CN1716456A - Nano grade positioning precision one dimension displacement work table - Google Patents
Nano grade positioning precision one dimension displacement work table Download PDFInfo
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- CN1716456A CN1716456A CN 200510018618 CN200510018618A CN1716456A CN 1716456 A CN1716456 A CN 1716456A CN 200510018618 CN200510018618 CN 200510018618 CN 200510018618 A CN200510018618 A CN 200510018618A CN 1716456 A CN1716456 A CN 1716456A
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Abstract
The one-dimensional displacement work table in nanometer level positioning precision includes a work table part, a position detecting part, and a driving part. The work table part includes coarse regulating work table, which is set between rolling tracks in vertical direction and has coarse displacement regulating mechanism; and fine regulating work table, which has pedestal set in the inner cavity of the coarse regulating work table via one connecting foldable flexible hinge support mechanism and has piezoelectric micro displacement unit as fine displacement regulating mechanism set between its pedestal and the coarse regulating work table. The driving part for the coarse regulating work table and the fine regulating work table is connected to the signal processing and controlling circuit. diffraction grating fixed on the work table is used as the measurement sensor for the displacement of the work table to form the displacement relevant detection signal.
Description
Technical field
The present invention relates to a kind of nano grade positioning precision one dimension displacement work table, specifically, it is a kind of one dimension displacement work table, this worktable can be realized wide region, the ultraprecise displacement location of vertical direction, is used for the precision positioning of sciemtifec and technical spheres such as microelectronic engineering, measuring science and technology, optics and photoelectron engineering, precision engineering, bioengineering, nanometer science and technology.
Background technology
The development of sciemtifec and technical spheres such as microelectronic engineering, measuring science and technology, optics and photoelectron engineering, precision engineering, bioengineering, nanometer science and technology has proposed more and more higher requirement to precision positioning.Generally there is working range in existing accurate displacement worktable, and greatly then precision is low, locating speed (is seen L.Juhas slowly, A.Vuianic, N.Adamovic, L.Nagy, B.Borovac, Aplatform for micro-positioning based on piezo legs, Mechatronics2001,11:869-897), and the bearing accuracy height, the fast problem that then working range is little of speed (is seen Awabdy BA, Shih WC, Auslander DM, Nanometer positioning of a linearmotion stage under static loads, IEEE Trans Mechatronics, 1998:3 (2): 113-9), in addition, existing long stroke, the most double-frequency laser interferometry systems that adopt of the measurement feedback system of nanoscale worktable, as the feedback measurement links, this system bulk is big---and generally all more than the hundreds of millimeter, install and be difficult to meet abbe ' s principle, and cost is higher.
Summary of the invention
The object of the present invention is to provide a kind of nano grade positioning precision one dimension displacement work table, particularly can overcome above-mentioned defective, working range is big, bearing accuracy is high, locating speed is fast one dimension displacement work table, be used for one dimension ultraprecise location.
Technical scheme of the present invention: the present invention includes worktable part, position detection part, signal Processing and control circuit part, drive part, it is characterized in that: worktable comprises coarse adjustment, accurate adjustment two-stage positioning table, the coarse positioning worktable places in the middle of the rolling guide of vertical direction, and the below of coarse positioning worktable is a coarse positioning transposition complete machine structure; The base of accurate adjustment positioning table places the inner chamber of coarse positioning worktable, be connected with the inner chamber of coarse positioning worktable by the hinged mechanism of collapsible flexibility, piezoelectric actuator arranged as smart displacement adjusting mechanism between the base below of accurate adjustment positioning table and the coarse positioning worktable; Slightly, the drive part of smart displacement adjusting mechanism is connected with control circuit with signal Processing.
Described nano grade positioning precision one dimension displacement work table, the displacement adjusting mechanism of its coarse positioning worktable are that mechanism is dwindled in the wedge shape displacement that is positioned at coarse positioning worktable below, are connected with drive motor by nut-screw mechanism.
Described nano grade positioning precision one dimension displacement work table, its position probing is to be finished by grating sensor.Diffraction grating as displacement measurement sensor is fixed on the fine positioning table base, semiconductor laser emitted laser bundle impinges perpendicularly on the grating, produce ± prism of corner cubes reflection that 1 order diffraction light is placed through two symmetries respectively, incide once more on the grating face and produce diffraction, the secondary diffraction light is converged the formation interference fringe, project on the photodetector again, and form the grating signal relevant with displacement by photodetector.
Described nano grade positioning precision one dimension displacement work table, its signal Processing has grating signal amplifying circuit, counting to be connected with input end and computer with sub-circuit with control circuit successively; Fanout is connected with piezoelectric micromotor displacement high-voltage driving circuit by the D/A change-over circuit, is connected with stepper motor driver by the I/O control circuit.
Advantage of the present invention:
1, thick, the thin two-stage location structure that worktable of the present invention adopts, not only guaranteed worktable fast moving but also utilized Piezoelectric Ceramic to have high resolving power, response, no friction and wearing and tearing fast, low-power consumption, not affected by magnetic fields and in a big way, guaranteed the accurate positioning of worktable advantages such as the running environment requirement are low.This worktable can be used on the aspects such as photoetching technique, little manufacturing, MEMS (micro electro mechanical system), measuring surface form and nanoscale measurement of coordinates of semiconductor and ultraprecise processing, and its working range is big, bearing accuracy is high, locating speed is fast.
2, the present invention adopts diffraction grating as position measurement sensor, can realize high precision, large-scale position probing, grating directly and worktable be fixed together, greatly reduced the influence of Abbe error.
In a word, this worktable can be realized the one dimension displacement precision positioning, can be used for aspects such as measuring surface form and nanoscale measurement of coordinates, semiconductor and the photoetching technique of ultraprecise processing, little manufacturing, MEMS (micro electro mechanical system).
Description of drawings
Fig. 1 is the front view of one dimension worktable of the present invention;
Fig. 2 is the light path synoptic diagram of diffraction grating;
The signal Processing of Fig. 3 worktable and control circuit structural representation;
Thick, the smart worktable front view of Fig. 4;
Fig. 5 workflow diagram.
Embodiment
Worktable of the present invention comprises worktable part, position detection part, signal Processing and control circuit part and drive part as shown in Figure 1.Worktable partly comprises coarse positioning worktable 2, accurate adjustment positioning table 1, and coarse positioning worktable 2 places in the middle of the rolling guide 4 of vertical direction, and the below of coarse positioning worktable is a coarse positioning transposition complete machine structure 6; The base 1-1 of accurate adjustment positioning table 1 places the inner chamber 2-1 of coarse positioning worktable, and base 1-1 is connected with the inner chamber 2-1 of coarse positioning worktable by the hinged mechanism 8 of collapsible flexibility of four symmetries.Be that piezoelectric actuator 5 is as smart displacement adjusting mechanism, by the hinged mechanism of flexibility 8 guiding between accurate adjustment positioning table base 1-1 below and the coarse positioning worktable; Accurate adjustment positioning table 1 is connected with base 1-1 by web joint 1-2 and is fixing; Slightly, the drive part of smart displacement adjusting mechanism is connected with control circuit 10 with signal Processing.
The displacement adjusting mechanism of coarse positioning worktable 2 is that mechanism 6 is dwindled in the wedge shape displacement that is positioned at coarse positioning worktable below, is connected with drive motor by nut-screw mechanism.Nut-screw mechanism and motor 7 drivings are gone up the wedge along continuous straight runs and are moved, and this moves with certain scale down coarse positioning worktable and fine positioning worktable are moved in the vertical direction.Smart displacement adjusting mechanism piezoelectric actuator 5 is driven by piezoelectric micromotor displacement high-voltage driving circuit 16.
Fig. 2 is a grating light path synoptic diagram: the present invention adopts diffraction grating as displacement measurement sensor, comprise that diffraction grating 13 is fixed on the fine positioning table base 1-1, with diffraction grating 13 is core, laser instrument 12, prism of corner cube 3, right-angle prism 11 and photodetector 9 are for auxiliary, constitute position detecting device, the light beam that is sent by laser instrument 12 impinges perpendicularly on the diffraction grating 13 by collimation lens L, produce ± prism of corner cubes 3 reflections that 1 order diffraction light is placed through two symmetries respectively, incide once more on the grating 13 and produce diffraction, make it meet at right-angle prism 11 and produce interference fringe, interference fringe projects on the photodetector 9, form the grating signal relevant by photodetector 9, deliver to signal Processing and control circuit again with displacement.
Signal Processing and control circuit 10 be as shown in Figure 3: the grating signal amplifying circuit 19, counting and the sub-circuit 20 that comprise computing machine 14 input ends; Fanout is connected with piezoelectric micromotor displacement high-voltage driving circuit 16 by D/A change-over circuit 15, drives piezoelectric actuator 5; Be connected drive stepping motor 7 with stepper motor driver 18 by I/O control circuit 17.
Fig. 4 is thick, smart worktable front view: thick black line is represented the line cutting track among the figure, one end of the flexible hinged mechanism 8 of collapsible parallel flat is connected with fine positioning table base 1-1, the other end is fixed on the coarse positioning worktable 2, the 8 pairs of fine positioning table bases 1-1 of flexible hinged mechanism of four symmetries forms supporting stably and displacement guiding, piezoelectric actuator 5 by fine positioning table base 1-1 bottom drives adjustment, and accurate adjustment positioning table 1 is connected with base 1-1 by web joint 1-2 and fixing (as Fig. 1); The driving of piezoelectric actuator is driven by D/A change-over circuit 15 and piezoelectric ceramics high-voltage driving circuit 16 by computing machine shown in Figure 3 14, realizes the one-dimensional micro-displacement motion to accurate adjustment positioning table 1.
In order to realize the worktable wide region, move high-precision location, as shown in Figure 1, fine positioning worktable 1 is fixed on the fine positioning table base 1-1, fine positioning table base 1-1 is driven by piezoelectric actuator, and the flexible hinged mechanism 8 that passes through four symmetries is connected with coarse positioning worktable 2, coarse positioning worktable 2 is by vertical direction rolling guide 4 guiding that are vertically fixed on the motion reference field A, mechanism 6 is dwindled in the displacement of motor-driven wedge shape makes the coarse positioning worktable produce the vertical direction displacement, and also inciting somebody to action thereupon with coarse positioning stationary table fine positioning worktable together, equivalent moves; Diffraction grating 13 is fixed on the fine positioning table base 1-1, and the formed grating signal relevant with displacement is transferred to computing machine 14 through signal amplification circuit 19 and counting and sub-circuit 20 with displacement signal; Computing machine is through comparing with the target location parameter, and the gained gap is greater than 10 μ m, and by I/O control circuit control step motor driver, drive motor rotates, and finishes coarse regulation; The gained gap is less than 10 μ m, by D/A change-over circuit control piezoelectric ceramics high-voltage driving circuit, the piezoelectric ceramics high-voltage driving circuit is adjusted the operating voltage of piezoelectric actuator and to finish the accurate adjustment of displacement is put in order, thereby the displacement of worktable is formed a closed loop detection control system.
The position fixing process of worktable such as Fig. 5: when worktable will move to certain target location, by diffraction grating the position of fine positioning worktable is detected in real time, and testing result fed back to computing machine, compare with the target location, the gained gap is delivered to stepper motor driver greater than 10 μ m by the I/O control circuit, and drive motor rotates coarse regulation, the displacement of motor-driven wedge shape is dwindled mechanism and is moved the coarse positioning worktable, up to the gap of target location less than 10 μ m; Gap is less than 10 μ m, deliver to the piezoelectric ceramics high-voltage driving circuit by the D/A change-over circuit, the piezoelectric ceramics high-voltage driving circuit is adjusted the operating voltage of piezoelectric actuator and to finish the accurate adjustment of displacement is put in order, till the fine positioning worktable reaches desired bearing accuracy.
Claims (4)
1. nano grade positioning precision one dimension displacement work table, comprise worktable part, position detection part, signal Processing and control circuit part, drive part, it is characterized in that: worktable comprises coarse adjustment, accurate adjustment two-stage positioning table, the coarse positioning worktable places in the middle of the rolling guide of vertical direction, and the below of coarse positioning worktable is a coarse positioning transposition complete machine structure; The base of accurate adjustment positioning table places the inner chamber of coarse positioning worktable, be connected with the inner chamber of coarse positioning worktable by the hinged mechanism of collapsible flexibility, piezoelectric actuator arranged as smart displacement adjusting mechanism between the base below of accurate adjustment positioning table and the coarse positioning worktable; Slightly, the drive part of smart displacement adjusting mechanism is connected with control circuit with signal Processing.
2. nano grade positioning precision one dimension displacement work table according to claim 1, it is characterized in that: the displacement adjusting mechanism of coarse positioning worktable is that mechanism is dwindled in the wedge shape displacement that is positioned at coarse positioning worktable below, is connected with drive motor by nut-screw mechanism.
3. nano grade positioning precision one dimension displacement work table according to claim 1 and 2, it is characterized in that: the diffraction grating as the worktable displacement survey sensor is fixed on the fine positioning table base, semiconductor laser emitted laser bundle impinges perpendicularly on the grating, produce ± prism of corner cubes reflection that 1 order diffraction light is placed through two symmetries respectively, incide once more on the grating face and produce diffraction, the secondary diffraction light is converged the formation interference fringe, project on the photodetector again, and form the grating signal relevant with displacement by photodetector.
4. nano grade positioning precision one dimension displacement work table according to claim 1 and 2 is characterized in that: signal Processing has grating signal amplifying circuit, counting to be connected with input end and computer with sub-circuit with control circuit successively; Fanout is connected with piezoelectric micromotor displacement high-voltage driving circuit by the D/A change-over circuit, is connected with stepper motor driver by the I/O control circuit.
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| CN 200510018618 CN1716456A (en) | 2005-04-28 | 2005-04-28 | Nano grade positioning precision one dimension displacement work table |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1956106B (en) * | 2006-08-18 | 2010-09-08 | 许宏 | Large stroke precision working platform device and drive method |
| CN102012227A (en) * | 2010-11-27 | 2011-04-13 | 上海大学 | Inclined contact type cavity-adjusting mechanism and method of laser gyro |
| CN101436436B (en) * | 2007-11-16 | 2011-05-25 | 同济大学 | Accurate one-dimensional rotary and two-dimensional tilting table |
| CN101541472B (en) * | 2007-06-27 | 2011-06-22 | 株式会社爱发科 | Coarse-fine movement device |
| CN102591368A (en) * | 2012-03-15 | 2012-07-18 | 无锡瑞迪声科技有限公司 | Anti-interference accurate nanometer displacement trigger |
| CN102768543A (en) * | 2012-06-25 | 2012-11-07 | 韩晖 | Stop-motion animation shooting control device and control method thereof |
| CN102889272A (en) * | 2012-10-19 | 2013-01-23 | 南京工程学院 | Piezoelectric-electrohydraulic mixing driving arm and control method thereof |
| CN104091618A (en) * | 2014-06-04 | 2014-10-08 | 中国科学院长春光学精密机械与物理研究所 | Double adjustment device |
| CN104793121A (en) * | 2015-04-23 | 2015-07-22 | 中国电子科技集团公司第四十一研究所 | Controllable high-frequency-response probe test moving device for microwave and millimeter wave chips |
| CN105116834A (en) * | 2015-04-14 | 2015-12-02 | 宁波职业技术学院 | Precise control console |
| CN105666162A (en) * | 2016-03-15 | 2016-06-15 | 南京航空航天大学 | Macro and micro dual-driving precise wedged feeding worktable and motion generation method |
| CN107622786A (en) * | 2017-11-08 | 2018-01-23 | 杭州电子科技大学 | Two-stage Piezoelectric Driving micro-nano locating platform |
| CN107911043A (en) * | 2017-11-29 | 2018-04-13 | 沈阳工业大学 | A kind of magnetostriction type splices the twin-stage displacement adjusting mechanism of more minute surfaces |
| CN110208936A (en) * | 2019-05-31 | 2019-09-06 | 中国计量科学研究院 | Nanoscale micrometric displacement regulation device for Laser Scanning Confocal Microscope detecting pinhole |
| CN110937148A (en) * | 2018-09-24 | 2020-03-31 | 先进科技新加坡有限公司 | Apparatus for packaging subminiature electronic devices |
| CN114523304A (en) * | 2022-02-10 | 2022-05-24 | 河南理工大学 | Eccentricity correction device between continuous processes of rotary parts |
-
2005
- 2005-04-28 CN CN 200510018618 patent/CN1716456A/en active Pending
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1956106B (en) * | 2006-08-18 | 2010-09-08 | 许宏 | Large stroke precision working platform device and drive method |
| CN101541472B (en) * | 2007-06-27 | 2011-06-22 | 株式会社爱发科 | Coarse-fine movement device |
| CN101436436B (en) * | 2007-11-16 | 2011-05-25 | 同济大学 | Accurate one-dimensional rotary and two-dimensional tilting table |
| CN102012227A (en) * | 2010-11-27 | 2011-04-13 | 上海大学 | Inclined contact type cavity-adjusting mechanism and method of laser gyro |
| CN102012227B (en) * | 2010-11-27 | 2012-05-02 | 上海大学 | Inclined contact type cavity-adjusting mechanism and method of laser gyro |
| CN102591368A (en) * | 2012-03-15 | 2012-07-18 | 无锡瑞迪声科技有限公司 | Anti-interference accurate nanometer displacement trigger |
| CN102768543A (en) * | 2012-06-25 | 2012-11-07 | 韩晖 | Stop-motion animation shooting control device and control method thereof |
| CN102768543B (en) * | 2012-06-25 | 2014-11-12 | 韩晖 | Control method of stop-motion animation shooting control device |
| CN102889272A (en) * | 2012-10-19 | 2013-01-23 | 南京工程学院 | Piezoelectric-electrohydraulic mixing driving arm and control method thereof |
| CN102889272B (en) * | 2012-10-19 | 2016-01-20 | 南京工程学院 | A kind of piezoelectricity-electric liquid combined drive swing arm and controlling method thereof |
| CN104091618A (en) * | 2014-06-04 | 2014-10-08 | 中国科学院长春光学精密机械与物理研究所 | Double adjustment device |
| CN104091618B (en) * | 2014-06-04 | 2016-03-02 | 中国科学院长春光学精密机械与物理研究所 | A kind of dual regulating device |
| CN105116834B (en) * | 2015-04-14 | 2018-09-04 | 宁波职业技术学院 | A kind of precision console |
| CN105116834A (en) * | 2015-04-14 | 2015-12-02 | 宁波职业技术学院 | Precise control console |
| CN104793121A (en) * | 2015-04-23 | 2015-07-22 | 中国电子科技集团公司第四十一研究所 | Controllable high-frequency-response probe test moving device for microwave and millimeter wave chips |
| CN104793121B (en) * | 2015-04-23 | 2017-11-17 | 中国电子科技集团公司第四十一研究所 | A kind of controllable high frequency sound probe test telecontrol equipment of microwave and millimeter wave chip |
| CN105666162A (en) * | 2016-03-15 | 2016-06-15 | 南京航空航天大学 | Macro and micro dual-driving precise wedged feeding worktable and motion generation method |
| CN107622786A (en) * | 2017-11-08 | 2018-01-23 | 杭州电子科技大学 | Two-stage Piezoelectric Driving micro-nano locating platform |
| CN107911043A (en) * | 2017-11-29 | 2018-04-13 | 沈阳工业大学 | A kind of magnetostriction type splices the twin-stage displacement adjusting mechanism of more minute surfaces |
| CN107911043B (en) * | 2017-11-29 | 2024-03-01 | 沈阳工业大学 | Two-stage displacement adjusting mechanism for magnetostriction type spliced multi-mirror-surface |
| CN110937148A (en) * | 2018-09-24 | 2020-03-31 | 先进科技新加坡有限公司 | Apparatus for packaging subminiature electronic devices |
| CN110208936A (en) * | 2019-05-31 | 2019-09-06 | 中国计量科学研究院 | Nanoscale micrometric displacement regulation device for Laser Scanning Confocal Microscope detecting pinhole |
| CN114523304A (en) * | 2022-02-10 | 2022-05-24 | 河南理工大学 | Eccentricity correction device between continuous processes of rotary parts |
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