CN1742218A - 带有集成透镜的光电微模块 - Google Patents
带有集成透镜的光电微模块 Download PDFInfo
- Publication number
- CN1742218A CN1742218A CN200380109124.3A CN200380109124A CN1742218A CN 1742218 A CN1742218 A CN 1742218A CN 200380109124 A CN200380109124 A CN 200380109124A CN 1742218 A CN1742218 A CN 1742218A
- Authority
- CN
- China
- Prior art keywords
- encapsulation
- photoelectric device
- lens
- cavity
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005538 encapsulation Methods 0.000 claims description 109
- 230000003287 optical effect Effects 0.000 claims description 43
- 239000013307 optical fiber Substances 0.000 claims description 42
- 238000007789 sealing Methods 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 14
- 230000008878 coupling Effects 0.000 claims description 8
- 238000010168 coupling process Methods 0.000 claims description 8
- 238000005859 coupling reaction Methods 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000001465 metallisation Methods 0.000 abstract description 4
- 230000005693 optoelectronics Effects 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 239000011521 glass Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000007767 bonding agent Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000005622 photoelectricity Effects 0.000 description 2
- 241000662429 Fenerbahce Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
Claims (36)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/305,255 | 2002-11-26 | ||
US10/305,255 US6969204B2 (en) | 2002-11-26 | 2002-11-26 | Optical package with an integrated lens and optical assemblies incorporating the package |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1742218A true CN1742218A (zh) | 2006-03-01 |
CN100383574C CN100383574C (zh) | 2008-04-23 |
Family
ID=32325389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2003801091243A Expired - Lifetime CN100383574C (zh) | 2002-11-26 | 2003-11-24 | 带有集成透镜的封装和包括该封装的组件 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6969204B2 (zh) |
EP (1) | EP1565771A2 (zh) |
JP (2) | JP2006507679A (zh) |
CN (1) | CN100383574C (zh) |
TW (1) | TWI290245B (zh) |
WO (1) | WO2004049022A2 (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101785160B (zh) * | 2007-07-20 | 2011-09-28 | 康宁股份有限公司 | 波长经转换、波长经调制的半导体激光器中的对准方法 |
CN104459925A (zh) * | 2013-09-17 | 2015-03-25 | 富士康(昆山)电脑接插件有限公司 | 透镜模组 |
CN105659131A (zh) * | 2013-08-22 | 2016-06-08 | 康宁光电通信有限责任公司 | 具有包括grin透镜的光学通路的内插器耦接组件以及相关光学插头组件 |
CN109416446A (zh) * | 2016-10-11 | 2019-03-01 | 华为技术有限公司 | 一种光收发组件 |
CN111295608A (zh) * | 2018-04-20 | 2020-06-16 | 斯科雅有限公司 | 光组件 |
CN112612084A (zh) * | 2019-10-04 | 2021-04-06 | 财团法人工业技术研究院 | 测试装置与异质整合结构 |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7224856B2 (en) | 2001-10-23 | 2007-05-29 | Digital Optics Corporation | Wafer based optical chassis and associated methods |
US7961989B2 (en) * | 2001-10-23 | 2011-06-14 | Tessera North America, Inc. | Optical chassis, camera having an optical chassis, and associated methods |
US6893170B1 (en) * | 2001-11-02 | 2005-05-17 | Phillip J. Edwards | Optical/electrical module |
US6932520B2 (en) * | 2003-02-03 | 2005-08-23 | Jds Uniphase Corporation | Modular optical components |
EP1517166B1 (en) | 2003-09-15 | 2015-10-21 | Nuvotronics, LLC | Device package and methods for the fabrication and testing thereof |
US20050063637A1 (en) * | 2003-09-22 | 2005-03-24 | Mershon Jayne L. | Connecting a component with an embedded optical fiber |
US7251393B2 (en) * | 2004-03-30 | 2007-07-31 | Lockheed Martin Corporation | Optical router |
US20070055375A1 (en) * | 2005-09-02 | 2007-03-08 | Anova Corporation | Methods and apparatus for reconstructing the annulus fibrosis |
US7682090B2 (en) * | 2005-12-16 | 2010-03-23 | Finisar Corporation | Integrated focusing and reflecting structure in an optical assembly |
US7528422B2 (en) * | 2006-01-20 | 2009-05-05 | Hymite A/S | Package for a light emitting element with integrated electrostatic discharge protection |
US8044412B2 (en) * | 2006-01-20 | 2011-10-25 | Taiwan Semiconductor Manufacturing Company, Ltd | Package for a light emitting element |
JP2007287967A (ja) * | 2006-04-18 | 2007-11-01 | Shinko Electric Ind Co Ltd | 電子部品装置 |
KR100889976B1 (ko) * | 2006-10-24 | 2009-03-24 | 이형종 | 광 모듈과 이를 이용한 광 센서 및 그 제조방법 |
US20090154872A1 (en) * | 2007-12-18 | 2009-06-18 | Sherrer David S | Electronic device package and method of formation |
DE102008014121A1 (de) * | 2007-12-20 | 2009-06-25 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung von Halbleiterchips und Halbleiterchip |
US8280207B2 (en) | 2008-11-06 | 2012-10-02 | Luxtera Inc. | Method and system for coupling optical signals into silicon optoelectronic chips |
US8168939B2 (en) | 2008-07-09 | 2012-05-01 | Luxtera, Inc. | Method and system for a light source assembly supporting direct coupling to an integrated circuit |
US10613281B2 (en) * | 2008-07-09 | 2020-04-07 | Luxtera, Inc. | Method and system for coupling a light source assembly to an optical integrated circuit |
US9971107B2 (en) * | 2008-07-09 | 2018-05-15 | Luxtera, Inc. | Method and system for coupling a light source assembly to an optical integrated circuit |
US8265487B2 (en) * | 2009-07-29 | 2012-09-11 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Half-duplex, single-fiber (S-F) optical transceiver module and method |
US8923670B2 (en) * | 2009-11-11 | 2014-12-30 | Samtec, Inc. | Molded optical structure for optical transceiver |
WO2011109442A2 (en) * | 2010-03-02 | 2011-09-09 | Oliver Steven D | Led packaging with integrated optics and methods of manufacturing the same |
US9746628B2 (en) | 2011-11-30 | 2017-08-29 | 3M Innovative Properties Company | Active optical cable assembly including optical fiber movement control |
US9274291B2 (en) | 2011-11-30 | 2016-03-01 | 3M Innovative Properties Company | Optical fiber connector assembly with printed circuit board stabilization features |
CN104508527B (zh) | 2012-05-11 | 2017-10-13 | 安费诺富加宜(亚洲)私人有限公司 | 光学耦合装置和光学通信*** |
JP6200642B2 (ja) * | 2012-11-30 | 2017-09-20 | 日本オクラロ株式会社 | 光学装置 |
JP6051253B2 (ja) * | 2015-03-30 | 2016-12-27 | 沖電気工業株式会社 | 光双方向通信モジュール |
FR3037190B1 (fr) * | 2015-06-02 | 2017-06-16 | Radiall Sa | Module optoelectronique pour liaison optique sans contact mecanique, ensemble de modules, systeme d'interconnexion, procede de realisation et de connexion a une carte associes |
JP2017069241A (ja) * | 2015-09-28 | 2017-04-06 | 京セラ株式会社 | 半導体レーザ素子用パッケージおよび半導体レーザ装置 |
US10319654B1 (en) | 2017-12-01 | 2019-06-11 | Cubic Corporation | Integrated chip scale packages |
CN111352192B (zh) * | 2018-12-20 | 2021-08-10 | 青岛海信宽带多媒体技术有限公司 | 一种光模块 |
WO2022020257A1 (en) * | 2020-07-20 | 2022-01-27 | Apple Inc. | Photonic integrated circuits with controlled collapse chip connections |
CN113467015B (zh) * | 2021-08-03 | 2023-03-21 | 新疆师范大学 | 一种激光器耦合台的中心校准装置 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07123175B2 (ja) * | 1986-09-17 | 1995-12-25 | 株式会社リコー | 半導体レ−ザ装置 |
US4826272A (en) * | 1987-08-27 | 1989-05-02 | American Telephone And Telegraph Company At&T Bell Laboratories | Means for coupling an optical fiber to an opto-electronic device |
US4897711A (en) * | 1988-03-03 | 1990-01-30 | American Telephone And Telegraph Company | Subassembly for optoelectronic devices |
DE3914835C1 (zh) * | 1989-05-05 | 1990-07-26 | Ant Nachrichtentechnik Gmbh, 7150 Backnang, De | |
DE59009661D1 (de) | 1990-06-27 | 1995-10-19 | Siemens Ag | Sende- und Empfangsmodul für eine bidirektionale optische Nachrichten- und Signalübertragung. |
JPH0667069A (ja) * | 1992-08-24 | 1994-03-11 | Nec Corp | 光半導体装置 |
DE4313493A1 (de) | 1992-11-25 | 1994-05-26 | Ant Nachrichtentech | Anordnung zur Ankopplung eines Lichtwellenleiters an ein lichtaussendendes oder -empfangendes Element |
WO1996000920A1 (en) | 1994-06-30 | 1996-01-11 | The Whitaker Corporation | Optoelectronic package and bidirectional optical transceiver for use therein |
DE4436204C1 (de) * | 1994-09-29 | 1996-03-21 | Siemens Ag | Optische Kopplungsanordnung |
DE4440976A1 (de) | 1994-11-17 | 1996-05-23 | Ant Nachrichtentech | Optische Sende- und Empfangseinrichtung mit einem oberflächenemittierenden Laser |
DE4440935A1 (de) * | 1994-11-17 | 1996-05-23 | Ant Nachrichtentech | Optische Sende- und Empfangseinrichtung |
DE19527026C2 (de) | 1995-07-24 | 1997-12-18 | Siemens Ag | Optoelektronischer Wandler und Herstellverfahren |
DE19600306C1 (de) | 1996-01-05 | 1997-04-10 | Siemens Ag | Halbleiter-Bauelement, insb. mit einer optoelektronischen Schaltung bzw. Anordnung |
US5821530A (en) * | 1996-01-16 | 1998-10-13 | Wireless Control Systems, Inc | Coadunate emitter/detector for use with fiber optic devices |
US5771254A (en) * | 1996-01-25 | 1998-06-23 | Hewlett-Packard Company | Integrated controlled intensity laser-based light source |
DE19616969A1 (de) | 1996-04-27 | 1997-10-30 | Bosch Gmbh Robert | Optische Baugruppe zur Ankopplung eines Lichtwellenleiters und Verfahren zur Herstellung derselben |
JPH09311253A (ja) * | 1996-05-20 | 1997-12-02 | Fujitsu Ltd | 光結合構造とその製造方法 |
JPH10126002A (ja) * | 1996-10-23 | 1998-05-15 | Matsushita Electron Corp | 光伝送モジュール |
US6208783B1 (en) * | 1997-03-13 | 2001-03-27 | Cirrex Corp. | Optical filtering device |
JPH1164687A (ja) * | 1997-08-22 | 1999-03-05 | Alps Electric Co Ltd | 光送受信モジュール |
US6036872A (en) | 1998-03-31 | 2000-03-14 | Honeywell Inc. | Method for making a wafer-pair having sealed chambers |
DE19823691A1 (de) | 1998-05-27 | 1999-12-02 | Siemens Ag | Gehäuseanordnung für Lasermodul |
US7004644B1 (en) | 1999-06-29 | 2006-02-28 | Finisar Corporation | Hermetic chip-scale package for photonic devices |
US6547455B1 (en) * | 1999-10-18 | 2003-04-15 | Nippon Sheet Glass Co., Ltd. | Optical module for a semiconductor light-emitting device |
DE10034865B4 (de) * | 2000-07-18 | 2006-06-01 | Infineon Technologies Ag | Optoelektronisches oberflächenmontierbares Modul |
JP2002056557A (ja) * | 2000-08-08 | 2002-02-22 | Matsushita Electric Ind Co Ltd | 受発光ユニットおよびそれを用いた光ピックアップ |
US6818464B2 (en) | 2001-10-17 | 2004-11-16 | Hymite A/S | Double-sided etching technique for providing a semiconductor structure with through-holes, and a feed-through metalization process for sealing the through-holes |
US6939058B2 (en) * | 2002-02-12 | 2005-09-06 | Microalign Technologies, Inc. | Optical module for high-speed bidirectional transceiver |
-
2002
- 2002-11-26 US US10/305,255 patent/US6969204B2/en not_active Expired - Lifetime
-
2003
- 2003-11-24 WO PCT/IB2003/005394 patent/WO2004049022A2/en not_active Application Discontinuation
- 2003-11-24 EP EP03772535A patent/EP1565771A2/en not_active Withdrawn
- 2003-11-24 CN CNB2003801091243A patent/CN100383574C/zh not_active Expired - Lifetime
- 2003-11-24 JP JP2004554839A patent/JP2006507679A/ja active Pending
- 2003-11-25 TW TW092132974A patent/TWI290245B/zh not_active IP Right Cessation
-
2010
- 2010-11-26 JP JP2010264104A patent/JP2011054995A/ja active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101785160B (zh) * | 2007-07-20 | 2011-09-28 | 康宁股份有限公司 | 波长经转换、波长经调制的半导体激光器中的对准方法 |
CN105659131A (zh) * | 2013-08-22 | 2016-06-08 | 康宁光电通信有限责任公司 | 具有包括grin透镜的光学通路的内插器耦接组件以及相关光学插头组件 |
US9979469B2 (en) | 2013-08-22 | 2018-05-22 | Corning Optical Communications LLC | Interposer coupling assembly having an optical pathway including a GRIN lens and related optical plug assemblies |
CN104459925A (zh) * | 2013-09-17 | 2015-03-25 | 富士康(昆山)电脑接插件有限公司 | 透镜模组 |
CN109416446A (zh) * | 2016-10-11 | 2019-03-01 | 华为技术有限公司 | 一种光收发组件 |
CN109416446B (zh) * | 2016-10-11 | 2020-09-25 | 华为技术有限公司 | 一种光收发组件 |
US10855375B2 (en) | 2016-10-11 | 2020-12-01 | Huawei Technologies Co., Ltd. | Optical transceiver assembly |
CN111295608A (zh) * | 2018-04-20 | 2020-06-16 | 斯科雅有限公司 | 光组件 |
CN111295608B (zh) * | 2018-04-20 | 2021-09-03 | 斯科雅有限公司 | 光组件 |
CN112612084A (zh) * | 2019-10-04 | 2021-04-06 | 财团法人工业技术研究院 | 测试装置与异质整合结构 |
Also Published As
Publication number | Publication date |
---|---|
WO2004049022A2 (en) | 2004-06-10 |
CN100383574C (zh) | 2008-04-23 |
WO2004049022A3 (en) | 2004-08-12 |
JP2006507679A (ja) | 2006-03-02 |
US6969204B2 (en) | 2005-11-29 |
TW200417766A (en) | 2004-09-16 |
TWI290245B (en) | 2007-11-21 |
US20040101259A1 (en) | 2004-05-27 |
JP2011054995A (ja) | 2011-03-17 |
EP1565771A2 (en) | 2005-08-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1742218A (zh) | 带有集成透镜的光电微模块 | |
US6998691B2 (en) | Optoelectronic device packaging with hermetically sealed cavity and integrated optical element | |
US7165896B2 (en) | Light transmitting modules with optical power monitoring | |
CN100368842C (zh) | 用于半导体器件与光纤的无源光学对准的集成平台 | |
JP5777355B2 (ja) | システム及び方法 | |
TWI601992B (zh) | 光插座以及光模組 | |
US8265487B2 (en) | Half-duplex, single-fiber (S-F) optical transceiver module and method | |
CN108780197B (zh) | 光插座、光模块及光模块的制造方法 | |
US20100272393A1 (en) | Wafer based optical chassis and associated methods | |
CN1577874A (zh) | 光器件及其制造方法 | |
CN1599059A (zh) | 光接收器封装件 | |
CN1599159A (zh) | 具有集成光学元件和对准柱的表面发射激光器封装件 | |
EP1224495A1 (en) | Optical subassembly | |
JPH10173207A (ja) | 光送受信モジュール | |
US7520679B2 (en) | Optical device package with turning mirror and alignment post | |
US20050202826A1 (en) | Optical subassembly | |
US7290946B2 (en) | Optical subassembly | |
JP7197435B2 (ja) | 光レセプタクルおよび光モジュール | |
CN113625399A (zh) | 一种光模块 | |
CN1181367C (zh) | 多光纤阵列的光电模块 | |
JP4779919B2 (ja) | 光電気変換装置 | |
JP2015068997A (ja) | 光電気変換装置およびそれを用いた光モジュール | |
KR100853315B1 (ko) | 반사손실 저감구조를 구비한 레이저 다이오드 패키지 | |
CA2523418C (en) | Package for optoelectronic device on wafer level and associated methods |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: TAIWEN INTEGRATED CIRCUIT MANUFACTURE CO., LTD. Free format text: FORMER OWNER: HYMITE AS Effective date: 20110314 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: LYNGBY, DENMARK TO: NO. 8, LIXING ROAD 6, HSINCHU SCIENCE PARK, TAIWAN PROVINCE, CHINA |
|
TR01 | Transfer of patent right |
Effective date of registration: 20110314 Address after: Hsinchu Science Park, Taiwan, China force line six, No. eight Patentee after: Taiwan Semiconductor Manufacturing Co.,Ltd. Address before: Danish spirits Patentee before: Schmidt Co.,Ltd. |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160509 Address after: Hsinchu City, Taiwan, China Patentee after: EPISTAR Corp. Address before: Hsinchu City, Taiwan, China Patentee before: Yuanxin Optoelectronics Co.,Ltd. Effective date of registration: 20160509 Address after: Hsinchu City, Taiwan, China Patentee after: Yuanxin Optoelectronics Co.,Ltd. Address before: Hsinchu Science Park, Taiwan, China force line six, No. eight Patentee before: Taiwan Semiconductor Manufacturing Co.,Ltd. |
|
CX01 | Expiry of patent term |
Granted publication date: 20080423 |
|
CX01 | Expiry of patent term |