the cabin fault time of wafer, more can improve the overall efficiency of system.
The above only is the preferred embodiments of the present invention, and all equivalences of carrying out according to claim of the present invention change and revise, and all should belong to covering scope of the present invention.
Claims (15)
1. the distributing method of a semiconductor board is used for a plurality of wafers are sent in a board, and this board includes a plurality of cabins, and comes these a plurality of wafer processs according to a plurality of technical recipes, and this distributing method includes:
Set the state in this board and these a plurality of cabins;
State according to these a plurality of cabins judges whether these a plurality of technical recipes can be carried out; And
Send these a plurality of wafers to this board according to executable technical recipe, make these a plurality of cabins these a plurality of wafer processs.
2. distributing method as claimed in claim 1, it also comprises:
For this technical recipe respectively defines path, a cabin, respectively this path, cabin is write down this board and is carried out employed cabin when respectively this technical recipe comes wafer process.
3. distributing method as claimed in claim 2, wherein this path, a plurality of cabin is represented with a plurality of operators.
4. distributing method as claimed in claim 3, wherein these a plurality of operators comprise " with " and " or ".
5. distributing method as claimed in claim 2, it also comprises:
Set the precedence in this path, cabin; And
According to the precedence in this path, cabin, should deliver to this a plurality of cabins by a plurality of wafer branches.
6. distributing method as claimed in claim 5, it also comprises:
Define the product category of these a plurality of wafers, and set at least one technical recipe of institute's palpus execution by each product category; And
Set the precedence in this path, pairing cabin of a plurality of technical recipes according to the product category of these a plurality of wafers.
7. distributing method as claimed in claim 5, wherein the state in these a plurality of cabins of foundation decides the precedence in this path, a plurality of cabin.
8. distributing method as claimed in claim 1, wherein the state in this board and these a plurality of cabins comprise await orders, production and fault.
9. distributing method as claimed in claim 1, wherein the state of this board changes automatically according to the state in these a plurality of cabins.
10. the distributing method of a semiconductor board is used for a plurality of wafers are sent in a board, and this board includes a plurality of cabins, and this distributing method includes:
Set the state in this board and these a plurality of cabins;
Define the product category of these a plurality of wafers, and set at least one technical recipe of institute's palpus execution by each product category;
For this technical recipe respectively defines path, a cabin, respectively this path, cabin is write down this board and is carried out employed cabin when respectively this technical recipe comes wafer process;
Set the precedence in this path, cabin, and set the precedence in this path, pairing cabin of a plurality of technical recipes according to the product category of these a plurality of wafers;
State according to these a plurality of cabins judges whether these a plurality of technical recipes can be carried out; And
According to executable technical recipe and according to the precedence in this path, cabin, should deliver to this a plurality of cabins by a plurality of wafer branches, make these a plurality of cabins to these a plurality of wafer processs.
11. distributing method as claimed in claim 10, wherein this path, a plurality of cabin is represented with a plurality of operators.
12. distributing method as claimed in claim 11, wherein these a plurality of operators comprise " with " and " or ".
13. distributing method as claimed in claim 10, wherein the state in these a plurality of cabins of foundation decides the precedence in this path, a plurality of cabin.
14. distributing method as claimed in claim 10, wherein the state in this board and these a plurality of cabins comprise await orders, production and fault.
15. distributing method as claimed in claim 10, wherein the state of this board changes automatically according to the state in these a plurality of cabins.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410089710 CN1769151A (en) | 2004-11-02 | 2004-11-02 | Method for delivering to cabin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410089710 CN1769151A (en) | 2004-11-02 | 2004-11-02 | Method for delivering to cabin |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1769151A true CN1769151A (en) | 2006-05-10 |
Family
ID=36750754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410089710 Pending CN1769151A (en) | 2004-11-02 | 2004-11-02 | Method for delivering to cabin |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1769151A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102768940A (en) * | 2011-05-04 | 2012-11-07 | 北大方正集团有限公司 | Method and device for selecting operation machines on production line |
| CN105843180A (en) * | 2015-01-15 | 2016-08-10 | 中芯国际集成电路制造(上海)有限公司 | Dispatching system and dispatching method based on semiconductor processing equipment production recipe |
-
2004
- 2004-11-02 CN CN 200410089710 patent/CN1769151A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102768940A (en) * | 2011-05-04 | 2012-11-07 | 北大方正集团有限公司 | Method and device for selecting operation machines on production line |
| CN102768940B (en) * | 2011-05-04 | 2014-12-03 | 北大方正集团有限公司 | Method and device for selecting operation machines on production line |
| CN105843180A (en) * | 2015-01-15 | 2016-08-10 | 中芯国际集成电路制造(上海)有限公司 | Dispatching system and dispatching method based on semiconductor processing equipment production recipe |
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