CN1740566A - Diaphragm vacuum pump - Google Patents
Diaphragm vacuum pump Download PDFInfo
- Publication number
- CN1740566A CN1740566A CNA2005100916004A CN200510091600A CN1740566A CN 1740566 A CN1740566 A CN 1740566A CN A2005100916004 A CNA2005100916004 A CN A2005100916004A CN 200510091600 A CN200510091600 A CN 200510091600A CN 1740566 A CN1740566 A CN 1740566A
- Authority
- CN
- China
- Prior art keywords
- bearing
- mentioned
- motor shaft
- vacuum pump
- outer ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004888 barrier function Effects 0.000 claims description 10
- 229910001209 Low-carbon steel Inorganic materials 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 229910000838 Al alloy Inorganic materials 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 238000004378 air conditioning Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 210000003625 skull Anatomy 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/001—Noise damping
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/006—Crankshafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/14—Pistons, piston-rods or piston-rod connections
- F04B53/144—Adaptation of piston-rods
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Diaphragms And Bellows (AREA)
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
To provide a diaphragm type vacuum pump for preventing occurrence of vibration or creep of bearings in operation, and reducing operation noise. Adhesives are respectively applied between outer rings of the bearings 6a, 6b of a motor shaft 5 and housings 7a, 7b in which the bearings 6a, 6b are to be fitted; between outer rings of the bearings 11a, 11b of connecting rods 13a, 13b and the connecting rods 13a, 13b; between inner rings of the bearings 6a, 6b of the motor shaft 5 and the motor shaft 5; and between inner rings of the bearings 11a, 11b of the connecting rods 13a, 13b and eccentric shafts 9a, 9b, to perform adhesion therebetween.
Description
Technical field
The present invention relates to diaphragm vacuum pump.
Background technique
Before, as the employed vacuum pump that is reduced pressure in the inside of vacuum vessel etc. in operations such as semiconductor manufacturing process, known for example have diaphragm vacuum pump (for example, with reference to patent documentation 1.)。
In addition, in recent years, following commodity are practicability also, these commodity make up oxygen permeable membrane and vacuum pump, formation can improve oxygen concentration the device of the generation oxygen-enriched air about 30%, then this device is installed in air-conditioning etc., indoor oxygen concentration can be maintained at about more than 21%.In such air-conditioning, oxygen permeable membrane and vacuum pump are installed in the outdoor unit, utilize vacuum pump to make to have and make oxygen optionally spread 2 sides decompressions through the oxygen permeable membrane of ability, generation has improved the air of oxygen concentration, utilize vacuum pump that it is forced into barometric pressure, import indoor set to indoor discharge by pipe arrangement then.
As the vacuum pump in the outdoor unit that is installed in above-mentioned air-conditioning, use diaphragm vacuum pump.At this moment, for the vacuum pump in the outdoor unit that is installed in air-conditioning, require its operating sound below 40db (A characteristic 1m).
[patent documentation 1] spy opens the 2001-329963 communique
Summary of the invention
But diaphragm vacuum pump owing to change by the volume of barrier film being depressed, lifting makes pump chamber, attracts, compresses with this, so the cogging that the running shaft of pump revolves in turning around is very big.Therefore, on the bearing of motor, connecting rod bearing, can apply the load of change, if on the embedding part of the inner ring of the outer ring of these bearings and shell or these bearings and axle, have small gap, then these bearings will vibrate, produce noise, it is big that operating sound can become, in addition, also be easy to generate the phenomenon (creep) of the outer ring rotation of bearing, produce at short notice can not the retainer shaft precision problem.
So, the object of the present invention is to provide a kind of diaphragm vacuum pump, when it can prevent to turn round bearing vibrate, creep, can reduce running noise.
To achieve these goals, diaphragm vacuum pump of the present invention, the motor shaft that rotates on the one-sided or both sides that are supported in motor via the 1st bearing is extended, on above-mentioned motor shaft, dispose connecting rod via core shift axle and the 2nd bearing, on the forward end of above-mentioned connecting rod, barrier film is installed, the to-and-fro motion of the above-mentioned connecting rod that causes by rotation by above-mentioned motor shaft, make above-mentioned diaphragm movement, carry out vacuum exhaust, it is characterized in that, between the shell of the outer ring of above-mentioned the 1st bearing and chimeric the 1st bearing, between the outer ring of above-mentioned the 2nd bearing and the above-mentioned connecting rod, between the inner ring of above-mentioned the 1st bearing and the above-mentioned motor shaft, and between the inner ring of above-mentioned the 2nd bearing and the above-mentioned core shift axle, be coated with Bond respectively and engage.
In addition, it is characterized in that, be inserted with the ring that mild steel is made respectively between the outer ring of above-mentioned the 1st bearing and the above-mentioned shell and between the outer ring of above-mentioned the 2nd bearing and above-mentioned connecting rod, and engaging by Bond.
According to the present invention, produce bearing vibration, the creep of motor shaft and connecting rod in the time of can preventing to turn round, and can reduce running noise.
Description of drawings
Fig. 1 is the summary section of the diaphragm vacuum pump in the expression embodiments of the present invention.
Fig. 2 is the plan view of the diaphragm vacuum pump in the expression embodiments of the present invention.
Embodiment
Below, the present invention will be described according to illustrated mode of execution.Fig. 1 is the summary section of the diaphragm vacuum pump in the expression embodiments of the present invention, and Fig. 2 is its plan view.
In Fig. 1,1 is arranged on the stator of the motor 2 of central part, and it inserts the inside of motor casing 3 and fixes.In addition, the 4th, the rotor of motor 2 is pressed into and is fixed with motor shaft (axle) 5.Be separately installed with bearing 6a, the 6b with bearing support on the motor shaft 5 of the both sides of rotor 4, each bearing 6a, 6b embed respectively among aluminum alloy housing 7a, the 7b.Each shell 7a, 7b are inserted in respectively among pump casing 8a, the 8b, fix by screw (not shown).
The outside of each bearing 6a, 6b on motor shaft 5 is fixed with core shift axle 9a, 9b and cooling fan 10a, 10b respectively, is separately installed with bearing 11a, the 11b with bearing support on each core shift axle 9a, 9b.Each core shift axle 9a, 9b, core shift are formed with hole of inserting motor shaft 5 and the hole of inserting the inner ring of each bearing 11a, 11b, and the core shift amount of each core shift axle 9a, 9b is the to-and-fro motion amount (path increment) of each barrier film 12a, 12b.On each bearing 11a, 11b, connecting rod 13a, 13b via aluminum alloy system are connected with barrier film 12a, 12b respectively.
Center one side of each barrier film 12a, 12b is fixed by metal retaining element 14a, 14b respectively, and the peripheral part of each barrier film 12a, 12b is fixed by pump head 15a, 15b respectively.On each pump head 15a, 15b, be separately installed with Aspirating valves 16a, 16b and outlet valve 17a, 17b, its structure is, if the pressure in the pump chamber that forms respectively by barrier film 12a, 12b and pump head 15a, 15b is lower than barometric pressure, then Aspirating valves 16a, 16b open; If the indoor pressure of said pump is higher than barometric pressure, then outlet valve 17a, 17b open.On the top of pump head 15a, 15b, the mode with the top that is positioned at each Aspirating valves 16a, 16b and each outlet valve 17a, 17b is separately installed with pump pressure skull 18a, 18b.
Above-mentioned diaphragm vacuum pump is the two head pumps that have barrier film 12a, 12b in each pump case 8a, 8b respectively, and reciprocating phase shifting 180 degree of each barrier film 12a, 12b utilize each connecting pipings 19a, 19b to connect side by side.In addition, on the side of a side pump head 15a, be connected with intakeport 20 and relief opening 21 respectively.
So, if drive motor 2, then this motor shaft 5 will rotate, and by each core shift axle 9a, 9b rotation, each connecting rod 13a, 13b can to-and-fro motion.By the to-and-fro motion of each connecting rod 13a, 13b, air-breathing, exhaust is carried out in the phase place ground motion up and down that each connecting rod 13a, the 13b that is connected staggers 180 degree respectively thus repeatedly, carries out vacuum exhaust.
But, at the above-mentioned diaphragm vacuum pump of running, when carrying out vacuum exhaust, producing vebrato or work sound from movable part branch, these sound will become running noise.Wherein, the extra high situation of sound level can be enumerated following (a)～(d).
(a) on the micro-gap part at the outer ring of bearing 6a, 6b and the chimeric position between shell 7a, the 7b, the noise that produces by the outer ring vibration of bearing 6a, 6b.
(b) on the micro-gap part at the outer ring of bearing 11a, 11b and the chimeric position between connecting rod 13a, the 13b, the noise that produces by the outer ring vibration of bearing 11a, 11b.
(c) producing under the situation in gap the noise that produces by the inner ring vibration of bearing 6a, 6b on the inner ring of bearing 6a, 6b and the chimeric position between the motor shaft 5.
(d) producing under the situation in gap the noise that produces by the inner ring vibration of bearing 11a, 11b on the inner ring of bearing 11a, 11b and the chimeric position between core shift axle 9a, the 9b.
In the diaphragm vacuum pump of the invention described above, the part of outer ring of each bearing 6a, 6b that is used to insert steel at each shell 7a, the 7b of aluminum alloy system is cast into ring 22a, 22b that mild steel is made respectively.The reason that is cast into this ring 22a, 22b is that this diaphragm vacuum pump can use in the environment about-10 ℃～70 ℃.
That is, in the environment about 70 ℃, near the temperature bearing 6a, the 6b in the operation process will reach about 100 ℃.The rates of thermal expansion of aluminum alloy ( shell 7a, 7b) than steel (bearing 6a, 6b) larger about 2.2 times.Therefore, since the bearing 6a, the 6b that make by steel than the big 0.013mm in the gap of the telescoping part of aluminum alloy housing 7a, 7b about, so the outer ring of bearing 6a, 6b can rotate creep, cause to guarantee running accuracy, and, can produce vibration on the outer ring of bearing 6a, 6b, sound level uprises.
So, in the present invention, in order to suppress the noise that above-mentioned (a) causes, as mentioned above, on the part of the outer ring of each bearing 6a, the 6b that are inserted with steel of each shell 7a, the 7b of aluminum alloy system, be cast into ring 22a, 22b that mild steel is made respectively, be coated with Bond, behind the outer ring of inserting bearing 6a, 6b, engage at the inner thin unfertile land of this ring 22a, 22b.So, by ring 22a, the 22b that makes with the approaching mild steel of the thermal expansion coefficient of the Bearing Steel of bearing 6a, 6b is set, the gap enlargement that can suppress the telescoping part of the bearing 6a, the 6b that cause by thermal expansion and shell 7a, 7b, even when high temperature, also can keep by the outer ring of bearing 6a, the 6b of Bond bonding and the bond strength of shell 7a, 7b.
Thus, can suppress bearing 6a, the vibration of 6b outer ring, noise and diminish, and, the creep of the outer ring rotation of bearing 6a, 6b can be suppressed.
In addition, for the noise that suppresses to cause by above-mentioned (b), according to same reason, on the part of the outer ring of each bearing 11a, the 11b that are inserted with each connecting rod 13a, 13b, also be cast into ring 23a, 23b that mild steel is made respectively, inner thin unfertile land at this ring 23a, 23b is coated with Bond, behind the outer ring of inserting bearing 11a, 11b, engages.So, by ring 23a, the 23b that makes with the approaching mild steel of the thermal expansion coefficient of the Bearing Steel of bearing 11a, 11b is set, the gap enlargement that can suppress the telescoping part of the bearing 11a, the 11b that cause by thermal expansion and connecting rod 13a, 13b, even when high temperature, also can keep by the outer ring of bearing 11a, the 11b of Bond bonding and the bond strength of connecting rod 13a, 13b.
Thus, can suppress the vibration of the outer ring of bearing 11a, 11b, reduce noise, and, the creep of the outer ring rotation of bearing 11a, 11b can be suppressed.
And, according to inventor's of the present invention experiment, when high temperature, shell 7a, 7b (and connecting rod 13a, 13b) that ring 22a, 22b that mild steel is made (and ring 23a, 23b) and aluminum alloy are made, even at high temperature can not keep firm combination owing to the difference of rates of thermal expansion is separated yet.
In addition, in the present invention, for the noise that suppresses to cause by above-mentioned (c), the surface of the motor shaft 5 of motor 2 is provided with Bond and accumulates groove (not shown), on the internal surface of bearing 6a, 6b inner ring and the motor shaft 5 that is inserted with this inner ring, be coated with the anaerobic Bond thinly, each bearing 6a, 6b are pressed in the motor shaft 5 and fix.And, on the outer ring outer surface of the internal surface of shell 7a, the 7b of the outer ring that is inserted with bearing 6a, 6b and this bearing 6a, 6b, be coated with Bond, and in the axis hole of each shell 7a, 7b, be inserted with each bearing 6a, 6b respectively, by bolt (not shown) each shell 7a, 7b are fixed on the motor casing 3.And, at this moment, utilize waved spring 24 to apply preload to the outer ring of bearing 6a, eliminate the axial gap of bearing 6a, engage fixing.
Thus, can prevent to produce the gap between the inner ring of bearing 6a, 6b and the motor shaft 5, suppress the vibration of the inner ring of bearing 6a, 6b, reduce noise.
In addition, in the present invention, for the noise that suppresses to cause,, engage fixing being coated with the anaerobic Bond thinly between the outer ring of bearing 11a, 11b and ring 23a, the 23b and between the inner ring of bearing 11a, 11b and core shift axle 9a, the 9b by above-mentioned (d).Even in this case, on the surface of the motor shaft 5 of motor 2, also be provided with Bond and accumulate groove (not shown), on the inner ring internal surface of bearing 11a, 11b and the motor shaft 5 that is inserted with this inner ring, be coated with the anaerobic Bond thinly, then each bearing 11a, 11b be pressed in the motor shaft 5 and fix.In addition, on ring 23a, 23b, also be provided with Bond and accumulate groove (not shown).
Thus, can prevent to produce the gap between the inner ring of bearing 11a, 11b and core shift axle 9a, the 9b, suppress the vibration of the inner ring of bearing 11a, 11b, reduce noise.
For as the result that measures of the above-mentioned sound level of having implemented to reduce the diaphragm vacuum pump of the present invention of noise measure, be 39db (A characteristic) apart from the sound level of the distance of this diaphragm vacuum pump 1m.On the other hand, for as the above-mentioned diaphragm vacuum pump before that implement to reduce the noise measure, carried out same sound level and measured, its result is 47db (A characteristic) apart from the sound level of the distance of this diaphragm vacuum pump 1m.According to this result, can prove as the above-mentioned diaphragm vacuum pump of the present invention of having implemented the measure of reduction noise and can reduce sound level significantly.
Claims (2)
1. diaphragm vacuum pump, the motor shaft that rotates on the one-sided or both sides that are supported in motor via the 1st bearing is extended, on above-mentioned motor shaft, dispose connecting rod via core shift axle and the 2nd bearing, on the forward end of above-mentioned connecting rod, barrier film is installed, the to-and-fro motion of the above-mentioned connecting rod that causes by rotation by above-mentioned motor shaft, make above-mentioned diaphragm movement, carry out vacuum exhaust, it is characterized in that, between the shell of the outer ring of above-mentioned the 1st bearing and chimeric the 1st bearing, between the outer ring of above-mentioned the 2nd bearing and the above-mentioned connecting rod, between the inner ring of above-mentioned the 1st bearing and the above-mentioned motor shaft, and between the inner ring of above-mentioned the 2nd bearing and the above-mentioned core shift axle, be coated with Bond respectively and engage.
2. diaphragm vacuum pump as claimed in claim 1 is characterized in that, is being inserted with the ring that mild steel is made respectively between the outer ring of above-mentioned the 1st bearing and the above-mentioned shell and between the outer ring of above-mentioned the 2nd bearing and above-mentioned connecting rod, and is engaging by Bond.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004246902A JP2006063874A (en) | 2004-08-26 | 2004-08-26 | Diaphragm type vacuum pump |
| JP2004246902 | 2004-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1740566A true CN1740566A (en) | 2006-03-01 |
Family
ID=36093060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2005100916004A Pending CN1740566A (en) | 2004-08-26 | 2005-08-26 | Diaphragm vacuum pump |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2006063874A (en) |
| KR (1) | KR20060050651A (en) |
| CN (1) | CN1740566A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101801749B (en) * | 2007-09-11 | 2012-06-13 | 大陆-特韦斯贸易合伙股份公司及两合公司 | Motor-pump aggregate |
| CN102536766A (en) * | 2010-11-30 | 2012-07-04 | Ulvac机工株式会社 | Pump apparatus and method for control the same |
| CN103237702A (en) * | 2010-11-30 | 2013-08-07 | 大陆-特韦斯贸易合伙股份公司及两合公司 | Motor-pump assembly |
| CN104204522A (en) * | 2012-03-30 | 2014-12-10 | Ulvac机工株式会社 | Pump device |
| CN105003426A (en) * | 2015-06-18 | 2015-10-28 | 南通斯蒙特真空科技有限公司 | Multi-functional diaphragm vacuum pump |
| CN105526128A (en) * | 2016-02-05 | 2016-04-27 | 宁波泰尔斯电子实业有限公司 | Micro vacuum pump and combined type micro vacuum pump |
| WO2021053077A1 (en) * | 2019-09-19 | 2021-03-25 | Continental Teves Ag & Co. Ohg | Electromotively driven assembly for a vehicle |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007016385A1 (en) * | 2007-04-03 | 2008-10-09 | Knf Neuberger Gmbh | pumping |
| JP2010096244A (en) * | 2008-10-15 | 2010-04-30 | Amadera Kuatsu Kogyo Kk | Mounting method of crank to bearing and bearing mechanism |
| JP5770458B2 (en) * | 2010-11-30 | 2015-08-26 | アルバック機工株式会社 | Pump system |
| KR102027178B1 (en) * | 2014-04-11 | 2019-11-04 | 한온시스템 주식회사 | Double-headed swash plate type compressor |
| CN105134567A (en) * | 2015-07-21 | 2015-12-09 | 石家庄佳信汽车制动***有限公司 | Horizontally-opposite diaphragm type electric vacuum pump |
| CN114623378A (en) * | 2022-01-21 | 2022-06-14 | 北京国科环宇科技股份有限公司 | Method for vacuumizing vacuum container |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5888012U (en) * | 1981-12-11 | 1983-06-15 | 株式会社日立製作所 | bearing |
| JPS6179069A (en) * | 1984-09-21 | 1986-04-22 | Aisin Warner Ltd | Bearing support sleeve for transmission of vehicle |
| JPH0650347A (en) * | 1992-07-31 | 1994-02-22 | Mitsubishi Heavy Ind Ltd | Outside drive type compressor |
| JP2003161328A (en) * | 2001-11-27 | 2003-06-06 | Matsushita Electric Ind Co Ltd | Motor |
-
2004
- 2004-08-26 JP JP2004246902A patent/JP2006063874A/en active Pending
-
2005
- 2005-08-25 KR KR1020050078270A patent/KR20060050651A/en not_active Application Discontinuation
- 2005-08-26 CN CNA2005100916004A patent/CN1740566A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101801749B (en) * | 2007-09-11 | 2012-06-13 | 大陆-特韦斯贸易合伙股份公司及两合公司 | Motor-pump aggregate |
| CN102536766A (en) * | 2010-11-30 | 2012-07-04 | Ulvac机工株式会社 | Pump apparatus and method for control the same |
| CN103237702A (en) * | 2010-11-30 | 2013-08-07 | 大陆-特韦斯贸易合伙股份公司及两合公司 | Motor-pump assembly |
| CN102536766B (en) * | 2010-11-30 | 2015-01-21 | Ulvac机工株式会社 | Pump apparatus and method for control the same |
| CN103237702B (en) * | 2010-11-30 | 2016-11-16 | 大陆-特韦斯贸易合伙股份公司及两合公司 | Motor pump assembly |
| CN104204522A (en) * | 2012-03-30 | 2014-12-10 | Ulvac机工株式会社 | Pump device |
| CN104204522B (en) * | 2012-03-30 | 2016-08-24 | Ulvac机工株式会社 | Pump installation |
| CN105003426A (en) * | 2015-06-18 | 2015-10-28 | 南通斯蒙特真空科技有限公司 | Multi-functional diaphragm vacuum pump |
| CN105526128A (en) * | 2016-02-05 | 2016-04-27 | 宁波泰尔斯电子实业有限公司 | Micro vacuum pump and combined type micro vacuum pump |
| WO2021053077A1 (en) * | 2019-09-19 | 2021-03-25 | Continental Teves Ag & Co. Ohg | Electromotively driven assembly for a vehicle |
| CN114423943A (en) * | 2019-09-19 | 2022-04-29 | 大陆-特韦斯贸易合伙股份公司及两合公司 | Motor-driven assembly for vehicle |
| CN114423943B (en) * | 2019-09-19 | 2023-09-19 | 大陆汽车科技有限公司 | Motor-driven assembly for a vehicle |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20060050651A (en) | 2006-05-19 |
| JP2006063874A (en) | 2006-03-09 |
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