CN104097113A - Single-stage driver positioning device and error compensation method - Google Patents
Single-stage driver positioning device and error compensation method Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
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- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
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- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/58—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair
- B23Q1/585—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair perpendicular to the working surface
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Abstract
The invention discloses a single-stage drive positioning device and an error compensation method. A positioning platform adopts a piezoelectric motor which is compact in structure and integrates multi-scale drive modes as a single-stage driver, a crossed roller guide rail as a guide mechanism and a high-resolution precision grating ruler as feedback, a middle transmission mechanism is not required to be used, and defects of reverse clearance errors, insufficient precision and rigidity and the like brought by adopting a ball screw and the like as a middle transmission link are avoided. By reasonably controlling and utilizing an AC (alternating current) continuous drive mode and a DC (direct current) scanning mode of the piezoelectric motor, the aims of large-travel quick drive and nanoscale precision positioning can be fulfilled. Moreover, a method of backwards compensating positioning errors is simple and effective, and a macro/micro double-layer position detection feedback device and a complicated macro/micro double-stage driver threshold switching algorithm are avoided. Only one position detection feedback device and a simple threshold judgment and control algorithm are required, and two drive modes of the single-stage driver, namely the piezoelectric motor can be conveniently controlled for precise positioning.
Description
Technical field
The invention belongs to large stroke precision location engineering field, be specifically related to a kind of single-stage and drive positioner and error compensating method.
Background technology
Modern manufacturing industry has been entered the general layout that the multiple manufacturing modes such as Precision Machining, semiconductor lithography, electron beam process, ion beam processing, light manufacture, LIGA processing and biological manufacture coexist by traditional machining.This general layout makes the precise part with fine structure more and more present following technical characterictic: volume is increasingly small, structure is increasingly meticulous, function is increasingly sophisticated, constituent material is increasingly various.And the detection of the high accuracy of the geometric sense of fine structure, physical quantity and material composition has extremely important effect in fields such as minute manufacturing, material engineering, gongwu, delicate metering, physical chemistry.High-resolution confocal microscopic imaging and spectrum test are the prerequisites that realizes precise part fine structure stress, group gradation parameter high-acruracy survey.And for the precision element with fine structure, need in larger range scale, find specific fine structure accurately to measure; Require fine structure measuring technology to realize and grandly/micro-measure across yardstick, high-resolution, both needed to ensure measurement category and macroscopic measurement precision, need again accurately to obtain microscopic information.Under this background, just make fine structure need to realize the requirement of large stroke, high accuracy, high-speed location across yardstick high-resolution tomography and detection system.And this needs to reach completing across the micro-nano navigation system of yardstick of sub-micron or even nano-precision in the scope of large stroke (Centimeter Level).
Similarly, in numerous field of nanometer technology such as microelectronic engineering, biomedical engineering, MEMS manufacture all day by day in the urgent need to large stroke across yardstick, high-precision Precision Position Location System.How can solve preferably the contradiction between large stroke and high position precision, to realize and become current numerous field of nanometer technology across yardstick precision positioning and be badly in need of one of the basic prerequisite that solves and key technology.Therefore, lot of domestic and foreign scientific research institution and scholar put into this technical research.Various large strokes are developed and develop across yardstick Precision Position Location System and device.
Traditional grand/micro-combination twin-stage drives locating platform to adopt thick/fine positioning mode can realize large stroke across yardstick precision positioning.Be that grand moving localization part is realized large stroke micron order coarse positioning, mainly drive leading screw or linear motor to mix air-bearing and guide rail or voice coil motor by stepper motor and mix the realizations such as guide rail; It is middle in order to compensate grand moving position error that Micro-positioning part is arranged on grand moving localization part, realizes nanoscale precision positioning.The Piezoelectric Ceramic that adopt more, in conjunction with flexible hinge as guiding mechanism.On position control method, how grand by arranging/micro-driving switching threshold is realized coarse positioning and accurate location, when grand moving componental movement is to distance objective position in threshold range time, is switched to fine motion part and carries out forward fine compensation and be positioned to target location.
Driving and the kind of drive (stepper motor that existing grand/micro-combination twin-stage drives location technology to adopt, voice coil motor drives, precision lead screw transmission etc.) there is opposite clearance error, response speed is low, and positioning precision is generally limited in micron or submicron order.Position error mainly relies on Micro-positioning part to complete compensation, and piezoelectric ceramic actuator stroke can only reach tens microns, and has self creep, sluggishness, non-linear etc.In addition, grand micro-two-stage drive locating platform complex structure, has increased rigging errors at different levels, makes actual location precision be difficult to reach nanoscale positioning requirements.These defects make grand/micro-combination twin-stage drive positioning control system more complicated; Passing threshold switches macro and micro servo, realizes the thick precision positioning control of large closed loop, and its position probing feedback device, threshold value switching controls algorithm to system is had relatively high expectations.
Therefore, in view of the above problems, be necessary to provide the comparatively simple single-stage of a kind of structure to drive and realize nanopositioning stage and the error compensating method of large stroke across yardstick, make locating platform overall structure simply compact, opposite clearance error while avoiding occurring rigging error and motion, improve the positioning precision of locating platform, to solve, fine structure is measured across yardstick, many reference amounts high-resolution and a difficult problem for decoupling zero.
Summary of the invention
In view of this, the invention provides a kind of single-stage and drive positioner and error compensating method, drive as single-stage by the piezo-electric motor that adopts compact conformation, integrates multiple dimensioned drive pattern, realize the object of large stroke fast driving and nanometer scale precision positioning.And what provide is simply effective across scale nanometer position error Backward compensation method, can conveniently controls two kinds of drive patterns of single-stage driver piezo-electric motor and accurately locate.
A kind of single-stage proposing according to object of the present invention drives positioner, comprises locating platform, drives the piezo-electric motor of described locating platform motion, and control the supervisory controller of locating platform motion and location;
Described locating platform comprises pedestal and the slide unit that moves along described pedestal linear slide, one side of locating platform is provided with at least one piezo-electric motor, opposite side is provided with the displacement detector that detects motion slide unit movement velocity and movement position, and described displacement detector is electrically connected with described supervisory controller;
Described supervisory controller comprises speed ring controller, position ring controller, motion control card, piezoelectric motor driver and signal transmission cable, described signal transmission cable is arranged on described piezo-electric motor, and described piezoelectric motor driver is by described signal transmission cable feed drive signal;
In a described motion slide unit side corresponding with described piezo-electric motor, be fixedly installed ceramic bar, the front end of described piezo-electric motor is provided with the driving foot of paired setting, and described drivings is vertically pressed on described ceramic bar enough; Drive foot motion, by driving the contact friction force actuation movement slide unit between sufficient and ceramic bar to move.
Preferably, described locating platform is upper and lower and two groups of locating platforms arranged in a crossed manner in length and breadth, the pedestal of upper one group of locating platform is fixed on next motion slide unit of organizing locating platform and with its synchronous slide, realizes movement and location in locating platform X-axis and Y direction.
Preferably, described piezo-electric motor is the in plane vibration supersonic motor based on inverse piezoelectric effect, and described piezo-electric motor is fixed on the centre position place of described pedestal.
Preferably, described pedestal bilateral symmetry is provided with into the line slideway of secondary collocation, and described line slideway is fixed on pedestal, and described motion slide unit is installed on described line slideway.
Preferably, described line slideway is crossed roller guide rail or air-float guide rail or magnetic suspended guide.
Preferably, described displacement detector is Raster Displacement Detection System or laser interferometer.
Preferably, described Raster Displacement Detection System comprises grating scale, read head, initial point, left limit, right limit and segmentation box; Described grating scale is installed on the opposite side of relatively ceramic bar on motion slide unit, described initial point, left limit and right limit are installed on respectively centre and the end positions place, left and right of grating scale, described read head is installed on the homonymy with respect to grating scale on pedestal, between described read head and pedestal, be provided with cushion block, make read head and grating scale at sustained height.
A kind of error compensating method, adopts described single-stage to drive positioner, specific as follows:
(1) input target location is with respect to the coordinate of initial point;
(2) supervisory controller control piezo-electric motor first moves to target location with AC Continuous Drive mode activated locating platform; Piezoelectric motor driver applies drive voltage signal by signal transmission cable to piezo-electric motor, excite piezo-electric motor flexural vibration mode and extensional vibration mode simultaneously, make to drive foot to produce elliptical trajectory, by driving the contact friction force actuation movement slide unit between sufficient and ceramic bar to move;
(3) the continuous detection and location platform of displacement detector moving displacement amount feed back to supervisory controller, once detect that locating platform motion arrives target location, supervisory controller sends halt instruction immediately, controls piezo-electric motor and stops driving;
(4) the location error compensation threshold value arranging between piezo-electric motor AC Continuous Drive pattern and DC scan pattern is 100nm-300nm, to guarantee that precision sweep is positioned at DC scan pattern and drives in scope ± 300nm;
When displacement detector detects that the displacement error causing due to mechanical shaking is within the scope of 100nm-300nm, supervisory controller is controlled immediately piezo-electric motor and is started DC scan pattern, turntable driving locating platform is positioned to target location locking backward, with the position error of compensation AC Continuous Drive pattern, reach nanoscale precision positioning;
If when detection mechanical shaking error exceedes 100nm-300nm, supervisory controller still control piezo-electric motor with AC Continuous Drive pattern to rear drive locating platform, until displacement detector detects current location distance objective position within the scope of 100nm-300nm, supervisory controller just switching controls piezo-electric motor drives locating platform to target location and latched position with DC scan pattern.
Preferably, the location error compensation threshold value between described piezo-electric motor AC Continuous Drive pattern and DC scan pattern is 250nm.
Compared with prior art, single-stage disclosed by the invention drives the advantage of positioner and error compensating method to be:
The piezo-electric motor that locating platform adopts compact conformation, integrate multiple dimensioned drive pattern drives as single-stage, crossed roller guide rail is as guiding mechanism, and high-resolution precise grating chi is as feedback, locating platform compact overall structure is simple, need to be by intermediate transmission mechanism, avoid adopting the defects such as opposite clearance error, precision and insufficient rigidity that the intermediate transmission links such as ball screw bring.
Utilize AC Continuous Drive pattern and the DC scan pattern of piezo-electric motor by reasonable control, can realize the object of large stroke fast driving and nanometer scale precision positioning.
And what provide is simply effective across scale nanometer position error Backward compensation method, grand/micro-double-deck position probing feedback device and complicated grand/micro-twin-stage drive threshold handoff algorithms are avoided.And only need a position detecting device and simple threshold decision control algolithm, can conveniently control two kinds of drive patterns of single-stage driver piezo-electric motor and accurately locate.
The present invention can be applicable to fine structure high-space resolution spectrum microscopy tomography and detection system in optical precision detection field, and to solve, fine structure is measured across yardstick, many reference amounts high-resolution and a difficult problem for decoupling zero.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is structural representation Fig. 1 that a kind of single-stage disclosed by the invention drives positioner.
Fig. 2 is structural representation Fig. 2 that a kind of single-stage disclosed by the invention drives positioner.
Fig. 3 is the structural representation of piezo-electric motor.
Fig. 4 is the control principle drawing of error compensating method.
Fig. 5 is the control principle drawing that single-stage drives positioner.
The title of the numeral in figure or the corresponding component of alphabetical representative:
1, pedestal 2, motion slide unit 3, piezo-electric motor 4, ceramic bar 5, line slideway 31, ceramic finger tip drive foot 32, signal transmission cable 6, cushion block 7, Raster Displacement Detection System 71, grating scale 72, read head 73, initial point 74, left limit 75, right limit
Detailed description of the invention
Driving and the kind of drive (stepper motor that existing grand/micro-combination twin-stage drives location technology to adopt, voice coil motor drives, precision lead screw transmission etc.) there is opposite clearance error, response speed is low, and positioning precision is generally limited in micron or submicron order.Position error mainly relies on Micro-positioning part to complete compensation, and piezoelectric ceramic actuator stroke can only reach tens microns, and has self creep, sluggishness, non-linear etc.In addition, grand micro-two-stage drive locating platform complex structure, has increased rigging errors at different levels, makes actual location precision be difficult to reach nanoscale positioning requirements.These defects make grand/micro-combination twin-stage drive positioning control system more complicated; Passing threshold switches macro and micro servo, realizes the thick precision positioning control of large closed loop, and its position probing feedback device, threshold value switching controls algorithm to system is had relatively high expectations.
The present invention is directed to deficiency of the prior art, provide a kind of single-stage to drive positioner and error compensating method, drive as single-stage by the piezo-electric motor that adopts compact conformation, integrates multiple dimensioned drive pattern, realize the object of large stroke fast driving and nanometer scale precision positioning.And what provide is simply effective across scale nanometer position error Backward compensation method, can conveniently controls two kinds of drive patterns of single-stage driver piezo-electric motor and accurately locate.
To be clearly and completely described technical scheme of the present invention by detailed description of the invention below.Obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
Please also refer to Fig. 1 to Fig. 3, as shown in the figure, a kind of single-stage drives positioner, comprises locating platform, drives the piezo-electric motor 3 of locating platform motion, and control the supervisory controller (not shown) of locating platform motion and location; Locating platform comprises pedestal 1 and the slide unit 2 that moves along pedestal 1 linear slide, one side of locating platform is provided with at least one piezo-electric motor 3, opposite side is provided with the displacement detector that detects motion slide unit movement velocity and movement position, and displacement detector is electrically connected with supervisory controller.Displacement detector can detect movement position and the movement velocity of the relative initial point of motion slide unit in real time, and feeds back to supervisory controller and carry out precise Positioning Control.
Locating platform is upper and lower and two groups of locating platforms arranged in a crossed manner in length and breadth, and the pedestal of upper one group of locating platform is fixed on motion slide unit 2 of next group locating platform and with its synchronous slide, realizes movement and location in locating platform X-axis and Y direction.Wherein next group locating platform can have 2 same side drives of piezo-electric motor, and upper one group of locating platform can be by piezo-electric motor one side drive, and concrete quantity needs to determine according to using, and does not limit at this.
Supervisory controller comprises speed ring controller, position ring controller, motion control card, piezoelectric motor driver and signal transmission cable 32, signal transmission cable 32 is arranged on piezo-electric motor 3, and piezoelectric motor driver is by the driving of signal transmission cable 32 feed drive signal controlling piezo-electric motors.
In motion slide unit 2 side corresponding with piezo-electric motor 3, be fixedly installed ceramic bar 4, the front end of piezo-electric motor 3 is provided with the driving foot of paired setting, drives foot to be vertically pressed on ceramic bar 4; Drive foot motion, by driving the contact friction force actuation movement slide unit 2 between sufficient and ceramic bar 4 to move.
Driving foot is that ceramic finger tip drives foot 31.Piezo-electric motor 3 is the in plane vibration supersonic motor based on inverse piezoelectric effect, and piezo-electric motor is fixed on the centre position place of pedestal 1.This piezoelectric motor configuration compactness, has eight identical ceramic finger tips and drives foot 31, has superpower driving and stabilizing power, has inherent braking function simultaneously, drives resolution 1nm, velocity interval 1 μ m/s-250mm/s.
When installation, piezo-electric motor 3 is fixed on the centre position place of the pedestal 1 of upper and lower two locating platforms; Pottery bar 4 is affixed on the motion slide unit 2 of corresponding piezo-electric motor installation side, and adjusts the pretension normal pressure between piezo-electric motor pottery finger tip driving foot 31 and corresponding ceramic bar 4 by pretension screw.When work, piezoelectric motor driver applies the sinusoidal drive voltage signal of resonant frequency 39.6kHz to piezo-electric motor 3 by signal transmission cable 32, excite flexural vibration mode and two kinds of mode of oscillations of extensional vibration mode of piezo-electric motor simultaneously, make ceramic finger tip drive foot 31 to produce a little elliptical trajectory.Be pressed on the ceramic bar 4 being fixed on motion slide unit 2 when ceramic finger tip being driven foot 31 install, utilize contact friction force between the two to move as drive force motion slide unit 2.In the time there is no load driver voltage signal, the finger pottery finger tip being pressed on ceramic bar 4 drives foot 31 can maintain a holding torque in motion slide unit 2 one sides, makes platform in stable state.Piezo-electric motor used mainly can be realized two kinds of drive patterns under its piezoelectric motor driver drives: AC Continuous Drive pattern can realize large stroke fast driving and location; DC scan pattern, piezo-electric motor is equivalent to common piezoelectric ceramics, can realize the nanometer scale precision positioning within the scope of 300nm.Thereby utilize two kinds of drive patterns of piezo-electric motor by reasonable control, need be by intermediate transmission mechanism, can realize large stroke fast driving and nanometer scale precision positioning.
Pedestal bilateral symmetry is provided with line slideway 5, and wherein line slideway is high-accuracy crossed roller guide rail, and precision is high, and speed is fast, and steadily, bearing capacity is strong in motion.When use, become secondary collocation to install, line slideway 5 is fixed on pedestal 1, and motion slide unit 2 is installed on line slideway 5, and motion slide unit 2 can, along line slideway 5 with respect to pedestal 1 rectilinear motion, be realized the stationarity of motion, avoids occurring offset deviation.
Wherein, line slideway is also replaceable is high-precision air-float guide rail or magnetic suspended guide.
Displacement detector is Raster Displacement Detection System, and Raster Displacement Detection System comprises grating scale 71, read head 72, initial point 73, left limit 74, right limit 75 and segmentation box; Grating scale 71 is installed on the opposite side of relatively ceramic bar 4 on motion slide unit 2, initial point, left limit and right limit are installed on respectively centre and the end positions place, left and right of grating scale 71, read head 72 is installed on the homonymy with respect to grating scale 71 on pedestal 1, between read head 72 and pedestal 1, be provided with cushion block 6, make read head 72 and grating scale 71 at sustained height.By Raster Displacement Detection System, movement position and the movement velocity of the relative initial point of the platform of detection and location in real time, and feed back to supervisory controller and carry out real-time closed-loop precise Positioning Control, improve the mobile accuracy of locating platform.
The concrete implementation principle of locating platform: the coordinate in input target location, host computer motion control interface with respect to initial point, supervisory controller sends motion control signal to piezoelectric motor driver by motion control card, piezoelectric motor driver applies the sinusoidal drive voltage signal of resonant frequency 39.6kHz to piezo-electric motor by signal transmission cable, make piezo-electric motor front end pottery finger tip drive foot to produce a little elliptical trajectory, thereby utilize ceramic finger tip drive between the ceramic bar on foot and motion slide unit contact friction force as drive force motion slide unit along high-accuracy crossed roller guide rail movement, Raster Displacement Detection System detects in real time movement position and the movement velocity of motion slide unit and feeds back to supervisory controller by segmentation box, carry out real-time closed-loop precise Positioning Control.Supervisory controller utilizes the AC Continuous Drive pattern of piezo-electric motor to realize large stroke fast driving by reasonable control and DC scan pattern realizes nanoscale precision positioning.Supervisory controller and motion control card can be controlled and drive upper and lower two groups of locating platforms to realize X-axis or Y-axis independently moving and location, also can control simultaneously and drive X-axis and Y-axis interlock location.
In the present invention, disclosed single-stage drives locating platform both can realize large stroke motion scope and the high speed positioning requirements of Centimeter Level, has reached again the positioning precision of nanometer scale.Adopt piezo-electric motor direct single-stage actuation movement locating platform, avoided adopting the defects such as opposite clearance error, precision and insufficient rigidity that the intermediate transmission links such as ball screw bring.Utilize two kinds of drive patterns of piezo-electric motor by reasonable control, can realize large stroke fast driving and nanometer scale precision positioning.The working range of the locating platform providing is 300mm × 300mm, and resolution ratio is 1nm, and repetitive positioning accuracy is ± 30nm.
Please also refer to Fig. 4 and Fig. 5, as shown in the figure, drive locating platform based on this single-stage, provide a kind of across scale nanometer position error Backward compensation method.Specific implementation method is as follows:
(1) input target location is with respect to the coordinate of initial point;
(2) supervisory controller control piezo-electric motor first moves to target location with AC Continuous Drive mode activated locating platform; Piezoelectric motor driver applies drive voltage signal by signal transmission cable to piezo-electric motor, excite piezo-electric motor flexural vibration mode and extensional vibration mode simultaneously, make to drive foot to produce elliptical trajectory, by driving the contact friction force actuation movement slide unit between sufficient and ceramic bar to move;
(3) the continuous detection and location platform of displacement detector moving displacement amount feed back to supervisory controller, once detect that locating platform motion arrives target location, supervisory controller sends halt instruction immediately, controls piezo-electric motor and stops driving;
(4) the location error compensation threshold value arranging between piezo-electric motor AC Continuous Drive pattern and DC scan pattern is 250nm, to guarantee that precision sweep is positioned at DC scan pattern and drives in scope ± 300nm;
When displacement detector detects that the displacement error causing due to mechanical shaking is within the scope of 250nm, supervisory controller is controlled immediately piezo-electric motor and is started DC scan pattern, turntable driving locating platform is positioned to target location locking backward, with the position error of compensation AC Continuous Drive pattern, reach nanoscale precision positioning;
If when detection mechanical shaking error exceedes 250nm, supervisory controller still control piezo-electric motor with AC drive pattern to rear drive locating platform, be less than 250nm until displacement detector detects current location distance objective position, supervisory controller just switching controls piezo-electric motor drives locating platform to target location and latched position with DC scan pattern.
Because the driving scope of piezo-electric motor DC scan pattern is ± 300nm (being that DC scan pattern can only could start within the scope of distance objective position ± 300nm) that therefore this threshold value only need be in DC scan pattern error compensation scope 300nm.But because the every step resolution ratio of piezo-electric motor AC Continuous Drive pattern reaches 100nm (be AC Continuous Drive pattern press down electric motor drive locating platform minimum step be 100nm), so the concrete scope of location error compensation threshold value between piezo-electric motor AC Continuous Drive pattern and DC scan pattern can be 100nm-300nm.Error compensation threshold value setting is 250nm, is while considering concrete enforcement, to have mechanical shaking and environmental disturbances error factors, and guarantees that precision sweep is positioned at DC scan pattern and drives in scope ± 300nm.
Wherein, the location error compensation threshold value between AC Continuous Drive pattern and DC scan pattern can be any number between 100nm-300nm, specifically can need to determine according to using.
Piezo-electric motor first moves to target location with AC Continuous Drive mode activated locating platform, once detect that locating platform moves to target location, controller sends Halt halt instruction immediately, controls piezo-electric motor and stops driving locating platform.But due to the existence of the factor such as mechanical shaking and environmental disturbances, locating platform will inevitably produce the position error that exceeds forward target location, and this error is detected and feed back to supervisory controller by Raster Displacement Detection System in real time.Controller is by comparing the location error compensation threshold value between this error and AC Continuous Drive pattern and DC scan pattern, if this error is in location error compensation threshold value time, supervisory controller is controlled immediately piezo-electric motor and is driven DC scan pattern " scanning backward " to compensate this error, with length nano-stepping backward turntable driving locating platform move to target location latched position.
Whole closed-loop control system mainly comprises speed ring controller and position ring controller, motion control card, piezoelectric motor driver, piezo-electric motor, locating platform and Raster Displacement Detection System.
Piezo-electric motor is under AC Continuous Drive pattern time, and supervisory controller is taking locating platform movement velocity as controlled quentity controlled variable.Raster Displacement Detection System is changed and is fed back locating platform real time kinematics speed, because piezo-electric motor actuation movement slide unit is to utilize contact friction force as driving force, the interference of out-of-flatness, mechanical shaking and the external environment on the ceramic bar surface that contacts must affect the stability of platform movement velocity.By PID (Proportion Integration Differentiation. proportional-integral-differential) speed ring controller, the locating platform movement velocity of grating feedback is carried out to real-time error correction, so that locating platform is accelerating, is at the uniform velocity moving steadily with moderating process, until target location reduces the position error causing due to factors such as mechanical shakings.
Piezo-electric motor is under DC scan pattern time, and supervisory controller is taking locating platform real time kinematics position as controlled quentity controlled variable.In the time that piezo-electric motor is switched to DC scan pattern by AC Continuous Drive pattern, motion platform to the position error of target location within the scope of 250nm, owing to having mechanical shaking and external environmental interference, and DC scan pattern lower piezoelectric motor self sluggishness, creep that exist and the positioning precision that must affect piezo-electric motor and drive locating platform such as non-linear.The displacement error value of the continuous Real-time Feedback locating platform distance objective of Raster Displacement Detection System position, by PID position ring controller, the position location error of grating feedback is carried out to real-time error correction, so that locating platform progressively " scans " to target location and latched position backward.
PID speed ring controller and PID position ring controller can adopt traditional PI D-algorithm, or the modern intelligent control algorithm such as neutral net, or combined control algorithm between them, specifically do not limit.
The switching threshold of speed ring controller and position ring controller is set to the site error 250nm of distance objective position, to guarantee that precision sweep is positioned at DC scan pattern and drives in scope ± 300nm.
The invention discloses a kind of single-stage and drive positioner and error compensating method, the piezo-electric motor that locating platform adopts compact conformation, integrate multiple dimensioned drive pattern drives as single-stage, crossed roller guide rail is as guiding mechanism, and high-resolution precise grating chi is as feedback, locating platform compact overall structure is simple, need to be by intermediate transmission mechanism, avoid adopting the defects such as opposite clearance error, precision and insufficient rigidity that the intermediate transmission links such as ball screw bring.
Utilize AC Continuous Drive pattern and the DC scan pattern of piezo-electric motor by reasonable control, can realize the object of large stroke fast driving and nanometer scale precision positioning.
And what provide is simply effective across scale nanometer position error Backward compensation method, grand/micro-double-deck position probing feedback device and complicated grand/micro-twin-stage drive threshold handoff algorithms are avoided.And only need a position probing feedback device and simple threshold decision control algolithm, can conveniently control two kinds of drive patterns of single-stage driver piezo-electric motor and accurately locate.
To the above-mentioned explanation of the disclosed embodiments, make professional and technical personnel in the field can realize or use the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiment, General Principle as defined herein can, in the situation that not departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (9)
1. single-stage drives a positioner, it is characterized in that, comprises locating platform, drives the piezo-electric motor of described locating platform motion, and control the supervisory controller of locating platform motion and location;
Described locating platform comprises pedestal and the slide unit that moves along described pedestal linear slide, one side of locating platform is provided with at least one piezo-electric motor, opposite side is provided with the displacement detector that detects motion slide unit movement velocity and movement position, and described displacement detector is electrically connected with described supervisory controller;
Described supervisory controller comprises speed ring controller, position ring controller, motion control card, piezoelectric motor driver and signal transmission cable, described signal transmission cable is arranged on described piezo-electric motor, and described piezoelectric motor driver is by described signal transmission cable feed drive signal;
In a described motion slide unit side corresponding with described piezo-electric motor, be fixedly installed ceramic bar, the front end of described piezo-electric motor is provided with the driving foot of paired setting, and described drivings is vertically pressed on described ceramic bar enough; Drive foot motion, by driving the contact friction force actuation movement slide unit between sufficient and ceramic bar to move.
2. single-stage as claimed in claim 1 drives positioner, it is characterized in that, described locating platform is upper and lower and two groups of locating platforms arranged in a crossed manner in length and breadth, the pedestal of upper one group of locating platform is fixed on next motion slide unit of organizing locating platform and with its synchronous slide, realizes movement and location in locating platform X-axis and Y direction.
3. single-stage as claimed in claim 1 drives positioner, it is characterized in that, described piezo-electric motor is the in plane vibration supersonic motor based on inverse piezoelectric effect, and described piezo-electric motor is fixed on the centre position place of described pedestal.
4. single-stage as claimed in claim 1 drives positioner, it is characterized in that, described pedestal bilateral symmetry is provided with into the line slideway of secondary collocation, and described line slideway is fixed on pedestal, and described motion slide unit is installed on described line slideway.
5. single-stage as claimed in claim 4 drives positioner, it is characterized in that, described line slideway is crossed roller guide rail or air-float guide rail or magnetic suspended guide.
6. single-stage as claimed in claim 1 drives positioner, it is characterized in that, described displacement detector is Raster Displacement Detection System or laser interferometer.
7. single-stage as claimed in claim 6 drives positioner, it is characterized in that, described Raster Displacement Detection System comprises grating scale, read head, initial point, left limit, right limit and segmentation box; Described grating scale is installed on the opposite side of relatively ceramic bar on motion slide unit, described initial point, left limit and right limit are installed on respectively centre and the end positions place, left and right of grating scale, described read head is installed on the homonymy with respect to grating scale on pedestal, between described read head and pedestal, be provided with cushion block, make read head and grating scale at sustained height.
8. an error compensating method, is characterized in that, adopts the single-stage described in claim 1-7 any one to drive positioner, specific as follows:
(1) input target location is with respect to the coordinate of initial point;
(2) supervisory controller control piezo-electric motor first moves to target location with AC Continuous Drive mode activated locating platform; Piezoelectric motor driver applies drive voltage signal by signal transmission cable to piezo-electric motor, excite piezo-electric motor flexural vibration mode and extensional vibration mode simultaneously, make to drive foot to produce elliptical trajectory, by driving the contact friction force actuation movement slide unit between sufficient and ceramic bar to move;
(3) the continuous detection and location platform of displacement detector moving displacement amount feed back to supervisory controller, once detect that locating platform motion arrives target location, supervisory controller sends halt instruction immediately, controls piezo-electric motor and stops driving;
(4) the location error compensation threshold value arranging between piezo-electric motor AC Continuous Drive pattern and DC scan pattern is 100nm-300nm, to guarantee that precision sweep is positioned at DC scan pattern and drives in scope ± 300nm;
When displacement detector detects that the displacement error causing due to mechanical shaking is within the scope of 100nm-300nm, supervisory controller is controlled immediately piezo-electric motor and is started DC scan pattern, turntable driving locating platform is positioned to target location locking backward, with the position error of compensation AC Continuous Drive pattern, reach nanoscale precision positioning;
If when detection mechanical shaking error exceedes 100nm-300nm, supervisory controller still control piezo-electric motor with AC Continuous Drive pattern to rear drive locating platform, until displacement detector detects current location distance objective position within the scope of 100nm-300nm, supervisory controller just switching controls piezo-electric motor drives locating platform to target location and latched position with DC scan pattern.
9. error compensating method as claimed in claim 8, is characterized in that, the location error compensation threshold value between described piezo-electric motor AC Continuous Drive pattern and DC scan pattern is 250nm.
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