CN1567095A - Photoresistive striping process - Google Patents
Photoresistive striping process Download PDFInfo
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- CN1567095A CN1567095A CN 03137356 CN03137356A CN1567095A CN 1567095 A CN1567095 A CN 1567095A CN 03137356 CN03137356 CN 03137356 CN 03137356 A CN03137356 A CN 03137356A CN 1567095 A CN1567095 A CN 1567095A
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Abstract
It is a photoresist stripping method used to strip the photoresist on the organic electro-luminescence display panel surface. The method is the following : to remove the photoresist on the panel by a stripping unit; to remove the remaining stripping liquid on the surface of the panel by a clearing unit spreading a clearing solvent; to weather the panel with a weather unit to deliver the panel to the stripping unit , the clearing unit and the weather unit in continuous type of delivering unit; to control the delivering sequence and time of the delivering unit and to accurately control the process time of the panel on each unit.
Description
Technical field
The present invention is the method, the particularly method of peeling off relevant for the photoresistance after a kind of pattern development of Polyimide layer that relevant a kind of photoresistance is peeled off.
Background technology
Organic electro-luminescent display (organic light emitting display, OLED) have autoluminescence, high brightness, high contrast, wide visual angle, driving voltage is low and advantage such as high-speed responsive, is the flat-panel screens of being placed high hopes most in the display of new generation at present.Yet because its technology is new, development is compared to other display evening, technology is full maturity not as yet, so the present whole world only has Japanese Pioneer to have undersized product to release, it is to be overcome to show that OLED also has many obstacles to have in the commercialization process, particularly for the technology of mass production.
It is last one step at the gold-tinted lithography process of semiconductor or display that photoresistance is peeled off (stripping); the photoresistance of protection pattern in the upper track etching step is removed; avoid one gold-tinted lithography process under the photoresistance residual contamination, to obtain the clean circuit pattern substrate that has.For the photoresistance stripping technology behind little shadow pattern definition of structural sheets such as the electrode connection layer in each road of oled panel, ITO (indium tin oxide) anode layer, separation layer, the employed crystal silicon substrate of heap of stone of semiconductor circuit is coarse more now owing to employed ito substrate surface, make that photoresistance is difficult for being stripped from from the ITO surface, have the residual phenomena of photoresistance to occur in the ITO surface of display panel easily.In case photoresistance residues in panel surface, particularly in the ito anode luminous zone, will stop the evaporation of follow-up organic luminous layer and cathode material, make display panel produce dim spot, reduce display quality and technology dose rate; Moreover, because the organic electronic luminescent film layer thickness of subsequent technique institute evaporation is extremely thin, because the residual uneven thickness that causes of photoresistance, easily cause the Electric Field Distribution inequality, even the assembly short circuit, and then influence the life-span of display.
The solution of the above-mentioned difficulties that meets with when photoresistance is peeled off in there is no especially at OLED technology in technology commonly used, in view of this, the invention provides an oled panel photoresistance stripping means, the photoresistance stripping technology of one high-cleanness, high and batch production technique smoothnessization can be provided, not only have the high production capacity of serialization advantage, be applicable to the operating flexibility of different generations substrate size, and satisfy oled substrate simultaneously and peel off the clean demand in back at photoresistance.
Generally speaking, define the material that the pattern of non-photosensitive type Polyimide (Non-photosensitive polyimide) layer uses and be photoresist layer, Polyimide itself has preferable thermostability, mechanical stability, electric stability and light stability, can make organic electric-excitation luminescent displaying panel have preferable luminous degree of stability and long serviceable life.The method of making includes coating Polyimide or Polyimide precursor (precursor), figure cloth one photoresist layer is on the Polyimide layer, carry out in regular turn in advance baking after roasting, exposure, the exposure, develop, peel off, technology such as high-temperature baking, to define the pattern of Polyimide.Wherein, the known photoresistance technology of peeling off is silicon substrate to be placed on the sucker rotate in traditional integrated circuit, photoelectricity technology, then sprays stripper and water lotion respectively by nozzle, is spin-dried at a high speed more at last; But along with display sizes strengthens toward new the propelling from generation to generation, influence than the heavy a lot of double effect of silicon substrate with display glass substrate, make the design of traditional rotating disk can't load so big weight and the centrifugal force under the high speed rotating, make photoresistance peel off the effect inequality, peel off and totally do not cause photoresistance residual, and reduce the qualification rate of display module greatly.Therefore or change and adopt the mode that display base plate is immersed in different alkaline peel groove and rinsing bowl and carry out and, but can't each step of continued operation, must display panel be taken out and be loaded in another board by the mode of artificial transmission, therefore the time-histories of whole developing process can prolong many, be unfavorable for the volume production operation, also be unfavorable for large-area display panel manufacturing.In addition, because human factor is wayward, regular meeting produces in transport process and incurs loss through delay or damage, and therefore general developing apparatus can't accurately be controlled splitting time at all, can not guarantee the quality of stripping technology.
Moreover at process chemistry stability, particularly employed Polyimide material in the organic electro-luminescent display structure because must height be electric, mechanical through just possessing behind last 220～350 ℃ of high-temperature bakings together, heat and chemical stability.And its chemical property is unstable as yet before this, is subjected to the destruction of chemical agents such as alkaline matter easily.So for the peeling off of Polyimide layer, be used for peeling off the alkaline matter of photoresistance such as NaOH, potassium hydroxide in the conventional art, also can cause Polyimide decomposition, peel off.Therefore, when carrying out the peeling off of photoresist layer, need do accurate splitting time control and select the suitable medicament of peeling off, the Polyimide layer is recruited and destroyed by stripper when avoiding peeling off, make the specification change of pattern definition area even cause full wafer Polyimide layer to peel off to come off, to promote the technology qualification rate and the specification stability of display.
Summary of the invention
The purpose of this invention is to provide an oled panel photoresistance stripping means, the photoresistance stripping technology of a high-cleanness, high can be provided.
Another object of the present invention provides an oled panel photoresistance stripping means, can be for the running of a batch production technique smoothnessization.
Another purpose of the present invention provides an oled panel photoresistance stripping means, is applicable to the operating flexibility of different generations substrate size, and satisfies oled substrate simultaneously and peel off the clean demand in back at photoresistance.
For achieving the above object, the invention provides a kind of stripping means, this method comprises:
This organic electric-excitation luminescent displaying panel places on the conveying roller unit;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in the one first normal-butyl ethyl ester peel groove;
In this first normal-butyl ethyl ester peel groove, provide the normal-butyl ethyl ester to peel off the lip-deep photoresistance of this organic electric-excitation luminescent displaying panel;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in the one second normal-butyl ethyl ester peel groove;
In this second normal-butyl ethyl ester peel groove, provide the normal-butyl ethyl ester to peel off the lip-deep photoresistance of this organic electric-excitation luminescent displaying panel;
This conveying roller unit is sent this organic electric-excitation luminescent displaying panel into an isopropyl alcohol and is peeled off in the rinse bath;
Peel off in the rinse bath at this isopropyl alcohol, provide isopropyl alcohol to residue in the photoresistance and the normal-butyl ethyl ester on this organic electric-excitation luminescent displaying panel surface with removal;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in one first rinse bath;
Spray this organic electric-excitation luminescent displaying panel surface with deionized water, to wash residual isopropyl alcohol off;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in one second rinse bath;
Spray this organic electric-excitation luminescent displaying panel surface with deionized water, to wash residual isopropyl alcohol off;
This conveying roller unit is sent this organic electric-excitation luminescent displaying panel into one and is dried up in the unit;
Remove the deionized water that is attached to this organic electric-excitation luminescent displaying panel surface with an air knife.
It is described in detail in detail, and a kind of stripping means provided by the invention is to be used for carrying out the photoresistance stripping technology at after the patterning Polyimide layer.The photoresistance stripping means has comprised with delivery unit and has linked three working cells, comprise peeling off unit, cleaning unit and drying up the unit, and a control module is controlled the transmission order and the delivery time of delivery unit.
The function of delivery unit is the mode that is used to provide continuous transmission, organic electric-excitation luminescent displaying panel is orderly sent to peels off unit, cleaning unit and dry up in the unit.Delivery unit has more comprised the conveying roller unit.The conveying roller unit is by wheel shaft and be installed on that two rollers at wheel shaft two ends form, and wherein roller comprises the inner edge with the function accepted and has two parts of outer rim of limitation function.Inner edge with the function accepted is in order to accepting organic electric-excitation luminescent displaying panel, and the outer rim with limitation function is to be positioned at lateral attitude on the conveying roller unit in order to fixing organic electric-excitation luminescent displaying panel.Transmit organic electric-excitation luminescent displaying panel placed on it by the rotation of roller.
Peel off the unit and comprised that at least (n-Butyl acetate, NBA) (Isopropyl Alcohol IPA) peels off rinse bath to the normal-butyl ethyl ester for peel groove and isopropyl alcohol.Normal-butyl ethyl ester peel groove has comprised storage tank, liquid-supplying system and reaction chamber at least.The function of storage tank is to store the normal-butyl ethyl ester, and the normal-butyl ethyl ester is supplied to reaction chamber via liquid-supplying system, and be positioned at the photoresistance effect on the organic electric-excitation luminescent displaying panel that reaction chamber transmits back and forth and photoresistance peeled off, organic electric-excitation luminescent displaying panel is transmitted in reaction chamber back and forth, can impel that to peel off the effect homogeneity better.Liquid-supplying system will be positioned at the normal-butyl ethyl ester purt of storage tank and go into reaction chamber, dissolve with the normal-butyl ethyl ester and remove and be positioned at the lip-deep photoresistance of organic electric-excitation luminescent displaying panel to soak, to spray or to soak the mode of spraying on one side, and make photoresistance disengaging organic electric-excitation luminescent displaying panel surface.Peel off the unit and comprise a normal-butyl ethyl ester peel groove at least, if comprise more than one normal-butyl ethyl ester peel groove, the arrangement mode of these normal-butyl ethyl ester peel groove can be arranged for the mode of parallel connection, series connection or parallel-series.The advantage that is arranged in parallel is to handle more substantial organic electric-excitation luminescent displaying panel simultaneously, and the advantage of series connection is and can and makes that divesting of photoresistance is cleaner with the processing of the normal-butyl ethyl ester more than the continuous quadratic, and parallel-series more has both advantages concurrently.Plural normal-butyl ethyl ester peel groove more can be avoided stopping of optical resistance-stripping device when changing the normal-butyl ethyl ester, and makes the speed of production unaffected.
Isopropyl alcohol is peeled off rinse bath and is arranged in after the normal-butyl ethyl ester peel groove, peel off the unit and comprise that at least an isopropyl alcohol peels off rinse bath, peel off rinse bath if comprise more than one isopropyl alcohol, these isopropyl alcohols are peeled off rinse bath and also can be arranged as the arrangement mode of normal-butyl ethyl ester peel groove, look closely the demand in the production and decide.The purpose that isopropyl alcohol is peeled off rinse bath is that the lip-deep residual photoresistor of organic electric-excitation luminescent displaying panel is being removed totally on the one hand, is to residue in normal-butyl ethyl ester displacement on the organic electric-excitation luminescent displaying panel surface on the other hand.Isopropyl alcohol is peeled off rinse bath and has also been comprised storage tank, liquid-supplying system and reaction chamber.The function of storage tank is to store isopropyl alcohol, cleaning the organic electric-excitation luminescent displaying panel that is positioned at reaction chamber and via liquid-supplying system isopropyl alcohol is supplied to reaction chamber.Because the boiling point of isopropyl alcohol is lower, clean organic electric-excitation luminescent displaying panel so all adopt the mode of soaking and need not spray, to reduce the generation of methanol vapor at this.The equipment of peeling off in the unit all adopts explosion-proof stainless steel design, to improve the safety coefficient of equipment.Also design has discarded recovery system in normal-butyl ethyl ester groove and isopropanol bath.The position is in response to the low boiling of isopropyl alcohol, in isopropanol bath and the design of condenser system is arranged, to meet environmental protection requirement.
Cleaning unit is placed in to be peeled off after the unit, and the function of cleaning unit is to be used for spraying cleaning solution, and cleaning solution mainly is that (De-ion Water DIW), removes the isopropyl alcohol that residues in the organic electric-excitation luminescent displaying panel surface to deionized water with cleaning solution.Cleaning unit comprises a rinse bath at least.Rinse bath has also comprised storage tank, liquid-supplying system and reaction chamber.The function of storage tank is to store deionized water, cleaning isopropyl alcohol residual on the organic electric-excitation luminescent displaying panel that is positioned at reaction chamber and via liquid-supplying system deionized water is supplied to reaction chamber in the mode of spraying.Generally speaking be the design of adopting two rinse baths of series connection, its objective is residual isopropyl alcohol on the effective flush away organic electric-excitation luminescent displaying panel of energy by double cleaning.Can more can effectively save water resource for the usefulness of first rinse bath by the collected used deionized water of second rinse bath.
Dry up the unit and be placed in after the cleaning unit, the function that dries up the unit is to be used for removing the residual deionized water of organic electric-excitation luminescent displaying panel.Dry up the unit and comprise the action of adopting air knife (AirKnife) to dry up.
The function of control module is transmission order and the delivery time that is used for controlling delivery unit, accurately to control organic electric-excitation luminescent displaying panel in peeling off unit, cleaning unit and drying up processing time in the unit.Peel off the unit and go for linking with developing cell and high-temperature baking unit, the foundation maintenance needs and the requirement of developing process comes elasticity to select to use developing cell.This stripping off device is also applicable to the continuous and automatic volume production of different size organic electric-excitation luminescent displaying panel.
Description of drawings
Fig. 1 is according to optical resistance-stripping device provided by the present invention;
The conveying roller unit of Fig. 2 for being used among the present invention;
Fig. 3 A is the normal-butyl ethyl ester peel groove that the present invention used;
Fig. 3 B peels off the removing groove for the isopropyl alcohol that the present invention used;
Fig. 4 is the removing groove that the present invention used;
Fig. 5 is for to carry out first method that photoresistance is peeled off according to optical resistance-stripping device provided by the present invention;
Fig. 6 is for to carry out second method that photoresistance is peeled off according to optical resistance-stripping device provided by the present invention; And
Fig. 7 is for to carry out third party's method that photoresistance is peeled off according to optical resistance-stripping device provided by the present invention.
10,20,30,40,50,60,70,80,90: organic electric-excitation luminescent displaying panel
100: optical resistance-stripping device
200: delivery unit
210: the conveying roller unit
220: wheel shaft
230: roller
240: inner edge
250: outer rim
300: peel off the unit
310,510,520,810,820,910,920,930: normal-butyl ethyl ester peel groove
312,322,412: storage tank
314,324,414: liquid-supplying system
316,326,416: reaction chamber
320,530,830,940: isopropyl alcohol is peeled off rinse bath
400: cleaning unit
410,540,550,840,850,950,960: rinse bath
500,560,860,970: dry up the unit
600: control module
700: developing cell
Embodiment
Embodiment 1
Please refer to Fig. 1, Fig. 1 is the optical resistance-stripping device after the pattern development of Polyimide layer.Optical resistance-stripping device 100 has comprised with delivery unit 200 and has linked three working cells, comprises peeling off unit 300, cleaning unit 400 and drying up unit 500 and a control module 600 is controlled the transmission order and the delivery time of delivery unit 200.
The function of delivery unit 200 is the modes that are used to provide continuous transmission, organic electric-excitation luminescent displaying panel is orderly sent to peels off unit 300, cleaning unit 400 and dry up in the unit 500.Please refer to Fig. 2, delivery unit 200 has more comprised conveying roller unit 210.Conveying roller unit 210 is by wheel shaft 220 and be installed on that two rollers 230 at wheel shaft two ends are formed, and wherein roller 230 comprises the inner edge 240 with the function accepted and 250 two parts of the outer rim with limitation function.Inner edge 240 with the function accepted is in order to accepting organic electric-excitation luminescent displaying panel 10, and the outer rim system with limitation function is positioned at lateral attitude on the conveying roller unit in order to fixing organic electric-excitation luminescent displaying panel 10.Transmit organic electric-excitation luminescent displaying panel placed on it 10 by the rotation of roller 230.
Please continue with reference to Fig. 1, organic electric-excitation luminescent displaying panel 10 is sent to by 210 autography unit 700, conveying roller unit and peels off unit 300.Peel off unit 300 and comprised that at least normal-butyl ethyl ester peel groove 310 and isopropyl alcohol peel off rinse bath 320.Organic electric-excitation luminescent displaying panel 10 is admitted to normal-butyl ethyl ester peel groove 310, please refer to Fig. 3 A, and normal-butyl ethyl ester peel groove 310 has comprised storage tank 312, liquid-supplying system 314 and reaction chamber 316 at least.The function of storage tank 312 is to store the normal-butyl ethyl ester, and the normal-butyl ethyl ester is supplied to reaction chamber 316 via liquid-supplying system 314, and be positioned at the photoresistance effect on the organic electric-excitation luminescent displaying panel 10 that reaction chamber 316 transmits back and forth and photoresistance peeled off, organic electric-excitation luminescent displaying panel 10 is transmitted in reaction chamber 316 back and forth, can impel that to peel off the effect homogeneity better.Liquid-supplying system 314 will be positioned at the normal-butyl ethyl ester purt of storage tank 312 and go into reaction chamber 316, dissolve with the normal-butyl ethyl ester and remove and be positioned at organic electric-excitation luminescent displaying panel 10 lip-deep photoresistances to soak, to spray or to soak the mode of spraying on one side, and make photoresistance disengaging organic electric-excitation luminescent displaying panel 10 surfaces.Please refer to Fig. 3 B, isopropyl alcohol is peeled off rinse bath 330 and has also been comprised storage tank 332, liquid-supplying system 334 and reaction chamber 336.The function of storage tank 332 is to store isopropyl alcohol, cleaning the organic electric-excitation luminescent displaying panel 10 that is positioned at reaction chamber and via liquid-supplying system 334 isopropyl alcohol is supplied to reaction chamber 336.Because the boiling point of isopropyl alcohol is lower, clean organic electric-excitation luminescent displaying panel 10 so all adopt the mode of soaking and need not spray, to reduce the generation of methanol vapor at this.The equipment of peeling off in the unit all adopts explosion-proof stainless steel design, to improve the safety coefficient of equipment.Also design has discarded recovery system in normal-butyl ethyl ester groove 310,320 and isopropanol bath 330.The position is in response to the low boiling of isopropyl alcohol, in isopropanol bath 330 and the design of condenser system is arranged, to meet environmental protection requirement.
Please continue with reference to Fig. 1, cleaning unit 400 is placed in to be peeled off after the unit 300, the function of cleaning unit 400 is to be used for spraying cleaning solution, and cleaning solution mainly is a deionized water, removes the isopropyl alcohol that residues in organic electric-excitation luminescent displaying panel 10 surfaces with cleaning solution.Cleaning unit 400 comprises a rinse bath 410 at least.Please refer to Fig. 4, rinse bath 410 has also comprised storage tank 412, liquid-supplying system 414 and reaction chamber 416.The function of storage tank 412 is to store deionized water, cleaning isopropyl alcohol residual on the organic electric-excitation luminescent displaying panel that is positioned at reaction chamber 416 and via liquid-supplying system 414 deionized water is supplied to reaction chamber 416 in the mode of spraying.Generally speaking be the design of adopting two rinse baths 340,350 of series connection, its objective is residual isopropyl alcohol on the effective flush away organic electric-excitation luminescent displaying panel 10 of energy by double cleaning.Can more can effectively save water resource for the usefulness of first rinse bath by the collected used deionized water of second rinse bath.
Please continue with reference to Fig. 1, dry up unit 500 and be placed in after the cleaning unit 400, the function that dries up unit 500 is to be used for removing the residual deionized water of organic electric-excitation luminescent displaying panel 10.Dry up unit 500 and comprise the action of adopting air knife to dry up.
The function of control module 600 is transmission order and the delivery times that are used for controlling delivery unit 200, accurately to control organic electric-excitation luminescent displaying panel 10 in peeling off unit 300, cleaning unit 400 and drying up processing time in the unit 500.Peel off unit 300 and go for linking with developing cell 700, the foundation maintenance needs and the requirement of developing process comes elasticity to select to use developing cell.This stripping off device is also applicable to the continuous and automatic volume production of different size organic electric-excitation luminescent displaying panel 10.
Embodiment 2
Please refer to Fig. 1, Fig. 1 is the optical resistance-stripping device after the pattern development of Polyimide layer.Optical resistance-stripping device 100 has comprised with delivery unit 200 and has linked three working cells, comprises peeling off unit 300, cleaning unit 400 and drying up unit 500 and a control module 600 is controlled the transmission order and the delivery time of delivery unit 200.
Please refer to Fig. 5, then, organic electric-excitation luminescent displaying panel 10 is admitted to isopropyl alcohol and peels off rinse bath 530.Isopropyl alcohol is peeled off rinse bath 530 and is arranged in after the normal-butyl ethyl ester peel groove 520, its purpose is that organic electric-excitation luminescent displaying panel 10 lip-deep residual photoresistor are being removed totally on the one hand, is on the other hand to wash off to residue in upward normal-butyl ethyl esters of organic electric-excitation luminescent displaying panel 10 surfaces.
Please continue with reference to Fig. 5, organic electric-excitation luminescent displaying panel 10 will be transmitted unit 200 and send into rinse bath 540 and clean with deionized water leaving isopropanol bath 530.Please continue with reference to Fig. 5, will be admitted to rinse bath 550 after organic electric-excitation luminescent displaying panel 10 carries out cleaning the first time and carry out the washed with de-ionized water second time, residual isopropyl alcohol be cleaned up guaranteeing.
After organic electric-excitation luminescent displaying panel 20 process rinse baths 540 and rinse bath 550 twice sprinkling of deionized water are cleaned, then, send into and dry up the action that unit 560 dries up with air knife.Through this a succession of step, finish organic electric-excitation luminescent displaying panel 20 surfaces and go up peeling off of photoresistance.
Embodiment 3
Please refer to Fig. 1, Fig. 1 is the optical resistance-stripping device after the pattern development of Polyimide layer.Optical resistance-stripping device 100 has comprised with delivery unit 200 and has linked three working cells, comprises peeling off unit 300, cleaning unit 400 and drying up unit 500 and a control module 600 is controlled the transmission order and the delivery time of delivery unit 200.
Please continue with reference to Fig. 6, after processing through the normal-butyl ethyl ester, organic electric-excitation luminescent displaying panel 20 is admitted to isopropyl alcohol and peels off rinse bath 830, and simultaneously, organic electric-excitation luminescent displaying panel 40 (not being illustrated on the figure) is admitted to normal-butyl ethyl ester peel groove 810 and carries out the processing of normal-butyl ethyl ester.Isopropyl alcohol is peeled off rinse bath 830 and is arranged in after the normal-butyl ethyl ester peel groove 810,820, its purpose is that organic electric-excitation luminescent displaying panel 20 lip-deep residual photoresistor are being removed totally on the one hand, is on the other hand to wash off to residue in upward normal-butyl ethyl esters of organic electric-excitation luminescent displaying panel 20 surfaces.
Please continue with reference to Fig. 6, treat that organic electric-excitation luminescent displaying panel 20 after isopropyl alcohol was handled, sends into rinse bath 840.Then, organic electric-excitation luminescent displaying panel 30 is admitted to isopropyl alcohol and peels off rinse bath 830, and simultaneously, organic electric-excitation luminescent displaying panel 50 (not being illustrated on the figure) is admitted to normal-butyl ethyl ester peel groove 820 and carries out the processing of normal-butyl ethyl ester.
After organic electric-excitation luminescent displaying panel 20 process rinse baths 840 and rinse bath 850 twice sprinkling of deionized water are cleaned, then, send into and dry up the action that unit 860 dries up with air knife.Through this a succession of step, finish organic electric-excitation luminescent displaying panel 20 surfaces and go up peeling off of photoresistance.
Embodiment 4
Please refer to Fig. 1, Fig. 1 is the optical resistance-stripping device after the pattern development of Polyimide layer.Optical resistance-stripping device 100 has comprised with delivery unit 200 and has linked three working cells, comprises peeling off unit 300, cleaning unit 400 and drying up unit 500 and a control module 600 is controlled the transmission order and the delivery time of delivery unit 200.
Delivery unit 200 devices and function are with described in the embodiment 1.Please refer to Fig. 7, organic electric-excitation luminescent displaying panel 60 (not being illustrated on the figure) is admitted to normal-butyl ethyl ester peel groove 910, peels off photoresistance on the organic electric-excitation luminescent displaying panel 60 with the normal-butyl ethyl ester.Then, organic electric-excitation luminescent displaying panel 70 is admitted to normal-butyl ethyl ester peel groove 920, peels off photoresistance on the organic electric-excitation luminescent displaying panel 70 (not being illustrated on the figure) with the normal-butyl ethyl ester.Wherein, normal-butyl ethyl ester peel groove 910 and normal-butyl ethyl ester peel groove 920 are for being arranged in parallel.After processing through the first road normal-butyl ethyl ester, please refer to 6B figure, organic electric-excitation luminescent displaying panel 60 is admitted to normal-butyl ethyl ester peel groove 930, simultaneously, organic electric-excitation luminescent displaying panel 80 (not being illustrated on the figure) is admitted to normal-butyl ethyl ester peel groove 910 and carries out the processing of normal-butyl ethyl ester.Wherein, normal-butyl ethyl ester peel groove 930 and normal-butyl ethyl ester peel groove 910 and normal-butyl ethyl ester peel groove 920 are arranged in series.The processing of the second road normal-butyl ethyl ester can guarantee that photoresistance is removed completely.
Please continue with reference to Fig. 7, after the processing of finishing the normal-butyl ethyl ester, organic electric-excitation luminescent displaying panel 60 is admitted to isopropyl alcohol and peels off rinse bath 940, organic electric-excitation luminescent displaying panel 70 is admitted to normal-butyl ethyl ester peel groove 930, simultaneously, organic electric-excitation luminescent displaying panel 90 (not being illustrated on the figure) is admitted to normal-butyl ethyl ester peel groove 920 and carries out the processing of normal-butyl ethyl ester.Isopropyl alcohol is peeled off rinse bath 940 and is arranged in after the normal-butyl ethyl ester peel groove 930, its purpose is that organic electric-excitation luminescent displaying panel 60 lip-deep residual photoresistor are being removed totally on the one hand, is on the other hand to wash off to residue in upward normal-butyl ethyl esters of organic electric-excitation luminescent displaying panel 60 surfaces.
And the presentation mode of normal-butyl ethyl ester also as described in example 1 above.So the advantage of parallel-series arrangement is to handle simultaneously more substantial organic electric-excitation luminescent displaying panel and can effectively removes photoresistance.Certainly, so the utilization that not only is applicable to three normal-butyl ethyl ester peel groove is arranged in parallel-series.
Please continue with reference to Fig. 7, treat that organic electric-excitation luminescent displaying panel 60 after isopropyl alcohol was handled, sends into rinse bath 950.Then, organic electric-excitation luminescent displaying panel 70 is admitted to isopropyl alcohol and peels off rinse bath 940, and simultaneously, organic electric-excitation luminescent displaying panel 80 is admitted to normal-butyl ethyl ester peel groove 930 and carries out the processing of normal-butyl ethyl ester.
After organic electric-excitation luminescent displaying panel 60 process rinse baths 950 and rinse bath 960 twice sprinkling of deionized water are cleaned, then, send into and dry up the action that unit 970 dries up with air knife.Through this a succession of step, finish organic electric-excitation luminescent displaying panel 60 surfaces and go up peeling off of photoresistance.
Claims (18)
1. a photoresistance stripping means is suitable for and peels off the lip-deep photoresistance of an organic electric-excitation luminescent displaying panel, it is characterized in that this method comprises:
This organic electric-excitation luminescent displaying panel places on the conveying roller unit;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in the one first normal-butyl ethyl ester peel groove;
In this first normal-butyl ethyl ester peel groove, provide the normal-butyl ethyl ester to peel off the lip-deep photoresistance of this organic electric-excitation luminescent displaying panel;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in the one second normal-butyl ethyl ester peel groove;
In this second normal-butyl ethyl ester peel groove, provide the normal-butyl ethyl ester to peel off the lip-deep photoresistance of this organic electric-excitation luminescent displaying panel;
This conveying roller unit is sent this organic electric-excitation luminescent displaying panel into an isopropyl alcohol and is peeled off in the rinse bath;
Peel off in the rinse bath at this isopropyl alcohol, provide isopropyl alcohol to residue in the photoresistance and the normal-butyl ethyl ester on this organic electric-excitation luminescent displaying panel surface with removal;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in one first rinse bath;
Spray this organic electric-excitation luminescent displaying panel surface with deionized water, to wash residual isopropyl alcohol off;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in one second rinse bath;
Spray this organic electric-excitation luminescent displaying panel surface with deionized water, to wash residual isopropyl alcohol off;
This conveying roller unit is sent this organic electric-excitation luminescent displaying panel into one and is dried up in the unit;
Remove the deionized water that is attached to this organic electric-excitation luminescent displaying panel surface with an air knife.
2. photoresistance stripping means as claimed in claim 1 is characterized in that, this conveying roller unit transmits this organic electric-excitation luminescent displaying panel and controlled with a control module.
3. photoresistance stripping means as claimed in claim 1 is characterized in that, the method system that provides the normal-butyl ethyl ester to handle this organic electric-excitation luminescent displaying panel is selected from by the combination in any of spraying and soaking in the group that is formed.
4. photoresistance stripping means as claimed in claim 1 is characterized in that the method that provides isopropyl alcohol to handle this organic electric-excitation luminescent displaying panel is adopted infusion method.
5. photoresistance stripping means as claimed in claim 1 is characterized in that the method that provides deionized water to handle this organic electric-excitation luminescent displaying panel is adopted spraying.
6. photoresistance stripping means as claimed in claim 1 is characterized in that, when providing the normal-butyl ethyl ester to peel off the lip-deep photoresistance of this organic electric-excitation luminescent displaying panel, this organic electric-excitation luminescent displaying panel can transmit in reaction chamber back and forth.
7. a photoresistance stripping means is suitable for and peels off the lip-deep photoresistance of an organic electric-excitation luminescent displaying panel, it is characterized in that this method comprises:
This organic electric-excitation luminescent displaying panel places on the conveying roller unit;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in the one normal-butyl ethyl ester peel groove;
In this normal-butyl ethyl ester peel groove, provide the normal-butyl ethyl ester to peel off the lip-deep photoresistance of this organic electric-excitation luminescent displaying panel;
This conveying roller unit is sent this organic electric-excitation luminescent displaying panel into an isopropyl alcohol and is peeled off in the rinse bath;
Peel off in the rinse bath at this isopropyl alcohol, provide isopropyl alcohol to residue in the photoresistance and the normal-butyl ethyl ester on this organic electric-excitation luminescent displaying panel surface with removal;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in one first rinse bath;
Spray this organic electric-excitation luminescent displaying panel surface with deionized water, to wash residual isopropyl alcohol off;
This conveying roller unit is sent into this organic electric-excitation luminescent displaying panel in one second rinse bath;
Spray this organic electric-excitation luminescent displaying panel surface with deionized water, to wash residual isopropyl alcohol off;
This conveying roller unit is sent this organic electric-excitation luminescent displaying panel into one and is dried up in the unit;
Remove the deionized water that is attached to this organic electric-excitation luminescent displaying panel surface with an air knife.
8. photoresistance stripping means as claimed in claim 7 is characterized in that, this conveying roller unit transmits this organic electric-excitation luminescent displaying panel and controlled with a control module.
9. photoresistance stripping means as claimed in claim 7 is characterized in that, the method that provides the normal-butyl ethyl ester to handle this organic electric-excitation luminescent displaying panel is selected from by the combination in any of spraying and soaking in the group that is formed.
10. photoresistance stripping means as claimed in claim 7 is characterized in that the method that provides isopropyl alcohol to handle this organic electric-excitation luminescent displaying panel is adopted infusion method.
11. photoresistance stripping means as claimed in claim 7 is characterized in that the method that provides deionized water to handle this organic electric-excitation luminescent displaying panel is adopted spraying.
12. photoresistance stripping means as claimed in claim 7 is characterized in that, when providing the normal-butyl ethyl ester to peel off the lip-deep photoresistance of this organic electric-excitation luminescent displaying panel, this organic electric-excitation luminescent displaying panel can transmit in reaction chamber back and forth.
13. a photoresistance stripping means is suitable for and peels off the lip-deep photoresistance of an organic electric-excitation luminescent displaying panel, it is characterized in that this method comprises:
With a delivery unit transmit this organic electric-excitation luminescent displaying panel enter in regular turn one peel off the unit, a cleaning unit and dries up the unit;
Provide at least normal-butyl ethyl ester to clean this organic electric-excitation luminescent displaying panel;
Provide at least isopropyl alcohol to clean this organic electric-excitation luminescent displaying panel;
Plural number time this organic electric-excitation luminescent displaying panel of washed with de-ionized water is provided; And
Remove the deionized water that is attached to this organic electric-excitation luminescent displaying panel surface with an air knife.
14. photoresistance stripping means as claimed in claim 13 is characterized in that, this delivery unit transmits this organic electric-excitation luminescent displaying panel and is controlled with a control module.
15. photoresistance stripping means as claimed in claim 13 is characterized in that, provide this method that normal-butyl ethyl ester is handled this organic electric-excitation luminescent displaying panel be selected from by spray and soak in the group that is formed combination in any.
16. photoresistance stripping means as claimed in claim 13 is characterized in that the method that provides this isopropyl alcohol to handle this organic electric-excitation luminescent displaying panel is adopted infusion method.
17. photoresistance stripping means as claimed in claim 13 is characterized in that the method that provides those deionized waters to handle this organic electric-excitation luminescent displaying panel is adopted spraying.
18. photoresistance stripping means as claimed in claim 13 is characterized in that, when providing the normal-butyl ethyl ester to peel off the lip-deep photoresistance of this organic electric-excitation luminescent displaying panel, this organic electric-excitation luminescent displaying panel can transmit in reaction chamber back and forth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03137356 CN1567095A (en) | 2003-06-19 | 2003-06-19 | Photoresistive striping process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03137356 CN1567095A (en) | 2003-06-19 | 2003-06-19 | Photoresistive striping process |
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| Publication Number | Publication Date |
|---|---|
| CN1567095A true CN1567095A (en) | 2005-01-19 |
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ID=34470370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03137356 Pending CN1567095A (en) | 2003-06-19 | 2003-06-19 | Photoresistive striping process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1567095A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207539A (en) * | 2012-01-13 | 2013-07-17 | 昆山允升吉光电科技有限公司 | Non-contact conveying device |
| CN103399468A (en) * | 2013-08-08 | 2013-11-20 | 深圳市华星光电技术有限公司 | Method and device for stripping photoresist layer |
| WO2019163009A1 (en) * | 2018-02-21 | 2019-08-29 | 堺ディスプレイプロダクト株式会社 | Organic el device and production method therefor |
| CN110187614A (en) * | 2019-05-13 | 2019-08-30 | 深圳市华星光电技术有限公司 | Photoresistive striping process and optical resistance-stripping device |
-
2003
- 2003-06-19 CN CN 03137356 patent/CN1567095A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207539A (en) * | 2012-01-13 | 2013-07-17 | 昆山允升吉光电科技有限公司 | Non-contact conveying device |
| CN103399468A (en) * | 2013-08-08 | 2013-11-20 | 深圳市华星光电技术有限公司 | Method and device for stripping photoresist layer |
| WO2019163009A1 (en) * | 2018-02-21 | 2019-08-29 | 堺ディスプレイプロダクト株式会社 | Organic el device and production method therefor |
| JPWO2019163009A1 (en) * | 2018-02-21 | 2020-02-27 | 堺ディスプレイプロダクト株式会社 | Organic EL device and manufacturing method thereof |
| CN110187614A (en) * | 2019-05-13 | 2019-08-30 | 深圳市华星光电技术有限公司 | Photoresistive striping process and optical resistance-stripping device |
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