CN1731236A - Sheet type two-dimensional piezoelectric light reflection structure - Google Patents
Sheet type two-dimensional piezoelectric light reflection structure Download PDFInfo
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- CN1731236A CN1731236A CN 200510012196 CN200510012196A CN1731236A CN 1731236 A CN1731236 A CN 1731236A CN 200510012196 CN200510012196 CN 200510012196 CN 200510012196 A CN200510012196 A CN 200510012196A CN 1731236 A CN1731236 A CN 1731236A
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Abstract
The invention relates to a precision mechanism light driving technology, which comprises a composite outrigger which is formed by a set of piezoelectric ceramic sheet with two electrodes and a base chip, a hinge, a reflecting lens and frame, and a supporting frame. The lens frame is connected with the base chip by the hinge; the base chip is fixed by the supporting frame. When the positive end of the power is paralleled with the two sets of the electrode area, the negative end of the power connects with the base chip, so that the composite outrigger generates a bend deformation; when the positive end and the negative end of the power are separately connected with the two sets of the electrode area, the composite outrigger generates a torsion deformation. The composite outrigger can also be formed by four cruciform symmetrical distributing outriggers with the reflecting lens in the center of the cruciform symmetric or by two vertical outriggers with the reflecting lens on the vertical point; the lens frame is connected with the supporting frame.
Description
Technical field
The invention belongs to optical drive technical field in the precision optical machinery, specially refer to several typical structures of novel two-dimensional piezoelectric photoscanning.
Technical background
In background technology, the scan-type optical system occupies an important position in optical instrument.Photoscanning structure commonly used has: Mechanical Driven Scan Architecture, Electromagnetic Drive Scan Architecture, static driven Scan Architecture, Piezoelectric Driving Scan Architecture, acoustooptic deflection Scan Architecture, electrooptical deflection Scan Architecture and multifaceted prism swinging Scan Architecture etc. are multiple.
Wherein, the research work of electromagnetism, electrostatic oscillation formula Scan Architecture is carried out relatively early, and is theoretical ripe with technology, obtained using very widely in the photoscanning application.Because electromagnetism, static driven also exist the structure chatter obvious, defectives such as electromagnetic radiation are arranged, and Piezoelectric Driving photoscanning structure is by feat of simple in structure, response is fast, it is little to start the braking chatter, electromagnetic-radiation-free, no gap, characteristics such as no frictional dissipation make more scholars more and more pay close attention to the development of Piezoelectric Driving Scan Architecture.At present, existing piezoelectricity photoscanning structure mainly is can realize the piezoelectricity composite structure of one dimension swing or can realize the two dimension swing but the very complicated piezoelectricity composite structure of structure.
Summary of the invention
In order to solve the two dimension swing that both can realize light reflection mirror, self structure is simple, reliable simultaneously, the present invention proposes the project organization of several two-dimensional piezoelectric photoscanning, all adopted the very simple piezoelectricity composite cantilever structure of structure in several structures, the piezoelectric ceramics of the chip type that is adopted is easy to the semiconducter process compatibility, in the future the further microminiaturization of implementation structure or device.
The two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:
(1) composite cantilever, be fixedly connected to form by a substrate and one group of piezoelectric ceramic piece being positioned at this substrate homonymy, two electrode districts are arranged on this piezoelectric ceramic piece, and they are identical by the polarised direction in the polarized area of formed two correspondences after the thickness direction polarization;
(2) hinge, a side of this hinge and a side of described substrate flexibly connect;
(3) reflecting optics, this eyeglass are fixed in the picture frame, and this picture frame links to each other with the opposite side of described hinge;
(4) support frame, this framework is fixedlyed connected with the opposite side of described substrate;
Anodal in parallel with the two arrays of electrodes district when pumping signal, and negative pole is when linking to each other with described substrate, and this composite cantilever generation is with respect to the flexural deformation of described substrate plane;
Link to each other the torsional deflection that it is center line that this composite cantilever produces with described composite cantilever major axis respectively with described two arrays of electrodes district with negative pole when pumping signal is anodal.
The two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:
(1) composite cantilever, be fixedly connected to form by a substrate and one group of piezoelectric ceramic piece being positioned at this substrate homonymy, two electrode districts are arranged on this piezoelectric ceramic piece, and they are identical by the polarised direction in the polarized area of two correspondences that form along thickness direction polarization back;
(2) hinge, a side of this hinge and a side of described substrate flexibly connect;
(3) reflecting optics, this eyeglass are fixed in the picture frame, and a side of this picture frame links to each other with the opposite side of described hinge;
(4) support frame, this framework one side is fixedlyed connected with the opposite side of described substrate, and the opposite side of this framework then flexibly connects by the opposite side of another one hinge and described picture frame;
Anodal in parallel with described two arrays of electrodes district when pumping signal, and negative pole is when linking to each other with described substrate, and this composite cantilever generation is with respect to the flexural deformation of described substrate plane;
Link to each other then this composite cantilever generation torsional deflection that is center line with described composite cantilever major axis respectively with described two arrays of electrodes district with negative pole when pumping signal is anodal.
The two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:
(1) composite cantilever combination, constitute by four composite cantilevers that are the cross symmetrical distribution mutually, each composite cantilever constitutes by a substrate and with the piezoelectric ceramic piece of this substrate Joint, this piezoelectric ceramic piece all is positioned at each substrate homonymy, and all identical along thickness direction polarization and polarised direction;
(2) reflecting optics is fixed in the picture frame, and this picture frame flexibly connects with a side of four substrates respectively mutually by four hinges, is positioned at the center part that described cross is symmetrically distributed;
(3) support frame, this framework is fixedlyed connected with the opposite side of described four substrates;
The electrode surface of the piezoelectric ceramic piece on any one composite cantilever in pumping signal positive pole and the combination of described composite cantilever links to each other, and the electrode surface of the piezoelectric ceramic piece on the composite cantilever of negative pole and opposite side is when linking to each other, shrink and another elongation remaining in these two piezoelectric ceramic pieces one, cause aspectant two composite cantilevers to produce, following two kinds of flexural deformations that phase place is reverse, and then making the reflecting optics that is connected produce swing, two kinds of swings that the composite cantilever that described cross is symmetrically distributed makes up formed reflecting optics are quadratures in the space.
The two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:
(1) composite cantilever combination, be made of two mutually perpendicular composite cantilevers, each composite cantilever constitutes by a substrate and with the piezoelectric ceramic piece of this substrate Joint, and each piezoelectric ceramic piece all is positioned at each substrate homonymy, all polarized along thickness direction, and polarised direction is identical;
(2) reflecting optics, this eyeglass are fixed in the picture frame, are positioned at the place that intersects vertically of described two composite cantilevers;
(3) support frame, this framework are fixedlyed connected with a side of described two orthogonal composite cantilevers respectively;
(4) hinge has four, and a side of the 1st hinge, the 2nd hinge then flexibly connects with described picture frame respectively with opposite side flexible connection the 1st hinge of described two orthogonal composite cantilevers, the opposite side of the 2nd hinge respectively; One side of the 3rd hinge, the 4th hinge flexibly connects with described support frame respectively, and the opposite side of the 3rd hinge, the 4th hinge then flexibly connects with described picture frame respectively mutually;
Described two orthogonal composite cantilevers are realized the two dimensional optical scanning of described reflecting optics by flexural deformation separately, promptly the electrode surface of the piezoelectric ceramic piece on pumping signal positive pole and any one composite cantilever wherein links to each other, then this composite cantilever generation flexural deformation when negative pole links to each other with substrate, and then make described anti-eyeglass produce swing; For the another one composite cantilever, it comes to the same thing when adopting described method, but front and back two kinds of swings orthogonal space has been realized the two dimension swing of described reflecting optics.
Described piezoelectric ceramic piece is a single-layer sheet, or any in the multi-layer stacks formula structure.
Described substrate and support frame adopt any in metal material or the silicon materials.
Described reflecting optics adopts any in sputtered aluminum film or the golden film surface.
Described hinge is the elongate strip structure, with described substrate or picture frame or the flexible connection of support frame rigidity.
Compare based on the photoscanning structure of other principle with tradition, two-dimensional piezoelectric light reflection structure has the advantage of highly significant.
Because electromagnetism, static driven also exist the structure chatter obvious, and defectives such as electromagnetic radiation are arranged, and Piezoelectric Driving photoscanning structure responds soon by feat of simple in structure, and it is little to start the braking chatter, electromagnetic-radiation-free, no gap, characteristics such as no frictional dissipation.With existing piezoelectric scanning texture ratio, simple in structure by having, the profile chip type is easy to the semiconducter process compatibility, and the possibility of scale in the future, mass production is provided.
The photoscanning development of technology impels it to use and corresponding product develop rapidly, as: code reader, scanner, projector, display, laser printing, non-cpntact measurement, wireless optical communications etc.Especially this structure is used the wireless optical communications aspect, greatly improved the speed that the space photoscanning is searched for and located in the wireless optical Netcom news, reliability of information transmission, stability have been increased, guarantee the design of node converter compact structure simultaneously, cheap manufacturing cost, be wireless optical Netcom's news market injection new vitality both domestic and external and life, the application in wireless optical Netcom news node converter of Piezoelectric Driving control technology and piezoelectric scanning microstructure, a kind of brand-new with very likely forming, in addition with the diverse design concept of traditional product in the past.Simultaneously, can greatly save the input of network communication aspect infrastructure, having avoided too much at facilities such as city provided underground optical cables, is replenishing of having a mind to of short-distance and medium-distance network information communication, is particularly suitable for relatively concentrating at residential building, intensive sub-district sets up this wireless optical Netcom news technology.
Description of drawings
Fig. 1 is the structural representation of single-cantilever type two-dimensional piezoelectric light reflection structure embodiment one of the present invention.A) for adopting a slice piezoelectric ceramics, the structural representation of two electrode districts of surface segmentation; B) for adopting the structural representation of two piezoelectric ceramics.
Fig. 2 is the fundamental diagram of single-cantilever type two-dimensional piezoelectric light reflection structure of the present invention.A) structural bending Finite element analysis of deformation result; B) construction torsion Finite element analysis of deformation result.
Fig. 3 is the photo in kind of single-cantilever type two-dimensional piezoelectric light reflection structure embodiment one of the present invention.
Fig. 4 is the laser-Doppler test result of single-cantilever type two-dimensional piezoelectric light reflection structure embodiment one of the present invention.A) structural bending deformation result; B) construction torsion deformation result.
Fig. 5 is the structural representation of single-cantilever type two-dimensional piezoelectric light reflection structure embodiment two.A) for adopting a slice piezoelectric ceramics, the structural representation of two electrode districts of surface segmentation is b) for adopting the structural representation of two piezoelectric ceramics.
Fig. 6 is the structural representation of the present invention four cantilever style two-dimensional piezoelectric light reflection structure embodiment three.
Fig. 7 is the fundamental diagram of the present invention's four cantilever style two-dimensional piezoelectric light reflection structures.
Fig. 8 is the structural representation of the present invention four cantilever style two-dimensional piezoelectric light reflection structure embodiment four.
Fig. 9 is the structural representation of the present invention four cantilever style two-dimensional piezoelectric light reflection structure embodiment five.
Figure 10 is the structural representation of the two cantilever style two-dimensional piezoelectric light reflection structure embodiment six of the present invention.
Figure 11 is the structural representation of the two cantilever style two-dimensional piezoelectric light reflection structure embodiment seven of the present invention.
Figure 12 is the structural representation of the two cantilever style two-dimensional piezoelectric light reflection structure embodiment eight of the present invention.
Embodiment
The present invention mainly designs the two-dimensional piezoelectric light reflection structure of single-cantilever type, two cantilever style and the novel chip type of four cantilever styles.
Wherein, the piezoelectricity composite cantilever that single-cantilever type two-dimensional piezoelectric light reflection structure is made of one group of piezoelectric ceramic piece and substrate, hinges, reflecting optics, support frame is formed.It is characterized in that: reflecting optics links to each other with composite cantilever or support frame by hinges, and the support frame around composite cantilever relies on is fixed.Described piezoelectric ceramic piece surface electrode is divided into two electrode districts, and each electrode district is identical along thickness direction polarization and polarised direction, and piezoelectric ceramic piece sticks on the substrate, and electrode district cut-off rule trend is parallel with the jib-length direction.When two electrode districts added the homophase alternating current, cantilever produced flexural vibrations, and eyeglass is along with vibration.When two electrode districts added anti-phase alternating current, a ceramic zone was upheld, and the another one ceramic zone is shunk, and eyeglass reverses along the center line of jib-length direction.Like this, the deflection angle of eyeglass has just had two degree of freedom, relies on piezoelectricity composite cantilever deflection of beam and torsional deflection during work, drives the swing of the reflecting optics two-dimensional directional of end, and then has realized the adjustment of light at two-dimensional space.
Two cantilever style two-dimensional piezoelectric light reflection structures constitute two piezoelectricity composite cantilevers respectively by two groups of piezoelectric ceramic pieces and substrate, hinges, and reflecting optics, support frame is formed.It is characterized in that: be in vertical distribution between two composite cantilevers, reflecting optics is arranged on the plotted point place of two composite cantilevers by hinge, and links to each other with support frame by hinges, and the support frame around two composite cantilevers rely on is fixed.
Four cantilever style two-dimensional piezoelectric light reflection structures constitute four composite cantilevers respectively by four groups of piezoelectric ceramic pieces and substrate, hinges, and reflecting optics, support frame is formed.It is characterized in that: four composite cantilevers are cross and are symmetrically distributed, and reflecting optics is arranged on the central spot of cross by hinges, and the support frame around four composite cantilevers rely on is fixed.Two and four cantilever style two-dimensional piezoelectric light reflection structures all are the flexural deformation that relies on the piezoelectricity composite cantilever during work, drive the swing of the reflecting optics two-dimensional directional of end, and then realize the adjustment of light at two-dimensional space.
The two-dimensional piezoelectric light reflection structure of the chip type that the present invention proposes reaches accompanying drawing in conjunction with the embodiments and is described in detail as follows.
Embodiment one:
The present invention has designed the embodiment one of the two-dimensional piezoelectric light reflection structure of chip type, shown in Fig. 1-4.
The two-dimensional piezoelectric light reflection structure of chip type, by the composite cantilever 1 that one group of piezoelectric ceramic piece 11 and substrate 12 constitute, hinges 13, reflecting optics 14, support frame 15 is formed.It is characterized in that: reflecting optics 14 links to each other with composite cantilever 1 by hinges 13, and the support frame 15 around composite cantilever 1 relies on is fixing, and the 141st, picture frame.
Described piezoelectric ceramic piece 11 is single-layer sheet, or multi-layer stacks formula structure, and polarised direction is along the thickness direction of piezoelectric ceramic piece 11.Piezoelectric ceramic piece 11 is bonding with described substrate 12 usefulness epoxy glues, and piezoelectric ceramic piece 11 is fixed on the same side of substrate 12.
Described piezoelectric ceramic piece 11 is to become two arrays of electrodes district 110 identical with 111, two groups of polarized area polarised directions in same-piezoelectric ceramic piece 11 surface segmentation; Perhaps described piezoelectric ceramic piece 11 is that two piezoelectric ceramic pieces 112 and 113 have certain intervals to arrange side by side along described composite cantilever length direction, and two blocks of piezoelectric ceramics 112 are identical with 113 polarised direction.
Described substrate 12 and support frame 15 adopt metal material or silicon materials.
Described reflecting optics 14 surfaces adopt sputtered aluminum film or golden film surface to form mirror surface 140.
Described hinges 13 is the elongate strip structure, and with described composite cantilever 1, picture frame 141 is rigidly connected.
Described support frame 15 is fixed with extraneous by through hole 150.
Described composite cantilever 1 is bent and deformed the two dimensional optical scanning of realizing described reflecting optics 14 with torsional deflection.Feature is: when the pumping signal positive pole links to each other with described two arrays of electrodes district 110,111 respectively, perhaps link to each other with 113 surface with two piezoelectric ceramic pieces 112 respectively, the pumping signal negative pole links to each other with substrate 12, and this connected mode will make composite cantilever 1 produce flexural deformation.Link to each other with described two arrays of electrodes district 110,111 respectively with negative pole when pumping signal is anodal, perhaps link to each other with 113 surface with two piezoelectric ceramic pieces 112 respectively, this connected mode will make composite cantilever 1 generation torsional deflection.
Embodiment two:
The present invention has designed the embodiment two of the two-dimensional piezoelectric light reflection structure of chip type, as shown in Figure 5.
The two-dimensional piezoelectric light reflection structure of chip type, by the composite cantilever 5 that one group of piezoelectric ceramic piece 51 and substrate 52 constitute, hinges 53, reflecting optics 54,541st, picture frame, support frame 55 is formed.It is characterized in that: reflecting optics 54 links to each other with support frame 55 with composite cantilever 55 by hinges 53, and the support frame 55 around composite cantilever 5 relies on is fixing.
Described piezoelectric ceramic piece 51 is single-layer sheet, or multi-layer stacks formula structure, and polarised direction is along the thickness direction of piezoelectric ceramic piece 51.Piezoelectric ceramic piece 51 is bonding with described substrate 52 usefulness epoxy glues, and piezoelectric ceramic piece 51 is fixed on the same side of substrate 52.
Described piezoelectric ceramic piece 51 is to become two arrays of electrodes district 510 identical with 511, two groups of polarized area polarised directions in same piezoelectric ceramic piece 51 surface segmentation; Perhaps described piezoelectric ceramic piece 51 is that two piezoelectric ceramic pieces 512 and 513 have certain intervals to arrange side by side along described composite cantilever length direction, and two blocks of piezoelectric ceramics 512 are identical with 513 polarised direction.
Described substrate 52 and support frame 55 adopt metal material or silicon materials.
Described reflecting optics 54 surfaces adopt sputtered aluminum film or golden film surface to form mirror surface 540.
Described hinges 53 is the elongate strip structure, and with described composite cantilever 1, picture frame 141, support frame 55 is rigidly connected.
Described support frame 55 is fixed with extraneous by through hole 550.
Described composite cantilever 5 is bent and deformed the two dimensional optical scanning of realizing described reflecting optics 54 with torsional deflection.Feature is: when the pumping signal positive pole links to each other with described two arrays of electrodes district 510,511 respectively, perhaps link to each other with 513 surface with two piezoelectric ceramic pieces 512 respectively, the pumping signal negative pole links to each other with substrate 52, and this connected mode will make composite cantilever 5 produce flexural deformation.Link to each other with described two arrays of electrodes district 510,511 respectively with negative pole when pumping signal is anodal, perhaps link to each other with 513 surface with two piezoelectric ceramic pieces 512 respectively, this connected mode will make composite cantilever 5 generation torsional deflections.
Embodiment three:
The present invention has designed the embodiment three of the two-dimensional piezoelectric light reflection structure of chip type, as shown in Figure 6.
The two-dimensional piezoelectric light reflection structure of chip type, constitute four composite cantilevers 61,62,63,64 respectively by four groups of piezoelectric ceramic pieces 610,620,630,640 and substrate 611,621,631,641, hinges 65, reflecting optics 66, support frame 67 is formed.It is characterized in that: four composite cantilevers 61,62,63 and 64 are cross and are symmetrically distributed, and reflecting optics 66 is arranged on the central spot of cross by hinges 65, and the support frame 67 around four composite cantilevers 61,62,63 and 64 rely on is fixing.
Described piezoelectric ceramic piece the 610,620,630, the 640th, single-layer sheet, or multi-layer stacks formula structure, polarised direction is along the thickness direction of piezoelectric ceramic piece.Piezoelectric ceramic piece 610,620,630,640 is bonding with described substrate 611,621,631,641 usefulness epoxy glues respectively, and piezoelectric ceramic piece 610,620,630,640 all is fixed on the same side of substrate 611,621,631,641.
Described substrate 611,621,631,641 and support frame 67 adopt metal material or silicon materials.
Described reflecting optics 66 surfaces adopt sputtered aluminum film or golden film surface to form mirror surface 660.
Described hinges 65 is the elongate strip structure, and with described composite cantilever 61,62,63,64, picture frame 661 is rigidly connected.
Described support frame 67 is fixed with extraneous by through hole 670.
Described composite cantilever 61,62,63,64 is realized the two dimensional optical scanning of described reflecting optics 66 by flexural deformation separately.Feature is: the electrode surface of the piezoelectric ceramic piece 610 on pumping signal positive pole and composite cantilever 61 links to each other, the electrode surface of the piezoelectric ceramic piece 630 on the composite cantilever 63 on pumping signal negative pole and opposite links to each other, this connected mode will remain another extension of contraction in two piezoelectric ceramic pieces 610 and 630, cause aspectant two composite cantilevers 61 and 63 to produce two kinds of phase place opposite curvature distortion up and down, and then make the reflecting optics 66 that is connected produce swing.In like manner, the electrode surface of the piezoelectric ceramic piece 620 on pumping signal positive pole and composite cantilever 62 links to each other, the electrode surface of the piezoelectric ceramic piece 640 on the composite cantilever 64 on pumping signal negative pole and opposite links to each other, this connected mode will remain another extension of contraction in two piezoelectric ceramic pieces 620 and 640, cause aspectant two composite cantilevers 62 and 64 to produce two kinds of phase place opposite curvature distortion up and down, and then make the reflecting optics 66 that is connected produce swing, the two kinds of swings in front and back orthogonal spaces, promptly reflecting optics 66 is realized the two dimension swing.
Embodiment four:
The present invention has designed the embodiment four of the two-dimensional piezoelectric light reflection structure of chip type, as shown in Figure 8.
The structure of embodiment four and embodiment three basically identicals, unique difference is the concrete structure of support frame, sees Fig. 8.
The two-dimensional piezoelectric light reflection structure of chip type, constitute four composite cantilevers 81,82,83,84 respectively by four groups of piezoelectric ceramic pieces 810,820,830,840 and substrate 811,821,831,841, hinges 85, reflecting optics 86, support frame 87 is formed.It is characterized in that: four composite cantilevers 81,82,83 and 84 are cross and are symmetrically distributed, and reflecting optics 86 is arranged on the central spot of cross by hinges 85, and the support frame 87 around four composite cantilevers 81,82,83 and 84 rely on is fixing.
Described piezoelectric ceramic piece the 810,820,830, the 840th, single-layer sheet, or multi-layer stacks formula structure, polarised direction is along the thickness direction of piezoelectric ceramic piece.Piezoelectric ceramic piece 810,820,830,840 is bonding with described substrate 811,821,831,841 usefulness epoxy glues respectively, and piezoelectric ceramic piece 810,820,830,840 all is fixed on the same side of substrate 811,821,831,841.
Described substrate 811,821,831,841 and support frame 87 adopt metal material or silicon materials.
Described reflecting optics 86 surfaces adopt sputtered aluminum film or golden film surface to form mirror surface 860.
Described hinges 85 is the elongate strip structure, and with described composite cantilever 81,82,83,84, picture frame 861 is rigidly connected.
Described support frame 87 is fixed with extraneous by through hole 870.
Described composite cantilever 81,82,83,84 is realized the two dimensional optical scanning of described reflecting optics 86 by flexural deformation separately.Feature is: the electrode surface of the piezoelectric ceramic piece 810 on pumping signal positive pole and composite cantilever 81 links to each other, the electrode surface of the piezoelectric ceramic piece 830 on the composite cantilever 83 on pumping signal negative pole and opposite links to each other, this connected mode will remain another extension of contraction in two piezoelectric ceramic pieces 810 and 830, cause aspectant two composite cantilevers 81 and 83 to produce two kinds of phase place opposite curvature distortion up and down, and then make the reflecting optics 86 that is connected produce swing.In like manner, the electrode surface of the piezoelectric ceramic piece 820 on pumping signal positive pole and composite cantilever 82 links to each other, the electrode surface of the piezoelectric ceramic piece 840 on the composite cantilever 84 on pumping signal negative pole and opposite links to each other, this connected mode will remain another extension of contraction in two piezoelectric ceramic pieces 820 and 840, cause aspectant two composite cantilevers 82 and 84 to produce two kinds of phase place opposite curvature distortion up and down, and then make the reflecting optics 86 that is connected produce swing, the two kinds of swings in front and back orthogonal spaces, promptly reflecting optics 86 is realized the two dimension swing.
Swing, the two kinds of swings in front and back orthogonal space, promptly reflecting optics 66 is realized the two dimension swing.
Embodiment five:
The present invention has designed the embodiment five of the two-dimensional piezoelectric light reflection structure of chip type, as shown in Figure 9.
The structure of embodiment five and embodiment three basically identicals, unique difference is the concrete structure of support frame, sees Fig. 9.
The two-dimensional piezoelectric light reflection structure of chip type, constitute four composite cantilevers 91,92,93,94 respectively by four groups of piezoelectric ceramic pieces 910,920,930,940 and substrate 911,921,931,941, hinges 95, reflecting optics 96, support frame 97 is formed.It is characterized in that: four composite cantilevers 91,92,93 and 94 are cross and are symmetrically distributed, and reflecting optics 96 is arranged on the central spot of cross by hinges 95, and the support frame 97 around four composite cantilevers 91,92,93 and 94 rely on is fixing.
Described piezoelectric ceramic piece the 910,920,930, the 940th, single-layer sheet, or multi-layer stacks formula structure, polarised direction is along the thickness direction of piezoelectric ceramic piece.Piezoelectric ceramic piece 910,920,930,940 is bonding with described substrate 911,921,931,941 usefulness epoxy glues respectively, and piezoelectric ceramic piece 910,920,930,940 all is fixed on the same side of substrate 911,921,931,941.
Described substrate 911,921,931,941 and support frame 97 adopt metal material or silicon materials.
Described reflecting optics 96 surfaces adopt sputtered aluminum film or golden film surface to form mirror surface 960.
Described hinges 95 is the elongate strip structure, and with described composite cantilever 91,92,93,94, picture frame 961 is rigidly connected.
Described support frame 97 is fixed with extraneous by through hole 970.
Described composite cantilever 91,92,93,94 is realized the two dimensional optical scanning of described reflecting optics 96 by flexural deformation separately.Feature is: the electrode surface of the piezoelectric ceramic piece 910 on pumping signal positive pole and composite cantilever 91 links to each other, the electrode surface of the piezoelectric ceramic piece 930 on the composite cantilever 93 on pumping signal negative pole and opposite links to each other, this connected mode will remain another extension of contraction in two piezoelectric ceramic pieces 910 and 930, cause aspectant two composite cantilevers 91 and 93 to produce two kinds of phase place opposite curvature distortion up and down, and then make the reflecting optics 96 that is connected produce swing.In like manner, the electrode surface of the piezoelectric ceramic piece 920 on pumping signal positive pole and composite cantilever 92 links to each other, the electrode surface of the piezoelectric ceramic piece 940 on the composite cantilever 94 on pumping signal negative pole and opposite links to each other, this connected mode will remain another extension of contraction in two piezoelectric ceramic pieces 920 and 940, cause aspectant two composite cantilevers 92 and 94 to produce two kinds of phase place opposite curvature distortion up and down, and then make the reflecting optics 96 that is connected produce swing, the two kinds of swings in front and back orthogonal spaces, promptly reflecting optics 96 is realized the two dimension swing.
Embodiment six:
The present invention has designed the embodiment six of the two-dimensional piezoelectric light reflection structure of chip type, as shown in figure 10.
The two-dimensional piezoelectric light reflection structure of chip type constitutes two composite cantilevers 101,102 respectively by two groups of piezoelectric ceramic pieces 1010,1020 and substrate 1011,1021, hinges 103, and reflecting optics 104, support frame 105 is formed.It is characterized in that: be in vertical distribution between two composite cantilevers 101 and 102, reflecting optics 104 is arranged on the plotted point place of two composite cantilevers 101 and 102 by hinge 103, and link to each other with support frame 105 by hinges 103,105 of carriages around two composite cantilevers 101 and 102 rely on are fixed.
Described piezoelectric ceramic piece 1010 and 1020 is single-layer sheet, or multi-layer stacks formula structure, and polarised direction is along the thickness direction of piezoelectric ceramic piece.Piezoelectric ceramic piece 1010 and 1020 is bonding with described substrate 1011 and 1021 usefulness epoxy glues respectively, and piezoelectric ceramic piece 1010 and 1020 all is fixed on the same side of substrate 1011 and 1021.
Described substrate 1011 and 1021 and support frame 105 adopt metal material or silicon materials.
Described reflecting optics 104 surfaces adopt sputtered aluminum film or golden film surface to form mirror surface 1040.
Described hinges 103 is the elongate strip structure, and with described composite cantilever 101 and 102, picture frame 1041 is rigidly connected.
Described support frame 105 is fixed with extraneous by through hole 1050.
Described composite cantilever 101,102 is realized the two dimensional optical scanning of described reflecting optics 104 by flexural deformation separately.Feature is: the electrode surface of the piezoelectric ceramic piece 1010 on pumping signal positive pole and composite cantilever 101 links to each other, and the pumping signal negative pole links to each other with substrate 1011, and composite cantilever 101 produces flexural deformations, and then makes the reflecting optics 104 that is connected produce swing.In like manner, the electrode surface of the piezoelectric ceramic piece 1020 on pumping signal positive pole and composite cantilever 102 links to each other, and the pumping signal negative pole links to each other with substrate 1021, and composite cantilever 102 produces flexural deformations, and then makes the reflecting optics 104 that is connected produce swing.The two kinds of swings in front and back orthogonal spaces, promptly reflecting optics 104 is realized the two dimension swing.
Embodiment seven:
The present invention has designed the embodiment seven of the two-dimensional piezoelectric light reflection structure of chip type, as shown in figure 11.
The structure of embodiment seven and embodiment six basically identicals, unique difference is the concrete structure of support frame, sees Figure 11.
The two-dimensional piezoelectric light reflection structure of chip type constitutes two composite cantilevers 111,112 respectively by two groups of piezoelectric ceramic pieces 1110,1120 and substrate 1111,1121, hinges 113, and reflecting optics 114, support frame 115 is formed.It is characterized in that: be in vertical distribution between two composite cantilevers 111 and 112, reflecting optics 114 is arranged on the plotted point place of two composite cantilevers 111 and 112 by hinge 113, and link to each other with support frame 115 by hinges 113,115 of carriages around two composite cantilevers 111 and 112 rely on are fixed.
Described piezoelectric ceramic piece 1110 and 1120 is single-layer sheet, or multi-layer stacks formula structure, and polarised direction is along the thickness direction of piezoelectric ceramic piece.Piezoelectric ceramic piece 1110 and 1120 is bonding with described substrate 1111 and 1121 usefulness epoxy glues respectively, and piezoelectric ceramic piece 1110 and 1120 all is fixed on the same side of substrate 1111 and 1121.
Described substrate 1111 and 1121 and support frame 115 adopt metal material or silicon materials.
Described reflecting optics 114 surfaces adopt sputtered aluminum film or golden film surface to form mirror surface 1140.
Described hinges 113 is the elongate strip structure, and with described composite cantilever 111 and 112, picture frame 1141 is rigidly connected.
Described support frame 115 is fixed with extraneous by through hole 1150.
Described composite cantilever 111,112 is realized the two dimensional optical scanning of described reflecting optics 114 by flexural deformation separately.Feature is: the electrode surface of the piezoelectric ceramic piece 1110 on pumping signal positive pole and composite cantilever 111 links to each other, and the pumping signal negative pole links to each other with substrate 1111, and composite cantilever 111 produces flexural deformations, and then makes the reflecting optics 114 that is connected produce swing.In like manner, the electrode surface of the piezoelectric ceramic piece 1120 on pumping signal positive pole and composite cantilever 112 links to each other, and the pumping signal negative pole links to each other with substrate 1121, and composite cantilever 112 produces flexural deformations, and then makes the reflecting optics 114 that is connected produce swing.The two kinds of swings in front and back orthogonal spaces, promptly reflecting optics 114 is realized the two dimension swing.
Embodiment eight:
The present invention has designed the embodiment eight of the two-dimensional piezoelectric light reflection structure of chip type, as shown in figure 12.
The structure of embodiment eight and embodiment six basically identicals, unique difference is the concrete structure of support frame, sees Figure 12.
The two-dimensional piezoelectric light reflection structure of chip type constitutes two composite cantilevers 121,122 respectively by two groups of piezoelectric ceramic pieces 1210,1220 and substrate 1211,1221, hinges 123, and reflecting optics 124, support frame 125 is formed.It is characterized in that: be in vertical distribution between two composite cantilevers 121 and 122, reflecting optics 124 is arranged on the plotted point place of two composite cantilevers 121 and 122 by hinge 123, and link to each other with support frame 115 by hinges 123,125 of carriages around two composite cantilevers 121 and 122 rely on are fixed.
Described piezoelectric ceramic piece 1210 and 1220 is single-layer sheet, or multi-layer stacks formula structure, and polarised direction is along the thickness direction of piezoelectric ceramic piece.Piezoelectric ceramic piece 1210 and 1220 is bonding with described substrate 1211 and 1221 usefulness epoxy glues respectively, and piezoelectric ceramic piece 1210 and 1220 all is fixed on the same side of substrate 1211 and 1221.
Described substrate 1211 and 1221 and support frame 125 adopt metal material or silicon materials.
Described reflecting optics 124 surfaces adopt sputtered aluminum film or golden film surface to form mirror surface 1240.
Described hinges 123 is the elongate strip structure, and with described composite cantilever 121 and 122, picture frame 1241 is rigidly connected.
Described support frame 125 is fixed with extraneous by through hole 1250.
Described composite cantilever 121,122 is realized the two dimensional optical scanning of described reflecting optics 124 by flexural deformation separately.Feature is: the electrode surface of the piezoelectric ceramic piece 1210 on pumping signal positive pole and composite cantilever 121 links to each other, and the pumping signal negative pole links to each other with substrate 1211, and composite cantilever 121 produces flexural deformations, and then makes the reflecting optics 124 that is connected produce swing.In like manner, the electrode surface of the piezoelectric ceramic piece 1220 on pumping signal positive pole and composite cantilever 122 links to each other, and the pumping signal negative pole links to each other with substrate 1221, and composite cantilever 122 produces flexural deformations, and then makes the reflecting optics 124 that is connected produce swing.The two kinds of swings in front and back orthogonal spaces, promptly reflecting optics 124 is realized the two dimension swing.
Claims (12)
1. the two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:
(1) composite cantilever, be fixedly connected to form by a substrate and one group of piezoelectric ceramic piece being positioned at this substrate homonymy, two electrode districts are arranged on this piezoelectric ceramic piece, and they are identical by the polarised direction in the polarized area of formed two correspondences after the thickness direction polarization;
(2) hinge, a side of this hinge and a side of described substrate flexibly connect;
(3) reflecting optics, this eyeglass are fixed in the picture frame, and this picture frame links to each other with the opposite side of described hinge;
(4) support frame, this framework is fixedlyed connected with the opposite side of described substrate;
Anodal in parallel with the two arrays of electrodes district when pumping signal, and negative pole is when linking to each other with described substrate, and this composite cantilever generation is with respect to the flexural deformation of described substrate plane;
Link to each other the torsional deflection that it is center line that this composite cantilever produces with described composite cantilever major axis respectively with described two arrays of electrodes district with negative pole when pumping signal is anodal.
2. the two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:
(1) composite cantilever, be fixedly connected to form by a substrate and one group of piezoelectric ceramic piece being positioned at this substrate homonymy, two electrode districts are arranged on this piezoelectric ceramic piece, and they are identical by the polarised direction in the polarized area of two correspondences that form along thickness direction polarization back;
(2) hinge, a side of this hinge and a side of described substrate flexibly connect;
(3) reflecting optics, this eyeglass are fixed in the picture frame, and a side of this picture frame links to each other with the opposite side of described hinge;
(4) support frame, this framework one side is fixedlyed connected with the opposite side of described substrate, and the opposite side of this framework then flexibly connects by the opposite side of another one hinge and described picture frame;
Anodal in parallel with described two arrays of electrodes district when pumping signal, and negative pole is when linking to each other with described substrate, and this composite cantilever generation is with respect to the flexural deformation of described substrate plane;
Link to each other then this composite cantilever generation torsional deflection that is center line with described composite cantilever major axis respectively with described two arrays of electrodes district with negative pole when pumping signal is anodal.
3. the two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:
(1) composite cantilever combination, constitute by four composite cantilevers that are the cross symmetrical distribution mutually, each composite cantilever constitutes by a substrate and with the piezoelectric ceramic piece of this substrate Joint, this piezoelectric ceramic piece all is positioned at each substrate homonymy, and all identical along thickness direction polarization and polarised direction;
(2) reflecting optics is fixed in the picture frame, and this picture frame flexibly connects with a side of four substrates respectively mutually by four hinges, is positioned at the center part that described cross is symmetrically distributed;
(3) support frame, this framework is fixedlyed connected with the opposite side of described four substrates;
The electrode surface of the piezoelectric ceramic piece on any one composite cantilever in pumping signal positive pole and the combination of described composite cantilever links to each other, and the electrode surface of the piezoelectric ceramic piece on the composite cantilever of negative pole and opposite side is when linking to each other, shrink and another elongation remaining in these two piezoelectric ceramic pieces one, cause aspectant two composite cantilevers to produce, following two kinds of flexural deformations that phase place is reverse, and then making the reflecting optics that is connected produce swing, two kinds of swings that the composite cantilever that described cross is symmetrically distributed makes up formed reflecting optics are quadratures in the space.
4. the two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:
(1) composite cantilever combination, be made of two mutually perpendicular composite cantilevers, each composite cantilever constitutes by a substrate and with the piezoelectric ceramic piece of this substrate Joint, and each piezoelectric ceramic piece all is positioned at each substrate homonymy, all polarized along thickness direction, and polarised direction is identical;
(2) reflecting optics, this eyeglass are fixed in the picture frame, are positioned at the place that intersects vertically of described two composite cantilevers;
(3) support frame, this framework are fixedlyed connected with a side of described two orthogonal composite cantilevers respectively;
(4) hinge has four, and a side of the 1st hinge, the 2nd hinge then flexibly connects with described picture frame respectively with opposite side flexible connection the 1st hinge of described two orthogonal composite cantilevers, the opposite side of the 2nd hinge respectively; One side of the 3rd hinge, the 4th hinge flexibly connects with described support frame respectively, and the opposite side of the 3rd hinge, the 4th hinge then flexibly connects with described picture frame respectively mutually;
Described two orthogonal composite cantilevers are realized the two dimensional optical scanning of described reflecting optics by flexural deformation separately, promptly the electrode surface of the piezoelectric ceramic piece on pumping signal positive pole and any one composite cantilever wherein links to each other, then this composite cantilever generation flexural deformation when negative pole links to each other with substrate, and then make described anti-eyeglass produce swing; For the another one composite cantilever, it comes to the same thing when adopting described method, but front and back two kinds of swings orthogonal space has been realized the two dimension swing of described reflecting optics.
5. according to the described chip type two-dimensional piezoelectric light reflection structure of any one claim in the claim 1～4, it is characterized in that: described piezoelectric ceramic piece is a single-layer sheet, or any in the multi-layer stacks formula structure.
6. according to the described chip type two-dimensional piezoelectric light reflection structure of any one claim in the claim 1～4, it is characterized in that: described substrate and support frame adopt any in metal material or the silicon materials.
7. according to the described chip type two-dimensional piezoelectric light reflection structure of any claim in the claim 1～4, it is characterized in that: described reflecting optics adopts any in sputtered aluminum film or the golden film surface.
8. according to the two-dimensional piezoelectric light reflection structure of the described chip type of any one claim in the claim 1～4, it is characterized in that: described hinge is the elongate strip structure, with described substrate or picture frame or the flexible connection of support frame rigidity.
9. according to the two-dimensional piezoelectric light reflection structure of the described chip type of any one claim in the claim 1,2 two kinds, it is characterized in that: described piezoelectric ceramic piece is to become the two arrays of electrodes district in same piezoelectric ceramic piece surface segmentation.
10. according to the two-dimensional piezoelectric light reflection structure of the described chip type of any one claim in the claim 1,2 two kinds, it is characterized in that: described piezoelectric ceramic piece is two piezoelectric ceramic pieces has certain intervals ground parallel arranged along described composite cantilever length direction upper and lower.
11. according to the two-dimensional piezoelectric light reflection structure of the described chip type of any one claim in the claim 2,4 two kinds, it is characterized in that: described hinge is made of one with substrate, picture frame, support frame.
12. the two-dimensional piezoelectric light reflection structure of chip type according to claim 1 is characterized in that: described hinge is made of one with substrate, picture frame.
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|---|---|---|---|
| CN 200510012196 CN1731236A (en) | 2005-07-15 | 2005-07-15 | Sheet type two-dimensional piezoelectric light reflection structure |
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| CN 200510012196 CN1731236A (en) | 2005-07-15 | 2005-07-15 | Sheet type two-dimensional piezoelectric light reflection structure |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7760414B2 (en) | 2007-04-02 | 2010-07-20 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Optical device comprising a structure for avoiding reflections |
| CN103246059A (en) * | 2012-02-14 | 2013-08-14 | 富士胶片株式会社 | Mirror driving device and method of controlling the device |
| CN103888023A (en) * | 2014-04-16 | 2014-06-25 | 吉林大学 | Cantilever mechanism for piezoelectric power generation |
| CN106872015A (en) * | 2017-02-22 | 2017-06-20 | 重庆邮电大学 | A kind of optical-fiber type vibrating sensing measuring system |
| JPWO2017141529A1 (en) * | 2016-02-17 | 2018-02-22 | 三菱電機株式会社 | Mirror drive device and manufacturing method thereof |
| CN110501812A (en) * | 2019-09-05 | 2019-11-26 | 上海汽车集团股份有限公司 | A kind of MEMS scanning mirror |
| WO2021135135A1 (en) * | 2019-12-31 | 2021-07-08 | 中芯集成电路（宁波）有限公司 | Piezoelectric drive structure and imaging module |
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- 2005-07-15 CN CN 200510012196 patent/CN1731236A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7760414B2 (en) | 2007-04-02 | 2010-07-20 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Optical device comprising a structure for avoiding reflections |
| CN101281295B (en) * | 2007-04-02 | 2011-05-04 | 弗劳恩霍夫应用研究促进协会 | Optical device comprising a structure for avoiding reflections |
| CN103246059A (en) * | 2012-02-14 | 2013-08-14 | 富士胶片株式会社 | Mirror driving device and method of controlling the device |
| CN103246059B (en) * | 2012-02-14 | 2016-08-10 | 富士胶片株式会社 | Mirror drives equipment and the method controlling this equipment |
| CN103888023A (en) * | 2014-04-16 | 2014-06-25 | 吉林大学 | Cantilever mechanism for piezoelectric power generation |
| JPWO2017141529A1 (en) * | 2016-02-17 | 2018-02-22 | 三菱電機株式会社 | Mirror drive device and manufacturing method thereof |
| CN106872015A (en) * | 2017-02-22 | 2017-06-20 | 重庆邮电大学 | A kind of optical-fiber type vibrating sensing measuring system |
| CN106872015B (en) * | 2017-02-22 | 2019-04-09 | 重庆邮电大学 | A kind of optical-fiber type vibrating sensing measuring system |
| CN110501812A (en) * | 2019-09-05 | 2019-11-26 | 上海汽车集团股份有限公司 | A kind of MEMS scanning mirror |
| WO2021135135A1 (en) * | 2019-12-31 | 2021-07-08 | 中芯集成电路（宁波）有限公司 | Piezoelectric drive structure and imaging module |
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