CN1650679A - 用于处理扁平和柔韧工件的方法和设备 - Google Patents
用于处理扁平和柔韧工件的方法和设备 Download PDFInfo
- Publication number
- CN1650679A CN1650679A CNA038100436A CN03810043A CN1650679A CN 1650679 A CN1650679 A CN 1650679A CN A038100436 A CNA038100436 A CN A038100436A CN 03810043 A CN03810043 A CN 03810043A CN 1650679 A CN1650679 A CN 1650679A
- Authority
- CN
- China
- Prior art keywords
- protection carrier
- carrier
- workpiece
- groove
- process fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 117
- 239000012530 fluid Substances 0.000 claims abstract description 124
- 238000012545 processing Methods 0.000 claims abstract description 72
- 238000011282 treatment Methods 0.000 claims abstract description 17
- 230000008569 process Effects 0.000 claims description 84
- 230000032258 transport Effects 0.000 claims description 32
- 238000007599 discharging Methods 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 15
- 230000000052 comparative effect Effects 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000001737 promoting effect Effects 0.000 claims description 4
- 238000007704 wet chemistry method Methods 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 2
- 230000005518 electrochemistry Effects 0.000 claims 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000009713 electroplating Methods 0.000 abstract description 12
- 238000005530 etching Methods 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 abstract 5
- 239000011888 foil Substances 0.000 description 12
- 238000012546 transfer Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 4
- 230000005484 gravity Effects 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000007634 remodeling Methods 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000006424 Flood reaction Methods 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000010130 dispersion processing Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 230000004941 influx Effects 0.000 description 1
- 210000003141 lower extremity Anatomy 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000009991 scouring Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Chemically Coating (AREA)
- Shaping Metal By Deep-Drawing, Or The Like (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10224817A DE10224817B4 (de) | 2002-06-05 | 2002-06-05 | Verfahren und Vorrichtung zum vertikalen Eintauchen von folienartigem Behandlungsgut in Bädern von Galvanisier- und Ätzanlagen |
DE10224817.6 | 2002-06-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN1650679A true CN1650679A (zh) | 2005-08-03 |
Family
ID=29594258
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA038100436A Pending CN1650679A (zh) | 2002-06-05 | 2003-05-27 | 用于处理扁平和柔韧工件的方法和设备 |
Country Status (10)
Country | Link |
---|---|
US (1) | US20050224357A1 (de) |
EP (1) | EP1510111A1 (de) |
JP (1) | JP2005529243A (de) |
KR (1) | KR20050008772A (de) |
CN (1) | CN1650679A (de) |
AU (1) | AU2003240725A1 (de) |
BR (1) | BR0308809A (de) |
DE (1) | DE10224817B4 (de) |
TW (1) | TW200403014A (de) |
WO (1) | WO2003105546A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103374744A (zh) * | 2013-07-11 | 2013-10-30 | 皆利士多层线路版(中山)有限公司 | Pcb电镀铜附槽 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004039632A1 (de) * | 2004-08-11 | 2006-02-23 | Atotech Deutschland Gmbh | Behälter für eine galvanotechnische Vertikal-Behandlungsanlage und dessen Herstellverfahren |
KR100728889B1 (ko) * | 2006-06-07 | 2007-06-20 | (주)에스엠씨 | 가요성 필름 에칭장치 |
KR100728890B1 (ko) * | 2006-06-07 | 2007-06-20 | (주)에스엠씨 | 가요성 필름 에칭장치 |
JP5481785B2 (ja) * | 2007-12-19 | 2014-04-23 | 日立化成株式会社 | エッチング方法 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1374370A (en) * | 1918-11-07 | 1921-04-12 | Herbert P Ewell | Electrochemical gold-separator |
US1792998A (en) * | 1928-07-05 | 1931-02-17 | Thomas G Melish | Anode container |
US2365202A (en) * | 1941-06-14 | 1944-12-19 | Connelly Iron Sponge & Governo | Process of making ferric hydrate |
US2431949A (en) * | 1943-11-24 | 1947-12-02 | Gen Motors Corp | Apparatus for electroplating the inside of bearing shells and the like |
US2461113A (en) * | 1946-10-14 | 1949-02-08 | Hanson Van Winkle Munning Co | Fluid treatment equipment |
US3607712A (en) * | 1969-01-21 | 1971-09-21 | Ionic International Inc | Barrel-type processing apparatus |
US3663406A (en) * | 1971-03-11 | 1972-05-16 | Ppg Industries Inc | Combined electrodialysis and ultrafiltration of an electrodeposition bath |
US4059493A (en) * | 1976-04-29 | 1977-11-22 | Cities Service Company | Anode, anode basket and method of packaging anodes |
US4680100A (en) * | 1982-03-16 | 1987-07-14 | American Cyanamid Company | Electrochemical cells and electrodes therefor |
JPS62222081A (ja) * | 1986-03-25 | 1987-09-30 | Toyo Giken Kogyo Kk | 薄板用治具 |
DE3612220A1 (de) * | 1986-04-11 | 1987-10-15 | Schering Ag | Haltezange |
JPH0657879B2 (ja) * | 1987-10-31 | 1994-08-03 | 日大工業株式会社 | バスケット式電着塗装装置 |
US4817650A (en) * | 1988-01-04 | 1989-04-04 | Herbert Tilton | Self-contained tiltable basket for plating, washing or otherwise treating hollow articles |
JPH01194497A (ja) * | 1988-01-29 | 1989-08-04 | Tanaka Kikinzoku Kogyo Kk | 印刷配線基板のめっき用治具 |
US4966672A (en) * | 1988-08-26 | 1990-10-30 | National Semiconductor Corporation | Electrolytic apparatus with unequal legged basket-carrier |
JPH06216496A (ja) * | 1993-01-13 | 1994-08-05 | Hitachi Ltd | 薄板用治具 |
US5472503A (en) * | 1993-06-25 | 1995-12-05 | Lico, Inc. | Vertical load transferring apparatus |
DE4323698C2 (de) | 1993-07-15 | 1995-06-14 | Atotech Deutschland Gmbh | Vorrichtung zum Stabilisieren von Leiterplatten |
FR2715146B1 (fr) * | 1994-01-19 | 1996-02-16 | Tech Surfaces Sa | Dispositif de traitement de pièces de formes spéciales. |
ES2118640T3 (es) * | 1994-11-15 | 1998-09-16 | Siemens Sa | Dispositivo para el tratamiento electrolitico de piezas en forma de placas, en especial placas para circuitos impresos. |
US5938899A (en) * | 1997-10-28 | 1999-08-17 | Forand; James L. | Anode basket for continuous electroplating |
IT1296811B1 (it) * | 1997-11-28 | 1999-08-02 | Resco Srl | Procedimento e macchine per la produzione di circuiti stampati flessibili e semirigidi |
DE19813528A1 (de) * | 1998-03-26 | 1999-10-07 | Siemens Sa | Vorrichtung zur Behandlung von plattenförmigen Werkstücken, insbesondere Leiterplatten |
US6261426B1 (en) * | 1999-01-22 | 2001-07-17 | International Business Machines Corporation | Method and apparatus for enhancing the uniformity of electrodeposition or electroetching |
US6190530B1 (en) * | 1999-04-12 | 2001-02-20 | International Business Machines Corporation | Anode container, electroplating system, method and plated object |
-
2002
- 2002-06-05 DE DE10224817A patent/DE10224817B4/de not_active Expired - Fee Related
-
2003
- 2003-05-27 US US10/507,137 patent/US20050224357A1/en not_active Abandoned
- 2003-05-27 CN CNA038100436A patent/CN1650679A/zh active Pending
- 2003-05-27 AU AU2003240725A patent/AU2003240725A1/en not_active Abandoned
- 2003-05-27 BR BR0308809-0A patent/BR0308809A/pt not_active IP Right Cessation
- 2003-05-27 EP EP03730130A patent/EP1510111A1/de not_active Withdrawn
- 2003-05-27 JP JP2004512469A patent/JP2005529243A/ja not_active Withdrawn
- 2003-05-27 KR KR10-2004-7019628A patent/KR20050008772A/ko not_active Application Discontinuation
- 2003-05-27 WO PCT/EP2003/005587 patent/WO2003105546A1/en active Application Filing
- 2003-06-05 TW TW092115247A patent/TW200403014A/zh unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103374744A (zh) * | 2013-07-11 | 2013-10-30 | 皆利士多层线路版(中山)有限公司 | Pcb电镀铜附槽 |
Also Published As
Publication number | Publication date |
---|---|
DE10224817B4 (de) | 2005-04-14 |
TW200403014A (en) | 2004-02-16 |
WO2003105546A1 (en) | 2003-12-18 |
KR20050008772A (ko) | 2005-01-21 |
US20050224357A1 (en) | 2005-10-13 |
EP1510111A1 (de) | 2005-03-02 |
AU2003240725A1 (en) | 2003-12-22 |
BR0308809A (pt) | 2005-01-04 |
JP2005529243A (ja) | 2005-09-29 |
DE10224817A1 (de) | 2003-12-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5516412A (en) | Vertical paddle plating cell | |
US7223323B2 (en) | Multi-chemistry plating system | |
CN101451264B (zh) | 电镀装置及电镀方法 | |
CN100469948C (zh) | 一旦进入金属沉积用来倾斜基片的方法和相关设备 | |
US20040118694A1 (en) | Multi-chemistry electrochemical processing system | |
CN1204863A (zh) | 半导体晶片等的处理方法及其处理装置 | |
CN102051650A (zh) | 电镀基板的装置和方法 | |
CN1119436C (zh) | 零件表面处理的方法和装置 | |
CN1985026A (zh) | 多化学剂电镀*** | |
CN1633525A (zh) | 工件湿处理的输送带式水平处理线和方法 | |
CN1650679A (zh) | 用于处理扁平和柔韧工件的方法和设备 | |
CN112695372A (zh) | 一种旋转式电解抛光清洗设备 | |
CN1688753A (zh) | 对至少表面导电的工件进行电解处理的装置和方法 | |
CN1804147B (zh) | 一种具实时回馈***的电镀装置 | |
US11447883B2 (en) | Wet substrate processing device | |
US5364523A (en) | Method of electroplating half sliding bearings | |
CN113019806B (zh) | 用于真空压力浸渍的工装、浸渍罐和真空压力浸渍方法 | |
KR101045938B1 (ko) | 음극판의 금속 박리장치. | |
CN103628105A (zh) | 一种电镀装置 | |
CN201186955Y (zh) | 挠性材料电镀装置 | |
CN1868600A (zh) | 半导体处理的流体注射设备 | |
CN214271103U (zh) | 一种主动式旋转电解抛光设备 | |
JPS6213597A (ja) | 物品の電解表面処理装置 | |
KR101591960B1 (ko) | 기판 처리 장치 | |
CN108642545B (zh) | 一种镁合金微弧氧化设备 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |